CN101017256A - Repair device and repair method - Google Patents
Repair device and repair method Download PDFInfo
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- CN101017256A CN101017256A CNA2007100067919A CN200710006791A CN101017256A CN 101017256 A CN101017256 A CN 101017256A CN A2007100067919 A CNA2007100067919 A CN A2007100067919A CN 200710006791 A CN200710006791 A CN 200710006791A CN 101017256 A CN101017256 A CN 101017256A
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- unit
- substrate
- under test
- stand
- sensing unit
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/04—Mounting of components, e.g. of leadless components
Abstract
A master platform frame and an auxiliary platform frame which can move along a guide piece in said Y axle direction, are disposed on the plane board. An optical system which is used to carry out repairment and can move in said X axle direction is installed on the master platform frame. A LCD substrate namely the detected unit is installed on a mobile carrier. Said master platform frame and auxiliary platform frame are installed with detection sensing heads which can move in said X axle direction and can rotate in said XY plane. Said detection sensing heads are provided with a detection unit which provides current for the electrodes, and a sensing unit, which is used to detect the current supplied to teh said said connecting lines and to determine the existence of open circuit/short circuit defects, wherein the said detection unit and the said sensing unit are integrated together with each other. The said repair equipment of such structure can be efficiently close to all areas of the circuit link lines on the said LCD substrate, can detect defects and repair said defect without putting aside, and reinstalling the said substrate.
Description
Technical field
The present invention relates to a kind of being used for to being arranged at LCD (LCD:Liquid CrystalDisplay), plasma scope (PDP:Plasma Display Panel), and the defective of the electrical wiring of the substrate of other FPD (Flat Panel Displays) etc. the prosthetic appliance that detects and repair.
Background technology
The size of FPD substrate increases in recent years, than discard the defective substrate that occurs in manufacture process, repairs these defective substrates and becomes more cheap.Use the defective in electrical wiring prosthetic appliance (prosthetic appliance) repairing substrate.
It below is before the process of using prosthetic appliance and the explanation of manufacture process afterwards.In the first of this process, by being specifically designed on described whole area of substrates electric defects detection equipment (OS (open circuit short circuit) tester) or automated graphics checkout equipment (the AOI equipment: automatic optical inspection device) that the open circuit defect in the electrical wiring of described FPD and circuit defect are tested, detect defective and determine its position, and will detect and result that the position is definite as data storage in computing machine.Described prosthetic appliance is according to the described defective of this data repair.Described then OS tester or AOI equipment are checked once more to the described defective of correctly repairing.Therefore, described process is returned, and the production rate descends.
For boosting productivity, developed the prosthetic appliance on a kind of OS of being placed in tester in recent years.Yet the free space that is used to place described prosthetic appliance in manufacture process is limited, so need get described device fabrication as far as possible little.Described equipment also must be boosted productivity and reduce cost.
Disclosed described prosthetic appliance is an example of utilizing the existing prosthetic appliance that is equipped with the OS tester among the Japan pending application application No.02-02947.Be equipped with the existing prosthetic appliance of OS tester to have: platform (stage), be used to support the unit under test that is placed, wherein said platform can move to detecting location and repair the position, and can be controlled to move on three orthogonal axes and rotate in two dimensional surface; Proving installation is used for powering up the electrical characteristics of testing described unit under test by the electrode of the described unit under test on described detecting location; And storer, be used to store address and details by the defective of described proving installation measurement.Drive described platform according to being fixed in address described prosthetic appliance and that be stored in the described storer, and then laser spot pointed to the defective locations comprise location of short circuit at least, and with the described defective locations of laser irradiation to repair described defective.
Fig. 1 is the planimetric map that has shown another the existing prosthetic appliance that is equipped with the OS test function.In explanation, set X-direction and Y direction as shown in Figure 1 for convenience.
Shown in Figure 1A, on surface plate (surface palte) 101, guide 102 is set, configuration can be moved along the Y direction of described guide 102 on described guide 102 main stand (main gantry) 103 and slave station frame (sub-gantry) 109.On described main stand 103 laser oscillator, lens or the like are installed, the optical system 104 that will be used to carry out reparation is installed on described main stand 103, and described optical system 104 can move in X-direction.Described slave station frame 109 is equipped with sensing head 107 and feed detecting head 108, and described sensing head 107 and feed detecting head 108 can move on described X-direction together, and the configuration that faces with each other of described head.On described surface plate 101, bearing 105 is set, on described bearing 105, LCD substrate 106 is set, a plurality of (shown in the described example being six) LCD display panel 160 is installed on LCD substrate 106.
The OS tester function that has two kinds of main types.Described first function is to survey open circuit defect, and described second function is the circuit defect of surveying in the adjacent pattern.In open circuit defect is surveyed, at first will be positioned at the single probe of described feed probe 108 and contact, and high-frequency current will be delivered to the figure of described LCD substrate via described probe with the electrode of described LCD substrate (pad (pad)).Construct described sensing head 107 feasible galvanomagnetic effects and detect the current value that is under the contactless state by described figure.When the figure of described LCD substrate was in open-circuit condition, the electric current that flows through described figure was interrupted, and described electric current can not detect by described sensing head 107.And construct described sensing head 107 and make and move, thereby can determine the position of the open circuit defect in the described figure in described X-direction.
Detect circuit defect by following system, wherein, two probes that are arranged at described feed probe 108 are contacted with the adjacent electrode pad, apply two probes of voltage and break-through then, thereby by the short circuit of conduction current detection in adjacent pattern.
In the LCD substrate, on both direction, dispose pad usually, but can dispose described pad in all directions according to the type of LCD substrate.For detecting whole open circuits and circuit defect, described feed probe 108 must be touched whole electrode pads.Therefore, in aforesaid traditional equipment, described LCD substrate must be removed once and rotation from described bearing 105, is re-installed in described prosthetic appliance then.Figure 1B has shown a kind of like this state, and wherein, described LCD substrate is removed and is re-installed in described prosthetic appliance after turning 90 degrees revolving from described bearing 105.
Yet prior art has following shortcoming as mentioned above.
In prior art as mentioned above, the OS tester equipment that provides by step formerly detects the defective locations in the described FPD substrate in advance, moves described prosthetic appliance to described defective locations based on described detection data, and repairs described defective.And the OS tester that described reparation result is back to once more described step formerly is to confirm whether correctly to have repaired described defective.Yet the shortcoming of the type system is and the FPD substrate of once repairing once will be back to described step formerly, thereby increased working time and single products production time (tact time).
