CN104280904A - Array substrate detecting head and device and array substrate detecting method - Google Patents
Array substrate detecting head and device and array substrate detecting method Download PDFInfo
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- CN104280904A CN104280904A CN201410505974.5A CN201410505974A CN104280904A CN 104280904 A CN104280904 A CN 104280904A CN 201410505974 A CN201410505974 A CN 201410505974A CN 104280904 A CN104280904 A CN 104280904A
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- array
- base palte
- detection head
- array base
- equipment
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
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- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Computer Hardware Design (AREA)
- Theoretical Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
Abstract
The invention provides an array substrate detecting head and device and an array substrate detecting method and belongs to the field of array circuit detecting. The array substrate detecting head is used for detecting a plurality of array circuits on an array substrate and comprises a detecting head body, a probe component and a detecting circuit. The probe component is disposed on the detecting head body and used for loading testing signals to the signal endpoints of the array circuits. The detecting circuit is disposed on the detecting head body and used for detecting the testing signals transmitted by the array circuits. By the array substrate detecting head, omnibearing testing of the array circuits on the substrate can be achieved, and loss caused by collision of detecting heads and probe frames is avoided.
Description
Technical field
The present invention relates to array circuit detection field, refer to a kind of array base palte detection head and pick-up unit, array base palte detection method especially.
Background technology
In the manufacturing process of thin-film transistor LCD device, by mask-exposure technology conventional in semiconductor, form thin film transistor array circuit on the glass substrate, the quality of array circuit directly determines the quality of thin-film transistor LCD device, and therefore the detection of pair array circuit also just becomes the important procedure in manufacturing process.
As shown in Figure 1, prior art is when pair array circuit detects, be placed on tester table 4 with the glass substrate of array circuit and array base palte 5, tester table 4 is provided with and detects framework 3, detect on framework 3 and be provided with prober frame 2, the probe that prober frame 2 is installed contacts with the signal input part in array circuit, and test signal is by the shorting pin loaded of prober frame 2 in array circuit, and detection head 8 pair array circuit as shown in Figure 2 detects afterwards.
In actual production, because different liquid crystal display product arranged distribution is different, need the prober frame buying different model to realize test, carry out needing the prober frame changing respective model to meet when testing and switch at different liquid crystal display product and detect needs, workload is larger; And partial array circuit can be detected framework and cover, and causes detecting; When detecting in addition, the distance of detection head and prober frame is very near sometimes, the interference of detection head and prober frame easily occurs, causes the damage of expensive detection head or the damage of miscellaneous part.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of array base palte detection head and pick-up unit, array base palte detection method, omnibearing test can be carried out to the array circuit on substrate, and avoid detection head and prober frame and to collide the loss caused.
For solving the problems of the technologies described above, embodiments of the invention provide technical scheme as follows:
On the one hand, provide a kind of array base palte detection head, the multiple array circuits in array substrate detect, and described array base palte detection head comprises:
Detection head body;
Be arranged on described detection head body, for loading the probe assembly of test signal to the signal end of described array circuit;
Be arranged on described detection head body, for detecting the testing circuit of the test signal that described array circuit transmits.
Further, described probe assembly is made up of at least one probe module, and each probe module comprises:
For obtaining the signal acquiring unit of test signal;
The probe structure of the predetermined number be connected with described signal acquiring unit.
Further, described probe structure comprises:
Be provided with the cylinder of air pipe interface;
Be positioned at the piston of described cylinder interior, between described piston and described cylinder, form an enclosure space;
Be positioned at the spring of described enclosure space, one end of described spring is fixed on piston, and the other end is fixed on the end of described cylinder;
Be arranged on described piston, the probe be positioned at outside described enclosure space, described probe is connected with described signal acquiring unit by signal lead.
