CN101306817B - 重掺硅中磷、砷、锑、硼的去除装置 - Google Patents
重掺硅中磷、砷、锑、硼的去除装置 Download PDFInfo
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- CN101306817B CN101306817B CN2008100598058A CN200810059805A CN101306817B CN 101306817 B CN101306817 B CN 101306817B CN 2008100598058 A CN2008100598058 A CN 2008100598058A CN 200810059805 A CN200810059805 A CN 200810059805A CN 101306817 B CN101306817 B CN 101306817B
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- silicon
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- arsenic
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CN2008100598058A CN101306817B (zh) | 2008-02-04 | 2008-02-04 | 重掺硅中磷、砷、锑、硼的去除装置 |
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CN2008100598058A CN101306817B (zh) | 2008-02-04 | 2008-02-04 | 重掺硅中磷、砷、锑、硼的去除装置 |
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CN101306817A CN101306817A (zh) | 2008-11-19 |
CN101306817B true CN101306817B (zh) | 2010-06-02 |
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CN2008100598058A Expired - Fee Related CN101306817B (zh) | 2008-02-04 | 2008-02-04 | 重掺硅中磷、砷、锑、硼的去除装置 |
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Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE112009001990B4 (de) * | 2008-08-15 | 2018-01-25 | Ulvac, Inc. | Verfahren zum Reinigen von Silizium |
CN102162124B (zh) * | 2011-04-06 | 2012-08-22 | 天津市环欧半导体材料技术有限公司 | 一种提高重掺砷单晶轴向电阻率均匀性的方法 |
CN103014839B (zh) * | 2013-01-09 | 2016-07-27 | 英利集团有限公司 | 一种p型掺杂剂及其制备方法 |
CN106082232B (zh) * | 2016-06-08 | 2018-02-06 | 大工(青岛)新能源材料技术研究院有限公司 | 中频熔炼回收打磨硅粉的方法 |
CN106757313A (zh) * | 2016-12-29 | 2017-05-31 | 上海合晶硅材料有限公司 | 超重掺砷晶棒拉制方法 |
CN109457294A (zh) * | 2018-12-27 | 2019-03-12 | 衢州晶哲电子材料有限公司 | 一种直拉重掺锑硅单晶锑源提纯装置及提纯掺杂方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5476065A (en) * | 1993-01-28 | 1995-12-19 | Mitsubishi Materials Silicon Corp. | System for pulling-up monocrystal and method of exhausting silicon oxide |
CN1900387A (zh) * | 2005-07-19 | 2007-01-24 | 上海九晶电子材料有限公司 | 一种太阳能级硅单晶用料配方及制备 |
CN101016155A (zh) * | 2006-12-30 | 2007-08-15 | 浙江昱辉阳光能源有限公司 | 直拉法生长硅单晶产生的锅底料的除杂方法 |
JP4193706B2 (ja) * | 2004-01-23 | 2008-12-10 | トヨタ自動車株式会社 | 路面摩擦係数検出装置 |
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5476065A (en) * | 1993-01-28 | 1995-12-19 | Mitsubishi Materials Silicon Corp. | System for pulling-up monocrystal and method of exhausting silicon oxide |
JP4193706B2 (ja) * | 2004-01-23 | 2008-12-10 | トヨタ自動車株式会社 | 路面摩擦係数検出装置 |
CN1900387A (zh) * | 2005-07-19 | 2007-01-24 | 上海九晶电子材料有限公司 | 一种太阳能级硅单晶用料配方及制备 |
CN101016155A (zh) * | 2006-12-30 | 2007-08-15 | 浙江昱辉阳光能源有限公司 | 直拉法生长硅单晶产生的锅底料的除杂方法 |
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