CN101210307B - 掩模装置、其制造方法以及制造有机发光显示装置的方法 - Google Patents
掩模装置、其制造方法以及制造有机发光显示装置的方法 Download PDFInfo
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- CN101210307B CN101210307B CN2007103013817A CN200710301381A CN101210307B CN 101210307 B CN101210307 B CN 101210307B CN 2007103013817 A CN2007103013817 A CN 2007103013817A CN 200710301381 A CN200710301381 A CN 200710301381A CN 101210307 B CN101210307 B CN 101210307B
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- 239000000758 substrate Substances 0.000 claims abstract description 80
- 238000000034 method Methods 0.000 claims abstract description 37
- 238000005096 rolling process Methods 0.000 claims abstract description 36
- 239000000463 material Substances 0.000 claims abstract description 21
- 238000000151 deposition Methods 0.000 claims abstract description 13
- 230000008021 deposition Effects 0.000 claims abstract description 7
- 239000010410 layer Substances 0.000 claims description 32
- 229920002120 photoresistant polymer Polymers 0.000 claims description 16
- 230000015572 biosynthetic process Effects 0.000 claims description 14
- 239000012044 organic layer Substances 0.000 claims description 10
- 230000008020 evaporation Effects 0.000 claims description 9
- 238000001704 evaporation Methods 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 8
- 230000004888 barrier function Effects 0.000 claims description 7
- 238000001259 photo etching Methods 0.000 claims description 7
- 238000012545 processing Methods 0.000 claims description 7
- 238000005530 etching Methods 0.000 claims description 5
- 239000010935 stainless steel Substances 0.000 claims description 5
- 229910001220 stainless steel Inorganic materials 0.000 claims description 5
- 239000003795 chemical substances by application Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 229910001092 metal group alloy Inorganic materials 0.000 claims description 2
- 238000002203 pretreatment Methods 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims 2
- 230000007261 regionalization Effects 0.000 claims 1
- 230000000903 blocking effect Effects 0.000 abstract 2
- 239000011368 organic material Substances 0.000 description 5
- 238000009499 grossing Methods 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 239000007858 starting material Substances 0.000 description 3
- 230000007704 transition Effects 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000005554 pickling Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000013139 quantization Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroluminescent Light Sources (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (18)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2006-0135494 | 2006-12-27 | ||
KR1020060135494A KR100796617B1 (ko) | 2006-12-27 | 2006-12-27 | 마스크 장치와 마스크 장치의 제조방법 및 이를 이용한유기전계발광표시장치의 제조방법 |
KR1020060135494 | 2006-12-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101210307A CN101210307A (zh) | 2008-07-02 |
CN101210307B true CN101210307B (zh) | 2013-01-30 |
Family
ID=39204063
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2007103013817A Active CN101210307B (zh) | 2006-12-27 | 2007-12-25 | 掩模装置、其制造方法以及制造有机发光显示装置的方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8545631B2 (zh) |