For overcoming above-mentioned shortcoming, some manufacturers have proposed to provide idea to prosthetic appliance with OS tester function in recent years.Yet, as being equipped with at as shown in Figure 1 existing in the prosthetic appliance of OS tester, the shortcoming of described existing system need to be following steps, promptly need described substrate is removed once and reinstalled to described LCD substrate from described bearing, thereby need have the runner equipment of outer buttons rotation mechanism etc., the installing zone that increases makes cost rise, and has further increased the single products production time.
Summary of the invention
The purpose of this invention is to provide a kind of prosthetic appliance, its can be effectively near the whole electrical wirings district on the LCD substrate, detect defective, and repair described defective and need not remove and reinstall described substrate.
Prosthetic appliance of the present invention comprises: platform is equipped with substrate thereon; First and second stands, it can move up in first party along the surface of described platform; First and second survey sensing unit, lay respectively at described first and second stands, and can move up in second party with respect to described stand, and described second direction and first direction intersect; And the reparation unit, being used to repair the unit under test of described substrate, described reparation unit is positioned at described first stand so that can move up in described second party; Wherein each described first and second detection sensing unit has: the pallet part, and it can move up in described second party; Be used for the unit under test of described substrate is applied the probe unit of voltage, and be used for sensing unit that the electric current that flows through described unit under test is detected, both are listed on the described pallet part for this; And the pallet driver element, be used on perpendicular to the direction on the surface of described platform, rotatably driving described pallet part around rotating shaft.
Can adopt a kind of like this structure, wherein, described reparation unit is installed in described first stand with the opposing side of second stand on; Survey sensing unit with described first and be arranged at facing on the side of second stand of described first stand; And with described second survey sensing unit be arranged at described second stand in the face of on the side of first stand.
Can adopt a kind of like this structure, wherein, described reparation unit is arranged at facing on the side of second stand of described first stand; Described first detection sensing unit and described reparation whole unit ground is arranged side by side; And with described second survey sensing unit be arranged at described second stand in the face of on the side of first stand.
Prosthetic appliance of the present invention comprises: platform is equipped with substrate thereon; First, second and the 3rd stand, it can move up in first party along the surface of described platform; First and second survey sensing unit, lay respectively at described first and second stands, and can move up in second party with respect to described stand, and described second direction and first direction intersect; And the reparation unit, being used to repair the unit under test of described substrate, described reparation unit is positioned at described the 3rd stand so that can move up in described second party; Wherein each described first and second detection sensing unit has: the pallet part, and it can move up in described second party; Be used for the unit under test of described substrate is applied the probe unit of voltage, and be used for sensing unit that the electric current that flows through described unit under test is detected, both are listed on the described pallet part for this; And the pallet driver element, be used on perpendicular to the direction on the surface of described platform, rotatably driving described pallet part around rotating shaft.
Can adopt a kind of like this structure, wherein, survey sensing unit with described first and be arranged at facing on the side of described second stand of described first stand; Survey sensing unit with described first and be arranged at facing on the side of described second stand of described first stand; Survey sensing unit with described second and be arranged at facing on the side of described first stand of described second stand; Described the 3rd stand is not configured between described first stand and described second stand; And with described reparation unit be arranged at described the 3rd stand in the face of on the side of described first and second stands.
Can also adopt a kind of like this structure, wherein, survey sensing unit with described first and be arranged at facing on the side of described second stand of described first stand; Survey sensing unit with described second and be arranged at facing on the side of described first stand of described second stand; Described the 3rd stand is not configured between described first stand and described second stand; And described reparation unit is arranged at described the 3rd stand with the opposing side of described first and second stands on.
Surface plate (surface plate) and platform driver element can also be set, wherein, this surface plate is provided with described platform and described first, second and the 3rd stand, and this platform driver element is used for respect to described surface plate at the first party described platform that moves up.
Can adopt a kind of like this structure, wherein, the unit under test of described substrate is arranged on the electrical wiring of substrate, and described first or second probe unit of surveying sensing unit contacts with the unit under test of described substrate at two points, and whether there is electric current to flow through described unit under test by applying voltage to detect, thereby detects the short circuit in the described electrical wiring at described two points.
Can adopt a kind of like this structure, wherein, the unit under test of described substrate is the electrical wiring that is arranged at substrate, described first and second any one probe unit of surveying in the sensing unit contact and provide electric current with the unit under test of described substrate on a point, whether another sensing unit of surveying sensing unit detects has electric current to flow through the electrical wiring that is connected with the unit under test of described substrate, thereby detects opening circuit in the described electrical wiring.
Can adopt a kind of like this structure, wherein, the unit under test of described substrate is the electrical wiring that is arranged at substrate, and described reparation the unit location of short circuit and the repair-deficiency of the described unit under test of laser beam irradiation.
Can adopt a kind of like this structure, wherein, the unit under test of described substrate is the electrical wiring that is arranged at substrate, and reparation is carried out with the off position of the described unit under test of laser beam irradiation and by chemical vapor deposition in described reparation unit.
Described substrate can be the flat pannel display substrate.In described flat pannel display substrate, data line and select lines can be connected up with matrix form.Described flat pannel display substrate can be the substrate of LCD or the substrate of plasma scope.
Restorative procedure of the present invention is a kind of method of utilizing described prosthetic appliance that the short circuit that is installed in the substrate on the platform is detected and repairs, and wherein said substrate has a plurality of electrical wirings unit that forms with described first and second directions within it; Wherein said restorative procedure comprises: any one in the mobile described first and second detection sensing units is to unit under test, when the short circuit in the line of described first direction being tested, determine the existence of short circuit by following process, described process promptly, after the described detection sensing unit that will be positioned at described unit under test rotates on the described first direction, probe unit is contacted at two points with the unit under test of described substrate, apply voltage at described two points, and detect the electric current that between described two points, flows through; When the short circuit in the line of described second direction being tested, determine the existence of short circuit by following steps, described step promptly, after the described detection sensing unit that will be positioned at described unit under test rotates on the described second direction, probe unit is contacted at two points with the unit under test of described substrate, apply voltage at described two points, and detect the electric current that between described two points, flows through; And when detecting short circuit, move described reparation unit to described location of short circuit and repair described short circuit.
Described substrate can be the flat pannel display substrate, wherein, data line and select lines is connected up with matrix form.
The optimum seeking site ground that applies voltage between two points that the probe that is used for described detection sensing unit contacts with the unit under test of described substrate is the adjacent electrode pad that is positioned at the terminal part of described data line or described select lines.
Described circuit defect can and be repaired with the laser beam irradiation location of short circuit in described reparation unit.
