CN100422660C - 真空装置 - Google Patents
真空装置 Download PDFInfo
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- CN100422660C CN100422660C CNB2004800227679A CN200480022767A CN100422660C CN 100422660 C CN100422660 C CN 100422660C CN B2004800227679 A CNB2004800227679 A CN B2004800227679A CN 200480022767 A CN200480022767 A CN 200480022767A CN 100422660 C CN100422660 C CN 100422660C
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- cryogenic pump
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B29/00—Other pumps with movable, e.g. rotatable cylinders
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B41/00—Pumping installations or systems specially adapted for elastic fluids
- F04B41/06—Combinations of two or more pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B41/00—Fluid-circulation arrangements
- F25B41/20—Disposition of valves, e.g. of on-off valves or flow control valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/10—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point with several cooling stages
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2309/00—Gas cycle refrigeration machines
- F25B2309/002—Gas cycle refrigeration machines with parallel working cold producing expansion devices in one circuit
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2309/00—Gas cycle refrigeration machines
- F25B2309/14—Compression machines, plants or systems characterised by the cycle used
- F25B2309/1428—Control of a Stirling refrigeration machine
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
- F25B2400/04—Refrigeration circuit bypassing means
- F25B2400/0411—Refrigeration circuit bypassing means for the expansion valve or capillary tube
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2600/00—Control issues
- F25B2600/25—Control of valves
- F25B2600/2501—Bypass valves
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Extrusion Moulding Of Plastics Or The Like (AREA)
- Glass Compositions (AREA)
- Control Of Positive-Displacement Pumps (AREA)
Abstract
一种真空装置,包括多个低温泵(10),与一个或多个真空室连接。低温泵(10)经由介质供应管道(12)和介质回流管道(14)与压缩机(16)连接。调节装置(18)连接在至少一低温泵之前,以控制供给低温泵的介质量。此外,低温泵(10)包括温度测量装置。温度测量装置和调节装置(18)与控制器(28)连接。为使所需介质量供给低温泵(10),按照本发明,调节装置(18)包括在介质供应管道(12)中的节流装置(24)和在节流旁通管道(22)中的控制阀。
Description
技术领域
本发明涉及一种真空装置,包括多个低温泵,以产生真空。
背景技术
此种真空装置包括多个低温泵,通常并列布置,该低温泵连接一个或多个真空室。此外,真空装置包括压缩机,藉此把冷却介质,通常为氦,加以压缩。压缩过的冷却介质经由介质供应管道供给低温泵,在低温泵内膨胀,再经介质回流管道回到压缩机。介质管道内可设清洗装置,以便从介质除去例如油或其它污物。如此,即可防止介质内所含污物进入低温泵。
