CN101293643B - 合成碳纳米管的装置及方法 - Google Patents
合成碳纳米管的装置及方法 Download PDFInfo
- Publication number
- CN101293643B CN101293643B CN2007103066354A CN200710306635A CN101293643B CN 101293643 B CN101293643 B CN 101293643B CN 2007103066354 A CN2007103066354 A CN 2007103066354A CN 200710306635 A CN200710306635 A CN 200710306635A CN 101293643 B CN101293643 B CN 101293643B
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- CN
- China
- Prior art keywords
- reaction chamber
- substrate
- gas
- spare room
- described reaction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
- B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/158—Carbon nanotubes
- C01B32/16—Preparation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
- B01J23/70—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
- B01J23/74—Iron group metals
- B01J23/745—Iron
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
- B01J23/70—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
- B01J23/74—Iron group metals
- B01J23/755—Nickel
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
- B01J37/16—Reducing
- B01J37/18—Reducing with gases containing free hydrogen
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Chemistry (AREA)
- Composite Materials (AREA)
- Carbon And Carbon Compounds (AREA)
- Catalysts (AREA)
Abstract
Description
Claims (6)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020070041068A KR100851391B1 (ko) | 2007-04-27 | 2007-04-27 | 탄소나노튜브 합성장치 및 방법 |
KR10-2007-0041068 | 2007-04-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101293643A CN101293643A (zh) | 2008-10-29 |
CN101293643B true CN101293643B (zh) | 2013-09-11 |
Family
ID=39881491
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2007103066354A Expired - Fee Related CN101293643B (zh) | 2007-04-27 | 2007-12-29 | 合成碳纳米管的装置及方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20100284897A1 (zh) |
JP (1) | JP4704418B2 (zh) |
KR (1) | KR100851391B1 (zh) |
CN (1) | CN101293643B (zh) |
TW (1) | TWI402212B (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007064148A1 (en) * | 2005-11-29 | 2007-06-07 | Semes Co., Ltd. | System and method for producing carbon nanotubes |
KR100998071B1 (ko) | 2008-11-12 | 2010-12-03 | 세메스 주식회사 | 접지부재를 가지는 탄소나노튜브 반응챔버 |
JP5303304B2 (ja) * | 2009-02-16 | 2013-10-02 | 日本ゼオン株式会社 | カーボンナノチューブ配向集合体の生産装置及び生産方法 |
JP2015174775A (ja) * | 2014-03-12 | 2015-10-05 | ヤマハ株式会社 | カーボンナノチューブの製造装置 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2654996B2 (ja) * | 1988-08-17 | 1997-09-17 | 東京エレクトロン株式会社 | 縦型熱処理装置 |
KR0155158B1 (ko) * | 1989-07-25 | 1998-12-01 | 카자마 젠쥬 | 종형 처리 장치 및 처리방법 |
JPH088290B2 (ja) * | 1990-11-02 | 1996-01-29 | 国際電気株式会社 | 縦型拡散・cvd装置のウェーハカセットロード・アンロード装置 |
JPH04240721A (ja) * | 1991-01-25 | 1992-08-28 | Sony Corp | マルチチャンバプロセス装置 |
JPH06120159A (ja) * | 1992-10-07 | 1994-04-28 | Kokusai Electric Co Ltd | ロードロック式縦型cvd・拡散装置 |
JP3320539B2 (ja) * | 1993-12-17 | 2002-09-03 | 東京エレクトロン株式会社 | 被処理体の搬入、搬出装置 |
KR19990073593A (ko) * | 1999-07-27 | 1999-10-05 | 이철진 | 탄소나노튜브의 대량합성을 위한 화학기상증착장치. |
TW593730B (en) * | 2002-03-25 | 2004-06-21 | Ind Tech Res Inst | Process of direct low-temperature growth of carbon nanotubes on a substrate |
JP4669986B2 (ja) * | 2004-03-04 | 2011-04-13 | 学校法人慶應義塾 | カーボンナノチューブの製造方法および製造装置 |
JP2006225199A (ja) * | 2005-02-17 | 2006-08-31 | Japan Science & Technology Agency | 仕切構造型カーボンナノ構造物製造装置 |
KR100664545B1 (ko) * | 2005-03-08 | 2007-01-03 | (주)씨엔티 | 탄소나노튜브 대량합성장치 및 대량합성방법 |
JP2007045637A (ja) * | 2005-08-05 | 2007-02-22 | Toho Gas Co Ltd | ナノカーボン材料の製造装置及び製造方法 |
CN100467370C (zh) | 2005-09-12 | 2009-03-11 | 鸿富锦精密工业(深圳)有限公司 | 一种碳纳米管制备装置及方法 |
JP2007091485A (ja) * | 2005-09-26 | 2007-04-12 | Sonac Kk | カーボンファイバの製造方法、基板カートリッジおよび熱cvd装置 |
JP2007091481A (ja) * | 2005-09-26 | 2007-04-12 | Sonac Kk | カーボンナノファイバの製造方法およびその方法を実施するためのカーボンナノファイバ製造装置 |
JP4550040B2 (ja) * | 2005-12-16 | 2010-09-22 | セメス株式会社 | カーボンナノチューブの合成装置及び方法 |
-
2007
- 2007-04-27 KR KR1020070041068A patent/KR100851391B1/ko not_active IP Right Cessation
- 2007-11-19 US US11/984,481 patent/US20100284897A1/en not_active Abandoned
- 2007-11-30 TW TW096145750A patent/TWI402212B/zh not_active IP Right Cessation
- 2007-12-26 JP JP2007333600A patent/JP4704418B2/ja not_active Expired - Fee Related
- 2007-12-29 CN CN2007103066354A patent/CN101293643B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP4704418B2 (ja) | 2011-06-15 |
TWI402212B (zh) | 2013-07-21 |
CN101293643A (zh) | 2008-10-29 |
US20100284897A1 (en) | 2010-11-11 |
JP2008273812A (ja) | 2008-11-13 |
TW200842108A (en) | 2008-11-01 |
KR100851391B1 (ko) | 2008-08-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: KOREA KUMHO PHTROCHEMICAL CO., LTD. Free format text: FORMER OWNER: SEMES CO., LTD. Effective date: 20111219 |
|
C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; TO: 110-857 |
|
TA01 | Transfer of patent application right |
Effective date of registration: 20111219 Address after: 110-857 Bell Road, Seoul, South Korea, new road, 1 Street, 115 times Applicant after: Korea Kumho Phtrochemical Co., Ltd. Address before: Chungnam Cheonan Yecheng N3 hole 623-5 Applicant before: SEMES Co., Ltd. |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130911 Termination date: 20161229 |
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CF01 | Termination of patent right due to non-payment of annual fee |