CN101268209B - 金属物体的双重表面处理 - Google Patents
金属物体的双重表面处理 Download PDFInfo
- Publication number
- CN101268209B CN101268209B CN2006800341936A CN200680034193A CN101268209B CN 101268209 B CN101268209 B CN 101268209B CN 2006800341936 A CN2006800341936 A CN 2006800341936A CN 200680034193 A CN200680034193 A CN 200680034193A CN 101268209 B CN101268209 B CN 101268209B
- Authority
- CN
- China
- Prior art keywords
- distiller
- gas
- bed furnace
- inert
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/80—After-treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C10/00—Solid state diffusion of only metal elements or silicon into metallic material surfaces
- C23C10/02—Pretreatment of the material to be coated
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C12/00—Solid state diffusion of at least one non-metal element other than silicon and at least one metal element or silicon into metallic material surfaces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B15/00—Fluidised-bed furnaces; Other furnaces using or treating finely-divided materials in dispersion
- F27B15/02—Details, accessories or equipment specially adapted for furnaces of these types
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D99/00—Subject matter not provided for in other groups of this subclass
- F27D99/0073—Seals
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D99/00—Subject matter not provided for in other groups of this subclass
- F27D99/0073—Seals
- F27D99/0075—Gas curtain seals
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Engineering & Computer Science (AREA)
- Dispersion Chemistry (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
- Furnace Details (AREA)
- Muffle Furnaces And Rotary Kilns (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AU2005903894A AU2005903894A0 (en) | 2005-07-21 | Duplex Surface Treatment of Metal Objects | |
| AU2005903894 | 2005-07-21 | ||
| PCT/AU2006/001031 WO2007009190A1 (en) | 2005-07-21 | 2006-07-20 | Duplex surface treatment of metal objects |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101268209A CN101268209A (zh) | 2008-09-17 |
| CN101268209B true CN101268209B (zh) | 2012-07-18 |
Family
ID=37668361
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2006800341936A Expired - Fee Related CN101268209B (zh) | 2005-07-21 | 2006-07-20 | 金属物体的双重表面处理 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US8317926B2 (enExample) |
| EP (2) | EP1904661A4 (enExample) |
| JP (1) | JP4977700B2 (enExample) |
| CN (1) | CN101268209B (enExample) |
| WO (1) | WO2007009190A1 (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4977700B2 (ja) * | 2005-07-21 | 2012-07-18 | ハード テクノロジーズ プロプライエタリー リミテッド | 金属物の複合表面処理 |
| JP5951623B2 (ja) * | 2010-11-17 | 2016-07-13 | ハード テクノロジーズ プロプライエタリー リミテッド | 金属物の表面処理 |
| US9555474B2 (en) * | 2013-08-12 | 2017-01-31 | United Technologies Corporation | High temperature fluidized bed for powder treatment |
| US9909202B2 (en) | 2014-05-02 | 2018-03-06 | General Electric Company | Apparatus and methods for slurry aluminide coating repair |
| CN105274490A (zh) * | 2015-10-29 | 2016-01-27 | 广东工业大学 | 一种具有内凹式微孔的超疏油金属表面的制备方法 |
| US11213888B2 (en) * | 2016-05-03 | 2022-01-04 | Raytheon Technologies Corporation | Additive manufactured powder processing system |
| CN109196336B (zh) | 2016-06-02 | 2021-10-15 | 东京毅力科创株式会社 | 利用奇异光束的暗场晶片纳米缺陷检查系统 |
| US10101090B2 (en) | 2016-07-18 | 2018-10-16 | Owens-Brockway Glass Container Inc. | Duct cleaning and valve device for furnace system |
| CN107377968A (zh) * | 2017-09-08 | 2017-11-24 | 安徽工业大学 | 一种基于喷吹流化的异质复合粉末的制备装置及制备方法 |
