CA2093046A1 - Method for polishing plate and apparatus therefor - Google Patents
Method for polishing plate and apparatus thereforInfo
- Publication number
- CA2093046A1 CA2093046A1 CA 2093046 CA2093046A CA2093046A1 CA 2093046 A1 CA2093046 A1 CA 2093046A1 CA 2093046 CA2093046 CA 2093046 CA 2093046 A CA2093046 A CA 2093046A CA 2093046 A1 CA2093046 A1 CA 2093046A1
- Authority
- CA
- Canada
- Prior art keywords
- polishing
- plate
- polished
- gate frame
- polishing member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 211
- 238000000034 method Methods 0.000 title claims abstract description 72
- 230000007246 mechanism Effects 0.000 claims description 11
- 230000010355 oscillation Effects 0.000 claims description 10
- 238000003825 pressing Methods 0.000 abstract description 8
- 229910052751 metal Inorganic materials 0.000 abstract description 5
- 239000002184 metal Substances 0.000 abstract description 5
- 229910052755 nonmetal Inorganic materials 0.000 abstract description 5
- 229910001220 stainless steel Inorganic materials 0.000 description 27
- 239000010935 stainless steel Substances 0.000 description 25
- 239000000463 material Substances 0.000 description 22
- 238000005530 etching Methods 0.000 description 20
- 238000007747 plating Methods 0.000 description 13
- 230000007797 corrosion Effects 0.000 description 6
- 238000005260 corrosion Methods 0.000 description 6
- 238000000227 grinding Methods 0.000 description 6
- 238000004040 coloring Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 239000002131 composite material Substances 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 229910001369 Brass Inorganic materials 0.000 description 3
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 3
- 239000010951 brass Substances 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 238000005868 electrolysis reaction Methods 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910017604 nitric acid Inorganic materials 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000003638 chemical reducing agent Substances 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 230000002708 enhancing effect Effects 0.000 description 2
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 2
- 238000007517 polishing process Methods 0.000 description 2
- 238000002203 pretreatment Methods 0.000 description 2
- 238000007790 scraping Methods 0.000 description 2
- HEMHJVSKTPXQMS-UHFFFAOYSA-M sodium hydroxide Inorganic materials [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 2
- 239000002351 wastewater Substances 0.000 description 2
- 238000004065 wastewater treatment Methods 0.000 description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910000423 chromium oxide Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/04—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/04—Headstocks; Working-spindles; Features relating thereto
- B24B41/047—Grinding heads for working on plane surfaces
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4110769A JP2724427B2 (ja) | 1992-04-02 | 1992-04-02 | 平板の研摩方法及びその装置 |
| JP110769/1992 | 1992-04-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2093046A1 true CA2093046A1 (en) | 1993-10-03 |
Family
ID=14544122
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA 2093046 Abandoned CA2093046A1 (en) | 1992-04-02 | 1993-03-31 | Method for polishing plate and apparatus therefor |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP0563954B1 (enrdf_load_stackoverflow) |
| JP (1) | JP2724427B2 (enrdf_load_stackoverflow) |
| CN (1) | CN1077406A (enrdf_load_stackoverflow) |