Restorative procedure of the present invention is to utilize described prosthetic appliance to detect and repair being installed in opening circuit in the substrate on the platform, described substrate has a plurality of electrical wirings unit that forms with first and second directions within it, and described restorative procedure comprises: with arbitrary unit under test that moves to of the described first and second detection sensing units; When opening circuit in the line of institute's first direction being tested, determine the existence of open defect by following process, described process promptly, the described detection sensing unit that will be positioned at described unit under test rotates on the described first direction, then probe unit is contacted at a point with the unit under test of described substrate, and provide electric current, then described another surveyed coordinate position on the second direction that sensing unit moves to described unit under test, and after rotating to another detection sensing unit on the first direction, flow through the magnitude of current that is positioned at the described electrical wiring under the described sensing unit by described sensing unit detection; When opening circuit in the line of institute's second direction being tested, determine the existence of open defect by following process, described process promptly, the described detection sensing unit that will be positioned at described unit under test rotates on the described second direction, then probe unit is contacted at a point with the unit under test of described substrate, and provide electric current, then described another surveyed coordinate position on the first direction that sensing unit moves to described unit under test, and after rotating to another detection sensing unit on second direction, flow through the magnitude of current that is positioned at the described electrical wiring under the described sensing unit by described sensing unit detection; When detecting when opening circuit, move described reparation unit to described off position and repair described opening circuit.
Described substrate can be the flat pannel display substrate, wherein, data line and select lines is connected up with matrix form.
Electric current is provided to being used to make that the optimum seeking site ground of the point that the probe of described detection sensing unit contacts with the unit under test of described substrate is the electrode pad that is positioned at the terminal part of described data line or described select lines.Described reparation unit can be repaired with the laser beam irradiation off position and by chemical vapor deposition.
Described prosthetic appliance of the present invention comprises: platform is equipped with substrate thereon; Stand, it can move up in first party along the surface of described platform; Survey sensing unit, be positioned at described stand, it can move up in second party with respect to described stand, and described second direction and described first direction intersect; And the reparation unit, being used to repair the unit under test of described substrate, described reparation unit is positioned at described stand so that can move up in described second party; Wherein said detection sensing unit has: the pallet part, and it can move up in described second party; Be used for the unit under test of described substrate is applied the probe unit of voltage, and be used for sensing unit that the electric current that flows through described unit under test is detected, both are listed on the described pallet part for this; And the pallet driver element, be used on perpendicular to the direction on the surface of described platform, rotatably driving described pallet part around rotating shaft.
Prosthetic appliance of the present invention comprises: platform is equipped with substrate thereon; First and second stands, it can move up in first party along the surface of described platform; Repair the unit, be used to repair the unit under test of described substrate, described reparation unit is positioned at described first stand so that can move up in described second party; And the detection sensing unit, being positioned at described second stand, it can move up in second party with respect to described second stand, and described second direction and described first direction intersect; Wherein said detection sensing unit has: the pallet part, and it can move up in described second party; Be used for the unit under test of described substrate is applied the probe unit of voltage, and be used for sensing unit that the electric current that flows through described unit under test is detected, both are listed on the described pallet part for this; And the pallet driver element, be used on perpendicular to the direction on the surface of described platform, rotatably driving described pallet part around rotating shaft.
Can adopt a kind of like this structure, wherein, the described unit under test of described substrate is the electrical wiring that is positioned at substrate, the probe unit of described detection sensing unit is contacted at two points with the described unit under test of described substrate, and between described two points, apply voltage and whether have electric current to flow through described unit under test, thereby detect the short circuit in the described electrical wiring to detect.
Can adopt a kind of like this structure, wherein, the described unit under test of described substrate is the electrical wiring that is positioned at substrate, the described reparation unit location of short circuit and the repair-deficiency of the described unit under test of laser beam irradiation.
Described substrate can be the flat pannel display substrate.In described flat pannel display substrate, data line and select lines can also be connected up with matrix form.Described flat pannel display substrate can also be the substrate of LCD or the substrate of plasma scope.
Restorative procedure of the present invention is a kind of method of utilizing described prosthetic appliance that the short circuit that is installed in the substrate on the platform is detected and repairs, and wherein said have a plurality of electrical wirings unit that forms with described first and second directions within it; Wherein said restorative procedure comprises: described detection sensing unit is moved to unit under test; When the short circuit in the line of described first direction being tested, determine the existence of short circuit by following process, described process promptly, after the described detection sensing unit that will be positioned at described unit under test rotates on the described first direction, probe unit is contacted at two points with the unit under test of described substrate, apply voltage at described two points, detect the electric current that between described two points, flows through then; When the short circuit in the line of described second direction being tested, determine the existence of short circuit by following process, described process promptly, after the described detection sensing unit that will be positioned at described unit under test rotates on the described second direction, probe unit is contacted at two points with the unit under test of described substrate, apply voltage at described two points, detect the electric current that between described two points, flows through then; And when detecting short circuit, mobile described reparation unit is to described location of short circuit and repair described short circuit.
Described substrate can be the flat pannel display substrate,, data line and select lines is carried out line with matrix form within it.
The optimum seeking site ground that two points that contact with the unit under test of described substrate at the probe that is used for described detection sensing unit apply voltage is the adjacent electrode pad that is positioned at the terminal part of described data line or described select lines.
The present invention can obtain a kind of prosthetic appliance of the OS of being equipped with tester function, and this prosthetic appliance is used for the open circuit defect of the electrical wiring of FPD substrate, circuit defect etc. are detected.In this equipment, the power supply probe unit supporting with sensing unit is integrated in the individual unit, described unit is installed on main stand and slave station frame, and described stand can center on the axle rotation perpendicular with described substrate, thereby make the direction of the described FPD to consider to have settled in it electrode pad near the electrode pad on (access) unit under test, and can carry out defect detection and repairing effectively.
Description of drawings
Figure 1A is the planimetric map that shows the existing prosthetic appliance be equipped with OS tester function, and Figure 1B has shown when the example of planar the LCD substrate being revolved the same configuration when turning 90 degrees, and arrange described figure with different directions on described substrate;
Fig. 2 is the planimetric map that shows according to the prosthetic appliance that is equipped with OS tester function of first embodiment of the invention, and wherein, Fig. 2 A has shown the OS test of gating figure on the LCD substrate, and Fig. 2 B has shown the OS test of datagraphic on the described LCD substrate;
Fig. 3 A is the skeleton view that has shown described first embodiment that observes from the front, and Fig. 3 B is the skeleton view that has shown described first embodiment that observes from behind;
Fig. 4 A is the synoptic diagram that has shown the structure of LCD substrate, and Fig. 4 B is the enlarged drawing of LCD panel;
Fig. 5 has shown the skeleton view of surveying the structure of sensing head;
Fig. 6 A is the planimetric map that has shown the operation of carrying out the described detection sensing head of open circuit defect test period, and Fig. 6 B is the planimetric map that has shown the operation of carrying out the described detection sensing head of circuit defect test period;
Fig. 7 is the planimetric map that has shown according to the prosthetic appliance that is equipped with OS tester function of second embodiment of the invention;
Fig. 8 A is the skeleton view that has shown described second embodiment that observes from the front, and Fig. 8 B is the skeleton view that has shown described second embodiment that observes from behind;
Fig. 9 is the planimetric map that has shown according to the described prosthetic appliance that is equipped with OS tester function of third embodiment of the invention;
Figure 10 is the skeleton view that has shown described the 3rd embodiment that observes from the front;
Figure 11 is the planimetric map that has shown according to the described prosthetic appliance that is equipped with OS tester function of fourth embodiment of the invention;
Figure 12 is the skeleton view that has shown described the 4th embodiment that observes from the front;
Figure 13 is the planimetric map that has shown according to the described prosthetic appliance that is equipped with short-circuit test device function of fifth embodiment of the invention; And
Figure 14 is the planimetric map that has shown according to the described prosthetic appliance that is equipped with short-circuit test device function of sixth embodiment of the invention.
