CA2753990C - Xrf system having multiple excitation energy bands in highly aligned package - Google Patents
Xrf system having multiple excitation energy bands in highly aligned package Download PDFInfo
- Publication number
- CA2753990C CA2753990C CA2753990A CA2753990A CA2753990C CA 2753990 C CA2753990 C CA 2753990C CA 2753990 A CA2753990 A CA 2753990A CA 2753990 A CA2753990 A CA 2753990A CA 2753990 C CA2753990 C CA 2753990C
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- Canada
- Prior art keywords
- ray
- optics
- housing section
- spot
- optic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
- H05G1/02—Constructional details
- H05G1/04—Mounting the X-ray tube within a closed housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/076—X-ray fluorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/10—Different kinds of radiation or particles
- G01N2223/1003—Different kinds of radiation or particles monochromatic
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/30—Accessories, mechanical or electrical features
- G01N2223/315—Accessories, mechanical or electrical features monochromators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/40—Imaging
- G01N2223/423—Imaging multispectral imaging-multiple energy imaging
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K2201/00—Arrangements for handling radiation or particles
- G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
- G21K2201/062—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements the element being a crystal
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K2201/00—Arrangements for handling radiation or particles
- G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
- G21K2201/064—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements having a curved surface
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US3389908P | 2008-03-05 | 2008-03-05 | |
| US61/033,899 | 2008-03-05 | ||
| US3922008P | 2008-03-25 | 2008-03-25 | |
| US61/039,220 | 2008-03-25 | ||
| US4297408P | 2008-04-07 | 2008-04-07 | |
| US61/042,974 | 2008-04-07 | ||
| PCT/US2009/035847 WO2009111454A1 (en) | 2008-03-05 | 2009-03-03 | Xrf system having multiple excitation energy bands in highly aligned package |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2753990A1 CA2753990A1 (en) | 2009-09-11 |
| CA2753990C true CA2753990C (en) | 2017-11-21 |
Family
ID=41056347
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2753990A Active CA2753990C (en) | 2008-03-05 | 2009-03-03 | Xrf system having multiple excitation energy bands in highly aligned package |
Country Status (8)
| Country | Link |
|---|---|
| US (4) | US8559597B2 (es) |
| EP (1) | EP2260501B1 (es) |
| JP (1) | JP5539906B2 (es) |
| CN (2) | CN101981651B (es) |
| CA (1) | CA2753990C (es) |
| HK (1) | HK1153848A1 (es) |
| MX (1) | MX2010009713A (es) |
| WO (1) | WO2009111454A1 (es) |
Families Citing this family (50)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2260501B1 (en) | 2008-03-05 | 2021-08-25 | X-ray Optical Systems, INC. | Xrf system having multiple excitation energy bands in highly aligned package |
| JP2012524374A (ja) | 2009-04-16 | 2012-10-11 | エリック・エイチ・シルバー | 単色ｘ線の方法および装置 |
