CN100353510C - 绝缘栅薄膜晶体管及其控制系统 - Google Patents
绝缘栅薄膜晶体管及其控制系统 Download PDFInfo
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- CN100353510C CN100353510C CNB03136778XA CN03136778A CN100353510C CN 100353510 C CN100353510 C CN 100353510C CN B03136778X A CNB03136778X A CN B03136778XA CN 03136778 A CN03136778 A CN 03136778A CN 100353510 C CN100353510 C CN 100353510C
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- Prior art keywords
- semiconductor region
- thin film
- semiconductive thin
- conductive grid
- gated transistor
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 45
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- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
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- PEUPIGGLJVUNEU-UHFFFAOYSA-N nickel silicon Chemical compound [Si].[Ni] PEUPIGGLJVUNEU-UHFFFAOYSA-N 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 150000002831 nitrogen free-radicals Chemical class 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
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- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
- H01L29/78612—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device for preventing the kink- or the snapback effect, e.g. discharging the minority carriers of the channel region for preventing bipolar effect
- H01L29/78615—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device for preventing the kink- or the snapback effect, e.g. discharging the minority carriers of the channel region for preventing bipolar effect with a body contact
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/84—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being other than a semiconductor body, e.g. being an insulating body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1203—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body the substrate comprising an insulating body on a semiconductor body, e.g. SOI
Abstract
Description
Claims (41)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002108422A JP4457209B2 (ja) | 2002-04-10 | 2002-04-10 | 絶縁ゲート薄膜トランジスタとその制御方法 |
JP108422/2002 | 2002-04-10 | ||
JP108422/02 | 2002-04-10 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1452225A CN1452225A (zh) | 2003-10-29 |
CN100353510C true CN100353510C (zh) | 2007-12-05 |
Family
ID=28449955
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB03136778XA Expired - Fee Related CN100353510C (zh) | 2002-04-10 | 2003-04-10 | 绝缘栅薄膜晶体管及其控制系统 |
Country Status (6)
Country | Link |
---|---|
US (2) | US6949777B2 (zh) |
EP (1) | EP1353386B1 (zh) |
JP (1) | JP4457209B2 (zh) |
KR (1) | KR100989755B1 (zh) |
CN (1) | CN100353510C (zh) |
TW (1) | TWI298541B (zh) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6952027B2 (en) * | 2002-11-29 | 2005-10-04 | Kabushiki Kaisha Toshiba | Semiconductor integrated circuit device and electronic card using the same |
KR100529455B1 (ko) * | 2003-07-23 | 2005-11-17 | 동부아남반도체 주식회사 | 부분 공핍형 soi 모스 트랜지스터 및 그 제조 방법 |
WO2005074030A1 (en) * | 2004-01-30 | 2005-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US7745879B2 (en) * | 2007-10-16 | 2010-06-29 | International Business Machines Corporation | Method of fabricating high voltage fully depleted SOI transistor and structure thereof |
US7968434B2 (en) * | 2008-11-14 | 2011-06-28 | Nec Corporation | Method of forming of a semiconductor film, method of manufacture of a semiconductor device and a semiconductor device |
JP5531848B2 (ja) * | 2010-08-06 | 2014-06-25 | 富士通セミコンダクター株式会社 | 半導体装置、半導体集積回路装置、SRAM、Dt−MOSトランジスタの製造方法 |
US10469076B2 (en) * | 2016-11-22 | 2019-11-05 | The Curators Of The University Of Missouri | Power gating circuit utilizing double-gate fully depleted silicon-on-insulator transistor |
EP3654385A4 (en) | 2017-08-07 | 2020-11-18 | TowerJazz Panasonic Semiconductor Co., Ltd. | SEMICONDUCTOR COMPONENT |
CN107342327A (zh) * | 2017-08-10 | 2017-11-10 | 睿力集成电路有限公司 | 一种半导体存储器的晶体管结构及制作方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5893370A (ja) * | 1981-11-30 | 1983-06-03 | Nec Corp | Mosデバイス |
US5784311A (en) * | 1997-06-13 | 1998-07-21 | International Business Machines Corporation | Two-device memory cell on SOI for merged logic and memory applications |
WO1999027585A1 (fr) * | 1997-11-21 | 1999-06-03 | Hitachi, Ltd. | Dispositif a semi-conducteur |
CN1316781A (zh) * | 2000-04-04 | 2001-10-10 | 夏普公司 | 硅绝缘体结构半导体器件 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1127585A (ja) | 1997-06-30 | 1999-01-29 | Hitachi Denshi Ltd | 固体撮像素子の欠陥画素検出方法 |
JP3859821B2 (ja) * | 1997-07-04 | 2006-12-20 | 株式会社半導体エネルギー研究所 | 半導体装置 |
-
2002
- 2002-04-10 JP JP2002108422A patent/JP4457209B2/ja not_active Expired - Fee Related
-
2003
- 2003-04-09 TW TW092108139A patent/TWI298541B/zh not_active IP Right Cessation
- 2003-04-09 EP EP03252252.6A patent/EP1353386B1/en not_active Expired - Fee Related
- 2003-04-09 US US10/410,240 patent/US6949777B2/en not_active Expired - Lifetime
- 2003-04-10 CN CNB03136778XA patent/CN100353510C/zh not_active Expired - Fee Related
- 2003-04-10 KR KR1020030022659A patent/KR100989755B1/ko active IP Right Grant
-
2005
- 2005-05-03 US US11/121,319 patent/US7190032B2/en not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5893370A (ja) * | 1981-11-30 | 1983-06-03 | Nec Corp | Mosデバイス |
US5784311A (en) * | 1997-06-13 | 1998-07-21 | International Business Machines Corporation | Two-device memory cell on SOI for merged logic and memory applications |
WO1999027585A1 (fr) * | 1997-11-21 | 1999-06-03 | Hitachi, Ltd. | Dispositif a semi-conducteur |
CN1316781A (zh) * | 2000-04-04 | 2001-10-10 | 夏普公司 | 硅绝缘体结构半导体器件 |
Also Published As
Publication number | Publication date |
---|---|
US7190032B2 (en) | 2007-03-13 |
EP1353386A2 (en) | 2003-10-15 |
JP4457209B2 (ja) | 2010-04-28 |
US20050194618A1 (en) | 2005-09-08 |
US6949777B2 (en) | 2005-09-27 |
TW200402886A (en) | 2004-02-16 |
KR20030081141A (ko) | 2003-10-17 |
EP1353386A3 (en) | 2004-09-15 |
CN1452225A (zh) | 2003-10-29 |
US20030218193A1 (en) | 2003-11-27 |
EP1353386B1 (en) | 2018-02-07 |
JP2003303972A (ja) | 2003-10-24 |
KR100989755B1 (ko) | 2010-10-26 |
TWI298541B (en) | 2008-07-01 |
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C06 | Publication | ||
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GR01 | Patent grant | ||
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TR01 | Transfer of patent right |
Effective date of registration: 20160407 Address after: Chiba County, Japan Patentee after: SEIKO INSTR INC Patentee after: Lin Feng Address before: Chiba, Chiba, Japan Patentee before: Seiko Instruments Inc. Patentee before: Lin Feng |
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CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: Chiba County, Japan Co-patentee after: Lin Feng Patentee after: EPPs Lingke Co. Ltd. Address before: Chiba County, Japan Co-patentee before: Lin Feng Patentee before: SEIKO INSTR INC |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20071205 Termination date: 20210410 |