KR100899978B1 - Probe Unit and needle - Google Patents

Abstract

The present invention relates to a probe unit for use in LCD inspection, the object of which is to suppress the excessive deformation of the needle of the probe unit and the mutual interference of a plurality of needles, while suppressing the shortening of life, and easy to manufacture probe unit and In providing the needle.

To this end, the present invention is a beam unit fixedly coupled to the needle guide; A probe part electrically contacting a pad provided in the LCD and positioned to be spaced apart from the beam part by a predetermined distance below the beam part to limit a rising width of the probe part; And a connecting part connecting the probe part to the beam part and applying an elastic restoring force to the probe part when the probe part is raised, thereby reducing the lifespan of the probe unit while suppressing the possibility of interference between the needles of the probe unit. Has

Probe Unit, Needle, LCD, Needle Guide

Description

Probe Unit and Needle

1 is a side cross-sectional view of a needle and a needle guide of a conventional LCD inspection probe unit.

Figure 2 is a side cross-sectional view of the needle and the needle guide of the probe probe unit for LCD.

3 is a side view showing the needle of the probe unit according to the embodiment of the present invention.

4 and 5 are a side cross-sectional view and a perspective view showing a part of the probe unit according to an embodiment of the present invention.

<Description of Reference Symbols for Main Parts of Drawings>

100: needle of the probe unit 200: needle guide

113: probe portion 114: connection portion

115: beam portion

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe unit for inspecting electronic components, and more particularly, to a probe unit used for inspecting whether an electronic component used in a display device or the like normally operates.

The LCD (Liquid Crystal Display) production process is largely a cell process for producing LCD panels, and a driver, back light, polarizer, and light guide plate produced in the cell process. It is roughly divided into a module assembly process of assembling with a panel to make a finished product.

At this time, the LCD panel produced through the cell process is subjected to a shipment inspection process for inspecting for the presence of defects (eg, point defects, predecessors, stain defects, etc.) that may occur in the manufacturing process. That is, the task of selecting the LCD defects by evaluating the electrical characteristics and the optical characteristics of the device of the LCD, and the purpose of pursuing the reduction of the production cost of the product and the improvement of the quality of the product by accurate determination of defects.

Electrical characteristics tests performed on devices of LCDs such as TFT substrates include gate open / short tests, data open / short tests, and visual tests.

In the visual test, a color filter substrate is matched to a TFT substrate in a state where a gate line, a data line, a switching element, a TFT element, and a pixel are formed on the TFT substrate, and a color filter substrate having a gap of a predetermined size is formed between the TFT substrate and the TFT substrate. In the state that the liquid crystal material is filled, it is to test whether the liquid crystal material contains foreign substances.

The gate or data open / short test is performed after the gate line and the data line are formed on the TFT substrate, respectively. After the voltage is applied across the probe, the current is measured and the resistance value is calculated to open or close the gate line or data line. It is to judge whether or not a short.

The LCD station probe station equipment is used for the LCD inspection.

The probe station equipment for LCD inspection includes a probe unit, which is a collection of probe needles for applying a test signal to a plurality of electrodes located at the edge of the LCD panel, and a predetermined electric signal to the needle of the probe unit. TAB IC (Taped Automated Bonding Integrated Circuit), a signal generator (Pattern Generator) for generating a predetermined signal for testing the LCD panel, and a source for dividing the X and Y lines (Line) to the TAB IC / Gate (Source / Gate) is configured to include a printed circuit board (PCB) unit, etc. The present invention relates to the probe unit.

1 is a side cross-sectional view of a needle and a needle guide of a conventional LCD inspection probe unit.

As shown in FIG. 1, the probe inspection unit for an LCD test is inserted into and coupled to a needle guide 10 having a needle hole 11 and a needle hole 11 formed at the needle guide 10. It consists of a needle 12 that is.

Here, the needle 12 includes a probe portion 13, a connection portion 14, and a beam portion (not shown).

A needle hole 11 is formed in the needle guide 10 so that the needle 12 is inserted and coupled to the needle guide 10.

The probe part 13 is in contact with a pad provided in the LCD. An electrical signal transmitted through the beam unit for the LCD inspection is transmitted to the LCD pad (not shown).

