TW200508496A - Vacuum device - Google Patents

Vacuum device

Info

Publication number
TW200508496A
TW200508496A TW093124142A TW93124142A TW200508496A TW 200508496 A TW200508496 A TW 200508496A TW 093124142 A TW093124142 A TW 093124142A TW 93124142 A TW93124142 A TW 93124142A TW 200508496 A TW200508496 A TW 200508496A
Authority
TW
Taiwan
Prior art keywords
cryopumps
media
fed
temperature measuring
measuring device
Prior art date
Application number
TW093124142A
Other languages
Chinese (zh)
Inventor
Dirk Schiller
Holger Dietz
Gerhard Wilhelm Walter
Original Assignee
Leybold Vakuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum Gmbh filed Critical Leybold Vakuum Gmbh
Publication of TW200508496A publication Critical patent/TW200508496A/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B29/00—Other pumps with movable, e.g. rotatable cylinders
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B41/00—Fluid-circulation arrangements
    • F25B41/20—Disposition of valves, e.g. of on-off valves or flow control valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/10—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point with several cooling stages
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2309/00—Gas cycle refrigeration machines
    • F25B2309/002—Gas cycle refrigeration machines with parallel working cold producing expansion devices in one circuit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2309/00—Gas cycle refrigeration machines
    • F25B2309/14—Compression machines, plants or systems characterised by the cycle used 
    • F25B2309/1428—Control of a Stirling refrigeration machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
    • F25B2400/04—Refrigeration circuit bypassing means
    • F25B2400/0411—Refrigeration circuit bypassing means for the expansion valve or capillary tube
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2600/00—Control issues
    • F25B2600/25—Control of valves
    • F25B2600/2501—Bypass valves

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Extrusion Moulding Of Plastics Or The Like (AREA)
  • Glass Compositions (AREA)
  • Control Of Positive-Displacement Pumps (AREA)

Abstract

A vacuum device comprises a plurality of cryopumps (10) connected with one or a plurality of vacuum chambers. The cryopumps (10) are connected via media supply conduits (12) and media return conduits (14) with a compressor means (16). An adjusting means (18) is connected before at least one of the cryopumps for controlling the amount of media fed to the cryopump. Further, the cryopumps (10) comprise a temperature measuring device. The temperature measuring device and the adjusting device (18) are connected with a controller (28). To allow the desired amount of media to be fed to the cryopumps (10), the adjusting means (18) comprise, according to the present invention, throttle means (24) in a media supply conduit (12) and a controllable valve in a throttle bypass conduit (22).
TW093124142A 2003-08-20 2004-08-12 Vacuum device TW200508496A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US49700203P 2003-08-20 2003-08-20

Publications (1)

Publication Number Publication Date
TW200508496A true TW200508496A (en) 2005-03-01

Family

ID=34216063

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093124142A TW200508496A (en) 2003-08-20 2004-08-12 Vacuum device

Country Status (11)

Country Link
US (1) US7481066B2 (en)
EP (1) EP1678446B1 (en)
JP (1) JP2007502928A (en)
KR (1) KR20060067958A (en)
CN (1) CN100422660C (en)
AT (1) ATE395565T1 (en)
DE (1) DE502004007169D1 (en)
ES (1) ES2307022T3 (en)
HK (1) HK1093093A1 (en)
TW (1) TW200508496A (en)
WO (1) WO2005019744A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8493270B2 (en) 2008-06-19 2013-07-23 Sharp Kabushiki Kaisha Wireless device
KR101093480B1 (en) 2010-08-16 2011-12-13 프란시스 충 화 판 Ball movement path measuring method
JP5545858B2 (en) * 2010-09-21 2014-07-09 住友重機械工業株式会社 Cryopump system and control method thereof
JP5978045B2 (en) * 2012-07-26 2016-08-24 株式会社アルバック Decompression system
JP6067423B2 (en) * 2013-03-04 2017-01-25 住友重機械工業株式会社 Cryogenic refrigerator, cryopump, nuclear magnetic resonance imaging apparatus, and control method for cryogenic refrigerator
KR101741708B1 (en) * 2016-07-13 2017-05-30 한국알박크라이오(주) Compressor apparatus and control method thereof

