CN101133301A - 与其它类型电路集成的mram器件 - Google Patents

与其它类型电路集成的mram器件 Download PDF

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Publication number
CN101133301A
CN101133301A CNA2004800362736A CN200480036273A CN101133301A CN 101133301 A CN101133301 A CN 101133301A CN A2004800362736 A CNA2004800362736 A CN A2004800362736A CN 200480036273 A CN200480036273 A CN 200480036273A CN 101133301 A CN101133301 A CN 101133301A
Authority
CN
China
Prior art keywords
metal level
metal
semiconductor devices
mram
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2004800362736A
Other languages
English (en)
Chinese (zh)
Inventor
格洛丽亚·J·凯尔斯齐科夫斯基
常利辛
马克·A·迪尔拉姆
颜明
托马斯·V·迈克斯纳
洛伦·J·怀斯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NXP USA Inc
Original Assignee
Freescale Semiconductor Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Freescale Semiconductor Inc filed Critical Freescale Semiconductor Inc
Publication of CN101133301A publication Critical patent/CN101133301A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/14—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using thin-film elements
    • G11C11/15—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using thin-film elements using multiple magnetic layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Mram Or Spin Memory Techniques (AREA)
  • Semiconductor Memories (AREA)
  • Hall/Mr Elements (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
  • Logic Circuits (AREA)
CNA2004800362736A 2003-12-08 2004-10-29 与其它类型电路集成的mram器件 Pending CN101133301A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/730,239 US7031183B2 (en) 2003-12-08 2003-12-08 MRAM device integrated with other types of circuitry
US10/730,239 2003-12-08

Publications (1)

Publication Number Publication Date
CN101133301A true CN101133301A (zh) 2008-02-27

Family

ID=34634115

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2004800362736A Pending CN101133301A (zh) 2003-12-08 2004-10-29 与其它类型电路集成的mram器件

Country Status (6)

Country Link
US (1) US7031183B2 (https=)
JP (1) JP2007525022A (https=)
KR (1) KR20060121146A (https=)
CN (1) CN101133301A (https=)
TW (1) TW200540866A (https=)
WO (1) WO2005060439A2 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006120824A (ja) * 2004-10-21 2006-05-11 Renesas Technology Corp 磁気記憶装置
JP2008235677A (ja) * 2007-03-22 2008-10-02 Matsushita Electric Ind Co Ltd 半導体集積回路及び入出力セルの信号端子設計方法
US7629182B2 (en) * 2007-04-17 2009-12-08 Freescale Semiconductor, Inc. Space and process efficient MRAM and method
US8248840B2 (en) * 2010-03-26 2012-08-21 Qualcomm Incorporated Magnetoresistive random access memory (MRAM) with integrated magnetic film enhanced circuit elements
KR101111431B1 (ko) * 2010-08-17 2012-02-16 앰코 테크놀로지 코리아 주식회사 반도체 패키지 및 이의 제조 방법
CN102376737B (zh) * 2010-08-24 2014-03-19 中芯国际集成电路制造(北京)有限公司 嵌入mram的集成电路及该集成电路的制备方法
US10109674B2 (en) 2015-08-10 2018-10-23 Qualcomm Incorporated Semiconductor metallization structure
CN111742366B (zh) * 2018-06-14 2022-08-26 华为技术有限公司 存储器

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3515363B2 (ja) * 1998-03-24 2004-04-05 株式会社東芝 半導体装置の製造方法
US5940319A (en) * 1998-08-31 1999-08-17 Motorola, Inc. Magnetic random access memory and fabricating method thereof
US6055178A (en) * 1998-12-18 2000-04-25 Motorola, Inc. Magnetic random access memory with a reference memory array
US6153443A (en) * 1998-12-21 2000-11-28 Motorola, Inc. Method of fabricating a magnetic random access memory
US6165803A (en) * 1999-05-17 2000-12-26 Motorola, Inc. Magnetic random access memory and fabricating method thereof
US6292389B1 (en) * 1999-07-19 2001-09-18 Motorola, Inc. Magnetic element with improved field response and fabricating method thereof
US6233172B1 (en) * 1999-12-17 2001-05-15 Motorola, Inc. Magnetic element with dual magnetic states and fabrication method thereof
US6418046B1 (en) * 2001-01-30 2002-07-09 Motorola, Inc. MRAM architecture and system
JP2002368196A (ja) * 2001-05-30 2002-12-20 Internatl Business Mach Corp <Ibm> メモリセル、記憶回路ブロック、データの書き込み方法及びデータの読み出し方法
JP2002368197A (ja) * 2001-05-31 2002-12-20 Internatl Business Mach Corp <Ibm> 不揮発性磁気メモリ・セル及びそれを用いた記憶回路ブロック
JP2003151260A (ja) * 2001-11-13 2003-05-23 Mitsubishi Electric Corp 薄膜磁性体記憶装置
JP2003243631A (ja) * 2002-02-18 2003-08-29 Mitsubishi Electric Corp 薄膜磁性体記憶装置ならびにそれを用いた無線チップ、流通管理システムおよび製造工程管理システム
US6518071B1 (en) * 2002-03-28 2003-02-11 Motorola, Inc. Magnetoresistive random access memory device and method of fabrication thereof
US6906361B2 (en) * 2002-04-08 2005-06-14 Guobiao Zhang Peripheral circuits of electrically programmable three-dimensional memory

Also Published As

Publication number Publication date
JP2007525022A (ja) 2007-08-30
KR20060121146A (ko) 2006-11-28
TW200540866A (en) 2005-12-16
US7031183B2 (en) 2006-04-18
WO2005060439A3 (en) 2007-05-24
WO2005060439A2 (en) 2005-07-07
US20050122772A1 (en) 2005-06-09

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C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
ASS Succession or assignment of patent right

Owner name: AIWO SPINTEKNOLOGY, INC.

Free format text: FORMER OWNER: FREESCALE SEMICONDUCTOR INC.

Effective date: 20090508

C41 Transfer of patent application or patent right or utility model
TA01 Transfer of patent application right

Effective date of registration: 20090508

Address after: Arizona, USA

Applicant after: Freescale Semiconductor Inc.

Address before: Texas in the United States

Applicant before: Fisical Semiconductor Inc.

C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Open date: 20080227