BRPI0702617C8 - aparelho para realizar um processo de deposição química a vapor por plasma, e método de fabricar uma fibra ótica por meio de um processo de deposição química a vapor por plasma - Google Patents

aparelho para realizar um processo de deposição química a vapor por plasma, e método de fabricar uma fibra ótica por meio de um processo de deposição química a vapor por plasma

Info

Publication number
BRPI0702617C8
BRPI0702617C8 BRPI0702617A BRPI0702617A BRPI0702617C8 BR PI0702617 C8 BRPI0702617 C8 BR PI0702617C8 BR PI0702617 A BRPI0702617 A BR PI0702617A BR PI0702617 A BRPI0702617 A BR PI0702617A BR PI0702617 C8 BRPI0702617 C8 BR PI0702617C8
Authority
BR
Brazil
Prior art keywords
deposition process
vapor deposition
plasma vapor
chemical plasma
conducting
Prior art date
Application number
BRPI0702617A
Other languages
English (en)
Inventor
Antoon Hartsuiker Johannes
Jacobus Nicolaas Van Stralen Mattheus
Korsten Marco
Hubertus Matheus Deckers Rob
Original Assignee
Draka Comteq Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Draka Comteq Bv filed Critical Draka Comteq Bv
Publication of BRPI0702617A publication Critical patent/BRPI0702617A/pt
Publication of BRPI0702617B1 publication Critical patent/BRPI0702617B1/pt
Publication of BRPI0702617B8 publication Critical patent/BRPI0702617B8/pt
Publication of BRPI0702617C8 publication Critical patent/BRPI0702617C8/pt

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
    • C03B37/01815—Reactant deposition burners or deposition heating means
    • C03B37/01823—Plasma deposition burners or heating means
    • C03B37/0183—Plasma deposition burners or heating means for plasma within a tube substrate
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/08—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant
    • C03B2201/12—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant doped with fluorine
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
    • C03B2201/31—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with germanium

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Chemical Vapour Deposition (AREA)
  • Surface Treatment Of Glass Fibres Or Filaments (AREA)
  • Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)

Abstract

aparelho para realizar um processo de deposição de vapor químico em plasma (pcvd) e método para fabricar uma fibra ótica. a presente invenção refere-se a um aparelho para realizar um processo de deposição de vapor químico em plasma, por meio do qual uma ou mais camadas de sílica envernizada, ou não envernizada, podem ser depositadas sobre o interior de um tubo substrato de vidro alongado. a presente invenção ainda é relativa a um método para fabricar uma fibra ótica por meio de um tal aparelho.
BRPI0702617A 2006-06-16 2007-06-18 aparelho para realizar um processo de deposição química a vapor por plasma, e método de fabricar uma fibra ótica por meio de um processo de deposição química a vapor por plasma BRPI0702617C8 (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL1032015A NL1032015C2 (nl) 2006-06-16 2006-06-16 Inrichting voor het uitvoeren van een plasma chemische dampdepositie (PCVD) en werkwijze ter vervaardiging van een optische vezel.
NL1032015 2006-06-16

Publications (4)

Publication Number Publication Date
BRPI0702617A BRPI0702617A (pt) 2008-02-19
BRPI0702617B1 BRPI0702617B1 (pt) 2018-03-20
BRPI0702617B8 BRPI0702617B8 (pt) 2018-12-26
BRPI0702617C8 true BRPI0702617C8 (pt) 2019-10-15

Family

ID=37773470

Family Applications (1)

Application Number Title Priority Date Filing Date
BRPI0702617A BRPI0702617C8 (pt) 2006-06-16 2007-06-18 aparelho para realizar um processo de deposição química a vapor por plasma, e método de fabricar uma fibra ótica por meio de um processo de deposição química a vapor por plasma

Country Status (8)

