CN100344941C - 具有公共参考臂的可变电阻传感器 - Google Patents

具有公共参考臂的可变电阻传感器 Download PDF

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Publication number
CN100344941C
CN100344941C CNB03819614XA CN03819614A CN100344941C CN 100344941 C CN100344941 C CN 100344941C CN B03819614X A CNB03819614X A CN B03819614XA CN 03819614 A CN03819614 A CN 03819614A CN 100344941 C CN100344941 C CN 100344941C
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CN
China
Prior art keywords
output
sensor
amplifier
voltage divider
input
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Expired - Fee Related
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CNB03819614XA
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English (en)
Chinese (zh)
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CN1675522A (zh
Inventor
约翰·迈克·卢尔
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Entegris Inc
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Entegris Inc
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Publication of CN1675522A publication Critical patent/CN1675522A/zh
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Publication of CN100344941C publication Critical patent/CN100344941C/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/86—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
CNB03819614XA 2002-07-19 2003-07-16 具有公共参考臂的可变电阻传感器 Expired - Fee Related CN100344941C (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US39713902P 2002-07-19 2002-07-19
US60/397,139 2002-07-19
US43620702P 2002-12-23 2002-12-23
US60/436,207 2002-12-23

Publications (2)

Publication Number Publication Date
CN1675522A CN1675522A (zh) 2005-09-28
CN100344941C true CN100344941C (zh) 2007-10-24

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CNB03819614XA Expired - Fee Related CN100344941C (zh) 2002-07-19 2003-07-16 具有公共参考臂的可变电阻传感器

Country Status (8)

Country Link
US (2) US6845659B2 (cg-RX-API-DMAC7.html)
EP (1) EP1523660A1 (cg-RX-API-DMAC7.html)
JP (1) JP2005534014A (cg-RX-API-DMAC7.html)
KR (1) KR20050047079A (cg-RX-API-DMAC7.html)
CN (1) CN100344941C (cg-RX-API-DMAC7.html)
AU (1) AU2003256591A1 (cg-RX-API-DMAC7.html)
TW (1) TWI222514B (cg-RX-API-DMAC7.html)
WO (1) WO2004010091A1 (cg-RX-API-DMAC7.html)

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JP2019505922A (ja) 2016-01-22 2019-02-28 イリノイ トゥール ワークス インコーポレイティド 質量流量制御器上に記憶されるデータ値を動的に構成するシステム及び方法
ITUA20164320A1 (it) * 2016-06-13 2017-12-13 St Microelectronics Srl Ponte sensore con resistori commutati, sistema e procedimento corrispondenti
US10317482B2 (en) * 2016-11-19 2019-06-11 Nxp B.V. Resistive sensor frontend system having a resistive sensor circuit with an offset voltage source
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Also Published As

Publication number Publication date
WO2004010091A1 (en) 2004-01-29
CN1675522A (zh) 2005-09-28
US6845659B2 (en) 2005-01-25
US7082824B2 (en) 2006-08-01
US20040100289A1 (en) 2004-05-27
AU2003256591A1 (en) 2004-02-09
KR20050047079A (ko) 2005-05-19
TW200406576A (en) 2004-05-01
EP1523660A1 (en) 2005-04-20
US20050092077A1 (en) 2005-05-05
JP2005534014A (ja) 2005-11-10
TWI222514B (en) 2004-10-21

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Owner name: CELERITY INC.

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Effective date: 20070601

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Applicant after: Entegris Inc.

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Applicant before: Celerity Group Inc.

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Termination date: 20090817