| US11306968B2 (en) * | 2019-12-04 | 2022-04-19 | Mantle Inc. | Furnace system and method of use |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4461656A (en) * | 1983-03-15 | 1984-07-24 | Ross John A | Low temperature hardening of the surface of a ferrous metal workpiece in a fluidized bed furnace |
| CN87104781A (zh) * | 1986-07-07 | 1988-01-27 | 株式会社豐田中央研究所 | 表面处理的方法及其设备 |
Family Cites Families (45)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3249462A (en) | 1961-10-23 | 1966-05-03 | Boeing Co | Metal diffusion coating utilizing fluidized bed |
| FR1410647A (fr) * | 1964-10-05 | 1965-09-10 | Formsprag Co | Procédé de durcissement des surfaces frottantes et nouveaux produits industriels obtenus |
| US3672207A (en) * | 1971-01-04 | 1972-06-27 | North American Rockwell | Apparatus for verifying hermeticity of small electronic assemblies |
| AT316160B (de) | 1972-03-10 | 1974-06-25 | Plansee Metallwerk | Verfahren zur Herstellung von verschleißfesten Überzügen auf Verschleißteilen aller Art |
| US3904356A (en) * | 1974-04-29 | 1975-09-09 | Wilson Eng Co Inc Lee | Open coil heat shielding |
| GB1477493A (en) * | 1974-08-02 | 1977-06-22 | Atomic Energy Authority Uk | Fluidised bed designs |
| JPS5841656B2 (ja) * | 1975-09-11 | 1983-09-13 | 株式会社日立国際電気 | ハンドウタイキソウセイチヨウソウチ |
| DE2626446C3 (de) * | 1976-06-12 | 1978-12-14 | Hobeg Hochtemperaturreaktor-Brennelement Gmbh, 6450 Hanau | Verfahren zur Beschichtung von Teilchen für die Herstellung von Brenn- und/oder Absorberelementen für Kernreaktoren und Vorrichtung dazu |
| US4145258A (en) * | 1977-03-25 | 1979-03-20 | Mitsubishi Kasei Kogyo Kabushiki Kaisha | Apparatus for preventing gas leakage from oven door of coke oven |
| FR2454471A1 (fr) * | 1979-04-20 | 1980-11-14 | Aubert Et Duval | Procede de chromisation de pieces metalliques telles que des pieces d'acier et pieces metalliques chromisees |
| JPS5825474A (ja) * | 1981-08-07 | 1983-02-15 | Mitsubishi Electric Corp | スパツタ・酸化・蒸着装置 |
| US4512821A (en) * | 1982-12-20 | 1985-04-23 | Procedyne Corp. | Method for metal treatment using a fluidized bed |
| AU570799B2 (en) * | 1984-05-17 | 1988-03-24 | Toyota Chuo Kenkyusho K.K. | Vapour phase coating of carbide in fluidised bed |
| JPS60251274A (ja) | 1984-05-28 | 1985-12-11 | Toyota Central Res & Dev Lab Inc | 窒化物被覆方法 |
| CA1258609A (en) * | 1984-09-04 | 1989-08-22 | Patrick L. Fox | Shallow case hardening process |
| US4623400A (en) * | 1985-02-22 | 1986-11-18 | Procedyne Corp. | Hard surface coatings for metals in fluidized beds |
| EP0264448B1 (en) * | 1985-06-17 | 1990-02-07 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Method of treating the surface of iron alloy materials |
| JPS6280258A (ja) * | 1985-10-03 | 1987-04-13 | Toyota Central Res & Dev Lab Inc | 表面処理方法及びその装置 |
| JP2584217B2 (ja) * | 1986-11-18 | 1997-02-26 | 株式会社豊田中央研究所 | 表面処理方法 |
| JP2587227B2 (ja) * | 1987-02-06 | 1997-03-05 | キヤノン株式会社 | 気体軸受装置 |
| JPS6447844A (en) | 1987-08-12 | 1989-02-22 | Toyota Central Res & Dev | Method and apparatus for treating surface |
| JPS6446574A (en) * | 1987-08-17 | 1989-02-21 | Daido Steel Co Ltd | Fluidized bed furnace |
| FR2635175B1 (fr) * | 1988-08-04 | 1993-03-05 | Stein Heurtey | Perfectionnements apportes aux fours cloche utilises notamment pour le recuit de bobines metalliques sous atmosphere controlee |
| JP2733532B2 (ja) * | 1990-02-26 | 1998-03-30 | 東京エレクトロン株式会社 | 熱処理装置 |
| US5146869A (en) * | 1990-06-11 | 1992-09-15 | National Semiconductor Corporation | Tube and injector for preheating gases in a chemical vapor deposition reactor |