Country Link
US (1) US7759874B2 (pt)
EP (1) EP1867610B1 (pt)
JP (1) JP5164137B2 (pt)
CN (1) CN101089223B (pt)
AT (1) ATE480507T1 (pt)
BR (1) BRPI0702617C8 (pt)
DE (1) DE602007008977D1 (pt)
NL (1) NL1032015C2 (pt)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL1032015C2 (nl) 2006-06-16 2008-01-08 Draka Comteq Bv Inrichting voor het uitvoeren van een plasma chemische dampdepositie (PCVD) en werkwijze ter vervaardiging van een optische vezel.
NL1033763C2 (nl) * 2007-04-26 2008-10-28 Draka Comteq Bv Inrichting en werkwijze voor het vervaardigen van een optische voorvorm.
NL1033773C2 (nl) * 2007-04-27 2008-10-28 Draka Comteq Bv Werkwijze voor de vervaardiging van een voorvorm alsmede daarmee te verkrijgen optische vezel.
NL1037163C2 (nl) 2009-07-30 2011-02-02 Draka Comteq Bv Werkwijze en inrichting voor het vervaardigen van een primaire voorvorm voor optische vezels.
NL1037164C2 (nl) 2009-07-30 2011-02-02 Draka Comteq Bv Werkwijze voor het vervaardigen van een primaire voorvorm voor optische vezels.
CN107359103A (zh) * 2009-10-28 2017-11-17 应用材料公司 用于等离子体增强化学气相沉积的腔室
NL2004544C2 (nl) 2010-04-13 2011-10-17 Draka Comteq Bv Inwendig dampdepositieproces.
NL2004546C2 (nl) 2010-04-13 2011-10-17 Draka Comteq Bv Inwendig dampdepositieproces.
NL2004874C2 (nl) 2010-06-11 2011-12-19 Draka Comteq Bv Werkwijze voor het vervaardigen van een primaire voorvorm.
NL2007447C2 (nl) 2011-09-20 2013-03-21 Draka Comteq Bv Werkwijze voor de vervaardiging van een primaire voorvorm voor optische vezels, primaire voorvorm, uiteindelijke voorvorm, optische vezel.
NL2007448C2 (nl) 2011-09-20 2013-03-21 Draka Comteq Bv Werkwijze voor de vervaardiging van een primaire voorvorm voor optische vezels, primaire voorvorm, uiteindelijke voorvorm, optische vezels.
NL2007809C2 (en) * 2011-11-17 2013-05-21 Draka Comteq Bv An apparatus for performing a plasma chemical vapour deposition process.
NL2007917C2 (en) 2011-12-01 2013-06-06 Draka Comteq Bv A device for applying electromagnetic microwave radiation in a plasma inside a hollow glass substrate tube, and method for manufacturing an optical preform.
NL2007968C2 (en) 2011-12-14 2013-06-17 Draka Comteq Bv An apparatus for performing a plasma chemical vapour deposition process.
US9002162B2 (en) 2013-03-15 2015-04-07 Ofs Fitel, Llc Large core multimode optical fibers
CN103269561B (zh) * 2013-05-15 2016-01-06 浙江大学 波导直馈式微波等离子体炬装置
CN105244251B (zh) * 2015-11-03 2017-11-17 长飞光纤光缆股份有限公司 一种大功率等离子体微波谐振腔
NL2017575B1 (en) 2016-10-04 2018-04-13 Draka Comteq Bv A method and an apparatus for performing a plasma chemical vapour deposition process and a method
CN106099301B (zh) * 2016-07-19 2019-08-09 电子科技大学 一种同轴谐振腔及其应用
CN109562977B (zh) 2016-08-02 2021-11-26 住友电气工业株式会社 光纤预制件制造方法和光纤制造方法
CN110453202B (zh) * 2019-06-28 2023-08-25 郑州磨料磨具磨削研究所有限公司 一种天线位置可调的波导模式转换器及mpcvd装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3204846A1 (de) * 1982-02-11 1983-08-18 Schott Glaswerke, 6500 Mainz Plasmaverfahren zur innenbeschichtung von glasrohren
US5223308A (en) * 1991-10-18 1993-06-29 Energy Conversion Devices, Inc. Low temperature plasma enhanced CVD process within tubular members
US5230740A (en) * 1991-12-17 1993-07-27 Crystallume Apparatus for controlling plasma size and position in plasma-activated chemical vapor deposition processes comprising rotating dielectric
US5361016A (en) * 1992-03-26 1994-11-01 General Atomics High density plasma formation using whistler mode excitation in a reduced cross-sectional area formation tube
US6161498A (en) * 1995-09-14 2000-12-19 Tokyo Electron Limited Plasma processing device and a method of plasma process
US6715441B2 (en) * 1997-12-31 2004-04-06 Plasma Optical Fibre B.V. PCVD apparatus and a method of manufacturing an optical fiber, a preform rod and a jacket tube as well as the optical fiber manufactured therewith
ATE234947T1 (de) * 1997-12-31 2003-04-15 Draka Fibre Technology Bv Pcvd-vorrichtung und verfahren zur herstellung einer optischen faser, eines vorform-stabes und eines mantelrohres und die damit hergestellte optische faser
US20030104139A1 (en) * 2001-11-30 2003-06-05 House Keith L. Apparatus for depositing a plasma chemical vapor deposition coating on the inside of an optical fiber preform
US20030115909A1 (en) * 2001-12-21 2003-06-26 House Keith L. Plasma chemical vapor deposition methods and apparatus
NL1025155C2 (nl) * 2003-12-30 2005-07-04 Draka Fibre Technology Bv Inrichting voor het uitvoeren van PCVD, alsmede werkwijze voor het vervaardigen van een voorvorm.
NL1032015C2 (nl) 2006-06-16 2008-01-08 Draka Comteq Bv Inrichting voor het uitvoeren van een plasma chemische dampdepositie (PCVD) en werkwijze ter vervaardiging van een optische vezel.

