CN100409000C - 检验电极表面质量的方法 - Google Patents

检验电极表面质量的方法 Download PDF

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Publication number
CN100409000C
CN100409000C CNB008154767A CN00815476A CN100409000C CN 100409000 C CN100409000 C CN 100409000C CN B008154767 A CNB008154767 A CN B008154767A CN 00815476 A CN00815476 A CN 00815476A CN 100409000 C CN100409000 C CN 100409000C
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light source
image
cathode
camera
plane
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Expired - Lifetime
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CNB008154767A
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English (en)
Chinese (zh)
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CN1531648A (zh
Inventor
汤姆·马蒂拉
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Metso Corp
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Outokumpu Oyj
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8822—Dark field detection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8829—Shadow projection or structured background, e.g. for deflectometry

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • General Health & Medical Sciences (AREA)
  • Mathematical Physics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Electrolytic Production Of Metals (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
CNB008154767A 1999-11-09 2000-10-27 检验电极表面质量的方法 Expired - Lifetime CN100409000C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI992406A FI107192B (fi) 1999-11-09 1999-11-09 Menetelmä elektrodin pinnanlaadun tarkistamiseksi
FI19992406 1999-11-09

Publications (2)

Publication Number Publication Date
CN1531648A CN1531648A (zh) 2004-09-22
CN100409000C true CN100409000C (zh) 2008-08-06

Family

ID=8555574

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB008154767A Expired - Lifetime CN100409000C (zh) 1999-11-09 2000-10-27 检验电极表面质量的方法

Country Status (16)