On the other hand, provide a kind of array substrate detecting device, comprise above-mentioned array base palte detection head, described pick-up unit also comprises:
For placing the tester table of array base palte to be tested;
Be arranged on described tester table, for controlling the mobile Control Component of described array base palte detection head movement on equipment X-axis, equipment Y-axis and equipment Z axis.
Further, described mobile Control Component comprises:
The support on described tester table is arranged on along equipment Y direction;
Along equipment X-direction arrange on the bracket, can on the bracket along the support bar of equipment Y direction movement;
Along the setting of equipment Z-direction, the first end expansion link that be connected removable with described support bar, described expansion link can move along described support bar;
Wherein, described array base palte detection head is fixed on the second end of described expansion link.
Further, described support is provided with along the arrangement of equipment Y direction, the first relative guide rail and the second guide rail, described first guide rail and the second guide rail are respectively arranged with the first slide block and the second slide block;
The first end of described support bar is fixed on described first slide block, and the second end of described support bar is fixed on described second slide block.
Further, described support bar is provided with the 3rd guide rail along the arrangement of equipment X-direction, described 3rd guide rail is provided with the 3rd slide block, and the first end of described expansion link is fixed on described 3rd slide block.
There is provided a kind of array base palte detection method on the one hand again, be applied to above-mentioned pick-up unit, described detection method comprises:
Array base palte to be tested is placed on described tester table;
The multiple array circuits of described array substrate detecting device to described array base palte are utilized to test one by one.
Further, describedly utilize described array substrate detecting device to carry out test one by one to multiple array circuits of described array base palte to comprise:
Step a: described array base palte detection head is moved to above an array circuit do not detected by described mobile Control Component, and by described mobile Control Component, described array base palte detection head is contacted with described array circuit;
Step b: load test signal to the signal end on described array circuit by described probe assembly;
Step c: the test signal being detected the transmission of described array circuit by described testing circuit;
Repeat above-mentioned steps a-c, until complete detection to all array circuits on described array base palte.
Further, described step a comprises:
Control the movement of described support bar in equipment Y direction, make described support bar move to directly over described array circuit;
Control the movement of described expansion link in equipment X-direction, make described expansion link move to directly over described array circuit;
Control the flexible of described expansion link, the array base palte detection head being positioned at described expansion link end contacts with described array circuit.
Embodiments of the invention have following beneficial effect:
In such scheme, array base palte detection head comprises and is arranged on detection head body, for loading the probe assembly of test signal to the signal end of array circuit, also comprise and be arranged on detection head body, for the testing circuit of the test signal that detection arrays circuit transmits, the present invention does not re-use to be arranged on and detects probe on framework to array circuit load signal, but by being arranged on probe assembly on detection head body to array circuit load signal, solve the prober frame carrying out needing when testing and switch to change respective model at different liquid crystal display product, partial array circuit is detected framework and covers the problem causing cannot carrying out detecting, omnibearing test can be carried out to the array circuit on substrate, and avoid detection head and prober frame to collide the loss caused.
Accompanying drawing explanation
Fig. 1 is the structural representation of existing array substrate detecting device;
Fig. 2 is the structural representation of existing detection head;
Fig. 3 is the structural representation of embodiment of the present invention array substrate detecting device;
Fig. 4 is the structural representation of embodiment of the present invention array base palte detection head;
Fig. 5 is the schematic diagram of embodiment of the present invention probe structure.
Reference numeral
1 equipment Y-axis; 2 prober frame; 3 detect framework; 4 tester tables; 5 array base paltes; 6 equipment X-axis; 7 equipment Z axis; 8 detection heads of the prior art; The detection head of 81 embodiment of the present invention; 9 probe structures; 10 probe assemblies; Signal lead on 11 probe structures; Spring in 12 probe structures; 13 air pipe interfaces; 14 pistons; 15 probes; 16 detection head bodies; 17 testing circuits.
Embodiment
For embodiments of the invention will be solved technical matters, technical scheme and advantage clearly, be described in detail below in conjunction with the accompanying drawings and the specific embodiments.
