CN101076493A - 高纯粒状硅及其制造方法 - Google Patents
高纯粒状硅及其制造方法 Download PDFInfo
- Publication number
- CN101076493A CN101076493A CNA2005800388410A CN200580038841A CN101076493A CN 101076493 A CN101076493 A CN 101076493A CN A2005800388410 A CNA2005800388410 A CN A2005800388410A CN 200580038841 A CN200580038841 A CN 200580038841A CN 101076493 A CN101076493 A CN 101076493A
- Authority
- CN
- China
- Prior art keywords
- silicon
- particle
- reactor
- mean sizes
- cvd reactor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 193
- 239000010703 silicon Substances 0.000 title claims abstract description 193
- 238000004519 manufacturing process Methods 0.000 title claims description 23
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 194
- 238000000034 method Methods 0.000 claims abstract description 78
- 238000005229 chemical vapour deposition Methods 0.000 claims abstract description 70
- 238000000151 deposition Methods 0.000 claims abstract description 48
- 239000000428 dust Substances 0.000 claims abstract description 23
- 239000000203 mixture Substances 0.000 claims abstract description 17
- 239000004065 semiconductor Substances 0.000 claims abstract description 6
- 239000002245 particle Substances 0.000 claims description 134
- 239000007789 gas Substances 0.000 claims description 76
- 239000013078 crystal Substances 0.000 claims description 69
- 239000011856 silicon-based particle Substances 0.000 claims description 65
- 230000008021 deposition Effects 0.000 claims description 43
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 30
- 229910000077 silane Inorganic materials 0.000 claims description 30
- 238000000354 decomposition reaction Methods 0.000 claims description 28
- 238000013467 fragmentation Methods 0.000 claims description 20
- 238000006062 fragmentation reaction Methods 0.000 claims description 20
- 229910052739 hydrogen Inorganic materials 0.000 claims description 14
- 239000001257 hydrogen Substances 0.000 claims description 14
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 13
- 230000008569 process Effects 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 5
- 229910052796 boron Inorganic materials 0.000 claims description 5
- 150000003377 silicon compounds Chemical class 0.000 claims description 5
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 4
- 229910052698 phosphorus Inorganic materials 0.000 claims description 4
- 239000011574 phosphorus Substances 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- 239000002210 silicon-based material Substances 0.000 description 11
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 9
- 238000010899 nucleation Methods 0.000 description 9
- 230000008901 benefit Effects 0.000 description 8
- 238000005243 fluidization Methods 0.000 description 6
- 229910052742 iron Inorganic materials 0.000 description 6
- 239000002912 waste gas Substances 0.000 description 6
- 238000009826 distribution Methods 0.000 description 5
- 239000012159 carrier gas Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 229910052723 transition metal Inorganic materials 0.000 description 4
- 150000003624 transition metals Chemical class 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 230000002950 deficient Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000003344 environmental pollutant Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 238000000746 purification Methods 0.000 description 2
- 238000000197 pyrolysis Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000001149 thermolysis Methods 0.000 description 2
- 229920002472 Starch Polymers 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 150000004756 silanes Chemical class 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 235000019698 starch Nutrition 0.000 description 1
- 239000008107 starch Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/021—Preparation
