BRPI0801878A2 - aparelho para execuÇço de deposiÇço de vapor quÍmico de plasma e mÉtodo de fabricaÇço de uma prÉ-forma àtica - Google Patents
aparelho para execuÇço de deposiÇço de vapor quÍmico de plasma e mÉtodo de fabricaÇço de uma prÉ-forma àticaInfo
- Publication number
- BRPI0801878A2 BRPI0801878A2 BRPI0801878-2A BRPI0801878A BRPI0801878A2 BR PI0801878 A2 BRPI0801878 A2 BR PI0801878A2 BR PI0801878 A BRPI0801878 A BR PI0801878A BR PI0801878 A2 BRPI0801878 A2 BR PI0801878A2
- Authority
- BR
- Brazil
- Prior art keywords
- plasma chemical
- preform
- attic
- manufacture
- interior
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
- C03B37/01815—Reactant deposition burners or deposition heating means
- C03B37/01823—Plasma deposition burners or heating means
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
- C03B37/01815—Reactant deposition burners or deposition heating means
- C03B37/01823—Plasma deposition burners or heating means
- C03B37/0183—Plasma deposition burners or heating means for plasma within a tube substrate
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/08—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant
- C03B2201/12—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant doped with fluorine
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
- C03B2201/31—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with germanium
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Plasma & Fusion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
- Glass Melting And Manufacturing (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
APARELHO PARA EXECUÇçO DE DEPOSIÇçO DE VAPOR QUÍMICO DE PLASMA E MÉTODO DE FABRICAÇçO DE UMA PRÉ-FORMA àTICA. A presente invenção refere-se a um aparelho para execução da deposição de vapor químico de plasma, pelo qual uma ou mais camadas de sílica dopada ou não dopada são depositadas sobre o interior de um tubo de substrato de vidro oco alongado. A presente invenção também se refere a um método de fabricação de uma pré-forma ótica por meio da deposição de vapor químico de plasma, onde os gases de formação do vidro dopados ou não dopados são passados através do interior de um tubo de substrato de vidro alongado, enquanto as condições, tal que a deposição das camadas de vidro aconteça, são criadas no interior do tubo de substrato.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL1033783A NL1033783C2 (nl) | 2007-05-01 | 2007-05-01 | Inrichting voor het uitvoeren van een plasma chemische dampdepositie alsmede werkwijze ter vervaardiging van een optische voorvorm. |
Publications (2)
Publication Number | Publication Date |
---|---|
BRPI0801878A2 true BRPI0801878A2 (pt) | 2009-01-06 |
BRPI0801878B1 BRPI0801878B1 (pt) | 2018-10-16 |
Family
ID=38996701
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BRPI0801878A BRPI0801878B1 (pt) | 2007-05-01 | 2008-05-02 | aparelho para execução de deposição de vapor químico de plasma e método de fabricação de uma pré-forma ótica |
Country Status (8)
Country | Link |
---|---|
US (1) | US8662011B2 (pt) |
EP (1) | EP1988065B1 (pt) |
JP (1) | JP5459977B2 (pt) |
CN (1) | CN101298664B (pt) |
AT (1) | ATE531674T1 (pt) |
BR (1) | BRPI0801878B1 (pt) |
ES (1) | ES2376133T3 (pt) |
NL (1) | NL1033783C2 (pt) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102263000B (zh) * | 2011-06-24 | 2013-05-15 | 长飞光纤光缆有限公司 | 一种等离子体微波谐振腔 |
NL2007809C2 (en) * | 2011-11-17 | 2013-05-21 | Draka Comteq Bv | An apparatus for performing a plasma chemical vapour deposition process. |
NL2007917C2 (en) * | 2011-12-01 | 2013-06-06 | Draka Comteq Bv | A device for applying electromagnetic microwave radiation in a plasma inside a hollow glass substrate tube, and method for manufacturing an optical preform. |
