BRPI0805314A2 - dispositivos de contato embutidos para filmes baseados em nitreto e produção dos mesmos - Google Patents
dispositivos de contato embutidos para filmes baseados em nitreto e produção dos mesmosInfo
- Publication number
- BRPI0805314A2 BRPI0805314A2 BRPI0805314-6A BRPI0805314A BRPI0805314A2 BR PI0805314 A2 BRPI0805314 A2 BR PI0805314A2 BR PI0805314 A BRPI0805314 A BR PI0805314A BR PI0805314 A2 BRPI0805314 A2 BR PI0805314A2
- Authority
- BR
- Brazil
- Prior art keywords
- layer
- contact
- production
- contact devices
- nitride based
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W20/00—Interconnections in chips, wafers or substrates
- H10W20/01—Manufacture or treatment
- H10W20/021—Manufacture or treatment of interconnections within wafers or substrates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W15/00—Highly-doped buried regions of integrated devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W15/00—Highly-doped buried regions of integrated devices
- H10W15/01—Manufacture or treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W20/00—Interconnections in chips, wafers or substrates
- H10W20/20—Interconnections within wafers or substrates, e.g. through-silicon vias [TSV]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/83—Electrodes
- H10H20/831—Electrodes characterised by their shape
- H10H20/8316—Multi-layer electrodes comprising at least one discontinuous layer
Landscapes
- Led Devices (AREA)
- Electrodes Of Semiconductors (AREA)
- Semiconductor Lasers (AREA)
- Bipolar Transistors (AREA)
Abstract
DISPOSITIVOS DE CONTATO EMBUTIDOS PARA FILMES BASEADOS EM NITRETO E PRODUçãO DOS MESMOS. A presente invenção refere-se a dispositivo semicondutor, que compreende: um substrato; um primeiro contato; uma primeira camada de material semicondutor dopado, depositada sobre o substrato; uma região de junção semicondutora, depositada sobre a primeira camada; uma segunda camada de material semicondutor dopado, depositada sobre a região de junção, sendo que a segunda camada tem uma polaridade de dopagem semicondutora oposta à da primeira camada; e um segundo contato; sendo que o segundo contato está em comunicação elétrica com a segunda camada e o primeiro contato está embutido dentro do dispositivo semicondutor entre o substrato e a região de junção e está em comunicação elétrica com a primeira camada; e processos para produção de um dispositivo semicondutor de contato embutido.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AU2007903940A AU2007903940A0 (en) | 2007-07-20 | Buried contact devices for a nitride-based films and manufacture thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BRPI0805314A2 true BRPI0805314A2 (pt) | 2009-07-28 |
Family
ID=39884395
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BRPI0805314-6A BRPI0805314A2 (pt) | 2007-07-20 | 2008-07-21 | dispositivos de contato embutidos para filmes baseados em nitreto e produção dos mesmos |
Country Status (12)
| Country | Link |
|---|---|
| US (1) | US20090020768A1 (pt) |
| EP (1) | EP2017884A3 (pt) |
| JP (1) | JP2009044149A (pt) |
| KR (1) | KR20090009761A (pt) |
| CN (1) | CN101604665A (pt) |
| AU (1) | AU2008203209A1 (pt) |
| BR (1) | BRPI0805314A2 (pt) |
| CA (1) | CA2638191A1 (pt) |
| RU (1) | RU2394305C2 (pt) |
| SG (1) | SG149774A1 (pt) |
| TW (1) | TW200915476A (pt) |
| ZA (1) | ZA200806479B (pt) |
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| US20070240631A1 (en) * | 2006-04-14 | 2007-10-18 | Applied Materials, Inc. | Epitaxial growth of compound nitride semiconductor structures |
| US20080092819A1 (en) * | 2006-10-24 | 2008-04-24 | Applied Materials, Inc. | Substrate support structure with rapid temperature change |
| US20080314311A1 (en) * | 2007-06-24 | 2008-12-25 | Burrows Brian H | Hvpe showerhead design |
| US20090149008A1 (en) * | 2007-10-05 | 2009-06-11 | Applied Materials, Inc. | Method for depositing group iii/v compounds |
| US20090194026A1 (en) * | 2008-01-31 | 2009-08-06 | Burrows Brian H | Processing system for fabricating compound nitride semiconductor devices |