The connection part 14 supports the probe part 13 which is subjected to an external force with an elastic restoring force.

The beam part (not shown) is inserted into the needle hole 11 formed in the needle guide 10 to be fixed with epoxy, etc. to support the entire needle, and to connect the electrical signal transmitted from the TAB IC board side to the connection part 14. And through the probe 13 to be delivered to the pad provided in the LCD.

When the probe unit having the above structure is in contact with the pad provided in the LCD in the probe unit 13 during the LCD inspection, the connection unit 14 is deformed and the probe unit 13 maintains contact with the pad of the LCD by elastic restoring force. do.

However, since the probe 13 of the needle 12 is located inside the needle guide 10, the probe 13 was not easily seen from the outside. Since the probe unit 13 is hard to see, it is difficult to align the probe unit such that the probe unit 13 and the pad of the LCD contact each other.

In addition, when the probe portion 13 is deformed in contact with the pad of the LCD, the rising width of the probe portion 13 is not limited, and stress due to excessive deformation of the connection portion 14 is also a problem.

Therefore, in order to overcome this problem, the following technique has been proposed.

Figure 2 is a side cross-sectional view of the needle and the needle guide of the probe probe unit for LCD.

As shown in FIG. 2, the probe inspection unit for the LCD inspection includes a needle guide 10 ′ having a needle groove 11 ′ and a needle 12 inserted into and coupled to the needle groove 11 ′ formed at the needle guide 10 ′. ').

The needle guide 10 ', the needle 12', the probe portion 13 ', the connecting portion 14', and the beam portion (not shown) are as briefly described above.

A needle groove 11 'is formed in the needle guide 10', and a needle 12 'is inserted into the needle groove 11' and coupled thereto.

Here, the needle 12 'comprises a probe 13', a connection 14 'and a beam (not shown).

When the needle 12 'is inserted into and coupled to the needle groove 11' of the needle guide 10 ', a portion of the probe 13' is moved outward of the needle groove 11 '. The protrusion can easily check the position of the probe portion 13 'of the needle 12' from the outside. Therefore, it is easy to align the probe unit so that it can be exactly in contact with the pad (not shown) of the LCD.

The connecting portion 14 'supports the probe portion 13' which is subjected to an external force with elastic restoring force.

The beam part is inserted into the needle hole 11 'formed in the needle guide 10' and is fixed with epoxy or the like to support the entire needle. The beam part 14 'and the probe transmit electrical signals transmitted from the TAB IC substrate side. Through the portion 13 'to be delivered to the pad provided in the LCD.

When the probe unit having the above structure contacts the pad provided in the LCD to the probe part 13 'during the LCD inspection, the connection part 14' is deformed and the probe part 13 'contacts the pad of the LCD with elastic restoring force. Will be maintained. At this time, the rising width h of the probe portion 13 'is limited by the needle groove 11' formed in the needle guide 10 'to suppress excessive deformation of the connection portion 14'.

However, since a number of LCDs are repeatedly inspected, the contact between the probe 13 'and the needle guide 10' is inevitably frequent, resulting in damage of the needle guide 10 'made of a material such as silicon or glass. Due to this concern, the processing of the ceramic material prevents excessive deformation of the connecting portion 14 'and damage to the needle guide 10' caused by the contact of the probe 13 'with the needle guide 10'. Was suppressed.

However, there is a problem in that manufacture and installation of a needle guide made of ceramic are difficult and expensive in view of the low workability and slit processing of the ceramic.

Accordingly, an object of the present invention is to suppress the excessive deformation of the needle of the probe unit in order to solve the above problems, while suppressing the interference of the plurality of needles, while reducing the life of the probe unit, it is easy to manufacture Providing a probe unit and a needle.

Needle of the LCD inspection probe unit according to an aspect of the present invention for achieving the above object is a beam unit fixedly coupled to the needle guide; A probe part electrically contacting a pad provided in the LCD and positioned to be spaced apart from the beam part by a predetermined distance below the beam part to limit a rising width of the probe part; And a connecting part connecting the probe part to the beam part and applying an elastic restoring force to the probe part when the probe part is raised.

LCD inspection probe unit according to another aspect of the present invention for achieving the above object is a needle guide is a plurality of needle fixedly coupled; And a plurality of needles fixedly coupled to the needle guide and guided, wherein each of the plurality of needles is fixedly coupled to the needle groove formed with the needle guide; an electrical contact with a pad provided in the LCD, A probe portion having a rising width limited by the beam portion by being positioned below the beam portion at a predetermined interval below; And a connecting part connecting the probe part to the beam part and applying an elastic restoring force to the probe part when the probe part is raised.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

3 is a side view showing the needle of the probe unit according to the embodiment of the present invention.

As shown in FIG. 3, the needle of the probe probe unit for LCD inspection according to the embodiment of the present invention is provided with a beam unit 115 fixedly coupled to a needle guide (not shown) and a pad (not shown). A probe portion which is electrically contacted with the beam portion 115 and is spaced apart from the beam portion 115 by a predetermined distance h ″ below the beam portion 115. 113) and the connecting portion 113 is connected to the beam portion 115, the connecting portion 114 for applying an elastic restoring force to the probe portion 113 when the probe portion 113 is raised; do.

The beam unit 115 is fixedly coupled to the needle guide. The beam part 115 fixedly coupled to the needle guide supports the entire needle. In particular, the beam part 115 is inserted into the needle groove formed in the needle guide, and the needle is fixed by being molded with epoxy or the like thereon. Meanwhile, one side of the beam unit 115 is connected to a TAB IC board or an FPC board (Flexible Printed Circuit Board) to receive an electrical signal from a test equipment of a probe station (not shown), and thus, the connection unit 114 and the probe unit 113. ) To the pad provided on the LCD side.

The probe portion 113 is positioned below the beam portion 115 to be spaced apart from the beam portion 115 at a predetermined interval h 'so that the rising width is limited by the beam portion 115. Here, the rising width of the probe 113 is caused by the contact between the probe 113 and the pad provided on the LCD. Since the rising width of the probe 113 is limited by the beam 115, it is possible to prevent excessive deformation of the connecting portion 114 and prevent the needle guide from being damaged because it is not in contact with the needle guide.

The connection part 114 is connected to the lower side of the beam part 115. The predetermined distance h 'between the beam part 115 and the connection part 114 may be adjusted and manufactured at the time of manufacture of the needle. In addition, the shape of the connection part 114 may be in various forms as one side of the connection part 114 is coupled to the beam part 115 and the other side of the connection part 114 is spaced at a predetermined interval in addition to the shape as shown. .

On the other hand, the material of the needle portion 113, the connecting portion 114 and the beam portion 115 of the needle may be different, but preferably made of the same material. For example, tungsten alloy or the like may be used as the material of the needle 100.

Figure 4 is a side cross-sectional view showing a part of the probe unit according to an embodiment of the present invention, Figure 5 is a perspective view showing a part of the probe unit according to an embodiment of the present invention.

As shown in Figures 4 and 5, the LCD probe probe unit according to an embodiment of the present invention is fixedly coupled to the needle guide 200 and the needle guide 200 is fixed to the plurality of needles (100) Including a plurality of needles (100) to be guided, each of the plurality of needles (100) is a beam (115) fixed to the needle groove 201 formed in the needle guide 200 and pads (not shown) And a probe portion whose electrical width is limited by the beam portion 115 by being placed in electrical contact with the beam portion 115 and spaced apart from the beam portion 115 at a predetermined distance h '. 113) and the probe portion 113 is connected to the beam portion 115, the connection portion 114 for applying an elastic restoring force to the probe portion 113 when the probe portion 113 rises.

The needle guide 200 may be made of silicon or the like. The needle guide 200 has a plurality of needle grooves 201 through which a plurality of needles 100 can be inserted. In the needle guide 200 made of silicon, the needle groove 201 may be formed by an etching process during a semiconductor manufacturing process. A plurality of needles 100 are respectively inserted into the needle grooves 201 formed in the needle guide 200, and molded with epoxy on the needles 100, so that the needles 100 can be stably guided.

Each of the plurality of needles 100 includes a probe part 113, a connection part 114, and a beam part 115.

