CA2507270C - Optical via for three dimensional interconnection - Google Patents
Optical via for three dimensional interconnection Download PDFInfo
- Publication number
- CA2507270C CA2507270C CA2507270A CA2507270A CA2507270C CA 2507270 C CA2507270 C CA 2507270C CA 2507270 A CA2507270 A CA 2507270A CA 2507270 A CA2507270 A CA 2507270A CA 2507270 C CA2507270 C CA 2507270C
- Authority
- CA
- Canada
- Prior art keywords
- section
- waveguide
- optical
- receptive
- mode radiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 108
- 230000008878 coupling Effects 0.000 claims abstract description 73
- 238000010168 coupling process Methods 0.000 claims abstract description 73
- 238000005859 coupling reaction Methods 0.000 claims abstract description 73
- 230000005855 radiation Effects 0.000 claims description 124
- 238000005253 cladding Methods 0.000 claims description 41
- 239000013307 optical fiber Substances 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract description 3
- 239000011162 core material Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 206010000117 Abnormal behaviour Diseases 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000000499 gel Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12104—Mirror; Reflectors or the like
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4206—Optical features
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Couplings Of Light Guides (AREA)
- Optical Integrated Circuits (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/065,881 | 2002-11-27 | ||
| US10/065,881 US7046879B2 (en) | 2002-11-27 | 2002-11-27 | Optical via for three dimensional interconnection |
| PCT/US2003/036683 WO2004051327A2 (en) | 2002-11-27 | 2003-11-17 | Optical via for three dimensional interconnection |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2507270A1 CA2507270A1 (en) | 2004-06-17 |
| CA2507270C true CA2507270C (en) | 2013-02-12 |
Family
ID=32323610
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2507270A Expired - Fee Related CA2507270C (en) | 2002-11-27 | 2003-11-17 | Optical via for three dimensional interconnection |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US7046879B2 (enExample) |
| EP (1) | EP1567900A2 (enExample) |
| JP (1) | JP2006508398A (enExample) |
| KR (2) | KR100997611B1 (enExample) |
| AU (1) | AU2003291005A1 (enExample) |
| CA (1) | CA2507270C (enExample) |
| WO (1) | WO2004051327A2 (enExample) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8509582B2 (en) * | 2005-08-30 | 2013-08-13 | Rambus Delaware Llc | Reducing light leakage and improving contrast ratio performance in FTIR display devices |
| US7779085B2 (en) * | 2006-07-17 | 2010-08-17 | Research In Motion Limited | Automatic mobile device configuration |
| US9333717B2 (en) * | 2008-02-13 | 2016-05-10 | Xyratex Technology Limited | Method of making a waveguide and a waveguide made thereby |
| JP4570680B1 (ja) * | 2009-06-12 | 2010-10-27 | シャープ株式会社 | 光照射装置および検査装置 |
| CN103189768B (zh) | 2010-11-03 | 2016-08-24 | 英派尔科技开发有限公司 | 光波导的形成 |
| EP2634605B1 (en) | 2012-02-29 | 2015-10-28 | Huawei Technologies Co., Ltd. | A diffractive coupling grating for perpendicular coupling |
| ITTO20120583A1 (it) | 2012-07-02 | 2014-01-03 | St Microelectronics Srl | Dispositivo optoelettronico integrato con guida d'onda e relativo procedimento di fabbricazione |
| US9256027B2 (en) | 2012-07-02 | 2016-02-09 | Stmicroelectronics S.R.L. | Integrated optoelectronic device and system with waveguide and manufacturing process thereof |
| WO2018002675A1 (en) * | 2016-06-30 | 2018-01-04 | Mellanox Technologies, Ltd | Method and apparatus for optical coupling of optical signals for a photonic integrated circuit |
| WO2018179752A1 (ja) * | 2017-03-30 | 2018-10-04 | 旭化成エレクトロニクス株式会社 | 光導波路、光学式濃度測定装置および光導波路の製造方法 |
| US20190204711A1 (en) * | 2018-01-03 | 2019-07-04 | The Government Of The United States Of America, As Represented By The Secretary Of The Navy | Optical coupler having multiple thin-film layers with spatially varying optical thicknesses |
| US11585981B2 (en) * | 2020-04-15 | 2023-02-21 | Hirose Electric Co., Ltd. | Multi-mode waveguide system and connector for photonic integrated circuit |
