CN100352565C - 面板处理系统 - Google Patents
面板处理系统 Download PDFInfo
- Publication number
- CN100352565C CN100352565C CNB2004101024762A CN200410102476A CN100352565C CN 100352565 C CN100352565 C CN 100352565C CN B2004101024762 A CNB2004101024762 A CN B2004101024762A CN 200410102476 A CN200410102476 A CN 200410102476A CN 100352565 C CN100352565 C CN 100352565C
- Authority
- CN
- China
- Prior art keywords
- panel
- fluid
- panel processing
- processing region
- bathroom
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Cleaning In General (AREA)
- Bathtubs, Showers, And Their Attachments (AREA)
Abstract
Description
Claims (7)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020030096537A KR100544487B1 (ko) | 2003-12-24 | 2003-12-24 | 기판 처리시스템 |
KR1020030096537 | 2003-12-24 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1636639A CN1636639A (zh) | 2005-07-13 |
CN100352565C true CN100352565C (zh) | 2007-12-05 |
Family
ID=34793198
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2004101024762A Active CN100352565C (zh) | 2003-12-24 | 2004-12-23 | 面板处理系统 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4171457B2 (zh) |
KR (1) | KR100544487B1 (zh) |
CN (1) | CN100352565C (zh) |
TW (1) | TWI272970B (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101284604B (zh) * | 2008-05-21 | 2011-06-15 | 友达光电股份有限公司 | 除尘输送装置 |
CN101927244B (zh) * | 2010-07-27 | 2012-06-27 | 深圳市宇顺电子股份有限公司 | 液晶显示器表面和线路端玻璃屑自动清洁装置 |
CN103041940B (zh) * | 2011-10-13 | 2015-08-26 | 细美事有限公司 | 流体喷射装置 |
KR101580396B1 (ko) * | 2014-05-10 | 2016-01-04 | 김영선 | Pcb기판 제조공정 중 세척 후 건조공정에서의 이물질 제거방법 및 그 장치 |
KR102529274B1 (ko) * | 2018-04-11 | 2023-05-08 | 주식회사 디엠에스 | 유체공급장치 및 그 조립방법과 이를 이용한 기판처리시스템 |
CN110775863A (zh) * | 2019-09-17 | 2020-02-11 | 苏州晶洲装备科技有限公司 | 一种oled平板显示清洗设备用升降系统 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06120202A (ja) * | 1992-10-02 | 1994-04-28 | Nec Kyushu Ltd | 半導体基板湿式処理装置 |
US5927305A (en) * | 1996-02-20 | 1999-07-27 | Pre-Tech Co., Ltd. | Cleaning apparatus |
JP2001314824A (ja) * | 2000-05-12 | 2001-11-13 | Nec Kagoshima Ltd | 洗浄装置及びエッチング装置並びに洗浄方法及びエッチング方法 |
CN1393910A (zh) * | 2001-06-29 | 2003-01-29 | 株式会社D.M.S | 用于处理玻璃基片或晶片的注入装置 |
JP2003303807A (ja) * | 2002-04-12 | 2003-10-24 | Shibaura Mechatronics Corp | 基板の処理装置及び処理方法 |
-
2003
- 2003-12-24 KR KR1020030096537A patent/KR100544487B1/ko active IP Right Grant
-
2004
- 2004-12-08 TW TW093137905A patent/TWI272970B/zh not_active IP Right Cessation
- 2004-12-20 JP JP2004368276A patent/JP4171457B2/ja active Active
- 2004-12-23 CN CNB2004101024762A patent/CN100352565C/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06120202A (ja) * | 1992-10-02 | 1994-04-28 | Nec Kyushu Ltd | 半導体基板湿式処理装置 |
US5927305A (en) * | 1996-02-20 | 1999-07-27 | Pre-Tech Co., Ltd. | Cleaning apparatus |
JP2001314824A (ja) * | 2000-05-12 | 2001-11-13 | Nec Kagoshima Ltd | 洗浄装置及びエッチング装置並びに洗浄方法及びエッチング方法 |
CN1393910A (zh) * | 2001-06-29 | 2003-01-29 | 株式会社D.M.S | 用于处理玻璃基片或晶片的注入装置 |
JP2003303807A (ja) * | 2002-04-12 | 2003-10-24 | Shibaura Mechatronics Corp | 基板の処理装置及び処理方法 |
Also Published As
Publication number | Publication date |
---|---|
CN1636639A (zh) | 2005-07-13 |
TW200520849A (en) | 2005-07-01 |
JP4171457B2 (ja) | 2008-10-22 |
KR20050064923A (ko) | 2005-06-29 |
TWI272970B (en) | 2007-02-11 |
JP2005187213A (ja) | 2005-07-14 |
KR100544487B1 (ko) | 2006-01-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: WEIHAI DIANMEISHI OPTO-MECHATRONICS CO., LTD. Effective date: 20140227 |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20140227 Address after: Gyeonggi Do, South Korea Patentee after: Display Production Service Co., Ltd. Patentee after: Weihai dianmei Shiguang electromechanical Co Ltd Address before: Gyeonggi Do, South Korea Patentee before: Display Production Service Co., Ltd. |
|
CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: 264205 No. 88-1, Bekaert Road, Weihai Economic and Technological Development Zone, Weihai City, Shandong Province Patentee after: WEIHAI DMS OPTICAL ELECTROMECHANICAL Co.,Ltd. Patentee after: DMS Co.,Ltd. Address before: Gyeonggi Do, South Korea Patentee before: DMS Co.,Ltd. Patentee before: WEIHAI DMS OPTICAL ELECTROMECHANICAL Co.,Ltd. |