NL2007968C2 (en) * | 2011-12-14 | 2013-06-17 | Draka Comteq Bv | An apparatus for performing a plasma chemical vapour deposition process. |
CN105244251B (zh) * | 2015-11-03 | 2017-11-17 | 长飞光纤光缆股份有限公司 | 一种大功率等离子体微波谐振腔 |
NL2017575B1 (en) | 2016-10-04 | 2018-04-13 | Draka Comteq Bv | A method and an apparatus for performing a plasma chemical vapour deposition process and a method |
NL2028245B1 (en) | 2021-05-19 | 2022-12-05 | Draka Comteq Bv | A plasma chemical vapor deposition apparatus |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2444100C3 (de) * | 1974-09-14 | 1979-04-12 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Verfahren zur Herstellung von innenbeschichteten Glasrohren zum Ziehen von Lichtleitfasern |
US4292063A (en) * | 1980-05-05 | 1981-09-29 | Northern Telecom Limited | Manufacture of an optical fiber preform with micro-wave plasma activated deposition in a tube |
JPS5869732A (ja) * | 1981-10-21 | 1983-04-26 | Furukawa Electric Co Ltd:The | プラズマcvd法におけるガラスパイプの加熱方法 |
DE3528275A1 (de) * | 1985-08-07 | 1987-02-19 | Philips Patentverwaltung | Verfahren und vorrichtung zum innenbeschichten von rohren |
DE3632684A1 (de) * | 1986-09-26 | 1988-03-31 | Philips Patentverwaltung | Verfahren und vorrichtung zum innenbeschichten von rohren |
NL8602910A (nl) * | 1986-11-17 | 1988-06-16 | Philips Nv | Inrichting voor het aanbrengen van glaslagen op de binnenzijde van een buis. |
US5037666A (en) * | 1989-08-03 | 1991-08-06 | Uha Mikakuto Precision Engineering Research Institute Co., Ltd. | High-speed film forming method by microwave plasma chemical vapor deposition (CVD) under high pressure |
DE4203369C2 (de) * | 1992-02-06 | 1994-08-11 | Ceramoptec Gmbh | Verfahren und Vorrichtung zur Herstellung von Vorformen für Lichtwellenleiter |
US6138478A (en) * | 1992-09-21 | 2000-10-31 | Ceramoptec Industries, Inc. | Method of forming an optical fiber preform using an E020 plasma field configuration |
US5698036A (en) * | 1995-05-26 | 1997-12-16 | Tokyo Electron Limited | Plasma processing apparatus |
US5895548A (en) * | 1996-03-29 | 1999-04-20 | Applied Komatsu Technology, Inc. | High power microwave plasma applicator |
US5902404A (en) * | 1997-03-04 | 1999-05-11 | Applied Materials, Inc. | Resonant chamber applicator for remote plasma source |
JP4326146B2 (ja) * | 1997-12-31 | 2009-09-02 | プラズマ オプティカル ファイバー ベスローテン フェンノートシャップ | Pcvd装置及び光ファイバ、プレフォームロッド及びジャケットチューブを製造する方法並びにこれにより製造される光ファイバ |
JP4008728B2 (ja) * | 2002-03-20 | 2007-11-14 | 株式会社 液晶先端技術開発センター | プラズマ処理装置 |
NL1020358C2 (nl) * | 2002-04-10 | 2003-10-13 | Draka Fibre Technology Bv | Werkwijze en inrichting ter vervaardiging van optische voorvormen, alsmede de daarmee verkregen optische vezels. |
-
2007
- 2007-05-01 NL NL1033783A patent/NL1033783C2/nl not_active IP Right Cessation
-
2008
- 2008-04-25 EP EP08007993A patent/EP1988065B1/en active Active
- 2008-04-25 AT AT08007993T patent/ATE531674T1/de active
- 2008-04-25 ES ES08007993T patent/ES2376133T3/es active Active
- 2008-04-30 JP JP2008118127A patent/JP5459977B2/ja active Active
- 2008-04-30 CN CN2008101258138A patent/CN101298664B/zh active Active
- 2008-05-01 US US12/113,512 patent/US8662011B2/en active Active
- 2008-05-02 BR BRPI0801878A patent/BRPI0801878B1/pt active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
EP1988065B1 (en) | 2011-11-02 |
ES2376133T3 (es) | 2012-03-09 |
US20080274300A1 (en) | 2008-11-06 |
EP1988065A1 (en) | 2008-11-05 |
NL1033783C2 (nl) | 2008-11-06 |
CN101298664B (zh) | 2011-11-09 |
ATE531674T1 (de) | 2011-11-15 |
JP2008280238A (ja) | 2008-11-20 |
BRPI0801878B1 (pt) | 2018-10-16 |
US8662011B2 (en) | 2014-03-04 |
