EP1678446A1 - Vacuum device - Google Patents

Vacuum device

Info

Publication number
EP1678446A1
EP1678446A1 EP04740982A EP04740982A EP1678446A1 EP 1678446 A1 EP1678446 A1 EP 1678446A1 EP 04740982 A EP04740982 A EP 04740982A EP 04740982 A EP04740982 A EP 04740982A EP 1678446 A1 EP1678446 A1 EP 1678446A1
Authority
EP
European Patent Office
Prior art keywords
cryopumps
cryopump
vacuum
throttle
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP04740982A
Other languages
German (de)
French (fr)
Other versions
EP1678446B1 (en
Inventor
Dirk Schiller
Holger Dietz
Gerhard Wilhelm Walter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH, Leybold Vacuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP1678446A1 publication Critical patent/EP1678446A1/en
Application granted granted Critical
Publication of EP1678446B1 publication Critical patent/EP1678446B1/en
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B29/00—Other pumps with movable, e.g. rotatable cylinders
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B41/00—Fluid-circulation arrangements
    • F25B41/20—Disposition of valves, e.g. of on-off valves or flow control valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/10—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point with several cooling stages
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2309/00—Gas cycle refrigeration machines
    • F25B2309/002—Gas cycle refrigeration machines with parallel working cold producing expansion devices in one circuit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2309/00—Gas cycle refrigeration machines
    • F25B2309/14—Compression machines, plants or systems characterised by the cycle used 
    • F25B2309/1428—Control of a Stirling refrigeration machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
    • F25B2400/04—Refrigeration circuit bypassing means
    • F25B2400/0411—Refrigeration circuit bypassing means for the expansion valve or capillary tube
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2600/00—Control issues
    • F25B2600/25—Control of valves
    • F25B2600/2501—Bypass valves

