CA2247560A1 - Electrical isolation of opto-electronic device components - Google Patents
Electrical isolation of opto-electronic device components Download PDFInfo
- Publication number
- CA2247560A1 CA2247560A1 CA002247560A CA2247560A CA2247560A1 CA 2247560 A1 CA2247560 A1 CA 2247560A1 CA 002247560 A CA002247560 A CA 002247560A CA 2247560 A CA2247560 A CA 2247560A CA 2247560 A1 CA2247560 A1 CA 2247560A1
- Authority
- CA
- Canada
- Prior art keywords
- layer
- electronic device
- contact
- components
- laser diode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000002955 isolation Methods 0.000 title claims abstract description 56
- 230000005693 optoelectronics Effects 0.000 title claims abstract description 31
- 239000000758 substrate Substances 0.000 claims abstract description 18
- 230000001419 dependent effect Effects 0.000 claims 1
- 238000010521 absorption reaction Methods 0.000 abstract description 4
- 239000010410 layer Substances 0.000 description 67
- 238000000034 method Methods 0.000 description 14
- 230000003287 optical effect Effects 0.000 description 10
- 239000004020 conductor Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000005530 etching Methods 0.000 description 6
- 238000013459 approach Methods 0.000 description 5
- 230000002411 adverse Effects 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 238000005334 plasma enhanced chemical vapour deposition Methods 0.000 description 4
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 4
- 238000005253 cladding Methods 0.000 description 3
- 238000002513 implantation Methods 0.000 description 3
- 230000010354 integration Effects 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 3
- 229910001258 titanium gold Inorganic materials 0.000 description 3
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 150000001768 cations Chemical class 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- ZEMPKEQAKRGZGQ-AAKVHIHISA-N 2,3-bis[[(z)-12-hydroxyoctadec-9-enoyl]oxy]propyl (z)-12-hydroxyoctadec-9-enoate Chemical compound CCCCCCC(O)C\C=C/CCCCCCCC(=O)OCC(OC(=O)CCCCCCC\C=C/CC(O)CCCCCC)COC(=O)CCCCCCC\C=C/CC(O)CCCCCC ZEMPKEQAKRGZGQ-AAKVHIHISA-N 0.000 description 1
- 101100412422 Bacillus subtilis (strain 168) remA gene Proteins 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 241000022563 Rema Species 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000013101 initial test Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000005701 quantum confined stark effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
- H01S5/0265—Intensity modulators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
- H01S5/042—Electrical excitation ; Circuits therefor
- H01S5/0425—Electrodes, e.g. characterised by the structure
- H01S5/04256—Electrodes, e.g. characterised by the structure characterised by the configuration
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Semiconductor Lasers (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Optical Integrated Circuits (AREA)
- Optical Couplings Of Light Guides (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP97309032A EP0917260B1 (en) | 1997-11-11 | 1997-11-11 | Electrical isolation of opto-electronic device components |
| EP97309032.7 | 1997-11-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2247560A1 true CA2247560A1 (en) | 1999-05-11 |
Family
ID=8229607
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002247560A Abandoned CA2247560A1 (en) | 1997-11-11 | 1998-09-16 | Electrical isolation of opto-electronic device components |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US6191464B1 (cg-RX-API-DMAC7.html) |
