CN101281011A - 具有恒定接触力的振动扫描探针 - Google Patents
具有恒定接触力的振动扫描探针 Download PDFInfo
- Publication number
- CN101281011A CN101281011A CNA2008100900866A CN200810090086A CN101281011A CN 101281011 A CN101281011 A CN 101281011A CN A2008100900866 A CNA2008100900866 A CN A2008100900866A CN 200810090086 A CN200810090086 A CN 200810090086A CN 101281011 A CN101281011 A CN 101281011A
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- CN
- China
- Prior art keywords
- probe
- force
- contact force
- support member
- scanning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B3/00—Measuring instruments characterised by the use of mechanical techniques
- G01B3/002—Details
- G01B3/008—Arrangements for controlling the measuring force
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
Description
Claims (12)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP07105559.4 | 2007-04-03 | ||
EP07105559.4A EP1978328B1 (en) | 2007-04-03 | 2007-04-03 | Oscillating scanning probe with constant contact force |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101281011A true CN101281011A (zh) | 2008-10-08 |
CN101281011B CN101281011B (zh) | 2012-12-05 |
Family
ID=38982708
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2008100900866A Active CN101281011B (zh) | 2007-04-03 | 2008-04-02 | 具有恒定接触力的振动扫描探针 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7779553B2 (zh) |
EP (1) | EP1978328B1 (zh) |
JP (1) | JP2008256696A (zh) |
CN (1) | CN101281011B (zh) |
HK (1) | HK1122862A1 (zh) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102369412A (zh) * | 2009-02-06 | 2012-03-07 | 卡尔蔡司工业测量技术有限公司 | 用于坐标测量机的探头系统 |
CN102621479A (zh) * | 2012-04-09 | 2012-08-01 | 华为终端有限公司 | 测试装置及其使用方法 |
CN103097853A (zh) * | 2010-09-13 | 2013-05-08 | 赫克斯冈技术中心 | 用于控制表面扫描坐标测量机的方法和设备 |
CN105716559A (zh) * | 2014-12-19 | 2016-06-29 | 赫克斯冈技术中心 | 坐标测量机、探测系统以及补偿探针元件处的力的方法 |
TWI553293B (zh) * | 2013-06-28 | 2016-10-11 | 鴻海精密工業股份有限公司 | 三次元測量裝置 |
CN106767430A (zh) * | 2016-12-06 | 2017-05-31 | 苏州博众精工科技有限公司 | 一种接触式测量段差的装置 |
CN109655023A (zh) * | 2017-10-10 | 2019-04-19 | 赫克斯冈技术中心 | 用于确定工具定位机器的状态的系统 |
CN113405456A (zh) * | 2021-05-27 | 2021-09-17 | 杭州电子科技大学 | 面向关节式坐标测量机的实时接触力测量方法及装置 |
CN114295862A (zh) * | 2020-10-06 | 2022-04-08 | 哈姆股份公司 | 以夯土设备执行压实过程时提供有关地面压实状态的信息的方法 |
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DE102006003362A1 (de) * | 2006-01-19 | 2007-07-26 | Carl Zeiss Industrielle Messtechnik Gmbh | Koordinatenmessgerät und Verfahren zum Betreiben eines Koordinatenmessgeräts |
DE102006031580A1 (de) | 2006-07-03 | 2008-01-17 | Faro Technologies, Inc., Lake Mary | Verfahren und Vorrichtung zum dreidimensionalen Erfassen eines Raumbereichs |
EP2064514B2 (en) * | 2006-09-05 | 2014-08-06 | Renishaw PLC | Surface sensing device |
DE602007005778D1 (de) * | 2007-04-18 | 2010-05-20 | Hexagon Metrology Ab | Tastkopf mit konstanter Rastergeschwindigkeit |
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US7908756B2 (en) * | 2007-10-12 | 2011-03-22 | Los Alamos National Security, Llc | Integrated calibration sphere and calibration step fixture for improved coordinate measurement machine calibration |
DE102009015920B4 (de) | 2009-03-25 | 2014-11-20 | Faro Technologies, Inc. | Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung |
US9551575B2 (en) | 2009-03-25 | 2017-01-24 | Faro Technologies, Inc. | Laser scanner having a multi-color light source and real-time color receiver |
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US7905027B2 (en) * | 2009-07-01 | 2011-03-15 | Hexagon Metrology, Inc. | Method and apparatus for probe tip diameter calibration |
