CN100407390C - 探测器装置和探测器测试方法 - Google Patents

探测器装置和探测器测试方法 Download PDF

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Publication number
CN100407390C
CN100407390C CN02813785XA CN02813785A CN100407390C CN 100407390 C CN100407390 C CN 100407390C CN 02813785X A CN02813785X A CN 02813785XA CN 02813785 A CN02813785 A CN 02813785A CN 100407390 C CN100407390 C CN 100407390C
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CN
China
Prior art keywords
contact load
mounting table
displacement sensor
detector
displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN02813785XA
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English (en)
Chinese (zh)
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CN1526163A (zh
Inventor
本间彻
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of CN1526163A publication Critical patent/CN1526163A/zh
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Publication of CN100407390C publication Critical patent/CN100407390C/zh
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Expired - Lifetime legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
CN02813785XA 2001-11-30 2002-11-12 探测器装置和探测器测试方法 Expired - Lifetime CN100407390C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001367266A JP2003168707A (ja) 2001-11-30 2001-11-30 プローブ装置
JP367266/2001 2001-11-30

Publications (2)

Publication Number Publication Date
CN1526163A CN1526163A (zh) 2004-09-01
CN100407390C true CN100407390C (zh) 2008-07-30

Family

ID=19177041

Family Applications (1)

Application Number Title Priority Date Filing Date
CN02813785XA Expired - Lifetime CN100407390C (zh) 2001-11-30 2002-11-12 探测器装置和探测器测试方法

Country Status (5)

Country Link
US (1) US7235984B2 (enExample)
JP (1) JP2003168707A (enExample)
KR (1) KR100562845B1 (enExample)
CN (1) CN100407390C (enExample)
WO (1) WO2003049179A1 (enExample)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4357813B2 (ja) * 2002-08-23 2009-11-04 東京エレクトロン株式会社 プローブ装置及びプローブ方法
US7372250B2 (en) * 2003-02-20 2008-05-13 Applied Materials, Inc. Methods and apparatus for determining a position of a substrate relative to a support stage
JP4809594B2 (ja) 2004-08-02 2011-11-09 東京エレクトロン株式会社 検査装置
EP1628132B1 (en) * 2004-08-17 2015-01-07 Sensirion Holding AG Method and device for calibrating sensors
JP4878919B2 (ja) * 2006-05-30 2012-02-15 株式会社東京精密 プローバ及びプロービング方法
JP2008243861A (ja) * 2007-03-23 2008-10-09 Tokyo Electron Ltd 検査装置及び検査方法
JP2008246628A (ja) * 2007-03-30 2008-10-16 Disco Abrasive Syst Ltd チャックテーブル機構
US20080289973A1 (en) * 2007-05-24 2008-11-27 Macleod Ronald R Apparatus, systems and methods for tracking drug administration
JP4999615B2 (ja) * 2007-08-31 2012-08-15 東京エレクトロン株式会社 検査装置及び検査方法
JP2009130114A (ja) * 2007-11-22 2009-06-11 Tokyo Electron Ltd 検査装置
KR100936631B1 (ko) * 2007-11-22 2010-01-14 주식회사 쎄믹스 웨이퍼 프로버의 ｚ축 위치 제어 장치 및 방법
JP5071131B2 (ja) * 2008-01-31 2012-11-14 東京エレクトロン株式会社 プローブ装置
JP2009276215A (ja) 2008-05-15 2009-11-26 Tokyo Electron Ltd プローブ装置及びコンタクト位置の補正方法
CN101685133B (zh) * 2008-09-27 2011-12-07 京元电子股份有限公司 集成电路元件测试设备及其测试方法
JP5381118B2 (ja) * 2009-01-21 2014-01-08 東京エレクトロン株式会社 プローブ装置
EP2259027B1 (en) * 2009-06-04 2012-12-05 Sensirion AG Method and apparatus for processing individual sensor devices
EP2418503B1 (en) 2010-07-14 2013-07-03 Sensirion AG Needle head
JP5529769B2 (ja) * 2011-01-13 2014-06-25 東京エレクトロン株式会社 プローブカードの熱的安定化方法及び検査装置
CN105755339A (zh) * 2016-02-21 2016-07-13 南阳理工学院 一种变形镁合金材料及其制备方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000260852A (ja) * 1999-03-11 2000-09-22 Tokyo Electron Ltd 検査ステージ及び検査装置
JP2001110857A (ja) * 1999-10-06 2001-04-20 Tokyo Electron Ltd プローブ方法及びプローブ装置
US20010013787A1 (en) * 2000-02-15 2001-08-16 Kiyoshi Takekoshi Needle load measuring method, needle load setting method and needle load detecting mechanism

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4322977A (en) * 1980-05-27 1982-04-06 The Bendix Corporation Pressure measuring system
FR2617600B1 (fr) * 1987-06-30 1989-12-08 Inst Francais Du Petrole Dispositif et methode de mesure des deformations d'un echantillon
US4923302A (en) * 1989-02-02 1990-05-08 Litton Systems, Inc. Method and apparatus for calibrating deformable mirrors having replaceable actuators
TW399279B (en) * 1997-05-08 2000-07-21 Tokyo Electron Limtied Prober and probe method
US7009415B2 (en) * 1999-10-06 2006-03-07 Tokyo Electron Limited Probing method and probing apparatus
US6747462B2 (en) * 2002-03-18 2004-06-08 Hewlett-Packard Development Company, L.P. Method and system for determining position of a body
JP4175086B2 (ja) * 2002-10-29 2008-11-05 日本電気株式会社 検査用ウエハ支持装置及び検査用ウエハ支持方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000260852A (ja) * 1999-03-11 2000-09-22 Tokyo Electron Ltd 検査ステージ及び検査装置
JP2001110857A (ja) * 1999-10-06 2001-04-20 Tokyo Electron Ltd プローブ方法及びプローブ装置
US20010013787A1 (en) * 2000-02-15 2001-08-16 Kiyoshi Takekoshi Needle load measuring method, needle load setting method and needle load detecting mechanism
JP2001228212A (ja) * 2000-02-15 2001-08-24 Tokyo Electron Ltd 針荷重測定方法、針荷重設定方法及び検査装置

Also Published As

Publication number Publication date
CN1526163A (zh) 2004-09-01
JP2003168707A (ja) 2003-06-13
US20060145711A1 (en) 2006-07-06
US7235984B2 (en) 2007-06-26
KR100562845B1 (ko) 2006-03-24
WO2003049179A1 (fr) 2003-06-12
KR20040064717A (ko) 2004-07-19

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Granted publication date: 20080730