| JP4247413B1 (ja) * | 2008-03-19 | 2009-04-02 | 株式会社 東北テクノアーチ | デバイスの製造方法 |
| US20100139554A1 (en) * | 2008-12-08 | 2010-06-10 | Applied Materials, Inc. | Methods and apparatus for making gallium nitride and gallium aluminum nitride thin films |
| CA2653581A1 (en) | 2009-02-11 | 2010-08-11 | Kenneth Scott Alexander Butcher | Migration and plasma enhanced chemical vapour deposition |
| US20100273291A1 (en) * | 2009-04-28 | 2010-10-28 | Applied Materials, Inc. | Decontamination of mocvd chamber using nh3 purge after in-situ cleaning |
| US20110079251A1 (en) * | 2009-04-28 | 2011-04-07 | Olga Kryliouk | Method for in-situ cleaning of deposition systems |
| TW201039381A (en) * | 2009-04-29 | 2010-11-01 | Applied Materials Inc | Method of forming in-situ pre-GaN deposition layer in HVPE |
| US9800017B1 (en) | 2009-05-29 | 2017-10-24 | Soraa Laser Diode, Inc. | Laser device and method for a vehicle |
| US20110027973A1 (en) * | 2009-07-31 | 2011-02-03 | Applied Materials, Inc. | Method of forming led structures |
| US20110104843A1 (en) * | 2009-07-31 | 2011-05-05 | Applied Materials, Inc. | Method of reducing degradation of multi quantum well (mqw) light emitting diodes |
| KR20120055580A (ko) * | 2009-08-03 | 2012-05-31 | 뉴포트 코포레이션 | 유전체 코팅을 이용한 고출력 led 디바이스 아키텍처 및 제조 방법 |
| CN102414801A (zh) * | 2009-08-27 | 2012-04-11 | 应用材料公司 | 在原位腔室清洁后的处理腔室去污方法 |
| US20110064545A1 (en) * | 2009-09-16 | 2011-03-17 | Applied Materials, Inc. | Substrate transfer mechanism with preheating features |
| US20110076400A1 (en) * | 2009-09-30 | 2011-03-31 | Applied Materials, Inc. | Nanocrystalline diamond-structured carbon coating of silicon carbide |
| CN102414846A (zh) * | 2009-10-07 | 2012-04-11 | 应用材料公司 | 用于led制造的改良多腔室分离处理 |
| US20110204376A1 (en) * | 2010-02-23 | 2011-08-25 | Applied Materials, Inc. | Growth of multi-junction led film stacks with multi-chambered epitaxy system |
| US20110207256A1 (en) * | 2010-02-24 | 2011-08-25 | Applied Materials, Inc. | In-situ acceptor activation with nitrogen and/or oxygen plasma treatment |
| US9076827B2 (en) | 2010-09-14 | 2015-07-07 | Applied Materials, Inc. | Transfer chamber metrology for improved device yield |
| TWI501939B (zh) * | 2010-12-20 | 2015-10-01 | Tosoh Corp | 氮化鎵燒結體或氮化鎵成形體及此等之製造方法 |
| KR20120099318A (ko) * | 2011-01-26 | 2012-09-10 | 엘지이노텍 주식회사 | 발광 소자 및 그 제조방법 |
| RU2479070C2 (ru) * | 2011-02-03 | 2013-04-10 | Государственное образовательное учреждение высшего профессионального образования "Российский университет дружбы народов" (РУДН) | Светодиодный источник света |
| US8143147B1 (en) | 2011-02-10 | 2012-03-27 | Intermolecular, Inc. | Methods and systems for forming thin films |
| US20120267658A1 (en) * | 2011-04-20 | 2012-10-25 | Invenlux Limited | Large-area light-emitting device and method for fabricating the same |
| US9419182B2 (en) | 2012-01-05 | 2016-08-16 | Micron Technology, Inc. | Solid-state radiation transducer devices having at least partially transparent buried-contact elements, and associated systems and methods |
| RU2512742C1 (ru) * | 2012-12-06 | 2014-04-10 | Федеральное Государственное Унитарное Предприятие "Научно-Производственное Предприятие "Пульсар" | Биполярный транзистор |
| JP2015177132A (ja) * | 2014-03-17 | 2015-10-05 | ウシオ電機株式会社 | 半導体発光素子及びその製造方法 |
| US12283790B2 (en) | 2015-08-19 | 2025-04-22 | Kyocera Sld Laser, Inc. | Laser-phosphor integrated light source |
| US10879673B2 (en) | 2015-08-19 | 2020-12-29 | Soraa Laser Diode, Inc. | Integrated white light source using a laser diode and a phosphor in a surface mount device package |
| CN113078243B (zh) * | 2016-05-20 | 2024-05-28 | 亮锐控股有限公司 | 用于生长发光器件中的层的方法 |
| US10170604B2 (en) * | 2016-08-08 | 2019-01-01 | Atomera Incorporated | Method for making a semiconductor device including a resonant tunneling diode with electron mean free path control layers |
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| CN107293629A (zh) * | 2017-07-31 | 2017-10-24 | 广东工业大学 | 一种紫外led外延芯片倒装结构及其制作方法 |
| EP3707756B1 (en) * | 2017-11-07 | 2022-08-24 | Gallium Enterprises Pty Ltd | Buried activated p-(al,in)gan layers |