- C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/113—Silicon oxides; Hydrates thereof
- C01B33/12—Silica; Hydrates thereof, e.g. lepidoic silicic acid
- C01B33/18—Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/24—Deposition of silicon only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
Abstract
Description
Claims (41)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/988,179 US20060105105A1 (en) | 2004-11-12 | 2004-11-12 | High purity granular silicon and method of manufacturing the same |
US10/988,179 | 2004-11-12 | ||
PCT/US2005/040559 WO2006062660A2 (en) | 2004-11-12 | 2005-11-10 | High purity granular silicon and method of manufacturing the same |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2009102615052A Division CN101734664B (zh) | 2004-11-12 | 2005-11-10 | 高纯粒状硅及其制造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101076493A true CN101076493A (zh) | 2007-11-21 |
CN101076493B CN101076493B (zh) | 2010-05-05 |
Family
ID=35976382
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2009102615052A Active CN101734664B (zh) | 2004-11-12 | 2005-11-10 | 高纯粒状硅及其制造方法 |
CN2005800388410A Active CN101076493B (zh) | 2004-11-12 | 2005-11-10 | 高纯粒状硅及其制造方法 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2009102615052A Active CN101734664B (zh) | 2004-11-12 | 2005-11-10 | 高纯粒状硅及其制造方法 |
Country Status (8)
Country | Link |
---|---|
US (2) | US20060105105A1 (zh) |
EP (4) | EP1900684B1 (zh) |
JP (2) | JP5238258B2 (zh) |
KR (3) | KR101321675B1 (zh) |
CN (2) | CN101734664B (zh) |
DE (2) | DE602005025930D1 (zh) |
TW (2) | TW201122144A (zh) |
WO (1) | WO2006062660A2 (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103787336A (zh) * | 2008-09-16 | 2014-05-14 | 储晞 | 生产高纯颗粒硅的方法 |
CN107250428A (zh) * | 2014-12-23 | 2017-10-13 | 斯泰克有限责任公司 | 机械式流化沉积系统和方法 |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7789331B2 (en) * | 2006-09-06 | 2010-09-07 | Integrated Photovoltaics, Inc. | Jet mill producing fine silicon powder |
US20090324819A1 (en) * | 2008-06-27 | 2009-12-31 | Memc Electronic Materials, Inc. | Methods for increasing polycrystalline silicon reactor productivity by recycle of silicon fines |
DE102008036143A1 (de) | 2008-08-01 | 2010-02-04 | Berlinsolar Gmbh | Verfahren zum Entfernen von nichtmetallischen Verunreinigungen aus metallurgischem Silicium |
US8168123B2 (en) * | 2009-02-26 | 2012-05-01 | Siliken Chemicals, S.L. | Fluidized bed reactor for production of high purity silicon |
EP2421640A1 (en) * | 2009-04-20 | 2012-02-29 | Ae Polysilicon Corporation | Methods and system for cooling a reaction effluent gas |
AU2010239350A1 (en) | 2009-04-20 | 2011-11-10 | Ae Polysilicon Corporation | A reactor with silicide-coated metal surfaces |
DE102010040293A1 (de) | 2010-09-06 | 2012-03-08 | Wacker Chemie Ag | Verfahren zur Herstellung von polykristallinem Silicium |
US20120148728A1 (en) * | 2010-12-09 | 2012-06-14 | Siliken Sa | Methods and apparatus for the production of high purity silicon |
TWI580825B (zh) | 2012-01-27 | 2017-05-01 | Memc新加坡有限公司 | 藉由定向固化作用製備鑄態矽之方法 |
RU2492914C2 (ru) * | 2012-04-03 | 2013-09-20 | Федеральное государственное бюджетное учреждение науки Институт высокотемпературной электрохимии Уральского отделения Российской Академии наук | Молекулярный фильтр для извлечения гелия из гелийсодержащих газовых смесей |
DE102012206439A1 (de) * | 2012-04-19 | 2013-10-24 | Wacker Chemie Ag | Polykristallines Siliciumgranulat und seine Herstellung |
US8875728B2 (en) | 2012-07-12 | 2014-11-04 | Siliken Chemicals, S.L. | Cooled gas distribution plate, thermal bridge breaking system, and related methods |
CN104583122B (zh) | 2012-08-29 | 2017-09-05 | 赫姆洛克半导体运营有限责任公司 | 锥形流化床反应器及其使用方法 |
EP3720030B1 (en) | 2012-10-26 | 2022-06-15 | Sun Patent Trust | An integrated circuit to identify a resource |