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3139044C1 (en) * 1981-10-01 1983-04-21 Danfoss A/S, 6430 Nordborg Cold or heat pump cycle
US4546611A (en) * 1983-12-21 1985-10-15 Eby Robert S UF6 -Recovery process utilizing desublimation
US5010737A (en) * 1989-03-30 1991-04-30 Aisin Seiki Kabushiki Kaisha Multi-headed cryopump apparatus
JPH0626459A (en) * 1992-07-09 1994-02-01 Hitachi Ltd Cryogenic cooling device and cooling method thereon
US5386708A (en) * 1993-09-02 1995-02-07 Ebara Technologies Incorporated Cryogenic vacuum pump with expander speed control
US5775109A (en) * 1997-01-02 1998-07-07 Helix Technology Corporation Enhanced cooldown of multiple cryogenic refrigerators supplied by a common compressor
JP4274648B2 (en) * 1999-09-29 2009-06-10 住友重機械工業株式会社 Control device for cryopump
JP5421509B2 (en) * 2000-05-30 2014-02-19 ブルックス オートメイション インコーポレーテッド Cryogenic refrigeration system with controlled cooling and heating rate and long-term heating function
US7127901B2 (en) * 2001-07-20 2006-10-31 Brooks Automation, Inc. Helium management control system
JP3754992B2 (en) * 2001-08-03 2006-03-15 住友重機械工業株式会社 Multi-system refrigerator operation method, apparatus, and refrigeration apparatus

Also Published As

Publication number Publication date
US20060272338A1 (en) 2006-12-07
WO2005019744A1 (en) 2005-03-03
DE502004007169D1 (en) 2008-06-26
US7481066B2 (en) 2009-01-27
CN1833145A (en) 2006-09-13
ES2307022T3 (en) 2008-11-16
KR20060067958A (en) 2006-06-20
ATE395565T1 (en) 2008-05-15
EP1678446A1 (en) 2006-07-12
CN100422660C (en) 2008-10-01
HK1093093A1 (en) 2007-02-23
JP2007502928A (en) 2007-02-15
EP1678446B1 (en) 2008-05-14

Similar Documents

Publication Publication Date Title
HK1093093A1 (en) Vacuum device
EP1783048A3 (en) Integral add heat and surge control valve for compressor
MXPA05004513A (en) Pressure regulator and shut-off valve.
DE50109582D1 (en) Method for regulating the pumping of a turbocompressor
TW200737314A (en) Gas supply system, substrate processing apparatus and gas supply method
DE60143256D1 (en) ELECTRONIC GAS REGULATOR WITH HIGH FLOW
AU2003228548A1 (en) Variable evaporator control for a gas dryer
AU2001267599A1 (en) Apparatus for and method of lubricating of piston engine
AU6841587A (en) Method and arrangement for controlled application of supply pressure to pneumatic/hydraulic devices
AU2003250377A1 (en) Apparatus for controlling the pressure in a process chamber and method of operating same
SE0600199L (en) Milking system and method of vacuum control
CA2553722A1 (en) Pressure loaded pilot valve system and method for a regulator without atmospheric bleed
WO2008030760A3 (en) Oil-free air compressor system with inlet throttle
KR101849821B1 (en) Method for temperature control of a shaping tool
EP1336757A3 (en) Control device for variable displacement type compressor
DE602004000861D1 (en) MASTER SLAVE MOTORZAPFLUFTTEILSTEUER PROCESS AND SYSTEM
WO2009046292A3 (en) System and method for air flow control in a turbocharger
ATE225008T1 (en) HYDRAULIC CONTROL FOR A CONTINUOUSLY VARIABLE TRANSMISSION
SE0301566D0 (en) System and method of moving an implement of a vehicle
TW200510636A (en) Vacuum device
SE0200239L (en) Device for regulating differential pressure in heating and cooling systems
CA2454984A1 (en) Air bleed apparatus for a burner unit
JP2002242614A5 (en)
EP2096086B8 (en) Dead plate assembly
EP0972561A3 (en) Vacuum apparatus