Embodiments of the invention provide a kind of array base palte detection head and pick-up unit, array base palte detection method, can carry out omnibearing test to the array circuit on substrate, and avoid detection head and prober frame and to collide the loss caused.
Embodiments provide a kind of array base palte detection head, the multiple array circuits in array substrate detect, and as shown in Figure 3, described array base palte detection head comprises:
Detection head body 16;
Be arranged on described detection head body 16, for loading the probe assembly 10 of test signal to the signal end of described array circuit;
Be arranged on described detection head body 16, for detecting the testing circuit 17 of the test signal that described array circuit transmits.
Array base palte detection head of the present invention comprises and is arranged on detection head body, for loading the probe assembly of test signal to the signal end of array circuit, also comprise and be arranged on detection head body, for the testing circuit of the test signal that detection arrays circuit transmits, the present invention does not re-use to be arranged on and detects probe on framework to array circuit load signal, but by being arranged on probe assembly on detection head body to array circuit load signal, solve the prober frame carrying out needing when testing and switch to change respective model at different liquid crystal display product, partial array circuit is detected framework and covers the problem causing cannot carrying out detecting, omnibearing test can be carried out to the array circuit on substrate, and avoid detection head and prober frame to collide the loss caused.
Further, because of when actual product designs need by different signal loading to array circuit, therefore probe can be made module, to tackle the product of more polytypic, particularly, probe assembly is made up of at least one probe module, as shown in Figure 3, each probe module 10 comprises:
For obtaining the signal acquiring unit of test signal;
The probe structure 9 of the predetermined number be connected with signal acquiring unit.
Probe structure can be designed to add spring controlled telescopic probe by gas, and particularly, as shown in Figure 4, probe structure comprises:
Be provided with the cylinder of air pipe interface 13;
Be positioned at the piston 14 of cylinder interior, between piston 14 and cylinder, form an enclosure space;
Be positioned at the spring 12 of enclosure space, one end of spring 12 is fixed on piston 14, and the other end is fixed on the end of cylinder;
Be arranged on piston 14, the probe 15 be positioned at outside enclosure space, probe 15 is connected with signal acquiring unit by signal lead 11.
The embodiment of the present invention additionally provides a kind of array substrate detecting device, and as described in Figure 5, this array substrate detecting device comprises above-mentioned array base palte detection head 81, and this pick-up unit also comprises:
For placing the tester table 4 of array base palte 5 to be tested;
Be arranged on tester table 4, for controlling the mobile Control Component of array base palte detection head movement on equipment X-axis 6, equipment Y-axis 1 and equipment Z axis 7.
In array substrate detecting device of the present invention, array base palte detection head comprises and is arranged on detection head body, for loading the probe assembly of test signal to the signal end of array circuit, also comprise and be arranged on detection head body, for the testing circuit of the test signal that detection arrays circuit transmits, the present invention does not re-use to be arranged on and detects probe on framework to array circuit load signal, but by being arranged on probe assembly on detection head body to array circuit load signal, solve the prober frame carrying out needing when testing and switch to change respective model at different liquid crystal display product, partial array circuit is detected framework and covers the problem causing cannot carrying out detecting, omnibearing test can be carried out to the array circuit on substrate, and avoid detection head and prober frame to collide the loss caused.
Particularly, mobile Control Component comprises:
The support 18 on tester table 4 is arranged on along equipment Y direction;
Along equipment X-direction arrange on mount 18, can on mount 18 along the support bar 19 of equipment Y direction movement;
Along the setting of equipment Z-direction, the first end expansion link 20 that be connected removable with support bar 19, expansion link 20 can move along support bar 19;
Wherein, described array base palte detection head 81 is fixed on the second end of described expansion link 20.
Further, described support can be provided with along the arrangement of equipment Y direction, the first relative guide rail and the second guide rail, described first guide rail and the second guide rail are respectively arranged with the first slide block and the second slide block; The first end of described support bar is fixed on described first slide block, and the second end of described support bar is fixed on described second slide block.