Definitions

  • the invention relates to a vacuum device which has a plurality of cryopumps for generating vacuum.
  • Such vacuum devices have a plurality of cryopumps, which are usually connected in parallel to one another and are connected to one or more vacuum spaces. Furthermore, the vacuum device has a compressor device with which the refrigerant, usually helium, is compressed. The compressed refrigerant is conveyed to the cryopumps via medium supply lines, expands in the cryopump and is then returned to the compressor device via medium return lines. Possibly. cleaning devices are provided in the medium line to clean the medium of oil or other contaminants, for example. This keeps contamination of the medium away from the cryopumps.
  • the cryopumps used are usually two-stage cryopumps that operate according to the Gifford McMahon principle.
  • a piston possibly a common piston, is usually provided for each stage within the cryopump. With each piston stroke, refrigerant is transported and the two stages are cooled accordingly. For example, radiant heat or other temperature influences can cause individual pumps to heat up.
  • radiant heat or other temperature influences can cause individual pumps to heat up.
  • the object of the invention is to provide a vacuum device with a plurality of cryopumps in which the temperature of the cryopump can be regulated quickly and easily.
  • the vacuum device according to the invention has a plurality of cryopumps connected to one or more vacuum spaces. These are preferably cryopumps that operate according to the Gifford McMahon principle and preferably have a cooling head. With the aid of a compressor device connected to the cryopumps via medium supply lines and medium return lines, helium can be provided in the cryopumps in at least two different pressure levels.
  • a vacuum device according to the invention can in particular more than five, or possibly also have more than ten cryopumps which are connected in parallel with one another.
  • Systems of this type then have a compressor device with a plurality of, for example two or three, compressors, in particular helium compressors. This means that the required energy is relatively high, for example 10 to 20 kW.
  • the vacuum device has at least one adjusting device which is connected directly upstream of a cryopump, ie is assigned.
  • the amount of medium supplied to the cryopump can be controlled using the setting device.
  • the adjusting device is connected to a control device.
  • a temperature measuring device is provided which is connected to the cryopump and in particular measures temperatures of both stages.
  • the adjusting device according to the invention is arranged in a medium supply line of a cryopump and has a throttle device arranged in the medium supply line. Furthermore, the adjusting device has a branch or a throttle bypass that bridges the throttle device. A valve is arranged in the throttle bypass line. This valve can be controlled using the control device. With the aid of the adjusting device according to the invention, two medium supply states to the cryopump can be realized in particular. In one state, the valve arranged in the bypass line is closed, so that medium only reaches the cryopump through the throttle device. In another position, the valve is completely open so that a maximum amount of medium reaches the cryopump through the bypass line. In a simple embodiment, the valve can be designed as a switching valve that only has the two states completely closed or completely open.
  • a one-part device according to the invention is assigned to several cryopumps.
  • an adjusting device according to the invention is assigned to each cryopump of the vacuum device. This makes it possible to ensure in a simple manner that a cryopump that is too warm can be supplied with a sufficient amount of refrigerant so that the desired temperature of the cryopump can be reached quickly.
  • the cross section of the throttle bypass line is selected such that a maximum medium supply is possible.
  • the valve provided in the bypass line can be designed such that the effective cross section of the valve and thus the medium flow rate can be varied.
  • the valve arranged in the bypass line preferably has a cross-sectional diameter of more than 6 mm.
  • the nozzle provided has a cross-sectional diameter of approximately 1 mm.
  • a throttle device whose effective cross-sectional area can be adjusted.
  • a large amount of refrigerant is also required, for example, during start-up.
  • a cryopump usually only needs a third of the maximum refrigeration medium to keep the temperature constant in the first and second stages.
  • Fig. 1 is a schematic diagram of a vacuum device according to the invention.
  • Fig. 2 is a schematic flow diagram for controlling the valve arranged in the throttle bypass line.
  • the vacuum device has a plurality of cryopumps 10 which are connected to one or more vacuum spaces, not shown.
  • the cryopumps 10 are arranged in parallel with one another and are connected via medium feed lines 12 and medium return lines 14 to a compressor device having two compressors 16.
  • an adjusting device 18 is provided for controlling the quantity of medium supplied to the cryopump.
  • the setting device 18 has a branching of the medium supply line 12 in two lines 20, 22 running parallel to one another.
  • a throttle device 24 is provided in the first line 20 and a valve 26 in the second line 22.
  • the individual valves 26 are connected to a control device 28 via electrical lines shown in broken lines. Temperature control devices provided in the cryopumps 10 are also connected to the control device 28 via electrical lines, also shown in dashed lines.
  • the throttle device 24 is not variable, but has a constant cross section.
  • the valve 16 is a switching valve, which can either be closed or open. This valve does not have an intermediate position.
  • a first step 30 the temperature of a first stage of a specific cryopump 10 is compared with a target value. If the measured temperature of the first stage is higher than the target value, i. H. If the first stage of the cryopump 10 is too warm, the query is to be answered with “yes”, so that the associated valve 26 is opened in step 32.
  • step 34 the temperature of the second stage is checked for a second target value which differs from the first target value checked in step 30.
  • the decision “yes” is made if the temperature of the second stage exceeds the target value, ie the second stage is too warm. This in turn results in step 32 in opening the valve 26. If the second stage is cold enough and therefore does not exceed the target value, the decision is "no" and the valve remains closed (step 36).
  • the query of the individual cryopumps described above takes place at regular intervals.
  • the control of the valves can be refined, in particular in the case of valves that can also be partially opened or closed. For this purpose, for example, further target values or threshold values are defined.

Abstract

A vacuum device comprises a plurality of cryopumps (10) connected with one or a plurality of vacuum chambers. The cryopumps (10) are connected via media supply conduits (12) and media return conduits (14) with a compressor (16). An adjusting device (18) is connected before at least one of the cryopumps for controlling the amount of media fed to the cryopump. Further, the cryopumps (10) comprise a temperature measuring device. The temperature measuring device and the adjusting device (18) are connected with a controller (28). To allow the desired amount of media to be fed to the cryopumps (10), the adjusting device (18) comprises a throttle (24) in a media supply conduit (12) and a controllable valve in a throttle bypass conduit (22).