通常,所用低温泵为两级式低温泵,按照Gifford McMahon原理操作。在低温泵中,通常是各级有一活塞,适当的是为共用活塞。在各活塞冲程中传送冷却介质,两级即相对应冷却。例如,辐射热或其它温度影响,会将个别泵加热。此外,有低温气体密度高引起的问题,在每一冲程中,较冷的低温泵会比较热的低温泵处理更多量的氦。因此,受到压缩机容量限制的可得到的氦量,被较冷低温泵消耗到较大程度,以致较热低温泵可得到的气体量减少。结果,太热的低温泵要费较长时间冷却。
按照US 5,775,109,此问题通过控制气体流量加以解决。此项控制可通过加热低温泵实现,以防止泵输送增加量的冷却介质。此外,活塞速度可降低,或活塞可停止。然而,其缺点是热力学效率下降,因为冷却器调节到特定频率。氦内储存的冷却能量因此没有完全利用。
发明内容
本发明的目的在于提供一种真空装置,包括多个低温泵,其中低温泵的温度可以容易而快速的方式控制。
按照本发明,此目的是以一种具有权利要求1特征的真空泵实现。
本发明的真空装置包括多个低温泵,其连接一个或多个真空室。这些泵优选是按照Gifford McMahon原理操作的低温泵,并优选包括冷却头。借助于经由介质供应管道和介质回流管道与低温泵连接的压缩装置,在低温泵内可提供至少二种不同压力水准的氦。本发明的真空装置可特别包括五个以上,甚至可能十个以上低温泵,彼此并列布置。这种系统还包括压缩装置,有多个(例如二或三个)压缩机,尤其是氦压缩机。此举造成较高能量需求,例如10至20千瓦特。此外,真空装置包括至少一调节装置,直接连接在低温泵前,即与之相关。借助调节装置,可以控制供给低温泵的氦量。为此目的,调节装置与控制器连接。此外,设有温度测量装置,与低温泵连接,特别是测量两级的温度。
本发明的调节装置布置在低温泵的介质供应管道内,并包括设在介质供应管道内的节流装置。此外,调节装置包括支路或跨越节流装置的节流旁通管。在节流旁通管道内布置有阀。该阀可利用控制器加以控制。因此,借助本发明的调节装置,可实现特别有两种介质供给情况供应给低温泵。在一种情况中,布置于旁通管道内的阀关闭,使介质只能经由节流装置流至低温泵。在另一种情况中,阀完全打开,使介质的最大量经旁通管道流至低温泵。在简单实施例中,阀可构造成开关阀,只包括两种状态,“全关”或“全开”。
借助控制器,因此可通过打开阀,以简单方式把大量冷却介质供给太热的低温泵。因此,关闭或保持与充分冷却的低温泵相关的阀关闭,可防止太大量的冷却介质被该低温泵所消耗。
在特别优选的变化例中,本发明的此种调节装置与多个低温泵关联。具体地,本发明的调节装置与真空装置的各低温泵关联。因此,可以简单方式确保对太热的低温泵供应充足量的冷却介质,以便快速达到低温泵的所需温度。
在优选实施例中,选择节流旁通常道的截面,使可能有最大介质供应。旁通管道内所设的阀可构造为使阀的有效截面可以变化,因而介质流量可以变化。旁通管道内布置的阀优选截面直径在6mm以上。所设喷嘴的截面直径大约1mm。
此外,可提供有效截面积可调节的节流装置。这所提供的优点是,节流装置的截面面积可以调节,使在标准操作当中,所需量的冷却介质的量可经此介质供应管道流到低温泵,而旁通管道内布置的阀可在标准操作中关闭。如此可容许例如由于热辐射而太热的低温泵被供应充分大量的冷却介质,尤其是氦。例如在启动操作期间,大量介质也是必须的。
在标准操作期间,低温泵通常只需在第一和第二级中保持温度恒定的最大量冷却介质的三分之一。借助本发明真空装置,即可减少压缩机的容量,因为本发明在网路上所布置的个别低温泵最大负载下,容许较低总体冷却剂消耗或冷却剂流量。
附图说明
图1为本发明真空泵的简图;
图2为节流旁通管道内所布置阀在控制上的简单流程图。
具体实施方式
下面参照附图详述本发明的优选实施例。
真空装置包括多个低温泵10,连接一个或多个真空室(图上未示)。低温泵10彼此并联布置,并经由介质供应管道12和介质回流管道14与包括两个压缩机16的压缩装置连接。
在与低温泵10直接关联的各个介质供应管道12内,各设有一调节装置18,以控制供给低温泵的介质量。调节装置18包括介质供应管道12的支路,分成两管道20、22彼此并列延伸。在第一管道20内,设有节流装置24,第二管道22内设有阀26。
在图示实施例中,各阀26经由虚线所示电路与控制器28连接。控制器28又经由虚线所示电路连接布置在低温泵10内的温度测量装置。
在图示实施例中,节流装置24不可变,却包括恒定的截面。另外,阀16是开关阀,可关闭或开启。此阀不包括中间位置。
控制器28的示范性功能如第2图所示。于此,在第一步骤30,就特定低温泵10的第一级温度与目标值加以比较。如果第一级测得温度超过目标值,即如果低温泵10的第一级太热,问题一定答“是”,从而在步骤32把各阀26打开。
若第一级的温度不超过目标值,在步骤34中检测第二级温度与第二目标值对照,该第二目标值与步骤30中检测的第一目标值不同。在步骤30中,如果第二级温度超过目标值,即第二级太热,作出“是”的决定。因此,在步骤32中打开阀26。
若第二级也够冷,即不超过目标值,作出“否”的决定,阀保持关闭(步骤36)。
上述各个低温泵的调查是定期进行的。阀的控制可进一步改进,尤其是在阀还可以是半开半闭的情况。为此目的,可例如界定进一步目标值和/或阈值。
Claims (6)
1. 一种真空装置,包括:
多个低温泵(10),连接一个或多个真空室;
压缩装置(16),经由介质供应管道(12)和介质回流管道(14)与低温泵(10)连接;
调节装置(18),连接在至少一低温泵(10)之前,以控制供给低温泵(10)的介质量;
温度测量装置,与低温泵(10)连接;和
控制器(28),与调节装置(18)及温度测量装置连接;
其特征在于,调节装置(18)包括布置在相应的介质供应管道(12)内的节流装置(24),以及布置在跨越节流装置的节流旁通管道(22)内的阀(26)。