Further, described support bar can be provided with the 3rd guide rail along the arrangement of equipment X-direction, described 3rd guide rail is provided with the 3rd slide block, and the first end of described expansion link is fixed on described 3rd slide block.
The embodiment of the present invention additionally provides a kind of array base palte detection method, is applied to above-mentioned pick-up unit, and described detection method comprises:
Array base palte to be tested is placed on described tester table;
The multiple array circuits of described array substrate detecting device to described array base palte are utilized to test one by one.
Further, describedly utilize described array substrate detecting device to carry out test one by one to multiple array circuits of described array base palte to comprise:
Step a: described array base palte detection head is moved to above an array circuit do not detected by described mobile Control Component, and by described mobile Control Component, described array base palte detection head is contacted with described array circuit;
Step b: load test signal to the signal end on described array circuit by described probe assembly;
Step c: the test signal being detected the transmission of described array circuit by described testing circuit;
Repeat above-mentioned steps a-c, until complete detection to all array circuits on described array base palte.
Further, described step a comprises:
Control the movement of described support bar in equipment Y direction, make described support bar move to directly over described array circuit;
Control the movement of described expansion link in equipment X-direction, make described expansion link move to directly over described array circuit;
Control the flexible of described expansion link, the array base palte detection head being positioned at described expansion link end contacts with described array circuit.
For the glass substrate of TFT-LCD (Thin Film Transistor-LCD) 5 generation production line, a large glass substrate is printed on multiple little display panel, display panel is inner with array circuit; Each array circuit edge is equipped with little signal end when designing.In the embodiment of the present invention, to when wherein an array circuit is tested, by mobile Control Component, array base palte detection head is moved to above an array circuit do not detected, and by mobile Control Component, array base palte detection head is contacted with array circuit, by the signal end loading test signal of the probe assembly on array base palte detection head to array circuit edge, after loading test signal, by the test signal that the testing circuit detection arrays circuit on array base palte detection head transmits, realize the detection of pair array circuit; After the array circuit having detected a display panel, mobile Control Component rises with array base palte detection head and probe assembly, move to next display panel to complete same action and test, repeat said process, until complete the test to all array circuits.
Detection framework is not used in array substrate detecting device of the present invention, thus avoid partial array circuit and be detected framework and cover and cause the problem that cannot carry out detecting, array base palte detection head comprises and is arranged on detection head body, for loading the probe assembly of test signal to the signal end of array circuit, also comprise and be arranged on detection head body, for the testing circuit of the test signal that detection arrays circuit transmits, solve the problem carrying out needing when testing and switch the prober frame changing respective model at different liquid crystal display product, and avoid detection head and prober frame to collide the loss caused.
The above is the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, under the prerequisite not departing from principle of the present invention; can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (10)
1. an array base palte detection head, the multiple array circuits in array substrate detect, and it is characterized in that, described array base palte detection head comprises:
Detection head body;
Be arranged on described detection head body, for loading the probe assembly of test signal to the signal end of described array circuit;
Be arranged on described detection head body, for detecting the testing circuit of the test signal that described array circuit transmits.
2. array base palte detection head according to claim 1, is characterized in that, described probe assembly is made up of at least one probe module, and each probe module comprises:
For obtaining the signal acquiring unit of test signal;
The probe structure of the predetermined number be connected with described signal acquiring unit.
3. array base palte detection head according to claim 2, is characterized in that, described probe structure comprises:
Be provided with the cylinder of air pipe interface;
Be positioned at the piston of described cylinder interior, between described piston and described cylinder, form an enclosure space;
Be positioned at the spring of described enclosure space, one end of described spring is fixed on piston, and the other end is fixed on the end of described cylinder;
Be arranged on described piston, the probe be positioned at outside described enclosure space, described probe is connected with described signal acquiring unit by signal lead.