Description

Vakuumvorrichtung vacuum device
Die Erfindung betrifft eine Vakuumvorrichtung, die zur Erzeugung von Vakuum mehrere Kryopumpen aufweist.The invention relates to a vacuum device which has a plurality of cryopumps for generating vacuum.
Derartige Vakuumvorrichtungen weisen mehrere üblicherweise zueinander parallel geschaltete Kryopumpen auf, die mit einem oder mehreren Vakuumräumen verbunden sind. Ferner weist die Vakuumvorrichtung eine Kompressoreinrichtung auf, mit der das Kältemedium, üblicherweise Helium, komprimiert wird. Das komprimierte Kältemedium wird über Medium- Zuführleitungen zu den Kryopumpen gefördert, expandiert in der Kryopumpe und wird sodann über Medium-Rückführleitungen zur Kompressoreinrichtung zurückgeführt. Ggf. sind hierbei Reinigungseinrichtungen in der Medium- Leitung vorgesehen, um das Medium beispielsweise von Öl oder anderen Verunreinigungen zu reinigen. Hierdurch werden Kontaminationen des Mediums aus den Kryopumpen ferngehalten.Such vacuum devices have a plurality of cryopumps, which are usually connected in parallel to one another and are connected to one or more vacuum spaces. Furthermore, the vacuum device has a compressor device with which the refrigerant, usually helium, is compressed. The compressed refrigerant is conveyed to the cryopumps via medium supply lines, expands in the cryopump and is then returned to the compressor device via medium return lines. Possibly. cleaning devices are provided in the medium line to clean the medium of oil or other contaminants, for example. This keeps contamination of the medium away from the cryopumps.
Üblicherweise handelt es sich bei den eingesetzten Kryopumpen um Zweistufen-Kryopumpen, die nach dem Gifford McMahon-Prinzip arbeiten. Innerhalb der Kryopumpe ist üblicherweise je Stufe ein Kolben, ggf. ein gemeinsamer Kolben vorgesehen. Bei jedem Kolbenhub wird Kältemedium transportiert und eine entsprechende Kühlung der beiden Stufen erreicht. Beispielsweise durch Strahlungswärme oder andere Temperatureinflüsse kann eine Erwärmung einzelner Pumpen auftreten. Ferner besteht das Problem, dass auf Grund der höheren Dichte eines Gases mit einer niedrigeren Temperatur eine kältere Kryopumpe je Hub eine größere Menge Helium verarbeiten kann als eine wärmere Kryopumpe. Dies hat zur Folge, dass die vorhandene Menge an Helium, die auf Grund der Kompressorleistung begrenzt ist, von den kälteren Kryopumpen zu einem größeren Teil verbraucht wird, so dass sich die für die wärmeren Kryopumpen vorhandene Gasmenge verringert. Dies hat wiederum zur Folge, dass das Kühlen zu warmer Kryopumpen relativ lange dauert.The cryopumps used are usually two-stage cryopumps that operate according to the Gifford McMahon principle. A piston, possibly a common piston, is usually provided for each stage within the cryopump. With each piston stroke, refrigerant is transported and the two stages are cooled accordingly. For example, radiant heat or other temperature influences can cause individual pumps to heat up. There is also the problem that due to the higher density of a gas with a lower one Temperature a colder cryopump can process a larger amount of helium per stroke than a warmer cryopump. As a result, the available amount of helium, which is limited due to the compressor output, is largely used up by the colder cryopumps, so that the amount of gas available for the warmer cryopumps is reduced. This in turn means that cooling to warm cryopumps takes a relatively long time.
Zur Lösung dieses Problems ist es aus US 5,775,109 bekannt, den Gasfluss zu regulieren. Dies kann dadurch erfolgen, dass die Kryopumpe erwärmt wird, um zu vermeiden, dass diese eine erhöhte Menge an Kältemedium fördert. Ferner kann die Geschwindigkeit des Kolbens verringert oder der Kolben angehalten werden. Dies hat jedoch den Nachteil, dass sich der thermodynamische Wirkungsgrad verschlechtert, da die Kühler auf eine bestimmte Frequenz abgestimmt sind. Die in dem Helium gespeicherte Kälte wird somit nicht vollständig ausgenutzt.To solve this problem, it is known from US Pat. No. 5,775,109 to regulate the gas flow. This can be done by heating the cryopump to prevent it from delivering an increased amount of refrigerant. Furthermore, the speed of the piston can be reduced or the piston can be stopped. However, this has the disadvantage that the thermodynamic efficiency deteriorates because the coolers are tuned to a certain frequency. The cold stored in the helium is therefore not fully utilized.