EP (1) | EP1939685B1 (zh) |
JP (1) | JP4750093B2 (zh) |
KR (1) | KR100796617B1 (zh) |
CN (1) | CN101210307B (zh) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2522700A1 (de) | 2011-05-11 | 2012-11-14 | Saint-Gobain Glass France | Wassersuspendierbare Druckpaste |
JP5382259B1 (ja) * | 2013-01-10 | 2014-01-08 | 大日本印刷株式会社 | 金属板、金属板の製造方法、および金属板を用いて蒸着マスクを製造する方法 |
JP5382257B1 (ja) | 2013-01-10 | 2014-01-08 | 大日本印刷株式会社 | 金属板、金属板の製造方法、および金属板を用いて蒸着マスクを製造する方法 |
KR102073765B1 (ko) * | 2013-04-04 | 2020-02-26 | 삼성디스플레이 주식회사 | 디스플레이 제조방법 및 이에 사용될 수 있는 증착장치 |
JP5455099B1 (ja) * | 2013-09-13 | 2014-03-26 | 大日本印刷株式会社 | 金属板、金属板の製造方法、および金属板を用いてマスクを製造する方法 |
JP5516816B1 (ja) * | 2013-10-15 | 2014-06-11 | 大日本印刷株式会社 | 金属板、金属板の製造方法、および金属板を用いて蒸着マスクを製造する方法 |
JP5641462B1 (ja) | 2014-05-13 | 2014-12-17 | 大日本印刷株式会社 | 金属板、金属板の製造方法、および金属板を用いてマスクを製造する方法 |
TWI696708B (zh) | 2015-02-10 | 2020-06-21 | 日商大日本印刷股份有限公司 | 有機el顯示裝置用蒸鍍遮罩之製造方法、欲製作有機el顯示裝置用蒸鍍遮罩所使用之金屬板及其製造方法 |
US11393698B2 (en) * | 2020-12-18 | 2022-07-19 | STATS ChipPAC Pte. Ltd. | Mask design for improved attach position |
KR102633153B1 (ko) * | 2021-06-28 | 2024-02-06 | (주)세우인코퍼레이션 | 마스크 얼라인 스틱의 제조방법 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5326663A (en) * | 1991-10-24 | 1994-07-05 | Kabushiki Kaisha Toshiba | Method of manufacturing shadow mask |
US6620554B1 (en) * | 1997-11-13 | 2003-09-16 | Dai Nippon Printing Co., Ltd. | Etching substrate material, etching process, and article obtained by etching |
CN1534383A (zh) * | 2003-03-27 | 2004-10-06 | ����Sdi��ʽ���� | 显示装置的沉积掩模及其制造方法 |
CN1779566A (zh) * | 2004-11-25 | 2006-05-31 | 三星Sdi株式会社 | 用于沉积的掩模和制造该掩模的方法 |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4048536A (en) * | 1976-03-18 | 1977-09-13 | Buckbee-Mears Company | Shadow mask with plurality of recessed regions extending across mask in two directions |
JPS59158051A (ja) * | 1983-02-28 | 1984-09-07 | Toshiba Corp | シヤドウマスクの製造方法 |
JP3032245B2 (ja) | 1990-06-14 | 2000-04-10 | 株式会社東芝 | シャドウマスク及びその製造方法 |
JP2764526B2 (ja) * | 1993-09-28 | 1998-06-11 | 大日本印刷株式会社 | アパーチャグリルの製造方法及びアパーチャグリル |
KR100435451B1 (ko) * | 1999-09-22 | 2004-06-10 | 주식회사 포스코 | 자성 및 흑화막 밀착성이 우수한 브라운관 마스크 프레임용 냉연강판의 제조방법 |
JP2001237073A (ja) * | 2000-02-24 | 2001-08-31 | Tohoku Pioneer Corp | 多面取り用メタルマスク及びその製造方法 |
US7396558B2 (en) * | 2001-01-31 | 2008-07-08 | Toray Industries, Inc. | Integrated mask and method and apparatus for manufacturing organic EL device using the same |
KR100404578B1 (ko) * | 2001-04-20 | 2003-11-05 | 엘지전자 주식회사 | 칼라 음극선관용 새도우마스크 |
JP2003017255A (ja) * | 2001-06-29 | 2003-01-17 | Sanyo Electric Co Ltd | エレクトロルミネッセンス表示装置の製造方法 |
KR20030023202A (ko) * | 2001-09-12 | 2003-03-19 | 엘지전자 주식회사 | 유기발광소자용 마스크 |
KR100490534B1 (ko) * | 2001-12-05 | 2005-05-17 | 삼성에스디아이 주식회사 | 유기 전자 발광 소자의 박막 증착용 마스크 프레임 조립체 |
KR100472012B1 (ko) * | 2001-12-17 | 2005-03-08 | 조수제 | 섀도우 마스크 및 그 제조 방법 |
US6729927B2 (en) * | 2002-08-01 | 2004-05-04 | Eastman Kodak Company | Method and apparatus for making a shadow mask array |
JP4072422B2 (ja) * | 2002-11-22 | 2008-04-09 | 三星エスディアイ株式会社 | 蒸着用マスク構造体とその製造方法、及びこれを用いた有機el素子の製造方法 |
KR200323202Y1 (ko) | 2002-11-28 | 2003-08-14 | 다이모스(주) | 4륜 구동차량용 부변속기의 전기식 변속장치 |