US8833564B1 (en) * | 2013-03-13 | 2014-09-16 | Sunedison Semiconductor Limited | Systems and methods for reducing dust in granular material |
CN103213989B (zh) * | 2013-03-19 | 2014-12-31 | 浙江精功新材料技术有限公司 | 一种多晶硅颗粒制备系统及制备方法 |
US10525430B2 (en) | 2013-12-26 | 2020-01-07 | Bruce Hazeltine | Draft tube fluidized bed reactor for deposition of granular silicon |
DE102014221928A1 (de) | 2014-10-28 | 2016-04-28 | Wacker Chemie Ag | Wirbelschichtreaktor und Verfahren zur Herstellung von polykristallinem Siliciumgranulat |
US9440262B2 (en) | 2014-11-07 | 2016-09-13 | Rec Silicon Inc | Apparatus and method for silicon powder management |
US9682404B1 (en) | 2016-05-05 | 2017-06-20 | Rec Silicon Inc | Method and apparatus for separating fine particulate material from a mixture of coarse particulate material and fine particulate material |
US10287171B2 (en) | 2016-05-05 | 2019-05-14 | Rec Silicon Inc | Tumbling device for the separation of granular polysilicon and polysilicon powder |
US10407310B2 (en) | 2017-01-26 | 2019-09-10 | Rec Silicon Inc | System for reducing agglomeration during annealing of flowable, finely divided solids |
WO2019079879A1 (en) | 2017-10-27 | 2019-05-02 | Kevin Allan Dooley Inc. | SYSTEM AND METHOD FOR PRODUCING HIGH-PURITY SILICON |
CN109529732B (zh) * | 2018-12-24 | 2020-01-10 | 亚洲硅业(青海)有限公司 | 一种流化处理系统 |
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US3012861A (en) * | 1960-01-15 | 1961-12-12 | Du Pont | Production of silicon |
US4314525A (en) * | 1980-03-03 | 1982-02-09 | California Institute Of Technology | Fluidized bed silicon deposition from silane |
US4444811A (en) * | 1980-03-03 | 1984-04-24 | California Institute Of Technology | Fluidized bed silicon deposition from silane |
US4424199A (en) * | 1981-12-11 | 1984-01-03 | Union Carbide Corporation | Fluid jet seed particle generator for silane pyrolysis reactor |
US4691866A (en) * | 1985-11-08 | 1987-09-08 | Ethyl Corporation | Generation of seed particles |
US4857173A (en) * | 1986-01-31 | 1989-08-15 | Ethyl Corporation | Particle classifier and method |
US4784840A (en) * | 1986-08-25 | 1988-11-15 | Ethyl Corporation | Polysilicon fluid bed process and product |
US4820587A (en) * | 1986-08-25 | 1989-04-11 | Ethyl Corporation | Polysilicon produced by a fluid bed process |
US4883687A (en) * | 1986-08-25 | 1989-11-28 | Ethyl Corporation | Fluid bed process for producing polysilicon |
JPH0755810B2 (ja) * | 1987-03-14 | 1995-06-14 | 三井東圧化学株式会社 | 高純度粒状珪素とその製造方法 |
US4868013A (en) * | 1987-08-21 | 1989-09-19 | Ethyl Corporation | Fluidized bed process |
US4871524A (en) * | 1987-09-03 | 1989-10-03 | Ethyl Corporation | Hydrogen purification process |
US4851297A (en) * | 1987-11-27 | 1989-07-25 | Ethyl Corporation | Dopant coated bead-like silicon particles |
US4789596A (en) * | 1987-11-27 | 1988-12-06 | Ethyl Corporation | Dopant coated bead-like silicon particles |
US5037503A (en) * | 1988-05-31 | 1991-08-06 | Osaka Titanium Co., Ltd. | Method for growing silicon single crystal |
CA1340189C (en) * | 1988-10-11 | 1998-12-15 | Albemarle Corporation | Polysilicon with diminished hydrogen content |
US5242671A (en) * | 1988-10-11 | 1993-09-07 | Ethyl Corporation | Process for preparing polysilicon with diminished hydrogen content by using a fluidized bed with a two-step heating process |
US5326547A (en) * | 1988-10-11 | 1994-07-05 | Albemarle Corporation | Process for preparing polysilicon with diminished hydrogen content by using a two-step heating process |
NO165288C (no) * | 1988-12-08 | 1991-01-23 | Elkem As | Silisiumpulver og fremgangsmaate for fremstilling av silisiumpulver. |
US5236547A (en) * | 1990-09-25 | 1993-08-17 | Kabushiki Kaisha Toshiba | Method of forming a pattern in semiconductor device manufacturing process |
JP3134370B2 (ja) * | 1991-07-29 | 2001-02-13 | 三菱マテリアル株式会社 | 粒状シリコン多結晶の製造方法 |