| FR3126049B1 (fr) * | 2021-08-05 | 2024-03-01 | Commissariat Energie Atomique | Dispositif pour combiner plusieurs faisceaux lumineux |
| US20240369763A1 (en) * | 2022-08-12 | 2024-11-07 | Purdue Research Foundation | 3d tapered nanophotonic waveguide to fiber edge coupler |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4413879A (en) * | 1979-10-15 | 1983-11-08 | The United States Of America As Represented By The Director Of The National Security Agency | Method and apparatus for side launch excitation of selected modes in graded-index optical fibers |
| JPS5730811A (en) * | 1980-07-31 | 1982-02-19 | Fujitsu Ltd | Optical fiber coupler |
| US4737004A (en) * | 1985-10-03 | 1988-04-12 | American Telephone And Telegraph Company, At&T Bell Laboratories | Expanded end optical fiber and associated coupling arrangements |
| JPH03288102A (ja) * | 1990-04-04 | 1991-12-18 | Fujitsu Ltd | 光ビーム形状変換素子 |
| US5142596A (en) * | 1990-07-24 | 1992-08-25 | Matsushita Electric Industrial Co., Ltd. | Tapered light wave guide and wavelength converting element using the same |
| US5121460A (en) * | 1991-01-31 | 1992-06-09 | The Charles Stark Draper Lab., Inc. | High-power mode-selective optical fiber laser |
| US5764845A (en) * | 1993-08-03 | 1998-06-09 | Fujitsu Limited | Light guide device, light source device, and liquid crystal display device |
| JP3318406B2 (ja) * | 1993-10-13 | 2002-08-26 | 京セラ株式会社 | 光導波路、光導波路と光ファイバの接続装置 |
| JPH07333450A (ja) * | 1994-06-08 | 1995-12-22 | Hoechst Japan Ltd | 光結合用導波路の形成方法及び光結合用導波路を有する光導波路素子 |
| JPH0843651A (ja) * | 1994-08-04 | 1996-02-16 | Hoechst Japan Ltd | 光導波路素子 |
| DE4440976A1 (de) * | 1994-11-17 | 1996-05-23 | Ant Nachrichtentech | Optische Sende- und Empfangseinrichtung mit einem oberflächenemittierenden Laser |
| JPH09153638A (ja) * | 1995-11-30 | 1997-06-10 | Nec Corp | 導波路型半導体受光装置およびその製造方法 |
| JP3607129B2 (ja) * | 1999-02-15 | 2005-01-05 | 日本電信電話株式会社 | スポットサイズ変換光導波路の製法 |
| JP2001004877A (ja) * | 1999-06-22 | 2001-01-12 | Hitachi Ltd | 光導波路、光モジュールおよび光システム |
| JP2001138337A (ja) * | 1999-11-15 | 2001-05-22 | Canon Inc | 変形半球状マイクロ構造体用金型、マイクロ凹面鏡及びその作製方法 |
| JP2002082244A (ja) * | 1999-12-02 | 2002-03-22 | Nec Corp | 光学的平面回路とその製造方法 |
| US6456766B1 (en) * | 2000-02-01 | 2002-09-24 | Cornell Research Foundation Inc. | Optoelectronic packaging |
| DE10031714C2 (de) * | 2000-06-29 | 2002-10-10 | Aircabin Gmbh | Dekompressionseinheit für den explosiven Luftdruckausgleich |
| US6631225B2 (en) * | 2000-07-10 | 2003-10-07 | Massachusetts Institute Of Technology | Mode coupler between low index difference waveguide and high index difference waveguide |
| JP2002031730A (ja) * | 2000-07-17 | 2002-01-31 | Fuji Photo Film Co Ltd | 光導波路素子および発光装置 |
| US20020034200A1 (en) * | 2000-09-21 | 2002-03-21 | Randy Wickman | Method of monitoring light from a VCSEL |
| JP2002107681A (ja) * | 2000-09-29 | 2002-04-10 | Fujitsu Quantum Devices Ltd | 光半導体装置 |
| KR100450935B1 (ko) * | 2002-07-03 | 2004-10-02 | 삼성전자주식회사 | 테이퍼형 광도파로 제조방법 |
-
2002
- 2002-11-27 US US10/065,881 patent/US7046879B2/en not_active Expired - Lifetime
-
2003
- 2003-11-17 CA CA2507270A patent/CA2507270C/en not_active Expired - Fee Related
- 2003-11-17 KR KR1020057009661A patent/KR100997611B1/ko not_active Expired - Fee Related
- 2003-11-17 AU AU2003291005A patent/AU2003291005A1/en not_active Abandoned
- 2003-11-17 WO PCT/US2003/036683 patent/WO2004051327A2/en not_active Ceased
- 2003-11-17 JP JP2004557211A patent/JP2006508398A/ja active Pending
- 2003-11-17 KR KR1020107022200A patent/KR20100122111A/ko not_active Ceased
- 2003-11-17 EP EP03783590A patent/EP1567900A2/en not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| EP1567900A2 (en) | 2005-08-31 |
| KR20050084018A (ko) | 2005-08-26 |
| AU2003291005A1 (en) | 2004-06-23 |
| US20040101246A1 (en) | 2004-05-27 |
| KR20100122111A (ko) | 2010-11-19 |
| CA2507270A1 (en) | 2004-06-17 |
| AU2003291005A8 (en) | 2004-06-23 |
| WO2004051327A3 (en) | 2004-10-28 |
| US7046879B2 (en) | 2006-05-16 |
| WO2004051327A2 (en) | 2004-06-17 |
| JP2006508398A (ja) | 2006-03-09 |
| KR100997611B1 (ko) | 2010-11-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| MKLA | Lapsed |
Effective date: 20211117 |