JP5459977B2 (ja) | 2014-04-02 |
CN101298664A (zh) | 2008-11-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
BRPI0702617C8 (pt) | aparelho para realizar um processo de deposição química a vapor por plasma, e método de fabricar uma fibra ótica por meio de um processo de deposição química a vapor por plasma | |
BRPI0801878A2 (pt) | aparelho para execuÇço de deposiÇço de vapor quÍmico de plasma e mÉtodo de fabricaÇço de uma prÉ-forma àtica | |
BRPI0802237A2 (pt) | mÉtodo para fabricar uma prÉ-forma para fibras àticas por meio de um processo de deposiÇço de vapor | |
TW200738737A (en) | Tungsten and molybdenum compounds and their use for chemical vapour deposition (CVD) | |
BRPI0801377A2 (pt) | dispositivo e mÉtodo para fabricar uma prÉ-forma àtica | |
EA024976B1 (ru) | Барьерный слой для щелочных металлов на основе sioc | |
WO2017103123A3 (de) | Herstellung von quarzglaskörpern mit taupunktkontrolle im schmelzofen | |
BRPI0405970A (pt) | Aparelho para executar o processo de deposição pcvd, métodos para fabricar uma pré-forma e para fabricar uma fibra ótica, e, forno e método para executar um processo de deposição pcvd | |
SI3001834T1 (en) | PRODUCT PROCESS WITH YTTERBIUM DOPEED OPTICAL FIBER | |
FR2911868B1 (fr) | Procede de fabrication de verre | |
BR112014010421A2 (pt) | vidraça hidrofóbica | |
MX2019003025A (es) | Sustrato de vidrio templado que tiene iridiscencia reducida. | |
BRPI0704124A (pt) | método de fabricação de uma preforma ótica | |
DE602006013774D1 (de) | Vorrichtung und Verfahren zum Herstellen einer optischen Vorform | |
ZA201004683B (en) | Gecl4 and/or sicl4 recovery process from optical fibers or glassy resigues and process for producing sicl4 from sio2 rich materials | |
WO2008140676A3 (en) | Glasses having low oh, od levels | |
ATE555859T1 (de) | Niederdielektrischer konstanter plasmapolymerisierter dünnfilm und herstellungsverfahren dafür | |
WO2013014258A3 (de) | Plasma-abscheideprozess zur herstellung einer optischen vorform mit einer mantelglasschicht aus fluordotiertem quarzglas | |
EP2573056A3 (en) | Method for manufacturing a primary preform for optical fibres, primary preform, final preform, optical fibre | |
FR2926296B1 (fr) | Four verrier et procede de fabrication de verre. | |
AU2003228129A1 (en) | Method and device for manufacturing optical preforms, as well as the optical fibres obtained therewith | |
BR0006241A (pt) | Processo para a aplicação de camadas de vidro, que pode ou não ser ativado, ao interior de um tubo de substrato por meio de uma técnica de deposição de vapor quìmico | |
DE602008002467D1 (de) | Verfahren zur Herstellung einer Vorform und damit erzeugte optische Faser | |
DK1365999T3 (da) | Fremgangsmåde til fremstilling af en optisk fiber, der er egnet til høje transmissionshastigheder | |
EP2821378A3 (en) | A method for manufacturing a precursor for a primary preform for optical fibres by means of a plasma deposition process |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
B03A | Publication of a patent application or of a certificate of addition of invention [chapter 3.1 patent gazette] | ||
B06F | Objections, documents and/or translations needed after an examination request according [chapter 6.6 patent gazette] | ||
B06I | Publication of requirement cancelled [chapter 6.9 patent gazette] | ||
B06A | Patent application procedure suspended [chapter 6.1 patent gazette] | ||
B09A | Decision: intention to grant [chapter 9.1 patent gazette] | ||
B16A | Patent or certificate of addition of invention granted [chapter 16.1 patent gazette] |
Free format text: PRAZO DE VALIDADE: 10 (DEZ) ANOS CONTADOS A PARTIR DE 16/10/2018, OBSERVADAS AS CONDICOES LEGAIS. |