Embodiment
Explain embodiments of the invention below with reference to described accompanying drawing.First embodiment of the invention at first is described.Fig. 2 A and 2B are the plan views that has shown present embodiment.Fig. 2 A has shown the OS test of the gating figure on the LCD substrate, and Fig. 2 B has shown the OS test of the datagraphic on the described LCD substrate.For convenience in explanation, in the drawings by setting X-axis and Y-axis shown in the arrow.The direction perpendicular with described X and Y-axis is the Z axle.
Shown in Fig. 2 A, in the prosthetic appliance of the described outfit OS of present embodiment tester, on surface plate 1, along two edges configuration guides 2, above described guide 2, main stand 3 is installed so that extend in described X-direction in described Y direction.Making up main stand 3 makes it possible to above described guide 2 moving along described y-axis shift.With the same manner, slave station frame 9 is installed on described guide 2 extending in described X-direction, and makes up it and make it possible on described guide 2 moving along described y-axis shift.Described surface plate 1 is the pedestal that is used for installing all unit on this equipment.
On described main stand 3, optical system 4 is set, and described optical system 4 can move along described main stand 3 on described X-direction.Described optical system 4 is a kind of optical units that are used to repair, and it is equipped with laser oscillator, lens etc.
Between two guides 2 on the described surface plate 1, be provided with the mobile support saddle 50 that can move along described Y direction, LCD substrate 6 that is described unit under test are installed on described mobile support saddle 50, and are moved described LCD substrate 6 by moving described mobile support saddle 50.Described LCD substrate has structure type as shown in Figure 4.
Fig. 4 is the synoptic diagram with LCD substrate 6 of active matrix TFT (thin film transistor (TFT)) structure.Shown in Fig. 4 A, described LCD substrate 6 is made up of a plurality of LCD panels 60 that are positioned on the glass substrate, and each LCD panel 60 is display boards.Fig. 4 B is the enlarged drawing of LCD panel 60.In described LCD panel 60, form the mesh wiring figure, wherein, arrange gating figure and datagraphic orthogonally.Gate pads is positioned at the end portion of described gating figure, and data pads is positioned at the end portion of described datagraphic, and described pad is to be used for the power pad that electricity drives described figure.
Shown in Fig. 2 A, the opposite side relative with described optical system 4 one sides that described main stand 3 has been installed on it installed slave station frame 9.With the opposition side of the optical system 4 of described main stand 3 on, will survey sensing head 10a and be installed on described main stand 3.And,, be installed on described slave station frame 9 will survey sensing head 10b in the face of the direction of described main stand 3 with the same manner.By providing a unit can obtain described detection sensing head 10a, 10b with sensing head and detecting head, wherein said sensing head promptly can be used for the status of electrically connecting of the figure of described LCD panel 60 is detected under the situation that need not contact, and described detecting head has two probes.Make up described detection sensing head 10a, 10b it can be moved together in described X-direction, and structure can rotate it in described XY plane.
Fig. 5 will be used to explain the structure of surveying sensing head.As shown in Figure 5, described detection sensing head has following structure, and wherein, sensing head 7 is positioned at identical back up pad 20 with detecting head 8, and described back up pad 20 is connected to the rotating mechanism 90 that is used for described detection sensing head, thereby described sensing head 7 and described detecting head 8 can be worked in coordination with rotation each other.Directly the described sensing head 7 of configuration makes its far-end not contact described LCD substrate on described LCD substrate, and described sensing head 7 detects the high-frequency current that is provided to the described figure on the described LCD substrate in the noncontact mode.Described detecting head 8 is provided with two probes 81,82, and it provides electric current by described pad to described figure.
Fig. 3 A is the skeleton view that aforesaid present embodiment is observed from the front, and Fig. 3 B is the skeleton view that has shown described first embodiment that observes from behind.In this explanation, the side that described optical system 4 has been installed on it is the front side of described prosthetic appliance, and is rear side with respect to its opposite side.As shown in Figure 3A, be provided with described guide 2 to its rear end from its front end along the edge of described surface plate 1, and, with the direction of described guide 2 quadratures, described main stand 3 and slave station frame 9 are set on described guide 2.Described main stand 3 one sides on the front side of described figure are provided with described optical system 4, and described slave station frame 9 one sides on the front side of described figure are provided with described detection sensing head 10b.Shown in Fig. 3 B, the opposition side of the described main stand 3 relative with described optical system 4 one sides have been installed thereon is provided with described detection sensing head 10a.
Next operation of the present invention is described.Utilize Fig. 6 that the operation of described sensing head 7 and detecting head 8 at first is described.Fig. 6 A has shown the test that is used for open circuit defect, and Fig. 6 B has shown the test that is used for circuit defect.
In Fig. 6 A, the described probe 81 that is provided with on the described detecting head 8 is connected to the high-frequency current circuit, high-frequency current provides to described datagraphic from described probe 81 by data pads.Within described sensing head 7, hold sensor electrode 71, and the high-frequency current that conducts to described datagraphic is detected by electric pathway to described datagraphic.In Fig. 6 A example shown, following state can appear, and wherein, a part of datagraphic opens circuit in the centre, form open circuit defect, and described sensing head 7 can not detect the high-frequency current that conducts to datagraphic.Yet, when from the breaking part of described datagraphic when described probe moves described sensing head 7, detect described high-frequency current, can determine not block in the described datagraphic.
At Fig. 6 B, apply voltage being arranged between described probe 81 on the described probe 8 and the probe 82, can measure resistance between described probe by the voltage and current of described probe.In as Fig. 6 B example shown, between datagraphic, form circuit defect, therefore resistance reduce, and can determine to exist short circuit then.When detecting circuit defect, can described circuit structure used high-frequency current circuit when being used for open defect be separated by switch.Described probe 81 and described probe 82 be equipped with can described Z-direction move so that with the contacted travel mechanism of the power pad of described LCD panel.