| CN110006936A (zh) * | 2011-06-20 | 2019-07-12 | X射线光学系统公司 | 原油和重质燃料中污染物的在线监控及其精炼厂应用 |
| EP2745101B1 (en) | 2011-08-15 | 2019-11-06 | X-Ray Optical Systems, Inc. | X-ray analysis apparatus |
| CN103946693B (zh) | 2011-10-06 | 2017-05-03 | X射线光学系统公司 | 可移除式x‑射线分析仪用的可移动型运输及屏蔽装置 |
| WO2013063253A1 (en) * | 2011-10-26 | 2013-05-02 | X-Ray Optical Systems, Inc. | Support structure and highly aligned monochromating x-ray optics for x-ray analysis engines and analyzers |
| US20150117599A1 (en) | 2013-10-31 | 2015-04-30 | Sigray, Inc. | X-ray interferometric imaging system |
| WO2013130525A1 (en) * | 2012-02-28 | 2013-09-06 | X-Ray Optical Systems, Inc. | X-ray analyzer having multiple excitation energy bands produced using multi-material x-ray tube anodes and monochromating optics |
| GB2515468A (en) * | 2013-05-24 | 2014-12-31 | Torr Scient Ltd | X-ray source |
| US9883793B2 (en) | 2013-08-23 | 2018-02-06 | The Schepens Eye Research Institute, Inc. | Spatial modeling of visual fields |
| US9449781B2 (en) | 2013-12-05 | 2016-09-20 | Sigray, Inc. | X-ray illuminators with high flux and high flux density |
| US9390881B2 (en) | 2013-09-19 | 2016-07-12 | Sigray, Inc. | X-ray sources using linear accumulation |
| US9448190B2 (en) | 2014-06-06 | 2016-09-20 | Sigray, Inc. | High brightness X-ray absorption spectroscopy system |
| US10297359B2 (en) | 2013-09-19 | 2019-05-21 | Sigray, Inc. | X-ray illumination system with multiple target microstructures |
| US10295485B2 (en) | 2013-12-05 | 2019-05-21 | Sigray, Inc. | X-ray transmission spectrometer system |
| US9570265B1 (en) | 2013-12-05 | 2017-02-14 | Sigray, Inc. | X-ray fluorescence system with high flux and high flux density |
| US10269528B2 (en) | 2013-09-19 | 2019-04-23 | Sigray, Inc. | Diverging X-ray sources using linear accumulation |
| US10304580B2 (en) | 2013-10-31 | 2019-05-28 | Sigray, Inc. | Talbot X-ray microscope |
| USRE48612E1 (en) | 2013-10-31 | 2021-06-29 | Sigray, Inc. | X-ray interferometric imaging system |
| US9594036B2 (en) | 2014-02-28 | 2017-03-14 | Sigray, Inc. | X-ray surface analysis and measurement apparatus |
| US9823203B2 (en) | 2014-02-28 | 2017-11-21 | Sigray, Inc. | X-ray surface analysis and measurement apparatus |
| US10401309B2 (en) | 2014-05-15 | 2019-09-03 | Sigray, Inc. | X-ray techniques using structured illumination |
| WO2015200551A1 (en) * | 2014-06-24 | 2015-12-30 | Silver Eric H | Methods and apparatus for determining information regarding chemical composition using x-ray radiation |
| DE102014015974B4 (de) * | 2014-10-31 | 2021-11-11 | Baker Hughes Digital Solutions Gmbh | Anschlusskabel zur Verminderung von überschlagsbedingten transienten elektrischen Signalen zwischen der Beschleunigungsstrecke einer Röntgenröhre sowie einer Hochspannungsquelle |
| JP6069609B2 (ja) * | 2015-03-26 | 2017-02-01 | 株式会社リガク | 二重湾曲ｘ線集光素子およびその構成体、二重湾曲ｘ線分光素子およびその構成体の製造方法 |
| US10352880B2 (en) | 2015-04-29 | 2019-07-16 | Sigray, Inc. | Method and apparatus for x-ray microscopy |
| US10295486B2 (en) | 2015-08-18 | 2019-05-21 | Sigray, Inc. | Detector for X-rays with high spatial and high spectral resolution |