Aufgabe der Erfindung ist es, eine Vakuumvorrichtung mit mehreren Kryopumpen zu schaffen, bei der die Temperatur der Kryopumpe auf einfache Weise und schnell geregelt werden kann.The object of the invention is to provide a vacuum device with a plurality of cryopumps in which the temperature of the cryopump can be regulated quickly and easily.
Die Lösung der Aufgabe erfolgt erfindungsgemäß durch die Merkmale des Anspruchs 1.According to the invention, the object is achieved by the features of claim 1.
Die erfϊndungsgemäße Vakuumvorrichtung weist mehrere mit einem oder mehreren Vakuumräumen verbundene Kryopumpen auf. Hierbei handelt es sich vorzugsweise um Kryopumpen, die nach dem Gifford McMahon-Prinzip arbeiten und vorzugsweise einen Kühlkopf aufweisen. Mit Hilfe einer über Medium-Zuführleitungen und Medium-Rückführleitungen mit den Kryopumpen verbundenen Kompressoreinrichtung kann in den Kryopumpen Helium in zumindest zwei verschiedenen Druckniveaus bereitgestellt werden. Hierbei kann eine erfϊndungsgemäße Vakuumvorrichtung insbesondere mehr als fünf, oder ggf. auch mehr als zehn Kryopumpen aufweisen, die zueinander parallel geschaltet sind. Derartige Systeme weisen sodann eine Kompressoreinrichtung mit mehreren, beispielsweise zwei oder drei Kompressoren, insbesondere Helium-Kompressoren, auf. Dies führt dazu, dass der erforderliche Energiebedarf relativ hoch ist und beispielsweise 10 bis 20 kW beträgt. Ferner weist die Vakuumvorrichtung zumindest eine EinStelleinrichtung auf, die unmittelbar einer Kryopumpe vorgeschaltet, d. h. zugeordnet ist. Mit Hilfe der EinStelleinrichtung kann die der Kryopumpe zugeführte Mediummenge gesteuert werden. Hierzu ist die Einsteileinrichtung mit einer Steuereinrichtung verbunden. Ferner ist eine Temperaturmessvorrichtung vorgesehen, die mit der Kryopumpe verbunden ist und insbesondere Temperaturen beider Stufen misst.The vacuum device according to the invention has a plurality of cryopumps connected to one or more vacuum spaces. These are preferably cryopumps that operate according to the Gifford McMahon principle and preferably have a cooling head. With the aid of a compressor device connected to the cryopumps via medium supply lines and medium return lines, helium can be provided in the cryopumps in at least two different pressure levels. Here, a vacuum device according to the invention can in particular more than five, or possibly also have more than ten cryopumps which are connected in parallel with one another. Systems of this type then have a compressor device with a plurality of, for example two or three, compressors, in particular helium compressors. This means that the required energy is relatively high, for example 10 to 20 kW. Furthermore, the vacuum device has at least one adjusting device which is connected directly upstream of a cryopump, ie is assigned. The amount of medium supplied to the cryopump can be controlled using the setting device. For this purpose, the adjusting device is connected to a control device. Furthermore, a temperature measuring device is provided which is connected to the cryopump and in particular measures temperatures of both stages.
Die erfindungsgemäße EinStelleinrichtung ist in einer Medium-Zuführleitung einer Kryopumpe angeordnet und weist eine in der Medium-Zuführleitung angeordnete Drosseleinrichtung auf. Ferner weist die Einsteileinrichtung eine Verzweigung bzw. einen Drossel-Beipass auf, der die Drosseleinrichtung überbrückt. In der Drossel-Beipassleitung ist ein Ventil angeordnet. Dieses Ventil ist mit Hilfe der Steuereinrichtung steuerbar. Mit Hilfe der erfindungsgemäßen EinStelleinrichtung können somit insbesondere zwei Medium-Zuführzustände zu der Kryopumpe realisiert werden. In einem Zustand ist das in der Beipassleitung angeordnete Ventil geschlossen, so dass Medium nur durch die Drosseleinrichtung hindurch zu der Kryopumpe gelangt. In einer anderen Stellung ist das Ventil vollständig geöffnet, so dass eine maximale Mediummenge durch die Beipassleitung zu der Kryopumpe gelangt. Hierbei kann das Ventil in einer einfachen Ausführungsform als Schaltventil ausgebildet sein, das nur die beiden Zustände vollständig geschlossen oder vollständig offen aufweist.The adjusting device according to the invention is arranged in a medium supply line of a cryopump and has a throttle device arranged in the medium supply line. Furthermore, the adjusting device has a branch or a throttle bypass that bridges the throttle device. A valve is arranged in the throttle bypass line. This valve can be controlled using the control device. With the aid of the adjusting device according to the invention, two medium supply states to the cryopump can be realized in particular. In one state, the valve arranged in the bypass line is closed, so that medium only reaches the cryopump through the throttle device. In another position, the valve is completely open so that a maximum amount of medium reaches the cryopump through the bypass line. In a simple embodiment, the valve can be designed as a switching valve that only has the two states completely closed or completely open.
Mit Hilfe der Steuereinrichtung ist es somit auf einfache Weise möglich, beispielweise einer zu warmen Kryopumpe durch Öffnen des Ventils eine große Menge an Kältemedium zur Verfügung zu stellen. Hierbei kann gleichzeitig durch Schließen oder Geschlossenhalten von Ventilen, die den ausreichend kalten Kryopumpen zugeordnet sind, vermieden werden, dass durch diese eine zu große Menge an Kältemedium abgeführt wird.With the aid of the control device, it is thus possible in a simple manner to provide a cryopump that is too warm, for example, by opening the valve with a large amount of refrigerant. This can be done simultaneously by closing or keeping valves that are assigned to the sufficiently cold cryopumps avoided that too much refrigerant is discharged through them.
Besonders bevorzugt ist es, dass mehreren Kryopumpen eine derartige erfindungsgemäße Einsteileinrichtung zugeordnet ist. Insbesondere ist jeder Kryopumpe der Vakuumvorrichtung eine erfindungsgemäße EinStelleinrichtung zugeordnet. Hierdurch ist es möglich, auf einfache Weise sicherzustellen, dass einer zu warmen Kryopumpe eine ausreichende Menge an Kältemedium dargeboten werden kann, so dass die gewünschte Temperatur der Kryopumpe schnell erreicht werden kann.It is particularly preferred that a one-part device according to the invention is assigned to several cryopumps. In particular, an adjusting device according to the invention is assigned to each cryopump of the vacuum device. This makes it possible to ensure in a simple manner that a cryopump that is too warm can be supplied with a sufficient amount of refrigerant so that the desired temperature of the cryopump can be reached quickly.
Bei einer bevorzugten Ausführungsform ist der Querschnitt der Drossel- Beipassleitung derart gewählt, dass eine maximale Mediumzufuhr möglich ist. Das in der Beipassleitung vorgesehene Ventil kann derart ausgebildet sein, dass der effektive Querschnitt des Ventils und somit die Medium- Durchflussmenge variiert werden kann. Das in der Beipassleitung angeordnete Ventil weist vorzugsweise einen Querschnittsdurchmesser von mehr als 6 mm auf. Die vorgesehene Düse weist einen Querschnittsdurchmesser von ca. 1 mm auf.In a preferred embodiment, the cross section of the throttle bypass line is selected such that a maximum medium supply is possible. The valve provided in the bypass line can be designed such that the effective cross section of the valve and thus the medium flow rate can be varied. The valve arranged in the bypass line preferably has a cross-sectional diameter of more than 6 mm. The nozzle provided has a cross-sectional diameter of approximately 1 mm.
Ebenso ist es möglich, eine Drosseleinrichtung vorzusehen, deren effektive Querschnittsfläche eingestellt werden kann. Dies hat den Vorteil, dass die Querschnittsfläche der Drosseleinrichtung derart eingestellt werden kann, dass im Standardbetrieb die erforderliche Kältemediummenge durch diese Medium- Zuführleitung zu der Kryopumpe gelangt und das in der Beipassleitung angeordnete Ventil im Standardbetrieb geschlossen sein kann. Hierdurch ist es möglich, einer beispielsweise auf Grund von Wärmestrahlung zu warmen Kryopumpe eine ausreichend große Menge an Kältemedium, insbesondere Helium, zur Verfügung zu stellen. Eine große Menge an Kältemedium ist beispielsweise auch im Startbetrieb erforderlich. Im Standardbetrieb wird von einer Kryopumpe üblicherweise nur ein Drittel des maximalen Kältemediums benötigt, um die Temperatur in der ersten und zweiten Stufe konstant zu halten. Mit Hilfe der erfindungsgemäßen Vakuumvorrichtung ist es somit möglich, die Kapazität der Kompressoreinrichtung zu verringern, da auf Grund der Erfindung bei Spitzenbelastungen an einzelnen Kryopumpen eines Netzwerks ein geringerer Gesamt-Kältemittel-Verbrauch bzw. Kälte mitte Istrom erforderlich ist. Ebenso ist es möglich, bei Verwendung von Kompressoren gleichbleibender Kapazität mit Hilfe der Erfindung eine Reserve zu schaffen.It is also possible to provide a throttle device whose effective cross-sectional area can be adjusted. This has the advantage that the cross-sectional area of the throttle device can be set in such a way that, in standard operation, the required amount of refrigerant reaches the cryopump through this medium supply line and the valve arranged in the bypass line can be closed in standard operation. This makes it possible to provide a sufficiently large amount of cooling medium, in particular helium, to a cryopump that is too warm, for example due to thermal radiation. A large amount of refrigerant is also required, for example, during start-up. In standard operation, a cryopump usually only needs a third of the maximum refrigeration medium to keep the temperature constant in the first and second stages. With the help of the vacuum device according to the invention, it is thus possible to reduce the capacity of the compressor device, since, due to the invention, a lower total refrigerant consumption or refrigerant center current is required at peak loads on individual cryopumps in a network. It is also possible to create a reserve when using compressors of constant capacity with the aid of the invention.
Nachfolgend wird die Erfindung an Hand einer bevorzugten Ausführungsform unter Bezugnahme auf die anliegenden Zeichnungen näher erläutert:The invention is explained in more detail below on the basis of a preferred embodiment with reference to the accompanying drawings:
Es zeigen:Show it:
Fig. 1 eine schematische Prinzipskizze einer erfindungsgemäßen Vakuumvorrichtung undFig. 1 is a schematic diagram of a vacuum device according to the invention and
Fig. 2 ein schematisches Flussdiagramm zur Steuerung des in der Drossel- Beipassleitung angeordneten Ventils.Fig. 2 is a schematic flow diagram for controlling the valve arranged in the throttle bypass line.
Die Vakuumvorrichtung weist mehrere Kryopumpen 10 auf, die mit einem oder mehreren nicht dargestellten Vakuumräumen verbunden sind. Die Kryopumpen 10 sind zueinander parallel angeordnet und über Medium- Zuführleitungen 12 und Medium-Rückführleitungen 14 mit einer zwei Kompressoren 16 aufweisenden Kompressoreinrichtung verbunden.The vacuum device has a plurality of cryopumps 10 which are connected to one or more vacuum spaces, not shown. The cryopumps 10 are arranged in parallel with one another and are connected via medium feed lines 12 and medium return lines 14 to a compressor device having two compressors 16.
In den einzelnen Medium-Zuführleitungen 12, die unmittelbar einer Kryopumpe 10 zugeordnet sind, ist jeweils eine EinStelleinrichtung 18 zur Steuerung der der Kryopumpe zugeführten Mediummenge vorgesehen. Die EinStelleinrichtung 18 weist eine Verzweigung der Medium-Zuführleitung 12 in zwei zueinander parallel verlaufende Leitungen 20, 22 auf. Hierbei ist in der ersten Leitung 20 eine Drosseleinrichtung 24 und in der zweiten Leitung 22 ein Ventil 26 vorgesehen.In the individual medium supply lines 12, which are directly assigned to a cryopump 10, an adjusting device 18 is provided for controlling the quantity of medium supplied to the cryopump. The setting device 18 has a branching of the medium supply line 12 in two lines 20, 22 running parallel to one another. A throttle device 24 is provided in the first line 20 and a valve 26 in the second line 22.
Im dargestellten Ausführungsbeispiel sind die einzelnen Ventile 26 über gestrichelt dargestellte elektrische Leitungen mit einer Steuereinrichtung 28 verbunden. Mit der Steuereinrichtung 28 sind ferner über ebenfalls gestrichelt dargestellte elektrische Leitungen in den Kryopumpen 10 vorgesehene Temperaturmessvorrichtungen verbunden.In the exemplary embodiment shown, the individual valves 26 are connected to a control device 28 via electrical lines shown in broken lines. Temperature control devices provided in the cryopumps 10 are also connected to the control device 28 via electrical lines, also shown in dashed lines.
Im dargestellten Ausführungsbeispiel ist die Drosseleinrichtung 24 nicht variabel, sondern weist einen konstanten Querschnitt auf. Ferner handelt es sich bei dem Ventil 16 um ein Schaltventil, das entweder geschlossen oder geöffnet sein kann. Eine Zwischenstellung weist dieses Ventil nicht auf.In the illustrated embodiment, the throttle device 24 is not variable, but has a constant cross section. Furthermore, the valve 16 is a switching valve, which can either be closed or open. This valve does not have an intermediate position.
Die der Steuereinrichtung 28 beispielsweise hinterlegte Funktionsweise ist in Fig. 2 dargestellt. Hierbei wird in einem ersten Schritt 30 die Temperatur einer ersten Stufe einer bestimmten Kryopumpe 10 mit einem Zielwert verglichen. Ist die gemessene Temperatur der ersten Stufe höher als der Zielwert, d. h. ist die erste Stufe der Kryopumpe 10 zu warm, ist die Abfrage mit „ja" zu beantworten, so dass in dem Schritt 32 ein Öffnen des zugehörigen Ventils 26 erfolgt.The mode of operation stored for example in the control device 28 is shown in FIG. 2. In a first step 30, the temperature of a first stage of a specific cryopump 10 is compared with a target value. If the measured temperature of the first stage is higher than the target value, i. H. If the first stage of the cryopump 10 is too warm, the query is to be answered with “yes”, so that the associated valve 26 is opened in step 32.
Übersteigt die Temperatur der ersten Stufe den Zielwert nicht, so erfolgt im nächsten Schritt 34 ein Überprüfen der Temperatur der zweiten Stufe hinsichtlich eines zweiten Zielwertes, der sich von dem im Schritt 30 überprüften ersten Zielwert unterscheidet. Entsprechend dem Schritt 30 erfolgt die Entscheidung „ja" sofern die Temperatur der zweiten Stufe den Zielwert übersteigt, d. h. die zweite Stufe zu warm ist. Dies hat wiederum im Schritt 32 ein Öffnen des Ventils 26 zur Folge. Ist auch die zweite Stufe kalt genug und übersteigt somit den Zielwert nicht, lautet die Entscheidung „nein" und das Ventil bleibt geschlossen (Schritt 36).If the temperature of the first stage does not exceed the target value, then in the next step 34 the temperature of the second stage is checked for a second target value which differs from the first target value checked in step 30. In accordance with step 30, the decision “yes” is made if the temperature of the second stage exceeds the target value, ie the second stage is too warm. This in turn results in step 32 in opening the valve 26. If the second stage is cold enough and therefore does not exceed the target value, the decision is "no" and the valve remains closed (step 36).
Die vorstehend beschriebene Abfrage der einzelnen Kryopumpen erfolgt in regelmäßigen Abständen. Die Steuerung der Ventile kann insbesondere bei Ventilen, die auch teilweise geöffnet oder geschlossen werden können, noch verfeinert werden. Hierzu werden beispielsweise weitere Zielwerte bzw. Schwellwerte definiert. The query of the individual cryopumps described above takes place at regular intervals. The control of the valves can be refined, in particular in the case of valves that can also be partially opened or closed. For this purpose, for example, further target values or threshold values are defined.

