CH402191A - Verfahren zur Umwandlung von n- in p-leitendes Halbleitermaterial - Google Patents

Verfahren zur Umwandlung von n- in p-leitendes Halbleitermaterial

Info

Publication number
CH402191A
CH402191A CH385662A CH385662A CH402191A CH 402191 A CH402191 A CH 402191A CH 385662 A CH385662 A CH 385662A CH 385662 A CH385662 A CH 385662A CH 402191 A CH402191 A CH 402191A
Authority
CH
Switzerland
Prior art keywords
converting
semiconductor material
conducting semiconductor
conducting
semiconductor
Prior art date
Application number
CH385662A
Other languages
English (en)
Inventor
Heinrich Dr Hora
Original Assignee
United Aircraft Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Aircraft Corp filed Critical United Aircraft Corp
Publication of CH402191A publication Critical patent/CH402191A/de

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22FCHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F3/00Changing the physical structure of non-ferrous metals or alloys by special physical methods, e.g. treatment with neutrons
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00Semiconductor device manufacturing: process
    • Y10S438/914Doping

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
CH385662A 1961-03-30 1962-03-30 Verfahren zur Umwandlung von n- in p-leitendes Halbleitermaterial CH402191A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEZ8650A DE1186952B (de) 1961-03-30 1961-03-30 Verfahren und Vorrichtung zum Umwandeln von n- in p-leitendes Halbleitermaterial fuer Halbleiterbauelemente durch Beschuss mit einem Elektronenstrahl

Publications (1)

Publication Number Publication Date
CH402191A true CH402191A (de) 1965-11-15

Family

ID=7620580

Family Applications (1)

Application Number Title Priority Date Filing Date
CH385662A CH402191A (de) 1961-03-30 1962-03-30 Verfahren zur Umwandlung von n- in p-leitendes Halbleitermaterial

Country Status (5)

Country Link
US (1) US3206336A (de)
CH (1) CH402191A (de)
DE (1) DE1186952B (de)
GB (1) GB958716A (de)
NL (1) NL276412A (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5308241A (en) * 1957-06-27 1994-05-03 Lemelson Jerome H Surface shaping and finshing apparatus and method
US5552675A (en) * 1959-04-08 1996-09-03 Lemelson; Jerome H. High temperature reaction apparatus
US3272661A (en) * 1962-07-23 1966-09-13 Hitachi Ltd Manufacturing method of a semi-conductor device by controlling the recombination velocity
NL296231A (de) * 1962-08-03
US3323947A (en) * 1964-12-17 1967-06-06 Bell Telephone Labor Inc Method for making electrode connections to potassium tantalate-niobate
US3351503A (en) * 1965-09-10 1967-11-07 Horizons Inc Production of p-nu junctions by diffusion
US3496029A (en) * 1966-10-12 1970-02-17 Ion Physics Corp Process of doping semiconductor with analyzing magnet
US3430029A (en) * 1967-01-06 1969-02-25 Smith Corp A O Rapid load system for electron beam welder
US3667116A (en) * 1969-05-15 1972-06-06 Avio Di Felice Method of manufacturing zener diodes having improved characteristics
GB1280013A (en) * 1969-09-05 1972-07-05 Atomic Energy Authority Uk Improvements in or relating to apparatus bombarding a target with ions
US3612815A (en) * 1970-01-16 1971-10-12 Smith Corp A O Electron beam apparatus
US3826889A (en) * 1970-10-12 1974-07-30 I Brukovsky System for automatic control of electron beam heating device
DE2449265A1 (de) * 1974-10-16 1976-04-22 Steigerwald Strahltech Vorrichtung zum herstellen von mittels elektronenstrahlen fein perforierten folien-zuschnitten, insbesondere schuh-oberteilen
US3951695A (en) * 1975-02-11 1976-04-20 Accelerators, Inc. Automatic end station for ion implantation system

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2666814A (en) * 1949-04-27 1954-01-19 Bell Telephone Labor Inc Semiconductor translating device
NL158460B (nl) * 1950-01-31 George Frederick Smith Vorkhefvoertuig met kantelbaar laadvlak.
US2771568A (en) * 1951-01-31 1956-11-20 Zeiss Carl Utilizing electron energy for physically and chemically changing members
DE891113C (de) * 1951-09-08 1953-09-24 Licentia Gmbh Verfahren zur Herstellung elektrisch unsymmetrisch leitender Systeme
GB778383A (en) * 1953-10-02 1957-07-03 Standard Telephones Cables Ltd Improvements in or relating to the production of material for semi-conductors
US2860251A (en) * 1953-10-15 1958-11-11 Rauland Corp Apparatus for manufacturing semi-conductor devices
US2816847A (en) * 1953-11-18 1957-12-17 Bell Telephone Labor Inc Method of fabricating semiconductor signal translating devices
US2803569A (en) * 1953-12-03 1957-08-20 Jacobs Harold Formation of junctions in semiconductors
US2743200A (en) * 1954-05-27 1956-04-24 Bell Telephone Labor Inc Method of forming junctions in silicon
US2883544A (en) * 1955-12-19 1959-04-21 Sprague Electric Co Transistor manufacture
GB844747A (en) * 1955-12-20 1960-08-17 Nat Res Dev Production of p-n junctions in semiconductors
US2868988A (en) * 1955-12-22 1959-01-13 Miller William Method of reducing transient reverse current
US2968723A (en) * 1957-04-11 1961-01-17 Zeiss Carl Means for controlling crystal structure of materials
US2989385A (en) * 1957-05-14 1961-06-20 Bell Telephone Labor Inc Process for ion bombarding and etching metal
DE1099659B (de) * 1958-08-30 1961-02-16 Zeiss Carl Fa Abschirmvorrichtung
US3049608A (en) * 1959-08-24 1962-08-14 Air Reduction Electron beam welding
US3118050A (en) * 1960-04-06 1964-01-14 Alloyd Electronics Corp Electron beam devices and processes

Also Published As

Publication number Publication date
DE1186952B (de) 1965-02-11
GB958716A (en) 1964-05-27
NL276412A (de)
US3206336A (en) 1965-09-14

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