CH644398A5 - Vorrichtung zur chemisch-thermischen behandlung von metallischen werkstuecken mittels glimmentladung. - Google Patents
Vorrichtung zur chemisch-thermischen behandlung von metallischen werkstuecken mittels glimmentladung. Download PDFInfo
- Publication number
- CH644398A5 CH644398A5 CH100580A CH100580A CH644398A5 CH 644398 A5 CH644398 A5 CH 644398A5 CH 100580 A CH100580 A CH 100580A CH 100580 A CH100580 A CH 100580A CH 644398 A5 CH644398 A5 CH 644398A5
- Authority
- CH
- Switzerland
- Prior art keywords
- current
- working chamber
- cathode
- transformer
- thyristor
- Prior art date
Links
- 239000000126 substance Substances 0.000 title description 2
- 238000010438 heat treatment Methods 0.000 title 1
- 238000004804 winding Methods 0.000 description 23
- 239000003990 capacitor Substances 0.000 description 12
- 238000004140 cleaning Methods 0.000 description 7
- 238000007669 thermal treatment Methods 0.000 description 7
- 238000009499 grossing Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 238000001816 cooling Methods 0.000 description 4
- 230000007704 transition Effects 0.000 description 4
- 238000009738 saturating Methods 0.000 description 3
- 230000005415 magnetization Effects 0.000 description 2
- 230000033228 biological regulation Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000010349 pulsation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32018—Glow discharge
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/34—Methods of heating
- C21D1/38—Heating by cathodic discharges
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
- H02H7/00—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of AC power input into DC power output; Conversion of DC power input into AC power output
- H02M7/02—Conversion of AC power input into DC power output without possibility of reversal
- H02M7/04—Conversion of AC power input into DC power output without possibility of reversal by static converters
- H02M7/12—Conversion of AC power input into DC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/125—Avoiding or suppressing excessive transient voltages or currents
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Thermal Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Power Engineering (AREA)
- Analytical Chemistry (AREA)
- Arc Welding Control (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- ing And Chemical Polishing (AREA)
- Generation Of Surge Voltage And Current (AREA)
- Control Of Resistance Heating (AREA)
- Manufacture And Refinement Of Metals (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| BG7943198A BG29362A1 (en) | 1979-03-11 | 1979-03-11 | Apparatus for chemical- thermal processing of matal articles in the condition of electrical smouldering charge |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH644398A5 true CH644398A5 (de) | 1984-07-31 |
Family
ID=3905917
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH100580A CH644398A5 (de) | 1979-03-11 | 1980-02-07 | Vorrichtung zur chemisch-thermischen behandlung von metallischen werkstuecken mittels glimmentladung. |
Country Status (17)
| Country | Link |
|---|---|
| JP (1) | JPS55125275A (OSRAM) |
| AT (1) | AT365659B (OSRAM) |
| BG (1) | BG29362A1 (OSRAM) |
| CH (1) | CH644398A5 (OSRAM) |
| CS (1) | CS215904B1 (OSRAM) |
| DD (1) | DD235802A3 (OSRAM) |
| DE (1) | DE3007420C2 (OSRAM) |