US9210288B2 (en) | 2009-11-20 | 2015-12-08 | Faro Technologies, Inc. | Three-dimensional scanner with dichroic beam splitters to capture a variety of signals |
US9529083B2 (en) | 2009-11-20 | 2016-12-27 | Faro Technologies, Inc. | Three-dimensional scanner with enhanced spectroscopic energy detector |
DE102009057101A1 (de) | 2009-11-20 | 2011-05-26 | Faro Technologies, Inc., Lake Mary | Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung |
US9113023B2 (en) | 2009-11-20 | 2015-08-18 | Faro Technologies, Inc. | Three-dimensional scanner with spectroscopic energy detector |
US8630314B2 (en) | 2010-01-11 | 2014-01-14 | Faro Technologies, Inc. | Method and apparatus for synchronizing measurements taken by multiple metrology devices |
WO2011090891A1 (en) | 2010-01-20 | 2011-07-28 | Faro Technologies, Inc. | Display for coordinate measuring machine |
US8875409B2 (en) | 2010-01-20 | 2014-11-04 | Faro Technologies, Inc. | Coordinate measurement machines with removable accessories |
US8615893B2 (en) | 2010-01-20 | 2013-12-31 | Faro Technologies, Inc. | Portable articulated arm coordinate measuring machine having integrated software controls |
US9628775B2 (en) | 2010-01-20 | 2017-04-18 | Faro Technologies, Inc. | Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations |
US9163922B2 (en) | 2010-01-20 | 2015-10-20 | Faro Technologies, Inc. | Coordinate measurement machine with distance meter and camera to determine dimensions within camera images |
US9879976B2 (en) | 2010-01-20 | 2018-01-30 | Faro Technologies, Inc. | Articulated arm coordinate measurement machine that uses a 2D camera to determine 3D coordinates of smoothly continuous edge features |
US8832954B2 (en) | 2010-01-20 | 2014-09-16 | Faro Technologies, Inc. | Coordinate measurement machines with removable accessories |
JP5615382B2 (ja) | 2010-01-20 | 2014-10-29 | ファロ テクノロジーズ インコーポレーテッド | マルチバスアーム技術を用いた可搬型の関節アーム座標測定機 |
US8898919B2 (en) | 2010-01-20 | 2014-12-02 | Faro Technologies, Inc. | Coordinate measurement machine with distance meter used to establish frame of reference |
US9607239B2 (en) | 2010-01-20 | 2017-03-28 | Faro Technologies, Inc. | Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations |
US8677643B2 (en) | 2010-01-20 | 2014-03-25 | Faro Technologies, Inc. | Coordinate measurement machines with removable accessories |
GB2489370B (en) | 2010-01-20 | 2014-05-14 | Faro Tech Inc | Coordinate measuring machine having an illuminated probe end and method of operation |
JP5410317B2 (ja) * | 2010-02-05 | 2014-02-05 | 株式会社ミツトヨ | 三次元測定機 |
EP2384851B1 (en) * | 2010-05-03 | 2018-01-03 | Tesa Sa | Coordinate Measuring System with rotatory adapter |
DE102010020925B4 (de) | 2010-05-10 | 2014-02-27 | Faro Technologies, Inc. | Verfahren zum optischen Abtasten und Vermessen einer Umgebung |
JP5612386B2 (ja) * | 2010-07-23 | 2014-10-22 | 株式会社ミツトヨ | 形状測定装置 |
DE112011102995B4 (de) | 2010-09-08 | 2016-05-19 | Faro Technologies Inc. | Laserscanner oder Lasernachführungsgerät mit einem Projektor |
US9168654B2 (en) | 2010-11-16 | 2015-10-27 | Faro Technologies, Inc. | Coordinate measuring machines with dual layer arm |
JP5679793B2 (ja) * | 2010-12-15 | 2015-03-04 | キヤノン株式会社 | 形状測定装置及び方法 |
DE102012100609A1 (de) | 2012-01-25 | 2013-07-25 | Faro Technologies, Inc. | Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung |
EP2620779A1 (en) * | 2012-01-30 | 2013-07-31 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | Probe calibration |