| US9966161B2 (en) * | 2015-09-21 | 2018-05-08 | Uchicago Argonne, Llc | Mechanical design of thin-film diamond crystal mounting apparatus with optimized thermal contact and crystal strain for coherence preservation x-ray optics |
| US10677744B1 (en) * | 2016-06-03 | 2020-06-09 | U.S. Department Of Energy | Multi-cone x-ray imaging Bragg crystal spectrometer |
| US10247683B2 (en) | 2016-12-03 | 2019-04-02 | Sigray, Inc. | Material measurement techniques using multiple X-ray micro-beams |
| PL3364421T3 (pl) * | 2017-02-17 | 2019-08-30 | Rigaku Corporation | Rentgenowskie urządzenie optyczne |
| JP6937380B2 (ja) | 2017-03-22 | 2021-09-22 | シグレイ、インコーポレイテッド | Ｘ線分光を実施するための方法およびｘ線吸収分光システム |
| EP3641651A4 (en) | 2017-05-19 | 2021-04-07 | Imagine Scientific, Inc. | MONOCHROMATIC X-RAY IMAGING SYSTEMS AND METHODS |
| JP7299226B2 (ja) | 2018-02-09 | 2023-06-27 | イマジン サイエンティフィック，インコーポレイテッド | 単色ｘ線撮像システム及び方法 |
| US10818467B2 (en) | 2018-02-09 | 2020-10-27 | Imagine Scientific, Inc. | Monochromatic x-ray imaging systems and methods |
| US10578566B2 (en) | 2018-04-03 | 2020-03-03 | Sigray, Inc. | X-ray emission spectrometer system |
| US10845491B2 (en) | 2018-06-04 | 2020-11-24 | Sigray, Inc. | Energy-resolving x-ray detection system |
| GB2591630B (en) | 2018-07-26 | 2023-05-24 | Sigray Inc | High brightness x-ray reflection source |
| US10656105B2 (en) | 2018-08-06 | 2020-05-19 | Sigray, Inc. | Talbot-lau x-ray source and interferometric system |
| US10962491B2 (en) | 2018-09-04 | 2021-03-30 | Sigray, Inc. | System and method for x-ray fluorescence with filtering |
| DE112019004478T5 (de) | 2018-09-07 | 2021-07-08 | Sigray, Inc. | System und verfahren zur röntgenanalyse mit wählbarer tiefe |
| WO2020056281A1 (en) | 2018-09-14 | 2020-03-19 | Imagine Scientific, Inc. | Monochromatic x-ray component systems and methods |
| US11143605B2 (en) | 2019-09-03 | 2021-10-12 | Sigray, Inc. | System and method for computed laminography x-ray fluorescence imaging |
| US11175243B1 (en) | 2020-02-06 | 2021-11-16 | Sigray, Inc. | X-ray dark-field in-line inspection for semiconductor samples |
| US11217357B2 (en) | 2020-02-10 | 2022-01-04 | Sigray, Inc. | X-ray mirror optics with multiple hyperboloidal/hyperbolic surface profiles |
| JP7395775B2 (ja) | 2020-05-18 | 2023-12-11 | シグレイ、インコーポレイテッド | 結晶解析装置及び複数の検出器素子を使用するｘ線吸収分光法のためのシステム及び方法 |
| WO2022061347A1 (en) | 2020-09-17 | 2022-03-24 | Sigray, Inc. | System and method using x-rays for depth-resolving metrology and analysis |
| US11686692B2 (en) | 2020-12-07 | 2023-06-27 | Sigray, Inc. | High throughput 3D x-ray imaging system using a transmission x-ray source |
| WO2023177981A1 (en) | 2022-03-15 | 2023-09-21 | Sigray, Inc. | System and method for compact laminography utilizing microfocus transmission x-ray source and variable magnification x-ray detector |
| US11885755B2 (en) | 2022-05-02 | 2024-01-30 | Sigray, Inc. | X-ray sequential array wavelength dispersive spectrometer |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH441200A (de) * | 1963-12-27 | 1967-08-15 | Schloemann Ag | Formgerüst zur Herstellung von Schraubennahtrohren |
| JPH0769477B2 (ja) * | 1990-09-05 | 1995-07-31 | 理学電機工業株式会社 | Ｘ線分光装置 |
| JP2699134B2 (ja) * | 1992-12-03 | 1998-01-19 | 花王株式会社 | 蛍光ｘ線分析方法及びその装置 |
| JP3843601B2 (ja) * | 1997-04-30 | 2006-11-08 | 株式会社島津製作所 | 蛍光ｘ線分析装置 |
