CN202736444U - TFT array detection framework and detection equipment - Google Patents

TFT array detection framework and detection equipment Download PDF

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Publication number
CN202736444U
CN202736444U CN 201220349362 CN201220349362U CN202736444U CN 202736444 U CN202736444 U CN 202736444U CN 201220349362 CN201220349362 CN 201220349362 CN 201220349362 U CN201220349362 U CN 201220349362U CN 202736444 U CN202736444 U CN 202736444U
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CN
China
Prior art keywords
tft array
signal input
fixed support
conductive member
framework
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Expired - Fee Related
Application number
CN 201220349362
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Chinese (zh)
Inventor
裴晓光
林子锦
田震寰
赵海生
杨魏松
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOE Technology Group Co Ltd
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Beijing BOE Optoelectronics Technology Co Ltd
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Priority to CN 201220349362 priority Critical patent/CN202736444U/en
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Publication of CN202736444U publication Critical patent/CN202736444U/en
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Abstract

The utility model discloses a TFT array detection framework and detection equipment and aims to solve technical problems of poor compatibility, easy damage to a detection probe and easy damage to an array substrate existing a TFT array detection framework in the prior art. According to the TFT array detection framework, elastic conductive parts are used to replace the detection probes, and positions of fixing supports of the elastic conductive parts and the TFT array detection framework are adjustable, so one TFT array detection framework can be commonly used by products with a plurality of types. The TFT array detection framework not only saves cost for purchasing the TFT array detection frameworks with various types, but also can completely avoid unnecessary loss which is caused when an array substrate is broken by a damaged probe.

