TW200819706A - Interferometer angle sensitivity calibration method - Google Patents

Interferometer angle sensitivity calibration method Download PDF

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Publication number
TW200819706A
TW200819706A TW96135903A TW96135903A TW200819706A TW 200819706 A TW200819706 A TW 200819706A TW 96135903 A TW96135903 A TW 96135903A TW 96135903 A TW96135903 A TW 96135903A TW 200819706 A TW200819706 A TW 200819706A
Authority
TW
Taiwan
Prior art keywords
angle
interferometer
sensitivity
measured
formula
Prior art date
Application number
TW96135903A
Other languages
English (en)
Chinese (zh)
Other versions
TWI336391B (enExample
Inventor
Zongtao Ge
Original Assignee
Fujinon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujinon Corp filed Critical Fujinon Corp
Publication of TW200819706A publication Critical patent/TW200819706A/zh
Application granted granted Critical
Publication of TWI336391B publication Critical patent/TWI336391B/zh

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  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
TW96135903A 2006-10-20 2007-09-27 Interferometer angle sensitivity calibration method TW200819706A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006285707A JP2008102051A (ja) 2006-10-20 2006-10-20 干渉計角度感度較正方法

Publications (2)

Publication Number Publication Date
TW200819706A true TW200819706A (en) 2008-05-01
TWI336391B TWI336391B (enExample) 2011-01-21

Family

ID=39334235

Family Applications (1)

Application Number Title Priority Date Filing Date
TW96135903A TW200819706A (en) 2006-10-20 2007-09-27 Interferometer angle sensitivity calibration method

Country Status (3)

Country Link
JP (1) JP2008102051A (enExample)
CN (1) CN101165454A (enExample)
TW (1) TW200819706A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5305281B2 (ja) * 2007-12-11 2013-10-02 株式会社オプセル オートコリメータ
JP5208681B2 (ja) * 2008-11-06 2013-06-12 株式会社ミツトヨ 斜入射干渉計における測定感度の校正方法
JP2013117395A (ja) * 2011-12-01 2013-06-13 Panasonic Corp 傾斜測定装置およびその方法
DE102014209040B4 (de) * 2014-05-13 2019-02-14 Carl Mahr Holding Gmbh Verfahren zur Kalibrierung eines Messgerätes
CN110631510B (zh) * 2019-09-12 2020-07-31 中国科学院西安光学精密机械研究所 一种基于迈克尔逊结构的高精度测角装置及测角方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5719639A (en) * 1980-07-09 1982-02-01 Nippon Telegr & Teleph Corp <Ntt> Measuring device for end surface angle of optical fiber
JPS5875011A (ja) * 1981-10-30 1983-05-06 Hitachi Ltd 平行度の光学的測定装置
JPS63168529A (ja) * 1986-12-29 1988-07-12 Shimadzu Corp 光フアイバコネクタ検査法
JP2990309B2 (ja) * 1991-06-10 1999-12-13 コニカ株式会社 差動型干渉測長計の補正係数測定用光学部材
JP2001289627A (ja) * 2000-04-11 2001-10-19 Sumitomo Metal Ind Ltd 厚み測定装置
JP2002277218A (ja) * 2001-03-22 2002-09-25 Sharp Corp 膜厚測定装置およびその方法
JP3863408B2 (ja) * 2001-11-08 2006-12-27 富士通株式会社 磁気ヘッドスライダの検査装置
JP2004037167A (ja) * 2002-07-01 2004-02-05 Fuji Photo Optical Co Ltd 被検体の傾き測定方法
JP4093564B2 (ja) * 2003-03-20 2008-06-04 フジノン株式会社 クランプ装置の傾き調整方法
JP4786923B2 (ja) * 2005-03-31 2011-10-05 富士フイルム株式会社 縞計測装置の変換係数較正方法および装置ならびに該変換係数較正装置を備えた縞計測装置

Also Published As

Publication number Publication date
TWI336391B (enExample) 2011-01-21
CN101165454A (zh) 2008-04-23
JP2008102051A (ja) 2008-05-01

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