Country Link
US (1) US6646733B1 (enExample)
EP (1) EP1228360A1 (enExample)
JP (1) JP2003514121A (enExample)
KR (1) KR100816703B1 (enExample)
CN (1) CN100409000C (enExample)
AU (1) AU778924B2 (enExample)
BG (1) BG64999B1 (enExample)
BR (1) BR0015345B1 (enExample)
CA (1) CA2390536C (enExample)
EA (1) EA008366B1 (enExample)
FI (1) FI107192B (enExample)
MX (1) MXPA02004567A (enExample)
PE (1) PE20010857A1 (enExample)
PL (1) PL356130A1 (enExample)
WO (1) WO2001035083A1 (enExample)
ZA (1) ZA200203247B (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI112383B (fi) * 2001-06-25 2003-11-28 Outokumpu Oy Menetelmä katodin laadun parantamiseksi elektrolyysissä
US8594417B2 (en) 2007-11-27 2013-11-26 Alcoa Inc. Systems and methods for inspecting anodes and smelting management relating to the same
KR101013612B1 (ko) * 2008-11-21 2011-02-10 엘에스니꼬동제련 주식회사 전해 정련된 금속석출판 표면 검사장치
FI20135688A7 (fi) * 2013-06-24 2014-12-25 Outotec Finland Oy Menetelmä ja järjestely metallien elektrolyyttistä raffinointia varten valettujen anodien valmistamiseksi elektrolyyttistä raffinointivaihetta varten
TWI639829B (zh) 2017-06-21 2018-11-01 致茂電子股份有限公司 太陽能電池的檢測方法與檢測系統
CN109103118A (zh) * 2017-06-21 2018-12-28 致茂电子(苏州)有限公司 太阳能电池的检测方法与检测系统
JP6876576B2 (ja) * 2017-08-17 2021-05-26 日本電子株式会社 三次元像構築方法
CN108335296B (zh) * 2018-02-28 2021-10-01 中际山河科技有限责任公司 一种极板识别装置及方法
CN110205653B (zh) * 2019-06-14 2020-10-16 中国环境科学研究院 一种铅基阳极表面阳极泥智能识别及无损干除方法及系统
CN112864034B (zh) * 2019-11-27 2023-09-01 上海先进半导体制造有限公司 铝腐蚀的处理方法及系统
KR20230056313A (ko) * 2021-10-20 2023-04-27 주식회사 엘지에너지솔루션 전극 표면 검사 장치
CN115165890A (zh) * 2022-06-06 2022-10-11 云南铜业股份有限公司西南铜业分公司 一种沉积阴极铜表面特征性缺陷检测装置及方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4919766A (en) * 1988-11-03 1990-04-24 Heraeus Elektroden Gmbh Inspection of electrodes having activated layers
US5440391A (en) * 1990-03-23 1995-08-08 Icos Vision Systems N.V. Method and device for determining a position of at least one lead of an electronic component
US5774224A (en) * 1997-01-24 1998-06-30 International Business Machines Corporation Linear-scanning, oblique-viewing optical apparatus
JPH11148807A (ja) * 1997-07-29 1999-06-02 Toshiba Corp バンプ高さ測定方法及びバンプ高さ測定装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU482658A1 (ru) * 1972-05-03 1975-08-30 Институт электрохимии АН СССР Способ определени структурных параметров пористых электродов
US4498960A (en) * 1982-11-01 1985-02-12 General Electric Company Electrochemical method for visual detection of nonmetallic surface inclusions in metallic substrates
DE3431148A1 (de) 1984-08-24 1986-03-06 Klöckner-Humboldt-Deutz AG, 5000 Köln Verfahren und vorrichtung zum entfernen von badmaterialresten an anodenresten
EP0586702A4 (en) * 1991-04-29 1994-06-01 N Proizv Predprivatie Novatekh Electric arc evaporator of metals
JPH08313544A (ja) * 1995-05-24 1996-11-29 Hitachi Ltd 電子顕微鏡及びこれを用いた試料観察方法
US5614722A (en) * 1995-11-01 1997-03-25 University Of Louisville Research Foundation, Inc. Radiation detector based on charge amplification in a gaseous medium
JP3272998B2 (ja) * 1997-09-30 2002-04-08 イビデン株式会社 バンプ高さ良否判定装置
JPH11111174A (ja) * 1997-10-03 1999-04-23 Sony Corp 電子銃の位置ずれ検出方法及び検出装置
US5951372A (en) * 1997-11-14 1999-09-14 Lucent Technologies Inc. Method of roughing a metallic surface of a semiconductor deposition tool
JP3724949B2 (ja) * 1998-05-15 2005-12-07 株式会社東芝 基板検査装置およびこれを備えた基板検査システム並びに基板検査方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4919766A (en) * 1988-11-03 1990-04-24 Heraeus Elektroden Gmbh Inspection of electrodes having activated layers
US5440391A (en) * 1990-03-23 1995-08-08 Icos Vision Systems N.V. Method and device for determining a position of at least one lead of an electronic component
US5774224A (en) * 1997-01-24 1998-06-30 International Business Machines Corporation Linear-scanning, oblique-viewing optical apparatus
JPH11148807A (ja) * 1997-07-29 1999-06-02 Toshiba Corp バンプ高さ測定方法及びバンプ高さ測定装置
US5986763A (en) * 1997-07-29 1999-11-16 Kabushiki Kaisha Toshiba Method for measuring heights of bumps and apparatus for measuring heights of bumps

Also Published As

Publication number Publication date
CA2390536C (en) 2009-09-15
AU778924B2 (en) 2004-12-23
EA008366B1 (ru) 2007-04-27
EP1228360A1 (en) 2002-08-07
EA200200543A1 (ru) 2002-10-31
FI107192B (fi) 2001-06-15
JP2003514121A (ja) 2003-04-15
WO2001035083A1 (en) 2001-05-17
ZA200203247B (en) 2002-11-28
CN1531648A (zh) 2004-09-22
US6646733B1 (en) 2003-11-11
PE20010857A1 (es) 2001-08-21
PL356130A1 (en) 2004-06-14
MXPA02004567A (es) 2002-09-02
KR20020053844A (ko) 2002-07-05
CA2390536A1 (en) 2001-05-17
BG106643A (en) 2003-04-30
BR0015345A (pt) 2002-06-25
BG64999B1 (bg) 2006-11-30
KR100816703B1 (ko) 2008-03-27
BR0015345B1 (pt) 2011-01-25
AU1148901A (en) 2001-06-06

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Granted publication date: 20080806