CN100445816C - 基板端缘部覆膜的除去装置 - Google Patents
基板端缘部覆膜的除去装置 Download PDFInfo
- Publication number
- CN100445816C CN100445816C CNB2005100785633A CN200510078563A CN100445816C CN 100445816 C CN100445816 C CN 100445816C CN B2005100785633 A CNB2005100785633 A CN B2005100785633A CN 200510078563 A CN200510078563 A CN 200510078563A CN 100445816 C CN100445816 C CN 100445816C
- Authority
- CN
- China
- Prior art keywords
- substrate
- end edge
- edge portion
- slit
- overlay film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1313—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells specially adapted for a particular application
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
- B08B11/04—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto specially adapted for plate glass, e.g. prior to manufacture of windshields
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C13/00—Means for manipulating or holding work, e.g. for separate articles
- B05C13/02—Means for manipulating or holding work, e.g. for separate articles for particular articles
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1316—Methods for cleaning the liquid crystal cells, or components thereof, during manufacture: Materials therefor
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
- Coating Apparatus (AREA)
- Cleaning In General (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
Description
Claims (2)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP179077/04 | 2004-06-17 | ||
JP2004179077A JP2006000748A (ja) | 2004-06-17 | 2004-06-17 | 基板端縁部被膜の除去装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1710468A CN1710468A (zh) | 2005-12-21 |
CN100445816C true CN100445816C (zh) | 2008-12-24 |
Family
ID=35706730
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005100785633A Active CN100445816C (zh) | 2004-06-17 | 2005-06-17 | 基板端缘部覆膜的除去装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP2006000748A (zh) |
KR (1) | KR20060046468A (zh) |
CN (1) | CN100445816C (zh) |
TW (1) | TW200611753A (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101740325B (zh) * | 2008-11-14 | 2012-11-28 | 家登精密工业股份有限公司 | 半导体基材清洁装置 |
KR100934765B1 (ko) * | 2009-01-29 | 2009-12-30 | 주식회사 에이디피엔지니어링 | 평판표시소자 제조장치 |
JP5835188B2 (ja) * | 2012-11-06 | 2015-12-24 | 東京エレクトロン株式会社 | 基板周縁部の塗布膜除去方法、基板処理装置及び記憶媒体 |
CN104511393A (zh) * | 2014-12-18 | 2015-04-15 | 赵春玲 | 边缘滚涂装置 |
DE102016002773A1 (de) * | 2016-03-09 | 2017-09-14 | Ludy Galvanosysteme Gmbh | Vorrichtung zum Transportieren eines ebenen Behandlungsgutes und System mit einer solchen Vorrichtung |
JP7131334B2 (ja) * | 2018-11-29 | 2022-09-06 | 株式会社安川電機 | 基板支持装置、基板搬送ロボットおよびアライナ装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08102434A (ja) * | 1994-08-04 | 1996-04-16 | Tokyo Ohka Kogyo Co Ltd | 基板端縁部被膜の除去方法及び除去装置 |
JPH1196551A (ja) * | 1997-09-17 | 1999-04-09 | Mitsubishi Materials Corp | ディスクの保管装置 |
JP2004039730A (ja) * | 2002-07-01 | 2004-02-05 | Advanced Display Inc | 基板端面洗浄装置、基板端面洗浄方法及び半導体装置の製造方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08297278A (ja) * | 1995-04-25 | 1996-11-12 | Toppan Printing Co Ltd | 基板搬出装置 |
JP3809798B2 (ja) * | 2001-12-20 | 2006-08-16 | 凸版印刷株式会社 | 基板端部現像方法及びその現像装置 |
JP2003303762A (ja) * | 2002-04-11 | 2003-10-24 | Tokyo Electron Ltd | 基板処理装置及び基板処理方法 |
-
2004
- 2004-06-17 JP JP2004179077A patent/JP2006000748A/ja active Pending
-
2005
- 2005-06-14 TW TW094119657A patent/TW200611753A/zh unknown
- 2005-06-16 KR KR1020050051745A patent/KR20060046468A/ko not_active Application Discontinuation
- 2005-06-17 CN CNB2005100785633A patent/CN100445816C/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08102434A (ja) * | 1994-08-04 | 1996-04-16 | Tokyo Ohka Kogyo Co Ltd | 基板端縁部被膜の除去方法及び除去装置 |
JPH1196551A (ja) * | 1997-09-17 | 1999-04-09 | Mitsubishi Materials Corp | ディスクの保管装置 |
JP2004039730A (ja) * | 2002-07-01 | 2004-02-05 | Advanced Display Inc | 基板端面洗浄装置、基板端面洗浄方法及び半導体装置の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
TW200611753A (en) | 2006-04-16 |
CN1710468A (zh) | 2005-12-21 |
KR20060046468A (ko) | 2006-05-17 |
JP2006000748A (ja) | 2006-01-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20230529 Address after: Kanagawa, Japan Patentee after: Process Equipment Business Division Preparation Co.,Ltd. Address before: Kawasaki, Japan Patentee before: TOKYO OHKA KOGYO CO.,LTD. Effective date of registration: 20230529 Address after: Ibaraki Patentee after: Ameco Technology Co.,Ltd. Address before: Kanagawa, Japan Patentee before: Process Equipment Business Division Preparation Co.,Ltd. |