TW200734656A - Repair device and repair method - Google Patents

Repair device and repair method

Info

Publication number
TW200734656A
TW200734656A TW096103649A TW96103649A TW200734656A TW 200734656 A TW200734656 A TW 200734656A TW 096103649 A TW096103649 A TW 096103649A TW 96103649 A TW96103649 A TW 96103649A TW 200734656 A TW200734656 A TW 200734656A
Authority
TW
Taiwan
Prior art keywords
gantry
unit
probe
axis direction
repair
Prior art date
Application number
TW096103649A
Other languages
Chinese (zh)
Other versions
TWI334030B (en
Inventor
Akihiko Okano
Original Assignee
Laserfront Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Laserfront Technologies Inc filed Critical Laserfront Technologies Inc
Publication of TW200734656A publication Critical patent/TW200734656A/en
Application granted granted Critical
Publication of TWI334030B publication Critical patent/TWI334030B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04—Mounting of components, e.g. of leadless components

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Organic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)

Abstract

A main gantry and sub-gantry that are capable of moving in the Y-axis direction along a guide are provided on a surface plate, and an optical system that performs repairs and can move in the X-axis direction is mounted to the main gantry. An LCD substrate that is the unit under test is disposed on a moving holder. Probe sensor heads that can move in the X-axis direction and rotate in the XY plane are mounted to the main gantry and sub-gantry. The probe sensor heads are composed of a probe unit for supplying a current to an electrode, and a sensor unit for detecting the current supplied to the wiring and determining the presence of an open/short defect, wherein the probe unit and the sensor unit are integrated with each other. The repair device thus constructed are capable of efficiently accessing the entire area of electrical wiring on an LCD substrate, detecting defects, and repairing the defects without removal and remounting of the substrate.
TW096103649A 2006-02-06 2007-02-01 Repair device and repair method TWI334030B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006028764A JP2007206641A (en) 2006-02-06 2006-02-06 Repair device and method

Publications (2)

Publication Number Publication Date
TW200734656A true TW200734656A (en) 2007-09-16
TWI334030B TWI334030B (en) 2010-12-01

Family

ID=38486135

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096103649A TWI334030B (en) 2006-02-06 2007-02-01 Repair device and repair method

Country Status (4)

Country Link
JP (1) JP2007206641A (en)
KR (1) KR100868471B1 (en)
CN (1) CN101017256B (en)
TW (1) TWI334030B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI386709B (en) * 2007-11-30 2013-02-21 Lg Display Co Ltd Method for repairing defective cell of liquid crystal panel
TWI495923B (en) * 2008-01-28 2015-08-11 Charm & Ci Co Ltd Apparatus and method for repairing lcd panel
TWI634339B (en) * 2017-11-21 2018-09-01 興城科技股份有限公司 Method and apparatus for testing a tft panel

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4680082B2 (en) * 2006-02-09 2011-05-11 日鐵住金溶接工業株式会社 Flux-cored wire for gas shielded arc welding
KR100908327B1 (en) * 2007-12-28 2009-07-17 주식회사 코윈디에스티 Thin film forming device using laser
KR20100030867A (en) 2008-09-11 2010-03-19 삼성전자주식회사 Inspecting apparatus for solar cell and inspecting method using the same
JP5088579B2 (en) * 2008-09-12 2012-12-05 オムロン株式会社 Glass substrate repair device
JP5240466B2 (en) * 2009-03-12 2013-07-17 オムロン株式会社 FPD substrate manufacturing method and apparatus
JP5206979B2 (en) * 2009-03-13 2013-06-12 オムロン株式会社 Method for forming thin film by laser CVD and gas window suitable for the method
CN102236032A (en) * 2010-05-07 2011-11-09 北京京东方光电科技有限公司 Array detection equipment
JP5637532B2 (en) * 2010-12-27 2014-12-10 株式会社ブイ・テクノロジー Laser processing equipment
KR101317173B1 (en) 2011-12-19 2013-10-15 참엔지니어링(주) Apparatus for testing and repairing of substrate
CN103744201A (en) * 2013-12-31 2014-04-23 深圳市华星光电技术有限公司 Liquid crystal display panel repair method and repair system
US9297074B2 (en) 2013-12-31 2016-03-29 Shenzhen China Star Optoelectronics Technology Co., Ltd Liquid crystal display panel repairing method and repairing system
CN104280904A (en) * 2014-09-26 2015-01-14 京东方科技集团股份有限公司 Array substrate detecting head and device and array substrate detecting method
CN104880841B (en) * 2015-05-18 2018-05-25 合肥京东方光电科技有限公司 Substrate prosthetic device and restorative procedure
KR101553290B1 (en) 2015-07-01 2015-09-16 (주)넥스틴 system for inspection and repair for substrate of OLED display
CN104991391B (en) * 2015-07-30 2018-01-30 武汉华星光电技术有限公司 The restorative procedure of display panel
CN109116591A (en) * 2017-06-26 2019-01-01 深圳市宇顺工业智能科技有限公司 A kind of LCD liquid crystal display screen detection method
CN113203960A (en) * 2021-04-26 2021-08-03 深圳市华星光电半导体显示技术有限公司 Open-circuit and short-circuit testing device and method
CN114035384B (en) * 2021-10-27 2023-09-01 滁州惠科光电科技有限公司 Array substrate circuit repairing method and device and array substrate
CN114879389A (en) * 2022-05-23 2022-08-09 南京阿德庞斯信息科技有限公司 Liquid crystal display defect repairing equipment and repairing method thereof

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5164565A (en) * 1991-04-18 1992-11-17 Photon Dynamics, Inc. Laser-based system for material deposition and removal
US20010015641A1 (en) * 1998-09-23 2001-08-23 Mark A. Swart Circuit board testing apparatus
KR100402177B1 (en) * 2001-09-21 2003-10-17 미래산업 주식회사 Tilt Correcting System of Gantry for Surface Mounting Device
KR100402179B1 (en) * 2001-09-21 2003-10-17 미래산업 주식회사 Tilt Correcting System of Dual Gantries
CN2727784Y (en) * 2004-03-26 2005-09-21 广辉电子股份有限公司 Circuit fault detecting and laser repairing device for two-dimensional display
JP2006049384A (en) * 2004-07-30 2006-02-16 Laserfront Technologies Inc Gantry xy stage

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI386709B (en) * 2007-11-30 2013-02-21 Lg Display Co Ltd Method for repairing defective cell of liquid crystal panel
TWI495923B (en) * 2008-01-28 2015-08-11 Charm & Ci Co Ltd Apparatus and method for repairing lcd panel
TWI634339B (en) * 2017-11-21 2018-09-01 興城科技股份有限公司 Method and apparatus for testing a tft panel

Also Published As

Publication number Publication date
KR20070080231A (en) 2007-08-09
JP2007206641A (en) 2007-08-16
CN101017256B (en) 2011-03-30
CN101017256A (en) 2007-08-15
TWI334030B (en) 2010-12-01
KR100868471B1 (en) 2008-11-12

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees