ATE395565T1 - Vakuumvorrichtung - Google Patents
VakuumvorrichtungInfo
- Publication number
- ATE395565T1 ATE395565T1 AT04740982T AT04740982T ATE395565T1 AT E395565 T1 ATE395565 T1 AT E395565T1 AT 04740982 T AT04740982 T AT 04740982T AT 04740982 T AT04740982 T AT 04740982T AT E395565 T1 ATE395565 T1 AT E395565T1
- Authority
- AT
- Austria
- Prior art keywords
- cryopumps
- media
- adjusting device
- fed
- temperature measuring
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B29/00—Other pumps with movable, e.g. rotatable cylinders
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B41/00—Pumping installations or systems specially adapted for elastic fluids
- F04B41/06—Combinations of two or more pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B41/00—Fluid-circulation arrangements
- F25B41/20—Disposition of valves, e.g. of on-off valves or flow control valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/10—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point with several cooling stages
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2309/00—Gas cycle refrigeration machines
- F25B2309/002—Gas cycle refrigeration machines with parallel working cold producing expansion devices in one circuit
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2309/00—Gas cycle refrigeration machines
- F25B2309/14—Compression machines, plants or systems characterised by the cycle used
- F25B2309/1428—Control of a Stirling refrigeration machine
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
- F25B2400/04—Refrigeration circuit bypassing means
- F25B2400/0411—Refrigeration circuit bypassing means for the expansion valve or capillary tube
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2600/00—Control issues
- F25B2600/25—Control of valves
- F25B2600/2501—Bypass valves
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US49700203P | 2003-08-20 | 2003-08-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE395565T1 true ATE395565T1 (de) | 2008-05-15 |
Family
ID=34216063
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT04740982T ATE395565T1 (de) | 2003-08-20 | 2004-07-14 | Vakuumvorrichtung |
Country Status (11)
Country | Link |
---|---|
US (1) | US7481066B2 (de) |
EP (1) | EP1678446B1 (de) |
JP (1) | JP2007502928A (de) |
KR (1) | KR20060067958A (de) |
CN (1) | CN100422660C (de) |
AT (1) | ATE395565T1 (de) |
DE (1) | DE502004007169D1 (de) |
ES (1) | ES2307022T3 (de) |
HK (1) | HK1093093A1 (de) |
TW (1) | TW200508496A (de) |
WO (1) | WO2005019744A1 (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102017289B (zh) | 2008-06-19 | 2014-06-25 | 夏普株式会社 | 无线装置 |
KR101093480B1 (ko) | 2010-08-16 | 2011-12-13 | 프란시스 충 화 판 | 구체 이동 경로의 측정 방법 |
JP5545858B2 (ja) * | 2010-09-21 | 2014-07-09 | 住友重機械工業株式会社 | クライオポンプシステム及びその制御方法 |
JP5978045B2 (ja) * | 2012-07-26 | 2016-08-24 | 株式会社アルバック | 減圧システム |
JP6067423B2 (ja) * | 2013-03-04 | 2017-01-25 | 住友重機械工業株式会社 | 極低温冷凍装置、クライオポンプ、核磁気共鳴画像装置、及び極低温冷凍装置の制御方法 |
KR101741708B1 (ko) * | 2016-07-13 | 2017-05-30 | 한국알박크라이오(주) | 컴프레서 장치 및 그 제어 방법 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3139044C1 (de) * | 1981-10-01 | 1983-04-21 | Danfoss A/S, 6430 Nordborg | Kaelte- oder Waermepumpenkreislauf |
US4546611A (en) * | 1983-12-21 | 1985-10-15 | Eby Robert S | UF6 -Recovery process utilizing desublimation |
US5010737A (en) * | 1989-03-30 | 1991-04-30 | Aisin Seiki Kabushiki Kaisha | Multi-headed cryopump apparatus |
JPH0626459A (ja) * | 1992-07-09 | 1994-02-01 | Hitachi Ltd | 極低温冷却装置およびその冷却方法 |
US5386708A (en) * | 1993-09-02 | 1995-02-07 | Ebara Technologies Incorporated | Cryogenic vacuum pump with expander speed control |
US5775109A (en) * | 1997-01-02 | 1998-07-07 | Helix Technology Corporation | Enhanced cooldown of multiple cryogenic refrigerators supplied by a common compressor |
JP4274648B2 (ja) * | 1999-09-29 | 2009-06-10 | 住友重機械工業株式会社 | クライオポンプの制御装置 |
EP1200780B1 (de) * | 2000-05-30 | 2011-03-30 | Brooks Automation, Inc. | Tieftemperaturkältevorrichtung |
US7127901B2 (en) * | 2001-07-20 | 2006-10-31 | Brooks Automation, Inc. | Helium management control system |
JP3754992B2 (ja) * | 2001-08-03 | 2006-03-15 | 住友重機械工業株式会社 | マルチシステム冷凍機の運転方法、装置及び冷凍装置 |
-
2004
- 2004-07-14 EP EP04740982A patent/EP1678446B1/de not_active Not-in-force
- 2004-07-14 CN CNB2004800227679A patent/CN100422660C/zh not_active Expired - Fee Related
- 2004-07-14 WO PCT/EP2004/007763 patent/WO2005019744A1/de active IP Right Grant
- 2004-07-14 JP JP2006523539A patent/JP2007502928A/ja not_active Withdrawn
- 2004-07-14 KR KR1020067003136A patent/KR20060067958A/ko active IP Right Grant
- 2004-07-14 ES ES04740982T patent/ES2307022T3/es active Active
- 2004-07-14 US US10/568,549 patent/US7481066B2/en not_active Expired - Fee Related
- 2004-07-14 AT AT04740982T patent/ATE395565T1/de not_active IP Right Cessation
- 2004-07-14 DE DE502004007169T patent/DE502004007169D1/de not_active Expired - Fee Related
- 2004-08-12 TW TW093124142A patent/TW200508496A/zh unknown
-
2006
- 2006-09-22 HK HK06110606A patent/HK1093093A1/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
CN1833145A (zh) | 2006-09-13 |
US20060272338A1 (en) | 2006-12-07 |
WO2005019744A1 (de) | 2005-03-03 |
HK1093093A1 (en) | 2007-02-23 |
JP2007502928A (ja) | 2007-02-15 |
EP1678446A1 (de) | 2006-07-12 |
US7481066B2 (en) | 2009-01-27 |
EP1678446B1 (de) | 2008-05-14 |
DE502004007169D1 (de) | 2008-06-26 |
CN100422660C (zh) | 2008-10-01 |
KR20060067958A (ko) | 2006-06-20 |
ES2307022T3 (es) | 2008-11-16 |
TW200508496A (en) | 2005-03-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
REN | Ceased due to non-payment of the annual fee |