| CA (1) | CA2093046A1 (enrdf_load_stackoverflow) |
| DE (1) | DE69313333T2 (enrdf_load_stackoverflow) |
| TW (1) | TW223601B (enrdf_load_stackoverflow) |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3734878B2 (ja) * | 1996-04-25 | 2006-01-11 | 不二越機械工業株式会社 | ウェーハの研磨装置 |
| JP4465645B2 (ja) * | 2003-06-03 | 2010-05-19 | 株式会社ニコン | 研磨装置、これを用いた半導体デバイス製造方法 |
| CN103921207B (zh) * | 2013-01-10 | 2017-12-05 | 新源蓝宝石科技（深圳）有限公司 | 精磨抛光机 |
| CN103949964A (zh) * | 2014-03-31 | 2014-07-30 | 广东尚高科技有限公司 | 一种自动油漆抛光机 |
| CN105171537B (zh) * | 2015-09-30 | 2019-03-01 | 厦门理工学院 | 可抑制光学元件中频误差的超声振动抛光磨头装置 |
| CN105500203B (zh) * | 2016-01-07 | 2018-05-04 | 韩金桥 | 磨削设备磨头升降柔性控制装置 |
| CN105619227A (zh) * | 2016-03-08 | 2016-06-01 | 孝感市步集电子商务有限公司 | 具有观察口的建筑用板材抛光装置及其使用方法 |
| CN105666302A (zh) * | 2016-03-08 | 2016-06-15 | 厦门市优家品日用品有限公司 | 具有保护功能的建筑用板材抛光设备及其使用方法 |
| CN105856035B (zh) * | 2016-05-20 | 2018-02-06 | 王恒标 | 钢材表面杂屑磨除装置 |
| CN106181749B (zh) * | 2016-08-18 | 2018-02-27 | 肇庆市森美金属有限公司 | 一种液压回转研磨机 |
| CN106625181B (zh) * | 2016-12-27 | 2019-03-05 | 安徽工程大学 | 一种板材抛光装置 |
| CN106737159B (zh) * | 2016-12-30 | 2018-10-19 | 江苏天马通用设备有限公司 | 和纹机 |
| CN107322381A (zh) * | 2017-08-31 | 2017-11-07 | 淄博职业学院 | 一种大尺寸陶瓷圆锥筒端面磨削装置 |
| CN108098464B (zh) * | 2018-02-05 | 2020-01-14 | 天津市职业大学 | 一种木材磨抛方法 |
| CN108481166A (zh) * | 2018-05-29 | 2018-09-04 | 碳星智能装备（深圳）有限公司 | 一种多工位三轴联动数控抛光设备 |
| KR102027934B1 (ko) * | 2018-06-14 | 2019-10-02 | 홍기수 | 벽돌제작용 파렛트 철판의 연마장치 |
| CN110539219B (zh) * | 2019-09-17 | 2024-04-09 | 大同新成新材料股份有限公司 | 用于打磨碳纤维制品的平面磨床 |
| CN111069992B (zh) * | 2019-12-30 | 2020-11-20 | 徐州蓝联诚制造有限公司 | 一种金属板材加工用打磨机床 |
| CN111617938B (zh) * | 2020-06-15 | 2021-05-18 | 诸暨易阳环保科技有限公司 | 一种半圆环工件的自动涂漆设备 |
| KR102426223B1 (ko) * | 2020-07-29 | 2022-07-29 | 주식회사 포스코 | 강판 연마장치 |
| CN112757152A (zh) * | 2020-12-31 | 2021-05-07 | 福建省将乐县长兴电子有限公司 | 一种晶片研磨装置 |
| CN113755939B (zh) * | 2021-10-22 | 2025-03-04 | 东莞理工学院 | 一种用于干式电解抛光的装置 |
| CN116442019A (zh) * | 2023-06-07 | 2023-07-18 | 深圳腾睿微电子科技有限公司 | 研磨装置 |
| CN116900909B (zh) * | 2023-09-08 | 2024-02-02 | 华能太原东山燃机热电有限责任公司 | 一种光伏电缆端头抛光装置 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1491103A (en) * | 1919-07-08 | 1924-04-22 | Pratt & Whitney Co | Method of and machine for making gauges and other articles |
| DE680641C (de) * | 1936-04-10 | 1939-09-02 | Marbriere De Paris Sa Soc | Flaechenschleif- und Poliervorrichtung fuer harte Werkstoffe verschiedener Haerte, insbesondere fuer Gestein |
| JPS5719232Y2 (enrdf_load_stackoverflow) * | 1977-03-18 | 1982-04-22 | ||
| DE3433009C2 (de) * | 1984-09-07 | 1994-12-08 | Siemens Ag | Maschine zum Flachläppen oder Flachschleifen von Werkstücken |
| JP2881005B2 (ja) * | 1987-10-13 | 1999-04-12 | エクストルード ホーン コーポレーション | 工作機械用軌道テーブル |
-
1992
- 1992-04-02 JP JP4110769A patent/JP2724427B2/ja not_active Expired - Lifetime
-
1993
- 1993-03-31 CA CA 2093046 patent/CA2093046A1/en not_active Abandoned
- 1993-04-01 EP EP19930105411 patent/EP0563954B1/en not_active Expired - Lifetime
- 1993-04-01 TW TW82102453A patent/TW223601B/zh active
- 1993-04-01 DE DE1993613333 patent/DE69313333T2/de not_active Expired - Fee Related
- 1993-04-02 CN CN 93103507 patent/CN1077406A/zh active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JP2724427B2 (ja) | 1998-03-09 |
| EP0563954B1 (en) | 1997-08-27 |
| JPH05277914A (ja) | 1993-10-26 |
| DE69313333T2 (de) | 1998-03-26 |
| EP0563954A1 (en) | 1993-10-06 |
| DE69313333D1 (de) | 1997-10-02 |
| CN1077406A (zh) | 1993-10-20 |
| TW223601B (enrdf_load_stackoverflow) | 1994-05-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FZDE | Dead |