JPH06127923A (ja) * | 1992-10-16 | 1994-05-10 | Tonen Chem Corp | 多結晶シリコン製造用流動層反応器 |
US5405658A (en) * | 1992-10-20 | 1995-04-11 | Albemarle Corporation | Silicon coating process |
US5322670A (en) * | 1992-10-20 | 1994-06-21 | Ethyl Corporation | Product recovery tube assembly |
US5810934A (en) * | 1995-06-07 | 1998-09-22 | Advanced Silicon Materials, Inc. | Silicon deposition reactor apparatus |
WO1997044277A1 (fr) * | 1996-05-21 | 1997-11-27 | Tokuyama Corporation | Barreau de silicium polycristallin et son procede de preparation |
KR100263220B1 (ko) * | 1996-10-14 | 2000-09-01 | 에모토 간지 | 다결정실리콘의 제조방법과 장치 및 태양전지용실리콘기판의 제조방법 |
US5919303A (en) * | 1997-10-16 | 1999-07-06 | Memc Electronic Materials, Inc. | Process for preparing a silicon melt from a polysilicon charge |
US6827786B2 (en) * | 2000-12-26 | 2004-12-07 | Stephen M Lord | Machine for production of granular silicon |
CN1171784C (zh) * | 2002-03-05 | 2004-10-20 | 浙江大学 | 纳米硅管的制备方法 |
DE10359587A1 (de) * | 2003-12-18 | 2005-07-14 | Wacker-Chemie Gmbh | Staub- und porenfreies hochreines Polysiliciumgranulat |
-
2004
- 2004-11-12 US US10/988,179 patent/US20060105105A1/en not_active Abandoned
-
2005
- 2005-11-10 EP EP07120114A patent/EP1900684B1/en not_active Expired - Fee Related
- 2005-11-10 WO PCT/US2005/040559 patent/WO2006062660A2/en active Application Filing
- 2005-11-10 EP EP07120115A patent/EP1900685A1/en not_active Withdrawn
- 2005-11-10 CN CN2009102615052A patent/CN101734664B/zh active Active
- 2005-11-10 KR KR1020117000929A patent/KR101321675B1/ko active IP Right Grant
- 2005-11-10 EP EP05851459A patent/EP1833759B1/en not_active Expired - Fee Related
- 2005-11-10 KR KR1020127007690A patent/KR101370104B1/ko active IP Right Grant
- 2005-11-10 JP JP2007541287A patent/JP5238258B2/ja active Active
- 2005-11-10 CN CN2005800388410A patent/CN101076493B/zh active Active
- 2005-11-10 DE DE602005025930T patent/DE602005025930D1/de active Active
- 2005-11-10 KR KR1020077010827A patent/KR20070085338A/ko not_active Application Discontinuation
- 2005-11-10 DE DE602005018839T patent/DE602005018839D1/de active Active
- 2005-11-10 EP EP07120116A patent/EP1900686B1/en not_active Expired - Fee Related
- 2005-11-11 TW TW099141603A patent/TW201122144A/zh unknown
- 2005-11-11 TW TW094139670A patent/TWI338723B/zh active
-
2008
- 2008-04-09 US US12/100,151 patent/US20080187481A1/en not_active Abandoned
-
2012
- 2012-08-28 JP JP2012187792A patent/JP5623478B2/ja active Active
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103787336A (zh) * | 2008-09-16 | 2014-05-14 | 储晞 | 生产高纯颗粒硅的方法 |
CN101676203B (zh) * | 2008-09-16 | 2015-06-10 | 储晞 | 生产高纯颗粒硅的方法 |
CN103787336B (zh) * | 2008-09-16 | 2016-09-14 | 储晞 | 生产高纯颗粒硅的方法 |
CN107250428A (zh) * | 2014-12-23 | 2017-10-13 | 斯泰克有限责任公司 | 机械式流化沉积系统和方法 |
Also Published As
Publication number | Publication date |
---|---|
WO2006062660A3 (en) | 2007-08-02 |
EP1900686A1 (en) | 2008-03-19 |
US20060105105A1 (en) | 2006-05-18 |
CN101076493B (zh) | 2010-05-05 |
JP2012236768A (ja) | 2012-12-06 |
JP2008519754A (ja) | 2008-06-12 |
KR20120041268A (ko) | 2012-04-30 |
EP1900684B1 (en) | 2010-01-06 |
TW201122144A (en) | 2011-07-01 |
US20080187481A1 (en) | 2008-08-07 |
CN101734664A (zh) | 2010-06-16 |
EP1900685A1 (en) | 2008-03-19 |
EP1833759A2 (en) | 2007-09-19 |
EP1900684A1 (en) | 2008-03-19 |
TW200622026A (en) | 2006-07-01 |
KR101370104B1 (ko) | 2014-03-04 |
DE602005025930D1 (de) | 2011-02-24 |
EP1833759B1 (en) | 2011-01-12 |
KR20110019425A (ko) | 2011-02-25 |
DE602005018839D1 (de) | 2010-02-25 |
CN101734664B (zh) | 2012-10-31 |
EP1900686B1 (en) | 2012-02-08 |
JP5623478B2 (ja) | 2014-11-12 |
KR20070085338A (ko) | 2007-08-27 |
JP5238258B2 (ja) | 2013-07-17 |
TWI338723B (en) | 2011-03-11 |
KR101321675B1 (ko) | 2013-10-22 |
WO2006062660A2 (en) | 2006-06-15 |
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