The beam unit 115 is fixedly coupled to the needle guide 200. The beam part 115 fixedly coupled to the needle guide 200 supports the entire needle. In particular, the beam portion 115 is inserted into the needle groove 201 formed in the needle guide 200, and the needle is fixed by being molded with epoxy or the like thereon. Meanwhile, one side of the beam unit 115 is connected to a TAB IC board or an FPC board (Flexible Printed Circuit Board) to receive an electrical signal from a test equipment of a probe station (not shown), and thus, the connection unit 114 and the probe unit 113. ) To the pad provided on the LCD side.

The probe portion 113 is positioned below the beam portion 115 to be spaced apart from the beam portion 115 at a predetermined interval h 'so that the rising width is limited by the beam portion 115. The probe portion 113 is in contact with a pad provided on the LCD by a predetermined needle pressure by the elasticity (ie, form restoring force) of the connection portion 114. The rising width of the probe 113 is caused by the contact between the probe 113 and the pad provided on the LCD. Since the rising width of the probe 113 is limited by the beam 115, it is possible to prevent the needle guide 200 from being damaged because it suppresses excessive deformation of the connecting portion 114 and does not come into contact with the needle guide. .

In addition, a portion of the probe portion 113 protrudes to the outside of the needle groove 201 formed in the needle guide 200, it is easy to adjust the alignment of the probe unit from the outside.

 The shape of the probe portion 113 is not limited to a particular shape, but the tip contacting the pad of the electronic component is preferably sharper.

The connection part 114 is connected to the lower side of the beam part 115. In this case, the probe unit 113 is positioned below the beam unit 115, and the rising width is limited by the beam unit 115 as described above. The predetermined distance h 'between the beam part 115 and the probe part 113 may be adjusted and manufactured when the needle is manufactured. In addition, the shape of the connection part 114 may be in various forms as one side of the connection part 114 is coupled to the beam part 115 and the other side of the connection part 114 is spaced at a predetermined interval in addition to the shape as shown. .

As described above, when the probe unit 113 contacts the pad of the LCD with a predetermined pressure or more, the beam unit 115 is contacted. Therefore, since excessive deformation of the connection part 114 is prevented, stress on the connection part 114 is reduced due to the shape deformation.

In addition, damage to the needle guide 200 and shortening of the lifespan of the probe unit caused by the probe unit 113 directly contacting the needle guide 200 may be suppressed.

In addition, since the contact between the probe 113 and the needle guide 200 is prevented by the beam 115, it is not necessary to slit the ceramic separately and insert it into the needle groove 201 formed in the needle guide 200 Reduce production costs and shorten production time.

As described above, the detailed description of the present invention has been made by the embodiments with reference to the accompanying drawings. However, since the above-described embodiments have only been described with reference to preferred examples of the present invention, the present invention is limited to the above embodiments. It is not to be understood that the scope of the invention should be understood by the claims and equivalent concepts described below.

As described above, when the probe portion contacts the pad of the LCD above a predetermined needle pressure, the rising width of the probe portion is limited by the beam portion. Therefore, the needle guide is damaged by the needle guide caused by the direct contact with the needle guide and the life of the probe unit is suppressed.

In addition, since the beam part prevents contact between the probe part and the needle guide, the needle guide can be manufactured from silicon or the like without the need to separately slit the ceramic, thereby reducing the production cost and shortening the production time.

Claims (2)

A beam unit fixedly coupled to the needle guide; A probe part electrically contacting a pad provided in the LCD and positioned below the beam part at a predetermined distance from the beam part; And And a connecting part connecting the probe part to the beam part and applying an elastic restoring force to the probe part when the probe part is raised. The beam unit needle of the probe unit, characterized in that it has a portion that can be in contact with the probe so that the rising width of the probe. A needle guide to which a plurality of needles are fixedly coupled; And Includes; a plurality of needles fixedly coupled to the needle guide is guided, Each of the plurality of needles A beam part fixedly coupled to the needle guide formed needle groove; A probe part electrically contacting a pad provided in the LCD and positioned below the beam part at a predetermined distance from the beam part; And And a connecting part connecting the probe part to the beam part and applying an elastic restoring force to the probe part when the probe part is raised. And the beam unit has a portion that can be in contact with the probe so that the rising width of the probe can be limited.

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