JP2004185890A (ja) * | 2002-12-02 | 2004-07-02 | Hitachi Metals Ltd | メタルマスク |
US7153180B2 (en) * | 2003-11-13 | 2006-12-26 | Eastman Kodak Company | Continuous manufacture of flat panel light emitting devices |
JP4608874B2 (ja) * | 2003-12-02 | 2011-01-12 | ソニー株式会社 | 蒸着マスクおよびその製造方法 |
JP4441282B2 (ja) * | 2004-02-02 | 2010-03-31 | 富士フイルム株式会社 | 蒸着マスク及び有機el表示デバイスの製造方法 |
KR100692839B1 (ko) * | 2004-02-04 | 2007-03-09 | 엘지전자 주식회사 | 유기 전계 발광 소자용 마스크 및 그 제조방법 |
KR100692872B1 (ko) * | 2004-02-04 | 2007-03-12 | 엘지전자 주식회사 | 마스크 및 그 제조방법과 그를 이용한 유기 전계 발광소자의 제조방법 |
KR200349964Y1 (ko) | 2004-02-12 | 2004-05-12 | 이광한 | 복권엽서 |
US7253533B2 (en) * | 2004-05-06 | 2007-08-07 | Au Optronics Corporation | Divided shadow mask for fabricating organic light emitting diode displays |
JP4609187B2 (ja) * | 2005-05-30 | 2011-01-12 | 凸版印刷株式会社 | 多面付けメタルマスクの製造方法 |
JP2007164084A (ja) * | 2005-12-16 | 2007-06-28 | Toshiba Corp | フォトマスクの製造方法および半導体装置の製造方法 |
-
2006
- 2006-12-27 KR KR1020060135494A patent/KR100796617B1/ko active IP Right Grant
-
2007
- 2007-10-19 JP JP2007272994A patent/JP4750093B2/ja active Active
- 2007-12-25 CN CN2007103013817A patent/CN101210307B/zh active Active
- 2007-12-26 US US11/964,289 patent/US8545631B2/en active Active
- 2007-12-27 EP EP07255059.3A patent/EP1939685B1/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5326663A (en) * | 1991-10-24 | 1994-07-05 | Kabushiki Kaisha Toshiba | Method of manufacturing shadow mask |
US6620554B1 (en) * | 1997-11-13 | 2003-09-16 | Dai Nippon Printing Co., Ltd. | Etching substrate material, etching process, and article obtained by etching |
CN1534383A (zh) * | 2003-03-27 | 2004-10-06 | ����Sdi��ʽ���� | 显示装置的沉积掩模及其制造方法 |
CN1779566A (zh) * | 2004-11-25 | 2006-05-31 | 三星Sdi株式会社 | 用于沉积的掩模和制造该掩模的方法 |
Non-Patent Citations (1)
Title |
---|
JP平4-47648A 1992.02.17 |
Also Published As
Publication number | Publication date |
---|---|
JP4750093B2 (ja) | 2011-08-17 |
JP2008163448A (ja) | 2008-07-17 |
KR100796617B1 (ko) | 2008-01-22 |
EP1939685A3 (en) | 2013-08-21 |
US20080157084A1 (en) | 2008-07-03 |
CN101210307A (zh) | 2008-07-02 |
EP1939685B1 (en) | 2017-10-04 |
EP1939685A2 (en) | 2008-07-02 |
US8545631B2 (en) | 2013-10-01 |
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C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20090109 Address after: Gyeonggi Do, South Korea Applicant after: Samsung Mobile Display Co., Ltd. Address before: Gyeonggi Do, South Korea Applicant before: Samsung SDI Co., Ltd. |
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Owner name: SAMSUNG MOBILE DISPLAY CO., LTD. Free format text: FORMER OWNER: SAMSUNG SDI CO., LTD. Effective date: 20090109 |
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Owner name: SAMSUNG DISPLAY CO., LTD. Free format text: FORMER OWNER: SAMSUNG MOBILE DISPLAY CO., LTD. Effective date: 20120929 |
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Effective date of registration: 20120929 Address after: Gyeonggi Do, South Korea Applicant after: Samsung Display Co., Ltd. Address before: Gyeonggi Do, South Korea Applicant before: Samsung Mobile Display Co., Ltd. |
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