Claims

Patentansprüche claims
1. Vakuumvorrichtung mit mehreren mit einem oder mehreren Vakuumräumen verbundenen Kryopumpen (10), einer über Medium-Zuführleitungen (12) und Medium-Rückführleitungen (14) mit den Kryopumpen (10) verbundenen Kompressoreinrichtung (16), einer zumindest eine der Kryopumpen (10) vorgeschalteten Einsteileinrichtung (18) zur Steuerung der der Kryopumpe (10) zugeführten Mediummenge, einer mit der Kryopumpe (10) verbundenen Temperaturmessvorrichtung und einer mit der Einsteileinrichtung (18) und der Temperaturmessvorrichtung verbundenen Steuereinrichtung (28) dadurch gekennzeichnet, dass die EinStelleinrichtung (18) eine in der entsprechenden Medium- Zuführleitung (12) angeordnete Drosseleinrichtung (24) und ein innerhalb einer Drossel-Beipassleitung (22) angeordnetes Ventil (26) aufweist.1. Vacuum device with a plurality of cryopumps (10) connected to one or more vacuum spaces, a compressor device (16) connected to the cryopumps (10) via medium supply lines (12) and medium return lines (14), at least one of the cryopumps (10 ) upstream adjusting device (18) for controlling the amount of medium supplied to the cryopump (10), a temperature measuring device connected to the cryopump (10) and a control device (28) connected to the adjusting device (18) and the temperature measuring device, characterized in that the adjusting device (18 ) has a throttle device (24) arranged in the corresponding medium supply line (12) and a valve (26) arranged within a throttle bypass line (22).
2. Vakuumvorrichtung nach Anspruch 1, dadurch gekennzeichnet, dass der Querschnitt der Drossel-Beipassleitung (22) für eine maximale Mediumzufuhr ausgelegt ist. 2. Vacuum device according to claim 1, characterized in that the cross section of the throttle bypass line (22) is designed for a maximum medium supply.
3. Vakuumvorrichtung nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass die Drosseleinrichtung (24) einen Querschnitt aufweist, der für die für Standardbetrieb erforderliche Mediumzufuhr ausgelegt ist.3. Vacuum device according to claim 1 or 2, characterized in that the throttle device (24) has a cross section which is designed for the medium supply required for standard operation.
4. Vakuumvorrichtung nach einem der Ansprüche 1 - 3, dadurch gekennzeichnet, dass die Querschnittsfläche der Drosseleinrichtung (24) einstellbar ist.4. Vacuum device according to one of claims 1-3, characterized in that the cross-sectional area of the throttle device (24) is adjustable.
5. Vakuumvorrichtung nach einem der Ansprüche 1 - 4, dadurch gekennzeichnet, dass die Durchflussmenge des Ventils (26) einstellbar ist.5. Vacuum device according to one of claims 1-4, characterized in that the flow rate of the valve (26) is adjustable.
6. Vakuumvorrichtung nach einem der Ansprüche 1 - 5, dadurch gekennzeichnet, dass jeder Kryopumpe (10) eine Einsteileinrichtung (18) vorgeschaltet ist. 6. Vacuum device according to one of claims 1-5, characterized in that each cryopump (10) is preceded by an adjusting device (18).
EP04740982A 2003-08-20 2004-07-14 Vacuum device Not-in-force EP1678446B1 (en)

Applications Claiming Priority (2)

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PCT/EP2004/007763 WO2005019744A1 (en) 2003-08-20 2004-07-14 Vacuum device

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US20060272338A1 (en) 2006-12-07
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TW200508496A (en) 2005-03-01
US7481066B2 (en) 2009-01-27
ATE395565T1 (en) 2008-05-15
EP1678446B1 (en) 2008-05-14
KR20060067958A (en) 2006-06-20
HK1093093A1 (en) 2007-02-23
JP2007502928A (en) 2007-02-15
DE502004007169D1 (en) 2008-06-26
ES2307022T3 (en) 2008-11-16

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