Next explanation utilizes the structure repair-deficiency shown in Fig. 2 A.In order to repair, described optical system 4 must be near the Zone Full of described LCD substrate.Therefore, at first described mobile support saddle 50 is moved to left end.Thereby described optical system 4 can be near the Zone Full of described LCD substrate.When not having mobile support saddle 50, must have extra moving area, it equals described main stand 3 and the combined width of described optical system 4 on described Y direction, thereby has increased the size of described equipment.Specifically, described mobile support saddle 50 has the effect that has reduced described equipment size.
Obtain defect information from described process formerly then.Described defect information comprises: the line number of the defective in described datagraphic and gating figure, defect coordinate information is used to specify the defect type information of open circuit defect or circuit defect and other information.Then, described main stand 3 moves based on described Y-axis defect coordinate information, and described optical system 4 is moved based on described X-axis defect coordinate information, and described optical system 4 moves to described defective locations.Further, when the defect type demonstration is circuit defect, cut at described location of short circuit by laser irradiation.When having open circuit defect, utilize the described open circuit parts of connection such as CVD (chemical vapor deposition), and repair described defective.When having defective in a plurality of positions, with the same manner at described a plurality of positions repair-deficiency.
Next the method that is used for the OS test after the circuit defect of repairing by described prosthetic appliance in the described gating figure is described.Suppose in described Y direction and form described gating figure.When carrying out OS when test, the Zone Full of described LCD substrate 6 must all can be approaching by described detection sensing head 10a and 10b.Therefore described mobile support saddle 50 moves to right-hand member.Thereby described detection sensing head 10a and 10b can be near the Zone Fulls of described LCD substrate 6.
Then, move described slave station frame 9 to Y-axis coordinate based on the defect information calculating by described process formerly.And described detection sensing head 10b is moved to the X-axis coordinate of the pad locations of calculating based on described defect information, then, probe 81,82 moved down along described Z-direction make each probe contact with different pads.Between described two probes 81,82, apply electric current, and calculate resistance between the described figure by the voltage and current between the described probe.When described resistance during, can determine to have open-circuit condition and repair successfully greater than predetermined threshold.When described resistance during less than described threshold value, it is unsuccessful can determining to exist short-circuit condition and described reparation.In this case, repeat described reparation operation.
Next the method that is used for the OS test behind the open circuit defect of repairing by described prosthetic appliance in the described gating figure is described.Move described slave station frame 9 to Y-axis coordinate based on the defect information calculating by described process formerly.Then, the described detection sensing head 10b that is installed on described slave station frame 9 is moved to the X-axis coordinate of the described pad locations of calculating based on described defect information, and the described probe 81 that will be connected with high frequency electric source moves down to contact the pad of described reparation figure in described Z-direction.The described detection sensing head 10a that will be installed on described main stand 3 then moves to the position of the residing reparation figure of described detection sensing head 10b along described X-axis.In described Y direction described main stand 3 is moved to described detection sensing head 10b, carry out described exploration operation.When correctly having repaired described defective this moment, can detect described high-frequency current have a few on the described defective patterns apart between (strokes), can determine that described reparation is successful.When on described defective patterns, detecting, can determine that described reparation is unsuccessful less than described high-frequency current.In this case, carry out described reparation operation once more.When moving described detection sensing head, axially go up the described probe of withdrawal along described Z and contact with the surface of described substrate to prevent described probe.
Next explanation is used for described datagraphic is carried out the method for OS test.In Fig. 2 A, form described datagraphic along described X-axis axle.When described detection sensing head 10a and 10b in described XY plane after left side spin turn 90 degrees, produce the state shown in Fig. 2 B, and, therefore can be near described datagraphic and data pads.By can check the reparation result of described circuit defect and open circuit defect in the mode identical with the method for the OS test that is used for described gating figure.
Type according to described LCD substrate, can arrange described data pads and described gate pads in the mode of multiple direction, but, can go up in any direction near described data pads and described gate pads by rotate described detection sensing head 10a, 10b on described XY plane.
Next the effect of present embodiment is described.In the present embodiment, described power supply probe and sensing head are integrated into the detection sensing head that is arranged on described main stand and the described slave station frame, and in described XY plane, described detection sensing head can rotate in the scope of 180 degree, thereby, need not remove described FPD substrate and just can test described line regardless of the direction of the electrode pad of described measured base plate.Each described main stand and slave station frame have single detection sensing head in the present embodiment, but a plurality of detection sensing heads also can be set.
Because rear side at described main stand, the optical system that described main stand just has been installed is thereon unified the opposite side of side, added that the described slave station frame of surveying sensing head being installed on it, just easily added OS tester function so only increased the size of existing prosthetic appliance a little.Further, by surveying the rear that sensing head is installed on described main stand, and forward direction moves the described bearing that is used for the described FPD substrate of clamping with the back to ground on described Y direction, make when using described repair function, can to move forward described support position, and when the described OS tester function of use, can move described support position backward.Thereby can preserve compatibility with the feature of described existing repair function.
Next prosthetic appliance according to the equipment OS tester function of second embodiment of the invention is described.Fig. 7 is the planimetric map that has shown described present embodiment.As shown in Figure 7, except that described slave station frame 9, present embodiment also has another slave station frame 91 in the back of described main stand 3.The described detection sensing head 10a that is installed on described main stand 3 in Fig. 2 also is installed on described slave station frame 91, but identical among other aspects of described structure and Fig. 2.Thereby use the identical structural detail of identical Reference numeral indication, and no longer it is done and specify.The basic operation of present embodiment is identical with the operation of first embodiment.Except that the effect of described first embodiment, the present invention has following effect, wherein, need not change the repairing mechanism of described main stand, just can obtain OS tester function by adding another slave station frame, and can add OS tester function at an easy rate.Fig. 8 A is the skeleton view that has shown described second embodiment that observes from the front, and Fig. 8 B is the skeleton view that has shown described second embodiment that observes from behind; Fig. 8 is identical with Fig. 3 except the feature of present embodiment as mentioned above, thus use the identical structural detail of identical description of reference numerals, and be not elaborated.
Next the third embodiment of the present invention is described.Fig. 9 has shown the planimetric map of present embodiment.As shown in Figure 9, present embodiment has following structure, wherein, in the place ahead of described main stand 3 two slave station framves 9,91 is installed, and other aspects are with embodiment illustrated in fig. 7 identical.Therefore use the identical identical structural detail of Reference numeral indication, and it is not done and specify.The basic operation of present embodiment is identical with the operation of second embodiment.Figure 10 has shown the skeleton view of observing present embodiment from the front.Because except the feature of aforesaid present embodiment, Figure 10 is identical with Fig. 8, thus use identical Reference numeral to indicate identical structural detail, and it is not done and specify.