EP2839241B1 (en) | 2012-04-18 | 2018-08-08 | Renishaw PLC | Method of finding a feature of an object using a machine tool and corresponding machine tool apparatus |
JP6346167B2 (ja) | 2012-04-18 | 2018-06-20 | レニショウ パブリック リミテッド カンパニーRenishaw Public Limited Company | 工作機械におけるアナログ測定走査方法および対応する工作機械装置 |
CN110076630B (zh) * | 2012-04-18 | 2021-10-08 | 瑞尼斯豪公司 | 在机床上测量的方法以及相应的机床设备 |
US9157721B1 (en) * | 2012-06-08 | 2015-10-13 | Beeline Company | Measuring system |
US8997362B2 (en) | 2012-07-17 | 2015-04-07 | Faro Technologies, Inc. | Portable articulated arm coordinate measuring machine with optical communications bus |
US10067231B2 (en) | 2012-10-05 | 2018-09-04 | Faro Technologies, Inc. | Registration calculation of three-dimensional scanner data performed between scans based on measurements by two-dimensional scanner |
US9513107B2 (en) | 2012-10-05 | 2016-12-06 | Faro Technologies, Inc. | Registration calculation between three-dimensional (3D) scans based on two-dimensional (2D) scan data from a 3D scanner |
DE102012109481A1 (de) | 2012-10-05 | 2014-04-10 | Faro Technologies, Inc. | Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung |
CA2846729C (en) * | 2013-03-15 | 2022-10-04 | Synaptive Medical (Barbados) Inc. | Surgical pointer having constant pressure |
DE102014005664B3 (de) * | 2014-04-17 | 2015-07-09 | Carl Zeiss Industrielle Messtechnik Gmbh | Koordinatenmessgerät und Verfahren zum Betrieb eines Koordinatenmessgerätes |
US9291447B2 (en) * | 2014-07-09 | 2016-03-22 | Mitutoyo Corporation | Method for controlling motion of a coordinate measuring machine |
EP2998696B1 (en) * | 2014-09-18 | 2021-01-06 | Hexagon Technology Center GmbH | Method for compensating lobing behaviour of a CMM touch probe |
GB201505999D0 (en) * | 2015-04-09 | 2015-05-27 | Renishaw Plc | Measurement method and apparatus |
WO2016183339A1 (en) | 2015-05-12 | 2016-11-17 | Hexagon Metrology, Inc. | Apparatus and method of controlling a coordinate measuring machine using environmental information or coordinate measuring machine information |
EP3303991B1 (en) | 2015-05-29 | 2019-09-18 | Hexagon Metrology, Inc | Coordinate measuring machine with object location logic |
JP6514041B2 (ja) * | 2015-06-02 | 2019-05-15 | 株式会社ミツトヨ | 形状測定装置の制御方法 |
CA2939029A1 (en) * | 2015-08-21 | 2017-02-21 | Williams & White Machine Inc. | Feed finger positioning apparatus and methods |
DE102015122844A1 (de) | 2015-12-27 | 2017-06-29 | Faro Technologies, Inc. | 3D-Messvorrichtung mit Batteriepack |
EP3460384A1 (en) * | 2017-09-26 | 2019-03-27 | Renishaw PLC | Measurement probe |
GB201809631D0 (en) * | 2018-06-12 | 2018-07-25 | Renishaw Plc | Measurement method and apparatus |
Family Cites Families (20)
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US5212646A (en) * | 1987-12-19 | 1993-05-18 | Renishaw Plc | Method of using a mounting for surface-sensing stylus |
GB8908854D0 (en) * | 1989-04-19 | 1989-06-07 | Renishaw Plc | Method of and apparatus for scanning the surface of a workpiece |
US5189806A (en) * | 1988-12-19 | 1993-03-02 | Renishaw Plc | Method of and apparatus for scanning the surface of a workpiece |
GB9120029D0 (en) * | 1991-09-19 | 1991-11-06 | System E Controls Ltd | Measuring apparatus and method |
JPH09210647A (ja) * | 1996-01-30 | 1997-08-12 | Tohoku Ricoh Co Ltd | 光学式物体形状測定装置及び光学式物体形状測定方法 |
EP0849654B1 (de) * | 1996-12-21 | 2004-04-28 | Carl Zeiss | Verfahren zur Steuerung von Koordinatenmessgeräten und Koordinatenmessgerät |
DE19809690A1 (de) * | 1998-03-06 | 1999-09-09 | Zeiss Carl Fa | Koordinatenmeßgerät mit Benutzerführung |