4. an array substrate detecting device, is characterized in that, comprise the array base palte detection head according to any one of claim 1-3, described pick-up unit also comprises:
For placing the tester table of array base palte to be tested;
Be arranged on described tester table, for controlling the mobile Control Component of described array base palte detection head movement on equipment X-axis, equipment Y-axis and equipment Z axis.
5. array substrate detecting device according to claim 4, is characterized in that, described mobile Control Component comprises:
The support on described tester table is arranged on along equipment Y direction;
Along equipment X-direction arrange on the bracket, can on the bracket along the support bar of equipment Y direction movement;
Along the setting of equipment Z-direction, the first end expansion link that be connected removable with described support bar, described expansion link can move along described support bar;
Wherein, described array base palte detection head is fixed on the second end of described expansion link.
6. array substrate detecting device according to claim 5, is characterized in that,
Described support is provided with along the arrangement of equipment Y direction, the first relative guide rail and the second guide rail, described first guide rail and the second guide rail are respectively arranged with the first slide block and the second slide block;
The first end of described support bar is fixed on described first slide block, and the second end of described support bar is fixed on described second slide block.
7. array substrate detecting device according to claim 5, described support bar is provided with the 3rd guide rail along the arrangement of equipment X-direction, described 3rd guide rail is provided with the 3rd slide block, and the first end of described expansion link is fixed on described 3rd slide block.
8. an array base palte detection method, is characterized in that, is applied to the pick-up unit according to any one of claim 4-7, and described detection method comprises:
Array base palte to be tested is placed on described tester table;
The multiple array circuits of described array substrate detecting device to described array base palte are utilized to test one by one.
9. array base palte detection method according to claim 8, is characterized in that, describedly utilizes described array substrate detecting device to carry out test one by one to multiple array circuits of described array base palte to comprise:
Step a: described array base palte detection head is moved to above an array circuit do not detected by described mobile Control Component, and by described mobile Control Component, described array base palte detection head is contacted with described array circuit;
Step b: load test signal to the signal end on described array circuit by described probe assembly;
Step c: the test signal being detected the transmission of described array circuit by described testing circuit;
Repeat above-mentioned steps a-c, until complete detection to all array circuits on described array base palte.
10. array base palte detection method according to claim 9, is characterized in that, described step a comprises:
Control the movement of described support bar in equipment Y direction, make described support bar move to directly over described array circuit;
Control the movement of described expansion link in equipment X-direction, make described expansion link move to directly over described array circuit;
Control the flexible of described expansion link, the array base palte detection head being positioned at described expansion link end contacts with described array circuit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410505974.5A CN104280904A (en) | 2014-09-26 | 2014-09-26 | Array substrate detecting head and device and array substrate detecting method |
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| CN201410505974.5A CN104280904A (en) | 2014-09-26 | 2014-09-26 | Array substrate detecting head and device and array substrate detecting method |
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| CN104280904A true CN104280904A (en) | 2015-01-14 |
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| CN201410505974.5A Pending CN104280904A (en) | 2014-09-26 | 2014-09-26 | Array substrate detecting head and device and array substrate detecting method |
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| CN105931590A (en) * | 2016-04-28 | 2016-09-07 | 深圳市海达唯赢科技有限公司 | LCD driver board automatic detection method and system |
| CN106782234A (en) * | 2015-11-24 | 2017-05-31 | 飞腾动力公司 | System and method for promoting the inspection to the device to be tested including multiple panels |
| CN107085322A (en) * | 2017-05-05 | 2017-08-22 | 盐城华星光电技术有限公司 | LCD LCD screen detection devices |
| CN108226758A (en) * | 2018-03-09 | 2018-06-29 | 京东方科技集团股份有限公司 | A kind of detection device and its control method |
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| CN110780469A (en) * | 2018-07-30 | 2020-02-11 | 合肥欣奕华智能机器有限公司 | Detection head carrying device and detection system |
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