Description

A kind of tft array detects framework and checkout equipment
Technical field
The utility model relates to Thin Film Transistor (TFT) liquid crystal display (Thin Film Transistor-Liquid Crystal Display, TFT-LCD) the substrate circuit electrology characteristic field tests of manufacturing process, the particularly prober frame of the checkout equipment of tft array-array test board (Array tester).
Background technology
The TFT-LCD manufacture process probably can be divided into three phases:
(1) tft array technique namely is called for short Array technique, forms some independently tft array circuit at a larger glass substrate and forms tft array substrate, the corresponding LCDs (panel) of each pixel array region;
(2) to box technique, coating of liquid crystalline on tft array substrate covers colored filter, and box is become the LCD panel and cuts into independently LCDs;
(3) module technique is installed backlight for LCDs, and polaroid and peripheral circuit form complete TFT-LCD display module.
In Array technique, by mask-exposure technology commonly used in the semiconductor, form the tft array circuit at glass substrate, the quality of tft array circuit has directly determined the quality of TFT-LCD, therefore for the tft array circuit, be that the detection of tft array substrate also just becomes the important procedure in the manufacturing process.
Fig. 1 is the structural representation of traditional array detection equipment, when adopting the traditional array checkout equipment to carry out the tft array substrate detection, the detector probe 1 of installing on the prober frame 5 contacts with the signal input part 2 in the tft array substrate, test signal is loaded in the tft array substrate 3 by the detector probe 1 of prober frame 5, by detection probe 4 simulation liquid crystal displaying principles, reach the purpose of test, how can rapidly and accurately needed signal be joined in the tft array substrate 3 in test is the key of test.
Be fixed on fixed position on the prober frame 5 such as the detector probe 1 of the metal in the traditional array checkout equipment of Fig. 1, therefore, for the product of different model, signal input part 2 positions on the tft array substrate are different.As shown in Figure 2,19 cun (by the positions of dotted line 7 indications) are all different in the position of directions X and Y-direction with the signal input part of the tft array substrate of 14.1 cun (by positions of dotted line 8 indications).This detector probe framework that just causes needs to buy different model carries out the detection of different product model tft array substrate, causes the increase of production cost.
In addition, the detection signal loading procedure in the traditional array checkout equipment as shown in Figure 3.Detector probe 1 is connected on the external signal input terminal 12, and detection signal is added on the external signal input terminal 12, by the loading of detector probe 1 bundle at signal input part 2 settling signals of tft array substrate.If detector probe 1 goes wrong and is easy to tft array substrate is pricked broken in this process, cause unnecessary loss.In addition, because detector probe 1 diameter is less, therefore, also cause deadlock than being easier to fracture.
The utility model content
In view of this, fundamental purpose of the present utility model is to provide a kind of tft array to detect framework and checkout equipment, is used for solving existing tft array and detects the framework poor compatibility, the technical matters that the detector probe on it is damaged and caused easily array base palte to damage easily.
For achieving the above object, the technical solution of the utility model is achieved in that
A kind of tft array detects framework, comprising: main frame 9, fixed support 10, securing member 11, external signal input terminal 12, sliding bar 13, resilient conductive member 14;
Have a plurality of adjustment holes arranged side by side 15 at fixed support 10, securing member 11 passes adjustment hole 15 main frame 9 and fixed support 10 is linked together;
The head of external signal input terminal 12 contacts with resilient conductive member 14, and afterbody is connected with sliding bar 13 on being positioned at fixed support 10;
Resilient conductive member 14 is fixed on fixed support 10 inboards, is comprised of electrically conductive elastic conductive component and insulation resilient conductive member space.
In the such scheme, a plurality of external signal input terminals 12 side by side with sliding bar 13 vertical being fixedly connected with.
In the such scheme, fixed support 10 is positioned at main frame 9 tops on one side or a plurality of limit.
In the such scheme, described resilient conductive member is base-material, is equipped with filler and auxiliary agent forms by high performance silicon rubber.
In the such scheme, described filler is that copper is silver-plated, aluminium is silver-plated, glass silvering or graphite nickel plating particle.
In the such scheme, signal input part 2 minimum corresponding two resilient conductive member of each array base palte.
The utility model is by replacing detector probe with resilient conductive member, and resilient conductive member fixed support and TFT to detect frame position adjustable, detect framework thereby the product of realizing Multiple Type shares a TFT.The utility model has not only been saved the expense that various model TFT detect framework of buying, and can also thoroughly solve simultaneously owing to probe damages and prick the unnecessary loss that broken array base palte causes.
Description of drawings
Fig. 1 is the structural representation of traditional array detection framework;
Fig. 2 is the position view of the signal input part of different model product;
Fig. 3 is traditional tft array detection signal loading structure synoptic diagram;
The tft array that Fig. 4 provides for the utility model detects the perspective view of framework;
The tft array detection signal loading structure synoptic diagram that Fig. 5 provides for the utility model.
The figure elements explanation:
The 1-detector probe; Signal input part on the 2-TFT array base palte; The 3-TFT array base palte; The 4-detection probe; 5-detector probe framework; 7-large size panel signal input point; 8-small size panel signal input point; The 9-main frame; The 10-fixed support; The 11-securing member; 12-external signal input terminal; The 13-sliding bar; The 14-resilient conductive member; The 15-adjustment hole.
Embodiment
For making the purpose of this utility model, technical scheme and advantage clearer, by the following examples and with reference to accompanying drawing, the utility model is further described.
The perspective view of the tft array detection framework that the utility model provides specifically comprises: main frame 9, fixed support 10, securing member 11, external signal input terminal 12, sliding bar 13, resilient conductive member 14 as shown in Figure 4.
Main frame 9 is used for fixing and carrying fixed support 10;
Fixed support 10, be positioned at one side, main frame 9 tops or a plurality of limit, link together with main frame 9 by the securing member 11 with adjusting and fixation, have a plurality of adjustment holes arranged side by side 15 at fixed support 10, securing member 11 links together main frame 9 and fixed support 10 through adjustment hole 15.After securing member 11 unclamped, fixed support 10 can move along the direction of adjustment hole 15, by moving fixing support 10 can make external signal input terminal 12 in vertical direction (such as the Y-direction of Fig. 2) aim at signal input part 2 on the tft array substrate;
External signal input terminal 12 is positioned at the inboard of fixed support 10, and its head contacts with resilient conductive member 14, and its afterbody is connected with sliding bar 13 on being positioned at fixed support 10.A plurality of external signal input terminals 12 are fixedly connected with sliding bar 13 side by side; By mobile sliding bar 13, can make external signal input terminal 12 in the horizontal direction (such as the directions X of Fig. 2) aim at signal input part 2 on the tft array substrate; The head of external signal input terminal 12 comprises two parts, and a part is connected with external signal line A, and another part is connected with external signal line B.
Resilient conductive member 14 is fixed on the inboard of fixed support 10, and resilient conductive member 14 is bonded by elastic conduction material and the non-conductive material of elasticity space.Preferably, wherein the electrically conductive elastic conductive component is to be base-material by high performance silicon rubber, joins special type filler (silver-plated such as copper, aluminium is silver-plated, glass silvering, graphite nickel plating particle etc.) and auxiliary agent, and is made through strict controlled technique.Electric signal can be along the elastic conduction material in the vertical direction with the electric signal conducting, and in the horizontal direction because flexible non-conductive material can guarantee that electric signal can be along the horizontal direction conducting.The utility model uses resilient conductive member 14 to replace golden detector probe 1, by the signal input part 2 on electrically conductive elastic conductive material connection external signal input terminal 12 and the tft array substrate.
The tft array detection signal loading structure synoptic diagram that Fig. 5 provides for the utility model, external signal input terminal 12 contacts with resilient conductive member 14, resilient conductive member 14 contacts with the signal input part 2 of tft array substrate, external signal with the signal input part 2 of signal conduction to tft array substrate, realizes the loading of signal by external signal input terminal 12 process elastic conduction materials.Wherein, the size of the signal input part 2 of array base palte is 5 * 2.5mm, because two kinds of signals that the signal input part of each tft array substrate 2 wants that corresponding outside loads such as Fig. 5, therefore require signal input part 2 minimum corresponding two elastic conduction materials of each tft array substrate.
The above is preferred embodiment of the present utility model only, is not be used to limiting protection domain of the present utility model.