US6546640B2 (en) * | 2000-01-18 | 2003-04-15 | Mitutoyo Corporation | Traverse linearity compensation method and rotational accuracy compensation method of measuring device |
DE10006753A1 (de) * | 2000-02-15 | 2001-08-16 | Zeiss Carl | Dreh-Schwenkeinrichtung für den Tastkopf eines Koordinatenmeßgerätes |
DE50110183D1 (de) * | 2000-09-28 | 2006-07-27 | Zeiss Ind Messtechnik Gmbh | Ermittlung von korrekturparametern einer dreh- schwenkeinheit mit messendem sensor ( koordinatenmessgerät ) über zwei parameterfelder |
GB0215152D0 (en) * | 2002-07-01 | 2002-08-07 | Renishaw Plc | Probe or stylus orientation |
JP4085031B2 (ja) * | 2003-07-17 | 2008-04-30 | 株式会社リコー | 形状測定装置及びその制御方法 |
JP2005037197A (ja) * | 2003-07-18 | 2005-02-10 | Ricoh Co Ltd | 接触式表面形状測定装置及び測定方法 |
JP4330388B2 (ja) * | 2003-07-28 | 2009-09-16 | 株式会社ミツトヨ | 倣いプローブ |
GB0326532D0 (en) * | 2003-11-13 | 2003-12-17 | Renishaw Plc | Method of error compensation |
US7543393B2 (en) * | 2003-12-16 | 2009-06-09 | Renishaw Plc | Method of calibrating a scanning system |
JP4909548B2 (ja) * | 2005-09-01 | 2012-04-04 | 株式会社ミツトヨ | 表面形状測定装置 |
GB0603128D0 (en) * | 2006-02-16 | 2006-03-29 | Renishaw Plc | Articulating probe head apparatus |
GB0605796D0 (en) * | 2006-03-23 | 2006-05-03 | Renishaw Plc | Apparatus and method of measuring workpieces |
EP1975546B1 (en) * | 2007-03-26 | 2010-09-15 | Hexagon Metrology AB | Method of using multi-axis positioning and measuring system |
-
2007
- 2007-04-03 EP EP07105559.4A patent/EP1978328B1/en active Active
-
2008
- 2008-03-17 US US12/049,757 patent/US7779553B2/en active Active
- 2008-04-02 CN CN2008100900866A patent/CN101281011B/zh active Active
- 2008-04-03 JP JP2008096732A patent/JP2008256696A/ja active Pending
- 2008-12-24 HK HK08113968.3A patent/HK1122862A1/xx not_active IP Right Cessation
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102369412A (zh) * | 2009-02-06 | 2012-03-07 | 卡尔蔡司工业测量技术有限公司 | 用于坐标测量机的探头系统 |
CN102369412B (zh) * | 2009-02-06 | 2015-02-04 | 卡尔蔡司工业测量技术有限公司 | 用于坐标测量机的探头系统 |
CN103097853A (zh) * | 2010-09-13 | 2013-05-08 | 赫克斯冈技术中心 | 用于控制表面扫描坐标测量机的方法和设备 |
CN103097853B (zh) * | 2010-09-13 | 2016-05-04 | 赫克斯冈技术中心 | 用于控制表面扫描坐标测量机的方法和设备 |
CN102621479A (zh) * | 2012-04-09 | 2012-08-01 | 华为终端有限公司 | 测试装置及其使用方法 |
TWI553293B (zh) * | 2013-06-28 | 2016-10-11 | 鴻海精密工業股份有限公司 | 三次元測量裝置 |
CN105716559A (zh) * | 2014-12-19 | 2016-06-29 | 赫克斯冈技术中心 | 坐标测量机、探测系统以及补偿探针元件处的力的方法 |
CN106767430A (zh) * | 2016-12-06 | 2017-05-31 | 苏州博众精工科技有限公司 | 一种接触式测量段差的装置 |
CN106767430B (zh) * | 2016-12-06 | 2019-03-26 | 博众精工科技股份有限公司 | 一种接触式测量段差的装置 |
CN109655023A (zh) * | 2017-10-10 | 2019-04-19 | 赫克斯冈技术中心 | 用于确定工具定位机器的状态的系统 |
CN114295862A (zh) * | 2020-10-06 | 2022-04-08 | 哈姆股份公司 | 以夯土设备执行压实过程时提供有关地面压实状态的信息的方法 |
CN113405456A (zh) * | 2021-05-27 | 2021-09-17 | 杭州电子科技大学 | 面向关节式坐标测量机的实时接触力测量方法及装置 |
CN113405456B (zh) * | 2021-05-27 | 2022-05-31 | 杭州电子科技大学 | 面向关节式坐标测量机的实时接触力测量方法及装置 |
Also Published As
Publication number | Publication date |
---|---|
HK1122862A1 (en) | 2009-05-29 |
JP2008256696A (ja) | 2008-10-23 |
US7779553B2 (en) | 2010-08-24 |
CN101281011B (zh) | 2012-12-05 |
EP1978328A1 (en) | 2008-10-08 |
EP1978328B1 (en) | 2015-02-18 |
US20080249737A1 (en) | 2008-10-09 |
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Effective date of registration: 20160819 Address after: Swiss Hull Brugger Patentee after: HEXAGON TECHNOLOGY CENTER GmbH Address before: Stockholm Patentee before: Hexagonal Corp. Effective date of registration: 20160819 Address after: Stockholm Patentee after: Hexagonal Corp. Address before: Custer land, Sweden Patentee before: Hexagon Metrology Ab |