2. 如权利要求1所述的真空装置,其特征在于,节流旁通管道(22)的截面是为最大介质供应而设计的。
3. 如权利要求1或2所述的真空装置,其特征在于,节流装置(24)的截面是为标准操作所需介质供应而设计的。
4. 如权利要求1所述的真空装置,其特征在于,节流装置(24)的截面面积是可调节的。
5. 如权利要求1所述的真空装置,其特征在于,通过阀(26)的流量是可调节的。
6. 如权利要求1所述的真空装置,其特征在于,调节装置(18)连接在各低温泵(10)之前。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US49700203P | 2003-08-20 | 2003-08-20 | |
US60/497,002 | 2003-08-20 |
Publications (2)
Publication Number | Publication Date |
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CN1833145A CN1833145A (zh) | 2006-09-13 |
CN100422660C true CN100422660C (zh) | 2008-10-01 |
Family
ID=34216063
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CNB2004800227679A Expired - Fee Related CN100422660C (zh) | 2003-08-20 | 2004-07-14 | 真空装置 |
Country Status (11)
Country | Link |
---|---|
US (1) | US7481066B2 (zh) |
EP (1) | EP1678446B1 (zh) |
JP (1) | JP2007502928A (zh) |
KR (1) | KR20060067958A (zh) |
CN (1) | CN100422660C (zh) |
AT (1) | ATE395565T1 (zh) |
DE (1) | DE502004007169D1 (zh) |
ES (1) | ES2307022T3 (zh) |
HK (1) | HK1093093A1 (zh) |
TW (1) | TW200508496A (zh) |
WO (1) | WO2005019744A1 (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102017289B (zh) | 2008-06-19 | 2014-06-25 | 夏普株式会社 | 无线装置 |
KR101093480B1 (ko) | 2010-08-16 | 2011-12-13 | 프란시스 충 화 판 | 구체 이동 경로의 측정 방법 |
JP5545858B2 (ja) * | 2010-09-21 | 2014-07-09 | 住友重機械工業株式会社 | クライオポンプシステム及びその制御方法 |
JP5978045B2 (ja) * | 2012-07-26 | 2016-08-24 | 株式会社アルバック | 減圧システム |
JP6067423B2 (ja) * | 2013-03-04 | 2017-01-25 | 住友重機械工業株式会社 | 極低温冷凍装置、クライオポンプ、核磁気共鳴画像装置、及び極低温冷凍装置の制御方法 |
KR101741708B1 (ko) * | 2016-07-13 | 2017-05-30 | 한국알박크라이오(주) | 컴프레서 장치 및 그 제어 방법 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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US5010737A (en) * | 1989-03-30 | 1991-04-30 | Aisin Seiki Kabushiki Kaisha | Multi-headed cryopump apparatus |
US5386708A (en) * | 1993-09-02 | 1995-02-07 | Ebara Technologies Incorporated | Cryogenic vacuum pump with expander speed control |
US5775109A (en) * | 1997-01-02 | 1998-07-07 | Helix Technology Corporation | Enhanced cooldown of multiple cryogenic refrigerators supplied by a common compressor |
CN1405521A (zh) * | 2001-08-03 | 2003-03-26 | 住友重机械工业株式会社 | 多系统制冷机的运转方法、装置及制冷装置 |
JP2003113779A (ja) * | 2001-07-20 | 2003-04-18 | Helix Technol Corp | ヘリウム管理制御システム |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3139044C1 (de) * | 1981-10-01 | 1983-04-21 | Danfoss A/S, 6430 Nordborg | Kaelte- oder Waermepumpenkreislauf |