Next the fourth embodiment of the present invention is described.Figure 11 is the planimetric map that has shown present embodiment.As shown in figure 11, present embodiment has following structure, wherein, described slave station frame 9 is installed in the place ahead of described main stand 3, and described detection sensing head 10b is installed on the described optical system 4 of described main stand 3.Because other aspects of present embodiment are identical with first embodiment, thus the identical identical structural detail of Reference numeral indication used, and it is not elaborated.Basically operation and the effect with described first embodiment is identical with effect in the operation of present embodiment.Figure 12 is the skeleton view that has shown from the present embodiment of observing previously.Because except the feature of aforesaid present embodiment, Figure 12 is identical with Fig. 3, thus the identical identical structural detail of Reference numeral indication used, and it is not elaborated.
Shown in Figure 13 and 14, when described prosthetic appliance only is provided with single detection sensing head, need not reinstalls described measured base plate and also can detect circuit defect.Figure 13 and 14 has shown the of the present invention the 5th and the 6th embodiment respectively.Except described slave station frame and described detection sensing head were not installed, structure shown in Figure 13 was identical with structure shown in Fig. 2 A.Except the described detection sensing head that is not installed on described main stand, structure shown in Figure 14 is identical with structure shown in Fig. 2 B.Therefore use the identical identical structural detail of Reference numeral indication, and it is not done and specify.The operation of Figure 13 and 14 illustrated embodiment and effect with utilize embodiment illustrated in fig. 2 detect identical with the situation of repairing substrate internal short-circuit defective.
The present invention can be applicable to the equipment that is used for making LCD panel, plasma display panel and other FPD.
Claims (32)
1. prosthetic appliance comprises:
Platform is equipped with substrate thereon;
First and second stands, it can move up in first party along the surface of described platform;
First and second survey sensing unit, lay respectively at described first and second stands, and can move up in second party with respect to described stand, and described second direction and first direction intersect; And
Repair the unit, be used to repair the unit under test of described substrate, described reparation unit is positioned at described first stand so that can move up in described second party; Wherein
Each described first and second detection sensing unit has:
The pallet part, it can move up in described second party;
Be used for the unit under test of described substrate is applied the probe unit of voltage, and be used for sensing unit that the electric current that flows through described unit under test is detected, both are listed on the described pallet part for this; And
The pallet driver element is used for rotatably driving described pallet part around rotating shaft on perpendicular to the direction on the surface of described platform.
2. according to the described prosthetic appliance of claim 1, wherein:
Described reparation unit is installed in described first stand with the opposing side of second stand on;
Survey sensing unit with described first and be arranged at facing on the side of second stand of described first stand; And
Survey sensing unit with described second and be arranged at facing on the side of first stand of described second stand.
3. according to the described prosthetic appliance of claim 1, wherein:
Described reparation unit is arranged at facing on the side of second stand of described first stand;
Described first detection sensing unit and described reparation whole unit ground is arranged side by side; And
Survey sensing unit with described second and be arranged at facing on the side of first stand of described second stand.
4. prosthetic appliance comprises:
Platform is equipped with substrate thereon;
First, second and the 3rd stand, it can move up in first party along the surface of described platform;
First and second survey sensing unit, lay respectively at described first and second stands, and can move up in second party with respect to described stand, and described second direction and first direction intersect; And
Repair the unit, be used to repair the unit under test of described substrate, described reparation unit is positioned at described the 3rd stand so that can move up in described second party; Wherein
Each described first and second detection sensing unit has:
The pallet part, it can move up in described second party;
Be used for the unit under test of described substrate is applied the probe unit of voltage, and be used for sensing unit that the electric current that flows through described unit under test is detected, both are listed on the described pallet part for this; And
The pallet driver element is used for rotatably driving described pallet part around rotating shaft on perpendicular to the direction on the surface of described platform.
5. according to the described prosthetic appliance of claim 4, wherein:
Survey sensing unit with described first and be arranged at facing on the side of described second stand of described first stand;
Survey sensing unit with described first and be arranged at facing on the side of described second stand of described first stand;
Survey sensing unit with described second and be arranged at facing on the side of described first stand of described second stand;
Described the 3rd stand is not configured between described first stand and described second stand; And
Described reparation unit is arranged at facing on the side of described first and second stands of described the 3rd stand.
6. according to the described prosthetic appliance of claim 4, wherein:
Survey sensing unit with described first and be arranged at facing on the side of described second stand of described first stand;
Survey sensing unit with described second and be arranged at facing on the side of described first stand of described second stand;
Described the 3rd stand is not configured between described first stand and described second stand; And
Described reparation unit is arranged at described the 3rd stand with the opposing side of described first and second stands on.
7. according to the arbitrary described prosthetic appliance of claim 1 to 6, comprise further:
Surface plate, it is provided with described platform and described first, second and the 3rd stand; And
The platform driver element is used for respect to described surface plate at the described first party described platform that moves up.
8. according to the arbitrary described prosthetic appliance of claim 1 to 7, wherein:
The unit under test of described substrate is the electrical wiring that is positioned at substrate; And
Described first or second probe unit of surveying sensing unit contacts at two points with the unit under test of described substrate, and apply voltage at described two points and whether have electric current to flow through described unit under test, thereby detect the short circuit in the described electrical wiring to detect.
9. according to the arbitrary described prosthetic appliance of claim 1 to 8, wherein:
The unit under test of described substrate is the electrical wiring that is positioned at substrate; And
Described first and second any one probe unit of surveying sensing unit contact and provide electric current with the unit under test of described substrate at a point, whether another sensing unit of surveying sensing unit detects has electric current to flow through the electrical wiring that is connected with the described unit under test of described substrate, thereby detects opening circuit in the described electrical wiring.
10. according to the arbitrary described prosthetic appliance of claim 1 to 9, wherein:
The unit under test of described substrate is the electrical wiring that is positioned at substrate; And
The described reparation unit location of short circuit and the repair-deficiency of the described unit under test of laser beam irradiation.
11. according to the arbitrary described prosthetic appliance of claim 1 to 10, wherein:
The unit under test of described substrate is the electrical wiring that is positioned at substrate; And
Described reparation unit is repaired with the off position of the described unit under test of laser beam irradiation and by chemical vapor deposition.
12. according to the arbitrary described prosthetic appliance of claim 1 to 11, wherein, described substrate is the flat pannel display substrate.
13., wherein, in described flat pannel display substrate, data line and select lines are connected up with matrix form according to the described prosthetic appliance of claim 12.
14. according to the described prosthetic appliance of claim 12, wherein, described flat pannel display substrate is the substrate of LCD or the substrate of plasma scope.
15. restorative procedure, utilization detects and repairs the short circuit that is installed in the substrate on the platform according to the arbitrary described prosthetic appliance of claim 1 to 7, described substrate has a plurality of electrical wirings unit that forms with first and second directions within it, and described restorative procedure comprises:
Arbitrary unit under test that moves to the described first and second detection sensing units;
When the short circuit in the line of described first direction being tested, determine the existence of short circuit by following process, described process promptly, after the described detection sensing unit that will be positioned at described unit under test rotates on the described first direction, probe unit is contacted at two points with the unit under test of described substrate, apply voltage at described two points, then, detect the electric current that between described two points, flows through;
When the short circuit in the line of described second direction being tested, determine the existence of short circuit by following process, described process promptly, after the described detection sensing unit that will be positioned at described unit under test rotates on the described second direction, probe unit is contacted at two points with the unit under test of described substrate, apply voltage at described two points, detect the electric current that between described two points, flows through then;
When detecting short circuit, mobile described reparation unit is to described location of short circuit and repair described short circuit.
16. according to the described restorative procedure of claim 15, wherein, described substrate is the flat pannel display substrate, in this flat pannel display substrate data line and select lines is connected up with matrix form.
17. according to the described restorative procedure of claim 16, wherein, two points that contact with the unit under test of described substrate at the probe that is used for described detection sensing unit position of applying voltage is the adjacent electrode pad that is positioned at the terminal part of described data line or described select lines.
18. restorative procedure, be used to utilize arbitrary described prosthetic appliance to detect and repair to being installed in opening circuit in the substrate on the platform according to claim 1 to 7, described substrate has a plurality of electrical wirings unit that forms with first and second directions within it, and described restorative procedure comprises:
Arbitrary unit under test that moves to the described first and second detection sensing units;
When opening circuit in the line of institute's first direction being tested, determine the existence of open defect by following process, described process promptly, the described detection sensing unit that will be positioned at described unit under test rotates on the described first direction, then probe unit is contacted at a point with the unit under test of described substrate, and provide electric current, then described another surveyed coordinate position on the second direction that sensing unit moves to described unit under test, and after rotating to another detection sensing unit on the first direction, flow through the magnitude of current that is positioned at the described electrical wiring under the described sensing unit by described sensing unit detection;
When opening circuit in the line of institute's second direction being tested, determine the existence of open defect by following process, described process promptly, the described detection sensing unit that will be positioned at described unit under test rotates on the described second direction, then probe unit is contacted at a point with the unit under test of described substrate, and provide electric current, then described another surveyed coordinate position on the first direction that sensing unit moves to described unit under test, and after rotating to another detection sensing unit on second direction, flow through the magnitude of current that is positioned at the described electrical wiring under the described sensing unit by described sensing unit detection;
When detecting when opening circuit, move described reparation unit to described off position and repair described opening circuit.
19. according to the described restorative procedure of claim 18, wherein, described substrate is the flat pannel display substrate, in this flat pannel display substrate data line and select lines is connected up with matrix form.
20. according to the described restorative procedure of claim 19, wherein, providing the position of the point that contacts with the unit under test of described substrate to the probe of described detection sensing unit with electric current is the electrode pad that is positioned at terminal part described data line or described select lines.
21. according to the arbitrary described restorative procedure of claim 15 to 17, wherein, described reparation unit is with the laser beam irradiation location of short circuit and repair described circuit defect.
22. according to the arbitrary described restorative procedure of claim 18 to 20, wherein, described reparation unit is repaired with the laser beam irradiation off position and by chemical vapor deposition.
23. a prosthetic appliance comprises:
Platform is equipped with substrate thereon;
Stand, it can move up in first party along the surface of described platform;
Survey sensing unit, be positioned at described stand, it can move up in second party with respect to described stand, and described second direction and described first direction intersect; And
Repair the unit, be used to repair the unit under test of described substrate, described reparation unit is positioned at described stand so that can move up in described second party; Wherein
Described detection sensing unit has:
The pallet part, it can move up in described second party;
Be used for the unit under test of described substrate is applied the probe unit of voltage, and be used for sensing unit that the electric current that flows through described unit under test is detected, both are listed on the described pallet part for this; And
The pallet driver element is used for rotatably driving described pallet part around rotating shaft on perpendicular to the direction on the surface of described platform.
24. a prosthetic appliance comprises:
Platform is equipped with substrate thereon;
First and second stands, it can move up in first party along the surface of described platform;
Repair the unit, be used to repair the unit under test of described substrate, described reparation unit is positioned at described first stand so that can move up in described second party; And
Survey sensing unit, be positioned at described second stand, it can move up in second party with respect to described second stand, and described second direction and described first direction intersect; Wherein
Described detection sensing unit has:
The pallet part, it can move up in described second party;
Be used for the unit under test of described substrate is applied the probe unit of voltage, and be used for sensing unit that the electric current that flows through described unit under test is detected, both are listed on the described pallet part for this; And
The pallet driver element is used for rotatably driving described pallet part around rotating shaft on perpendicular to the direction on the surface of described platform.
25. according to claim 23 or 24 described prosthetic appliances, wherein:
The unit under test of described substrate is the electrical wiring that is positioned at substrate; And
Whether the probe unit of described detection sensing unit contacts at two points with the unit under test of described substrate, and apply voltage at described two points and have electric current to flow through described unit under test to detect, thereby detects the short circuit in the described electrical wiring.
26. according to the arbitrary described prosthetic appliance of claim 23 to 25, wherein:
The unit under test of described substrate is the electrical wiring that is positioned at substrate; And
The described reparation unit location of short circuit and the repair-deficiency of the described unit under test of laser beam irradiation.
27. according to the arbitrary described prosthetic appliance of claim 23 to 26, wherein, described substrate is the flat pannel display substrate.
28., wherein, in described flat pannel display substrate, data line and select lines are connected up with matrix form according to the described prosthetic appliance of claim 27.
29. according to the described prosthetic appliance of claim 27, wherein, described flat pannel display substrate is the substrate of LCD or the substrate of plasma scope.