| EP (1) | EP0917260B1 (cg-RX-API-DMAC7.html) |
| JP (1) | JP4763867B2 (cg-RX-API-DMAC7.html) |
| CA (1) | CA2247560A1 (cg-RX-API-DMAC7.html) |
| DE (1) | DE69721272T2 (cg-RX-API-DMAC7.html) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE520139C2 (sv) | 2001-11-30 | 2003-06-03 | Optillion Ab | Lasermodulator med elektriskt separerade laser- och modulatorsektioner |
| AU2003251607A1 (en) * | 2003-06-24 | 2005-02-14 | Emcore Corporation | Mechanical protection for semiconductor edge-emitting ridge waveguide lasers |
| JP5086141B2 (ja) * | 2008-03-17 | 2012-11-28 | 日本オクラロ株式会社 | 電界吸収型変調器 |
| US9054813B2 (en) * | 2013-03-13 | 2015-06-09 | Source Photonics (Chengdu) Co. Ltd. | Optical transceiver with isolated modulator contacts and/or inputs |
| US9306372B2 (en) | 2013-03-14 | 2016-04-05 | Emcore Corporation | Method of fabricating and operating an optical modulator |
| US9059801B1 (en) | 2013-03-14 | 2015-06-16 | Emcore Corporation | Optical modulator |
| US9306672B2 (en) * | 2013-03-14 | 2016-04-05 | Encore Corporation | Method of fabricating and operating an optical modulator |
| JP2015109319A (ja) * | 2013-12-03 | 2015-06-11 | 日本電信電話株式会社 | 狭線幅レーザ |
| EP3192136B1 (en) * | 2014-09-08 | 2020-10-07 | Lumentum Technology UK Limited | Monolithically integrated tunable semiconductor laser |
| US9564733B2 (en) | 2014-09-15 | 2017-02-07 | Emcore Corporation | Method of fabricating and operating an optical modulator |
| JP6421708B2 (ja) * | 2015-06-29 | 2018-11-14 | 住友電気工業株式会社 | 半導体光素子を作製する方法及び半導体光素子 |
| CN107306009B (zh) * | 2016-04-25 | 2021-04-13 | 住友电工光电子器件创新株式会社 | 在承载体上提供共面线的光发射器 |
| US10074959B2 (en) | 2016-08-03 | 2018-09-11 | Emcore Corporation | Modulated laser source and methods of its fabrication and operation |
| WO2018091094A1 (en) | 2016-11-17 | 2018-05-24 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Method for fabricating an electro-absorption modulated laser and electro-absorption modulated laser |
| CN115428280B (zh) * | 2020-04-27 | 2025-04-04 | 三菱电机株式会社 | 半导体光集成元件 |
| US11681166B2 (en) * | 2020-10-28 | 2023-06-20 | II-VI Delware, Inc. | Electro-absorption optical modulator including ground shield |
| CN113540969B (zh) * | 2021-07-16 | 2022-04-22 | 杰创半导体(苏州)有限公司 | 自带偏置电压电路的电调制激光器及其制作方法 |
| CN117394138B (zh) * | 2023-10-07 | 2024-10-29 | 武汉云岭光电股份有限公司 | 电吸收调制器激光器及其制备方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5067809A (en) * | 1989-06-09 | 1991-11-26 | Oki Electric Industry Co., Ltd. | Opto-semiconductor device and method of fabrication of the same |
| JP2606078B2 (ja) * | 1993-06-25 | 1997-04-30 | 日本電気株式会社 | 半導体レーザアレイおよびその製造方法 |
| JP3254053B2 (ja) * | 1993-08-09 | 2002-02-04 | 株式会社日立製作所 | 光集積回路 |
| JPH07221400A (ja) * | 1994-01-31 | 1995-08-18 | Fujitsu Ltd | 光変調器集積化発光装置及びその製造方法 |
| JP2842292B2 (ja) * | 1994-09-16 | 1998-12-24 | 日本電気株式会社 | 半導体光集積装置および製造方法 |
-
1997
- 1997-11-11 EP EP97309032A patent/EP0917260B1/en not_active Expired - Lifetime
- 1997-11-11 DE DE69721272T patent/DE69721272T2/de not_active Expired - Lifetime
-
1998
- 1998-09-14 US US09/152,577 patent/US6191464B1/en not_active Expired - Lifetime
- 1998-09-16 CA CA002247560A patent/CA2247560A1/en not_active Abandoned
- 1998-11-10 JP JP31884298A patent/JP4763867B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| DE69721272T2 (de) | 2004-02-05 |
| EP0917260A1 (en) | 1999-05-19 |
| JP4763867B2 (ja) | 2011-08-31 |
| DE69721272D1 (de) | 2003-05-28 |
| JPH11224970A (ja) | 1999-08-17 |
| US6191464B1 (en) | 2001-02-20 |
| EP0917260B1 (en) | 2003-04-23 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FZDE | Dead |