Claims (6)

1. a tft array detects framework, it is characterized in that, comprising: main frame (9), fixed support (10), securing member (11), external signal input terminal (12), sliding bar (13), resilient conductive member (14);
Have a plurality of adjustment holes arranged side by side (15) at fixed support (10), securing member (11) passes adjustment hole (15) main frame (9) and fixed support (10) is linked together;
The head of external signal input terminal (12) contacts with resilient conductive member (14), and afterbody is connected with sliding bar (13) on being positioned at fixed support (10);
Resilient conductive member (14) is fixed on fixed support (10) inboard, is comprised of electrically conductive elastic conductive component and insulation resilient conductive member space.
2. tft array according to claim 1 detects framework, it is characterized in that, a plurality of external signal input terminals (12) side by side with vertical being fixedly connected with of sliding bar (13).
3. tft array according to claim 1 detects framework, it is characterized in that, fixed support (10) is positioned at main frame (9) top on one side or a plurality of limit.
4. described tft array detects framework according to claim 1, it is characterized in that, described resilient conductive member is base-material, is equipped with filler and auxiliary agent forms by high performance silicon rubber.
5. described tft array detects framework according to claim 4, it is characterized in that, described filler is that copper is silver-plated, aluminium is silver-plated, glass silvering or graphite nickel plating particle.
6. described tft array detects framework according to claim 1, it is characterized in that minimum corresponding two resilient conductive member of the signal input part of each array base palte (2).
CN 201220349362 2012-07-18 2012-07-18 TFT array detection framework and detection equipment Expired - Fee Related CN202736444U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201220349362 CN202736444U (en) 2012-07-18 2012-07-18 TFT array detection framework and detection equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 201220349362 CN202736444U (en) 2012-07-18 2012-07-18 TFT array detection framework and detection equipment

Publications (1)

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CN202736444U true CN202736444U (en) 2013-02-13

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103257466A (en) * 2013-05-07 2013-08-21 京东方科技集团股份有限公司 Connector of display panel detection device, display panel detection device and display panel detection method
CN104280904A (en) * 2014-09-26 2015-01-14 京东方科技集团股份有限公司 Array substrate detecting head and device and array substrate detecting method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103257466A (en) * 2013-05-07 2013-08-21 京东方科技集团股份有限公司 Connector of display panel detection device, display panel detection device and display panel detection method
WO2014180137A1 (en) * 2013-05-07 2014-11-13 京东方科技集团股份有限公司 Connector of display panel detecting device, and display panel detecting device and method
CN103257466B (en) * 2013-05-07 2015-08-19 京东方科技集团股份有限公司 The connector of display board pick-up unit, display board pick-up unit and method
CN104280904A (en) * 2014-09-26 2015-01-14 京东方科技集团股份有限公司 Array substrate detecting head and device and array substrate detecting method

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C14 Grant of patent or utility model
GR01 Patent grant
ASS Succession or assignment of patent right

Owner name: JINGDONGFANG SCIENCE AND TECHNOLOGY GROUP CO., LTD

Free format text: FORMER OWNER: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY CO., LTD.

Effective date: 20150625

Owner name: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY

Effective date: 20150625

C41 Transfer of patent application or patent right or utility model
TR01 Transfer of patent right

Effective date of registration: 20150625

Address after: 100015 Jiuxianqiao Road, Beijing, No. 10, No.

Patentee after: BOE TECHNOLOGY GROUP Co.,Ltd.

Patentee after: BEIJING BOE OPTOELECTRONICS TECHNOLOGY Co.,Ltd.

Address before: 100176 Beijing city in Western Daxing District economic and Technological Development Zone, Road No. 8

Patentee before: BEIJING BOE OPTOELECTRONICS TECHNOLOGY Co.,Ltd.

CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20130213

Termination date: 20210718