| FR (1) | FR2451629A1 (OSRAM) |
| GB (1) | GB2045553B (OSRAM) |
| GR (1) | GR68091B (OSRAM) |
| HU (1) | HU190769B (OSRAM) |
| IT (1) | IT1145262B (OSRAM) |
| NO (1) | NO153320C (OSRAM) |
| PL (1) | PL131348B1 (OSRAM) |
| SE (1) | SE440169B (OSRAM) |
| SU (1) | SU1198132A1 (OSRAM) |
| YU (1) | YU41906B (OSRAM) |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BG41745A1 (en) * | 1984-12-29 | 1987-08-14 | Minchev | Device for discontinuing of arc dicharges in gas dicharge vessel |
| DE3514690A1 (de) * | 1985-04-24 | 1986-10-30 | Aeg-Elotherm Gmbh, 5630 Remscheid | Gleichspannungsquelle fuer anlagen zur oberflaechenbearbeitung von werkstuecken, insbesondere fuer eine ionitrierhaertanlage |
| DE4127505C2 (de) * | 1991-08-20 | 2003-05-08 | Unaxis Deutschland Holding | Einrichtung zur Unterdrückung von Lichtbögen in Gasentladungsvorrichtungen |
| US5281321A (en) * | 1991-08-20 | 1994-01-25 | Leybold Aktiengesellschaft | Device for the suppression of arcs |
| CH689767A5 (de) * | 1992-03-24 | 1999-10-15 | Balzers Hochvakuum | Verfahren zur Werkstueckbehandlung in einer Vakuumatmosphaere und Vakuumbehandlungsanlage. |
| DE69322404T2 (de) * | 1992-09-30 | 1999-04-29 | Advanced Energy Industries, Inc., Fort Collins, Col. 80525 | Topographisch genaues duennfilm-beschichtungssystem |
| DE4239218C2 (de) * | 1992-11-21 | 2000-08-10 | Leybold Ag | Anordnung zum Verhindern von Überschlägen in einem Plasma-Prozeßraum |
| DE4242633C2 (de) * | 1992-12-17 | 1996-11-14 | Fraunhofer Ges Forschung | Verfahren zur Durchführung von stabilen Niederdruck-Glimmprozessen |
| US6217717B1 (en) | 1992-12-30 | 2001-04-17 | Advanced Energy Industries, Inc. | Periodically clearing thin film plasma processing system |
| US5427669A (en) * | 1992-12-30 | 1995-06-27 | Advanced Energy Industries, Inc. | Thin film DC plasma processing system |
| US5718813A (en) * | 1992-12-30 | 1998-02-17 | Advanced Energy Industries, Inc. | Enhanced reactive DC sputtering system |
| RU2048601C1 (ru) * | 1993-12-20 | 1995-11-20 | Рыжов Николай Михайлович | Способ диагностики процесса химико-термической обработки сталей и сплавов в тлеющем разряде и устройство для его осуществления |
| US5584972A (en) * | 1995-02-01 | 1996-12-17 | Sony Corporation | Plasma noise and arcing suppressor apparatus and method for sputter deposition |
| WO1996031899A1 (en) | 1995-04-07 | 1996-10-10 | Advanced Energy Industries, Inc. | Adjustable energy quantum thin film plasma processing system |
| US5576939A (en) * | 1995-05-05 | 1996-11-19 | Drummond; Geoffrey N. | Enhanced thin film DC plasma power supply |
| US5584974A (en) * | 1995-10-20 | 1996-12-17 | Eni | Arc control and switching element protection for pulsed dc cathode sputtering power supply |
| US5882492A (en) * | 1996-06-21 | 1999-03-16 | Sierra Applied Sciences, Inc. | A.C. plasma processing system |
| US5682067A (en) * | 1996-06-21 | 1997-10-28 | Sierra Applied Sciences, Inc. | Circuit for reversing polarity on electrodes |
| DE19651615C1 (de) * | 1996-12-12 | 1997-07-10 | Fraunhofer Ges Forschung | Verfahren zum Aufbringen von Kohlenstoffschichten durch reaktives Magnetron-Sputtern |
| US6011704A (en) * | 1997-11-07 | 2000-01-04 | Sierra Applied Sciences, Inc. | Auto-ranging power supply |
| US5889391A (en) * | 1997-11-07 | 1999-03-30 | Sierra Applied Sciences, Inc. | Power supply having combined regulator and pulsing circuits |
| US5993613A (en) * | 1997-11-07 | 1999-11-30 | Sierra Applied Sciences, Inc. | Method and apparatus for periodic polarity reversal during an active state |
| US5990668A (en) * | 1997-11-07 | 1999-11-23 | Sierra Applied Sciences, Inc. | A.C. power supply having combined regulator and pulsing circuits |
| US5910886A (en) * | 1997-11-07 | 1999-06-08 | Sierra Applied Sciences, Inc. | Phase-shift power supply |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1068972B (de) * | 1959-11-12 | Dortmund-Hörder Hüttenunion Aktiengesellschaft, Dortmund | Vorrichtung zum Betreiben stromstarker Glimmentladungen in Entladungsgefäßen, insbesondere zur Behandlung von in das Entladungsgefäß eingebrachten Körpern | |
| NL254958A (OSRAM) * | 1959-08-17 | |||
| CH561285A5 (OSRAM) * | 1973-02-19 | 1975-04-30 | Berghaus Bernhard Elektrophysi | |
| FR2297927A1 (fr) * | 1975-01-17 | 1976-08-13 | Anvar | Perfectionnements aux |
| FR2423914A1 (fr) * | 1978-04-20 | 1979-11-16 | Aizenshtein Anatoly | Procede d'alimentation, en courant electrique, des installations de traitement d'articles, notamment au moyen de decharges luminescentes, et dispositif pour sa mise en oeuvre |
-
1979
- 1979-03-11 BG BG7943198A patent/BG29362A1/xx unknown
-
1980
- 1980-02-05 AT AT0062880A patent/AT365659B/de not_active IP Right Cessation
- 1980-02-05 CS CS80915A patent/CS215904B1/cs unknown
- 1980-02-05 YU YU298/80A patent/YU41906B/xx unknown
- 1980-02-06 SE SE8000931A patent/SE440169B/sv not_active IP Right Cessation
- 1980-02-07 DD DD218967A patent/DD235802A3/xx not_active IP Right Cessation
- 1980-02-07 SU SU807771058A patent/SU1198132A1/ru active
- 1980-02-07 CH CH100580A patent/CH644398A5/de not_active IP Right Cessation
- 1980-02-09 GR GR61174A patent/GR68091B/el unknown
- 1980-02-13 IT IT47884/80A patent/IT1145262B/it active
- 1980-02-21 PL PL1980222156A patent/PL131348B1/pl unknown
- 1980-02-27 DE DE3007420A patent/DE3007420C2/de not_active Expired
- 1980-03-04 NO NO800613A patent/NO153320C/no unknown
- 1980-03-10 FR FR8005341A patent/FR2451629A1/fr active Granted
- 1980-03-10 JP JP3019380A patent/JPS55125275A/ja active Granted
- 1980-03-10 GB GB8007980A patent/GB2045553B/en not_active Expired
- 1980-03-11 HU HU80568A patent/HU190769B/hu not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| GB2045553B (en) | 1983-08-17 |
| NO153320C (no) | 1986-02-19 |
| DE3007420A1 (de) | 1980-09-25 |
| ATA62880A (de) | 1981-06-15 |
| CS215904B1 (en) | 1982-10-29 |
| GB2045553A (en) | 1980-10-29 |
| YU41906B (en) | 1988-02-29 |
| FR2451629B1 (OSRAM) | 1984-12-07 |
| FR2451629A1 (fr) | 1980-10-10 |
| PL222156A1 (OSRAM) | 1980-11-03 |
| SE440169B (sv) | 1985-07-15 |
| DE3007420C2 (de) | 1984-08-30 |
| AT365659B (de) | 1982-02-10 |
| NO800613L (no) | 1980-09-12 |
| SU1198132A1 (ru) | 1985-12-15 |
| PL131348B1 (en) | 1984-10-31 |
| NO153320B (no) | 1985-11-11 |
| SE8000931L (sv) | 1980-09-12 |
| JPS55125275A (en) | 1980-09-26 |
| IT1145262B (it) | 1986-11-05 |
| DD235802A3 (de) | 1986-05-21 |
| IT8047884A0 (it) | 1980-02-13 |
| JPS6253593B2 (OSRAM) | 1987-11-11 |
| GR68091B (OSRAM) | 1981-10-30 |
| BG29362A1 (en) | 1980-11-14 |
| HU190769B (en) | 1986-11-28 |
| YU29880A (en) | 1983-06-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PL | Patent ceased | ||
| PL | Patent ceased |