CN102263000B - 一种等离子体微波谐振腔 - Google Patents

一种等离子体微波谐振腔 Download PDF

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CN102263000B
CN102263000B CN2011101720627A CN201110172062A CN102263000B CN 102263000 B CN102263000 B CN 102263000B CN 2011101720627 A CN2011101720627 A CN 2011101720627A CN 201110172062 A CN201110172062 A CN 201110172062A CN 102263000 B CN102263000 B CN 102263000B
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张金燕
王瑞春
夏先辉
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Yangtze Optical Fibre and Cable Co Ltd
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    • H01J37/32—Gas-filled discharge tubes
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    • C03B37/01815—Reactant deposition burners or deposition heating means
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    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/511—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using microwave discharges
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Abstract

本发明涉及一种用于PCVD光纤预制棒加工机床的等离子体微波谐振腔，包括有谐振腔壳体和与其相联的波导装置，在谐振腔壳体的两端沿谐振腔轴向开设有同轴线的通孔，通过两端通孔安设有贯穿谐振腔腔体和两端通孔的玻璃内衬套，所述的玻璃内衬套包括玻璃直筒体和设置在玻璃直筒体两端的玻璃止挡环，其特征在于在玻璃直筒体的一端或两端设置外螺纹，玻璃止挡环通过其设置的螺孔与玻璃直筒体的端头相联。本发明不仅安装调整方便，大大降低了现场安装操作的难度，而且完全不使用氢、氧气的高温燃烧，有效避免因高温造成谐振腔金属元素的扩散，保证了生产出的光纤预制棒性能和质量稳定；提高了等离子体微波谐振腔使用性能的稳定性和有效使用寿命。

