CN101165454A - 干涉仪角度灵敏度校准方法 - Google Patents

干涉仪角度灵敏度校准方法 Download PDF

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Publication number
CN101165454A
CN101165454A CNA2007101547294A CN200710154729A CN101165454A CN 101165454 A CN101165454 A CN 101165454A CN A2007101547294 A CNA2007101547294 A CN A2007101547294A CN 200710154729 A CN200710154729 A CN 200710154729A CN 101165454 A CN101165454 A CN 101165454A
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China
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angle
interferometer
inclination
benchmark
plane
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CNA2007101547294A
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Chinese (zh)
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葛宗涛
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Fujinon Corp
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Fujinon Corp
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  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
CNA2007101547294A 2006-10-20 2007-09-13 干涉仪角度灵敏度校准方法 Pending CN101165454A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006285707 2006-10-20
JP2006285707A JP2008102051A (ja) 2006-10-20 2006-10-20 干渉計角度感度較正方法

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CN101165454A true CN101165454A (zh) 2008-04-23

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CNA2007101547294A Pending CN101165454A (zh) 2006-10-20 2007-09-13 干涉仪角度灵敏度校准方法

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JP (1) JP2008102051A (enExample)
CN (1) CN101165454A (enExample)
TW (1) TW200819706A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106574834A (zh) * 2014-05-13 2017-04-19 卡尔·马尔控股有限公司 用于对测量仪进行校准的方法
CN110631510A (zh) * 2019-09-12 2019-12-31 中国科学院西安光学精密机械研究所 一种基于迈克尔逊结构的高精度测角装置及测角方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5305281B2 (ja) * 2007-12-11 2013-10-02 株式会社オプセル オートコリメータ
JP5208681B2 (ja) * 2008-11-06 2013-06-12 株式会社ミツトヨ 斜入射干渉計における測定感度の校正方法
JP2013117395A (ja) * 2011-12-01 2013-06-13 Panasonic Corp 傾斜測定装置およびその方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5719639A (en) * 1980-07-09 1982-02-01 Nippon Telegr & Teleph Corp <Ntt> Measuring device for end surface angle of optical fiber
JPS5875011A (ja) * 1981-10-30 1983-05-06 Hitachi Ltd 平行度の光学的測定装置
JPS63168529A (ja) * 1986-12-29 1988-07-12 Shimadzu Corp 光フアイバコネクタ検査法
JP2990309B2 (ja) * 1991-06-10 1999-12-13 コニカ株式会社 差動型干渉測長計の補正係数測定用光学部材
JP2001289627A (ja) * 2000-04-11 2001-10-19 Sumitomo Metal Ind Ltd 厚み測定装置
JP2002277218A (ja) * 2001-03-22 2002-09-25 Sharp Corp 膜厚測定装置およびその方法
JP3863408B2 (ja) * 2001-11-08 2006-12-27 富士通株式会社 磁気ヘッドスライダの検査装置
JP2004037167A (ja) * 2002-07-01 2004-02-05 Fuji Photo Optical Co Ltd 被検体の傾き測定方法
JP4093564B2 (ja) * 2003-03-20 2008-06-04 フジノン株式会社 クランプ装置の傾き調整方法
JP4786923B2 (ja) * 2005-03-31 2011-10-05 富士フイルム株式会社 縞計測装置の変換係数較正方法および装置ならびに該変換係数較正装置を備えた縞計測装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106574834A (zh) * 2014-05-13 2017-04-19 卡尔·马尔控股有限公司 用于对测量仪进行校准的方法
US10323938B2 (en) 2014-05-13 2019-06-18 Carl Mahr Holding Gmbh Method for calibrating a measuring device
CN106574834B (zh) * 2014-05-13 2019-09-20 卡尔·马尔控股有限公司 用于对测量仪进行校准的方法
CN110631510A (zh) * 2019-09-12 2019-12-31 中国科学院西安光学精密机械研究所 一种基于迈克尔逊结构的高精度测角装置及测角方法
CN110631510B (zh) * 2019-09-12 2020-07-31 中国科学院西安光学精密机械研究所 一种基于迈克尔逊结构的高精度测角装置及测角方法

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TW200819706A (en) 2008-05-01
TWI336391B (enExample) 2011-01-21
JP2008102051A (ja) 2008-05-01

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Open date: 20080423