| EP3769346A1 (en) * | 2018-03-19 | 2021-01-27 | King Abdullah University of Science and Technology | Iii-nitride optoelectronic devices and method of production |
| CN109216442A (zh) * | 2018-09-11 | 2019-01-15 | 苏州汉骅半导体有限公司 | 半导体结构制造方法 |
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| US20210074880A1 (en) * | 2018-12-18 | 2021-03-11 | Bolb Inc. | Light-output-power self-awareness light-emitting device |
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| US11421843B2 (en) | 2018-12-21 | 2022-08-23 | Kyocera Sld Laser, Inc. | Fiber-delivered laser-induced dynamic light system |
| US11884202B2 (en) | 2019-01-18 | 2024-01-30 | Kyocera Sld Laser, Inc. | Laser-based fiber-coupled white light system |
| DE102019112762A1 (de) * | 2019-05-15 | 2020-11-19 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Bauelement mit vergrabenen dotierten bereichen und verfahren zur herstellung eines bauelements |
| FR3098019B1 (fr) * | 2019-06-25 | 2022-05-20 | Aledia | Dispositif optoélectronique comprenant des éléments semi-conducteurs tridimensionnels et procédé pour sa fabrication |
| RU196426U1 (ru) * | 2019-12-27 | 2020-02-28 | федеральное государственное автономное образовательное учреждение высшего образования "Национальный исследовательский университет ИТМО" (Университет ИТМО) | Прозрачный гетеропереход на основе оксидов |
| CN114204414A (zh) * | 2021-11-16 | 2022-03-18 | 深圳市德明利光电有限公司 | 一种光学路径可控高导热、低电阻的vcsel制作方法及vcsel |
| CN115881866B (zh) * | 2023-03-03 | 2023-05-23 | 江西兆驰半导体有限公司 | 发光二极管外延片及其制备方法、led |
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| TWI334649B (en) * | 2005-09-27 | 2010-12-11 | Lg Chemical Ltd | Method for forming buried contact electrode of semiconductor device having pn junction and optoelectronic semiconductor device using the same |
| JP2007221029A (ja) * | 2006-02-20 | 2007-08-30 | Sony Corp | 半導体発光素子およびその製造方法 |
| JP2008283028A (ja) * | 2007-05-11 | 2008-11-20 | Fuji Xerox Co Ltd | 面発光型半導体レーザ、面発光型半導体レーザの製造方法、モジュール、光源装置、情報処理装置、光送信装置、光空間伝送装置および光空間伝送システム。 |
| KR20070118064A (ko) * | 2007-11-24 | 2007-12-13 | (주)제네라이트테크놀러지 | 매립전극 발광다이오드 |
-
2008
- 2008-07-18 TW TW097127409A patent/TW200915476A/zh unknown
- 2008-07-18 EP EP08252464A patent/EP2017884A3/en not_active Withdrawn
- 2008-07-18 CN CNA200810214758XA patent/CN101604665A/zh active Pending
- 2008-07-18 ZA ZA200806479A patent/ZA200806479B/en unknown
- 2008-07-18 US US12/176,073 patent/US20090020768A1/en not_active Abandoned
- 2008-07-18 AU AU2008203209A patent/AU2008203209A1/en not_active Abandoned
- 2008-07-18 CA CA002638191A patent/CA2638191A1/en not_active Abandoned
- 2008-07-18 RU RU2008129818/28A patent/RU2394305C2/ru not_active IP Right Cessation
- 2008-07-21 KR KR1020080070882A patent/KR20090009761A/ko not_active Withdrawn
- 2008-07-21 BR BRPI0805314-6A patent/BRPI0805314A2/pt not_active IP Right Cessation
- 2008-07-21 SG SG200805369-6A patent/SG149774A1/en unknown
- 2008-07-22 JP JP2008188941A patent/JP2009044149A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| CN101604665A (zh) | 2009-12-16 |
| EP2017884A2 (en) | 2009-01-21 |
| SG149774A1 (en) | 2009-02-27 |
| EP2017884A3 (en) | 2011-03-23 |
| ZA200806479B (en) | 2009-04-29 |
| RU2394305C2 (ru) | 2010-07-10 |
| TW200915476A (en) | 2009-04-01 |
| AU2008203209A1 (en) | 2009-02-05 |
| CA2638191A1 (en) | 2009-01-20 |
| JP2009044149A (ja) | 2009-02-26 |
| RU2008129818A (ru) | 2010-01-27 |
| US20090020768A1 (en) | 2009-01-22 |
| KR20090009761A (ko) | 2009-01-23 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| B03A | Publication of a patent application or of a certificate of addition of invention [chapter 3.1 patent gazette] | ||
| B08F | Application dismissed because of non-payment of annual fees [chapter 8.6 patent gazette] |
Free format text: REFERENTE A 3A ANUIDADE. |
|
| B08K | Patent lapsed as no evidence of payment of the annual fee has been furnished to inpi [chapter 8.11 patent gazette] |
Free format text: NAO APRESENTADA A GUIA DE CUMPRIMENTO DE EXIGENCIA. REFERENTE AS 3A E 4A ANUIDADES. |