| EP0471276B1 (en) * | 1990-08-10 | 1996-02-28 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Method of forming a nitride or carbonnitride layer |
| US5443686A (en) * | 1992-01-15 | 1995-08-22 | International Business Machines Corporation Inc. | Plasma CVD apparatus and processes |
| FR2692665A1 (fr) * | 1992-06-17 | 1993-12-24 | Unimetall Sa | Dispositif d'étanchéité partielle des électrodes de fours électriques à arc. |
| JP3189507B2 (ja) * | 1992-06-30 | 2001-07-16 | 株式会社豊田中央研究所 | 表面処理装置 |
| US5326725A (en) * | 1993-03-11 | 1994-07-05 | Applied Materials, Inc. | Clamping ring and susceptor therefor |
| US6689422B1 (en) * | 1994-02-16 | 2004-02-10 | Howmet Research Corporation | CVD codeposition of A1 and one or more reactive (gettering) elements to form protective aluminide coating |
| JPH085041A (ja) * | 1994-06-21 | 1996-01-12 | Kubota Corp | 流動床式焼却炉 |
| JPH0897167A (ja) * | 1994-09-28 | 1996-04-12 | Tokyo Electron Ltd | 処理装置及び熱処理装置 |
| WO1999014400A1 (en) * | 1997-09-17 | 1999-03-25 | Gas Research Institute | Corrosion-resistant coatings for steels used in bromide-based absorption cycles |
| EP0919642B1 (en) * | 1997-11-28 | 2007-10-17 | Maizuru Corporation | Method for treating surface of ferrous material and salt bath furnace used therefor |
| US5997963A (en) * | 1998-05-05 | 1999-12-07 | Ultratech Stepper, Inc. | Microchamber |
| JP2000068259A (ja) * | 1998-08-19 | 2000-03-03 | Tokyo Electron Ltd | 熱処理装置 |
| EP1165852A4 (en) * | 1999-02-08 | 2003-05-02 | Quality Heat Technologies Pty | SURFACE TREATMENT METHOD AND APPARATUS |
| JP2001023978A (ja) * | 1999-07-05 | 2001-01-26 | Mitsubishi Electric Corp | 半導体装置の製造装置および製造方法 |
| JP2001098355A (ja) * | 1999-09-29 | 2001-04-10 | Taiho Kogyo Co Ltd | 金属材の窒化方法 |
| KR20010056330A (ko) * | 1999-12-15 | 2001-07-04 | 황 철 주 | 반도체소자 제조장치 |
| US6733826B2 (en) * | 2000-12-18 | 2004-05-11 | Osram Sylvania Inc. | Method and apparatus for coating electroluminescent phosphors |
| FR2839730B1 (fr) * | 2002-05-15 | 2004-08-27 | Centre Nat Rech Scient | Formation de carbure de silicium monocristallin |
| US7651568B2 (en) * | 2005-03-28 | 2010-01-26 | Tokyo Electron Limited | Plasma enhanced atomic layer deposition system |
| JP4977700B2 (ja) * | 2005-07-21 | 2012-07-18 | ハード テクノロジーズ プロプライエタリー リミテッド | 金属物の複合表面処理 |
-
2006
- 2006-07-20 JP JP2008521750A patent/JP4977700B2/ja not_active Expired - Fee Related
- 2006-07-20 WO PCT/AU2006/001031 patent/WO2007009190A1/en not_active Ceased
- 2006-07-20 EP EP06760892A patent/EP1904661A4/en not_active Withdrawn
- 2006-07-20 EP EP12159640A patent/EP2487441A3/en not_active Withdrawn
- 2006-07-20 CN CN2006800341936A patent/CN101268209B/zh not_active Expired - Fee Related
- 2006-07-20 US US11/989,092 patent/US8317926B2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4461656A (en) * | 1983-03-15 | 1984-07-24 | Ross John A | Low temperature hardening of the surface of a ferrous metal workpiece in a fluidized bed furnace |
| CN87104781A (zh) * | 1986-07-07 | 1988-01-27 | 株式会社豐田中央研究所 | 表面处理的方法及其设备 |
Non-Patent Citations (3)
| Title |
|---|
| JP昭59-193267A 1984.11.01 |
| JP昭60-251274A 1985.12.11 |
| JP昭61-243178A 1986.10.29 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1904661A1 (en) | 2008-04-02 |
| JP2009501844A (ja) | 2009-01-22 |
| US8317926B2 (en) | 2012-11-27 |
| EP1904661A4 (en) | 2010-12-29 |
| WO2007009190A1 (en) | 2007-01-25 |
| JP4977700B2 (ja) | 2012-07-18 |
| EP2487441A3 (en) | 2012-11-21 |
| EP2487441A2 (en) | 2012-08-15 |
| US20090297725A1 (en) | 2009-12-03 |
| CN101268209A (zh) | 2008-09-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120718 Termination date: 20160720 |