US4546611A (en) * | 1983-12-21 | 1985-10-15 | Eby Robert S | UF6 -Recovery process utilizing desublimation |
JPH0626459A (ja) * | 1992-07-09 | 1994-02-01 | Hitachi Ltd | 極低温冷却装置およびその冷却方法 |
JP4274648B2 (ja) * | 1999-09-29 | 2009-06-10 | 住友重機械工業株式会社 | クライオポンプの制御装置 |
EP1200780B1 (en) * | 2000-05-30 | 2011-03-30 | Brooks Automation, Inc. | A low temperature refrigeration system |
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2004
- 2004-07-14 EP EP04740982A patent/EP1678446B1/de not_active Not-in-force
- 2004-07-14 CN CNB2004800227679A patent/CN100422660C/zh not_active Expired - Fee Related
- 2004-07-14 WO PCT/EP2004/007763 patent/WO2005019744A1/de active IP Right Grant
- 2004-07-14 JP JP2006523539A patent/JP2007502928A/ja not_active Withdrawn
- 2004-07-14 KR KR1020067003136A patent/KR20060067958A/ko active IP Right Grant
- 2004-07-14 ES ES04740982T patent/ES2307022T3/es active Active
- 2004-07-14 US US10/568,549 patent/US7481066B2/en not_active Expired - Fee Related
- 2004-07-14 AT AT04740982T patent/ATE395565T1/de not_active IP Right Cessation
- 2004-07-14 DE DE502004007169T patent/DE502004007169D1/de not_active Expired - Fee Related
- 2004-08-12 TW TW093124142A patent/TW200508496A/zh unknown
-
2006
- 2006-09-22 HK HK06110606A patent/HK1093093A1/xx not_active IP Right Cessation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5010737A (en) * | 1989-03-30 | 1991-04-30 | Aisin Seiki Kabushiki Kaisha | Multi-headed cryopump apparatus |
US5386708A (en) * | 1993-09-02 | 1995-02-07 | Ebara Technologies Incorporated | Cryogenic vacuum pump with expander speed control |
US5775109A (en) * | 1997-01-02 | 1998-07-07 | Helix Technology Corporation | Enhanced cooldown of multiple cryogenic refrigerators supplied by a common compressor |
JP2003113779A (ja) * | 2001-07-20 | 2003-04-18 | Helix Technol Corp | ヘリウム管理制御システム |
CN1405521A (zh) * | 2001-08-03 | 2003-03-26 | 住友重机械工业株式会社 | 多系统制冷机的运转方法、装置及制冷装置 |
Also Published As
Publication number | Publication date |
---|---|
CN1833145A (zh) | 2006-09-13 |
US20060272338A1 (en) | 2006-12-07 |
WO2005019744A1 (de) | 2005-03-03 |
HK1093093A1 (en) | 2007-02-23 |
JP2007502928A (ja) | 2007-02-15 |
EP1678446A1 (de) | 2006-07-12 |
ATE395565T1 (de) | 2008-05-15 |
US7481066B2 (en) | 2009-01-27 |
EP1678446B1 (de) | 2008-05-14 |
DE502004007169D1 (de) | 2008-06-26 |
KR20060067958A (ko) | 2006-06-20 |
ES2307022T3 (es) | 2008-11-16 |
TW200508496A (en) | 2005-03-01 |
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