Also Published As

Publication number Publication date
BRPI0702617B1 (pt) 2018-03-20
CN101089223A (zh) 2007-12-19
US20070289532A1 (en) 2007-12-20
CN101089223B (zh) 2010-09-22
EP1867610A1 (en) 2007-12-19
BRPI0702617A (pt) 2008-02-19
US7759874B2 (en) 2010-07-20
JP2007332460A (ja) 2007-12-27
BRPI0702617B8 (pt) 2018-12-26
JP5164137B2 (ja) 2013-03-13
EP1867610B1 (en) 2010-09-08
DE602007008977D1 (de) 2010-10-21
NL1032015C2 (nl) 2008-01-08
ATE480507T1 (de) 2010-09-15

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Legal Events

Date Code Title Description
B06A Patent application procedure suspended [chapter 6.1 patent gazette]
B09A Decision: intention to grant [chapter 9.1 patent gazette]
B16A Patent or certificate of addition of invention granted [chapter 16.1 patent gazette]

Free format text: PRAZO DE VALIDADE: 10 (DEZ) ANOS CONTADOS A PARTIR DE 20/03/2018, OBSERVADAS AS CONDICOES LEGAIS.

B16C Correction of notification of the grant [chapter 16.3 patent gazette]

Free format text: PRAZO DE VALIDADE: 10 (DEZ) ANOS CONTADOS A PARTIR DE 20/03/2018, OBSERVADAS AS CONDICOES LEGAIS. (CO) REFERENTE A RPI 2463 DE 20/03/2018_, QUANTO AO NOME DO INVENTOR.

B16C Correction of notification of the grant [chapter 16.3 patent gazette]

Free format text: PRAZO DE VALIDADE: 10 (DEZ) ANOS CONTADOS A PARTIR DE 20/03/2018, OBSERVADAS AS CONDICOES LEGAIS. (CO) REFERENTE A RPI 2503 DE 26/12/2018, QUANTO AO ITEM (72) NOME DO INVENTOR.