| US6023496A (en) * | 1997-04-30 | 2000-02-08 | Shimadzu Corporation | X-ray fluorescence analyzing apparatus |
| JP3059402B2 (ja) * | 1997-07-09 | 2000-07-04 | 理学電機工業株式会社 | 円筒結晶型分光装置とその製造方法 |
| US6014423A (en) * | 1998-02-19 | 2000-01-11 | Osmic, Inc. | Multiple corner Kirkpatrick-Baez beam conditioning optic assembly |
| JP2001194325A (ja) * | 2000-01-06 | 2001-07-19 | Ours Tex Kk | Ｘ線分析装置および方法 |
| JP3498689B2 (ja) * | 2000-07-31 | 2004-02-16 | 株式会社島津製作所 | モノクロ線源励起用モノクロメータ及び蛍光ｘ線分析装置 |
| US6493421B2 (en) * | 2000-10-16 | 2002-12-10 | Advanced X-Ray Technology, Inc. | Apparatus and method for generating a high intensity X-ray beam with a selectable shape and wavelength |
| JP2002195963A (ja) * | 2000-12-25 | 2002-07-10 | Ours Tex Kk | Ｘ線分光装置およびｘ線分析装置 |
| CN1246858C (zh) * | 2001-06-19 | 2006-03-22 | X射线光学系统公司 | X射线荧光(xrf)光谱测定系统和方法 |
| DE60237168D1 (de) * | 2001-12-04 | 2010-09-09 | X Ray Optical Sys Inc | Röntgenquelle mit verbesserter strahlstabilität unssigkeiten |
| JP2004184314A (ja) * | 2002-12-05 | 2004-07-02 | Mitsubishi Electric Corp | 蛍光ｘ線分析装置 |
| US7317784B2 (en) * | 2006-01-19 | 2008-01-08 | Broker Axs, Inc. | Multiple wavelength X-ray source |
| US7738630B2 (en) * | 2008-03-05 | 2010-06-15 | X-Ray Optical Systems, Inc. | Highly aligned x-ray optic and source assembly for precision x-ray analysis applications |
| EP2260501B1 (en) | 2008-03-05 | 2021-08-25 | X-ray Optical Systems, INC. | Xrf system having multiple excitation energy bands in highly aligned package |
-
2009
- 2009-03-03 EP EP09716373.7A patent/EP2260501B1/en active Active
- 2009-03-03 CN CN200980111618.2A patent/CN101981651B/zh active Active
- 2009-03-03 CN CN201510303481.8A patent/CN105044139B/zh active Active
- 2009-03-03 JP JP2010549809A patent/JP5539906B2/ja active Active
- 2009-03-03 CA CA2753990A patent/CA2753990C/en active Active
- 2009-03-03 US US12/920,641 patent/US8559597B2/en active Active
- 2009-03-03 WO PCT/US2009/035847 patent/WO2009111454A1/en active Application Filing
- 2009-03-03 MX MX2010009713A patent/MX2010009713A/es active IP Right Grant
-
2011
- 2011-08-04 HK HK11108104.3A patent/HK1153848A1/xx not_active IP Right Cessation
-
2013
- 2013-10-11 US US14/052,078 patent/US9048001B2/en active Active
-
2015
- 2015-06-01 US US14/727,027 patent/US9343193B2/en active Active
-
2016
- 2016-05-16 US US15/155,575 patent/US20160260514A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| JP5539906B2 (ja) | 2014-07-02 |
| CN105044139B (zh) | 2019-04-23 |
| US20110170666A1 (en) | 2011-07-14 |
| EP2260501B1 (en) | 2021-08-25 |
| EP2260501A4 (en) | 2014-03-19 |
| WO2009111454A1 (en) | 2009-09-11 |
| US8559597B2 (en) | 2013-10-15 |
| MX2010009713A (es) | 2011-03-29 |
| JP2011513751A (ja) | 2011-04-28 |
| CN105044139A (zh) | 2015-11-11 |
| US9048001B2 (en) | 2015-06-02 |
| US20140105363A1 (en) | 2014-04-17 |
| US20150262722A1 (en) | 2015-09-17 |
| CN101981651B (zh) | 2015-07-08 |
| CN101981651A (zh) | 2011-02-23 |
| EP2260501A1 (en) | 2010-12-15 |
| US9343193B2 (en) | 2016-05-17 |
| US20160260514A1 (en) | 2016-09-08 |
| CA2753990A1 (en) | 2009-09-11 |
| HK1153848A1 (en) | 2012-04-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request |
Effective date: 20131220 |