30. restorative procedure, be used to utilize according to claim 23 or 24 described prosthetic appliances the short circuit that is installed in the substrate on the platform is detected and repairs, described substrate has a plurality of electrical wirings unit that forms with first and second directions within it, and described restorative procedure comprises:
Described detection sensing unit is moved to unit under test;
When the short circuit in the line of described first direction being tested, determine the existence of short circuit by following process, described process promptly, after the described detection sensing unit that will be positioned at described unit under test rotates on the described first direction, probe unit is contacted at two points with the unit under test of described substrate, apply voltage at described two points, detect the electric current that between described two points, flows through then;
When the short circuit in the line of described second direction being tested, determine the existence of short circuit by following process, described process promptly, after the described detection sensing unit that will be positioned at described unit under test rotates on the described second direction, probe unit is contacted at two points with the unit under test of described substrate, apply voltage at described two points, detect the electric current that between described two points, flows through then; And
When detecting short circuit, mobile described reparation unit is to described location of short circuit and repair described short circuit.
31. according to the described restorative procedure of claim 30, wherein, described substrate is the flat pannel display substrate, in this flat pannel display substrate data line and select lines is connected up with matrix form.
32. according to the described restorative procedure of claim 31, wherein, two points that contact with the unit under test of described substrate at the probe that is used for described detection sensing unit position of applying voltage is the adjacent electrode pad that is positioned at the terminal part of described data line or described select lines.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
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| JP2006028764A JP2007206641A (en) | 2006-02-06 | 2006-02-06 | Repair device and method |
| JP2006028764 | 2006-02-06 | ||
| JP2006-028764 | 2006-02-06 |
Publications (2)
| Publication Number | Publication Date |
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| CN101017256A true CN101017256A (en) | 2007-08-15 |
| CN101017256B CN101017256B (en) | 2011-03-30 |
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| CN2007100067919A Expired - Fee Related CN101017256B (en) | 2006-02-06 | 2007-02-06 | Repair device and repair method |
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| JP (1) | JP2007206641A (en) |
| KR (1) | KR100868471B1 (en) |
| CN (1) | CN101017256B (en) |
| TW (1) | TWI334030B (en) |
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| CN102236032A (en) * | 2010-05-07 | 2011-11-09 | 北京京东方光电科技有限公司 | Array detection equipment |
| CN102554460A (en) * | 2010-12-27 | 2012-07-11 | 欧姆龙株式会社 | Laser processing device |
| CN103744201A (en) * | 2013-12-31 | 2014-04-23 | 深圳市华星光电技术有限公司 | Liquid crystal display panel repair method and repair system |
| CN104280904A (en) * | 2014-09-26 | 2015-01-14 | 京东方科技集团股份有限公司 | Array substrate detecting head and device and array substrate detecting method |
| CN104880841A (en) * | 2015-05-18 | 2015-09-02 | 合肥京东方光电科技有限公司 | Substrate repairing device and repairing method |
| CN104991391A (en) * | 2015-07-30 | 2015-10-21 | 武汉华星光电技术有限公司 | Repair method for display panel |
| US9297074B2 (en) | 2013-12-31 | 2016-03-29 | Shenzhen China Star Optoelectronics Technology Co., Ltd | Liquid crystal display panel repairing method and repairing system |
| CN109116591A (en) * | 2017-06-26 | 2019-01-01 | 深圳市宇顺工业智能科技有限公司 | A kind of LCD liquid crystal display screen detection method |
| CN113203960A (en) * | 2021-04-26 | 2021-08-03 | 深圳市华星光电半导体显示技术有限公司 | Open-circuit and short-circuit testing device and method |
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| JP4680082B2 (en) * | 2006-02-09 | 2011-05-11 | 日鐵住金溶接工業株式会社 | Flux-cored wire for gas shielded arc welding |
| KR101060472B1 (en) * | 2007-11-30 | 2011-08-29 | 엘지디스플레이 주식회사 | Defective cell repair method of LCD panel |
| KR100908327B1 (en) * | 2007-12-28 | 2009-07-17 | 주식회사 코윈디에스티 | Thin film forming device using laser |
| KR100909959B1 (en) * | 2008-01-28 | 2009-07-30 | 참앤씨(주) | Apparatus and method for lcd panel repair |
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| JP5206979B2 (en) * | 2009-03-13 | 2013-06-12 | オムロン株式会社 | Method for forming thin film by laser CVD and gas window suitable for the method |
| KR101317173B1 (en) | 2011-12-19 | 2013-10-15 | 참엔지니어링(주) | Apparatus for testing and repairing of substrate |
| KR101553290B1 (en) | 2015-07-01 | 2015-09-16 | (주)넥스틴 | system for inspection and repair for substrate of OLED display |
| TWI634339B (en) * | 2017-11-21 | 2018-09-01 | 興城科技股份有限公司 | Method and apparatus for testing a tft panel |
| CN114035384B (en) * | 2021-10-27 | 2023-09-01 | 滁州惠科光电科技有限公司 | Array substrate circuit repairing method and device and array substrate |
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- 2007-02-05 KR KR1020070011746A patent/KR100868471B1/en not_active IP Right Cessation
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| CN102236032A (en) * | 2010-05-07 | 2011-11-09 | 北京京东方光电科技有限公司 | Array detection equipment |
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| CN103744201A (en) * | 2013-12-31 | 2014-04-23 | 深圳市华星光电技术有限公司 | Liquid crystal display panel repair method and repair system |
| WO2015100796A1 (en) * | 2013-12-31 | 2015-07-09 | 深圳市华星光电技术有限公司 | Liquid crystal display panel repairing method and repairing system |
| US9297074B2 (en) | 2013-12-31 | 2016-03-29 | Shenzhen China Star Optoelectronics Technology Co., Ltd | Liquid crystal display panel repairing method and repairing system |
| CN104280904A (en) * | 2014-09-26 | 2015-01-14 | 京东方科技集团股份有限公司 | Array substrate detecting head and device and array substrate detecting method |
| CN104880841A (en) * | 2015-05-18 | 2015-09-02 | 合肥京东方光电科技有限公司 | Substrate repairing device and repairing method |
| CN104880841B (en) * | 2015-05-18 | 2018-05-25 | 合肥京东方光电科技有限公司 | Substrate prosthetic device and restorative procedure |
| CN104991391A (en) * | 2015-07-30 | 2015-10-21 | 武汉华星光电技术有限公司 | Repair method for display panel |
| CN109116591A (en) * | 2017-06-26 | 2019-01-01 | 深圳市宇顺工业智能科技有限公司 | A kind of LCD liquid crystal display screen detection method |
| CN113203960A (en) * | 2021-04-26 | 2021-08-03 | 深圳市华星光电半导体显示技术有限公司 | Open-circuit and short-circuit testing device and method |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20070080231A (en) | 2007-08-09 |
| JP2007206641A (en) | 2007-08-16 |
| TWI334030B (en) | 2010-12-01 |
| CN101017256B (en) | 2011-03-30 |
| TW200734656A (en) | 2007-09-16 |
| KR100868471B1 (en) | 2008-11-12 |
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