Description

一种等离子体微波谐振腔
技术领域
本发明涉及一种用于PCVD光纤预制棒加工机床的等离子体微波谐振腔，是对现有等离子体微波谐振腔的改进。
背景技术
PCVD即等离子化学气相沉积法是光纤预制棒加工的主要工艺之一，等离子体微波谐振腔是PCVD加工设备的核心部分。等离子体微波谐振腔主要由谐振腔壳体和与其相联的波导装置组成，在谐振腔壳体的两端沿谐振腔轴向开设有同轴线的通孔，通过两端通孔安设有贯穿谐振腔和两端通孔的玻璃内衬套，在玻璃内衬套的两端设置有玻璃止挡环，用于玻璃内衬套的轴向定位。现有的玻璃内衬套一端的玻璃止挡环在制作时与玻璃内衬套的玻璃直筒体制作成一体，另一端的玻璃止挡环需要在玻璃内衬套安装到谐振腔壳体上后将玻璃止挡环安装到玻璃直筒体的末端，然后用燃烧氢、氧气将直筒玻璃最末端熔化后外翻，压住玻璃止挡环。这样的玻璃内衬套结构存在以下几方面的问题：1、不仅现场安装复杂，操作难度大，而且由于熔化石英玻璃需要2000℃以上的温度，在这种高温环境下，谐振腔端部的金属很容易扩散到石英玻璃内衬套中，进而在PCVD的沉积过程中扩散到沉积管中，使光纤预制棒的衰减增加，从而影响光纤预制棒的加工质量；2、熔化后外翻的玻璃冷却后存在一定的应力，在以后使用过程中容易发生玻璃碎裂和破损现象，严重情况下将引起产品报废甚至设备损坏；3、如果使用过程中安装的玻璃环发生松动现象，需要进一步紧固，而玻璃的二次紧固效果不好，很难达到一定要求，进而影响设备的加工性能和产品质量的稳定性；4、由于石英玻璃内衬套与玻璃止挡环是高温粘接在一起，维修或检查谐振腔状态时需要对石英玻璃内衬套及止挡环进行破坏性拆除，这样不仅需要更换新的玻璃内衬套，而且其断裂的玻璃碎片易掉入谐振腔造成谐振腔的损坏。
发明内容
本发明所要解决的技术问题是针对上述现有技术存在的不足而提供一种便于安装和拆卸、安装质量好和使用性能稳定的等离子体微波谐振腔。
本发明为解决上述提出的问题所采用的技术方案为：包括有谐振腔壳体和与其相联的波导装置，在谐振腔壳体的两端沿谐振腔轴向开设有同轴线的通孔，通过两端通孔安设有贯穿谐振腔腔体和两端通孔的玻璃内衬套，所述的玻璃内衬套包括玻璃直筒体和设置在玻璃直筒体两端的玻璃止挡环，其特征在于在玻璃直筒体的一端或两端设置外螺纹，玻璃止挡环通过其设置的螺孔与玻璃直筒体的端头相联。
按上述方案，所述的玻璃直筒体的一端设置与其相联成一体的固定玻璃止挡环，玻璃直筒体的另一端端头设置外螺纹，与设置螺孔的玻璃止挡环相联，构成一端为螺纹联接的玻璃止挡环。
按上述方案，所述的玻璃直筒体和玻璃止挡环均由石英玻璃制成。
按上述方案，所述的玻璃直筒体直径为30～80毫米，端头设置的外螺纹为细牙螺纹，螺距为3～0.85毫米，整个外螺纹的轴向长度为10～20毫米。
按上述方案，所述的玻璃止挡环呈圆环形，螺孔与玻璃直筒体外螺纹相配置，玻璃止挡环的轴向厚度为3～15毫米，环体径向单边宽度为10～35毫米。
按上述方案，在玻璃直筒体一端或两端玻璃止挡环的内侧套装有活动玻璃挡圈。
按上述方案，所述的谐振腔壳体为圆柱型谐振腔壳体或同轴型谐振腔壳体。
本发明的有益效果在于：1、使用安装时，将玻璃内衬套穿入谐振腔和两端通孔，在端头的外螺纹旋上玻璃止挡环，拧紧玻璃止挡环即完成玻璃内衬套的安装和定位，这样不仅安装调整方便，大大降低了现场安装操作的难度，而且完全不使用氢、氧气的高温燃烧，有效避免因高温造成谐振腔金属元素的扩散，保证了生产出的光纤预制棒性能和质量稳定；2、玻璃内衬套采用螺纹安装锁紧结构，有效避免了石英玻璃熔化外翻冷却后易产生应力的缺点，在使用过程中不会出现玻璃碎裂、破损现象，提高了玻璃内衬套的使用寿命；3、使用过程中玻璃内衬套发生松动时，只需将玻璃止挡环继续拧紧一定距离即可，维修和检查时通过玻璃止挡环很容易将玻璃内衬套拆卸，拆卸后的玻璃内衬套能够方便的重新安装和定位，使设备的维修检查成本大大降低；并且拆卸安装不会形成玻璃碎片，进一步提高了等离子体微波谐振腔使用性能的稳定性。
附图说明
图1为本发明一个实施例的正剖视结构图。
图2为本发明另一个实施例的正剖视结构图。
图3为本发明一个实施例中玻璃内衬套的正剖视结构图。
具体实施方式
以下结合附图进一步说明本发明的实施例。
第一个实施例如图1、3所示，为一种圆柱型谐振腔，包括有谐振腔壳体5和与其一侧相联的波导装置10，在谐振腔壳体的两端安设有左、右端盖4、6，左、右端盖上沿谐振腔轴向开设有同轴线的通孔，通过左、右两端通孔安设有贯穿谐振腔腔体和两端通孔的玻璃内衬套7，所述的玻璃内衬套包括玻璃直筒体1，玻璃直筒体的外径为60毫米，玻璃直筒体的一端设置与其相联成一体的固定玻璃止挡环，玻璃直筒体的另一端端头设置外螺纹3，外螺纹为细牙螺纹，螺距为1.5毫米，整个外螺纹的轴向长度为15毫米，外螺纹与设置螺孔的玻璃止挡环2相联，构成一端为螺纹联接的玻璃止挡环，所述的玻璃止挡环呈圆环形，螺孔与玻璃直筒体外螺纹相配置，玻璃止挡环的轴向厚度为6毫米，环体径向单边宽度为18毫米。所述的玻璃直筒体和玻璃止挡环均由石英玻璃制成。其中固定式玻璃止挡环与玻璃直筒体一体成型。
第二个实施例如图2所示，为一种同轴型谐振腔，它与上一个实施例的主要不同在于同轴型谐振腔壳体8的谐振腔中设置有两个同轴套9，两同轴套之间存在有狭缝11，玻璃内衬套穿入两同轴套内孔并贯穿谐振腔轴向。在波导装置内安设有波导天线12.。

Claims (7)

1.一种等离子体微波谐振腔，包括有谐振腔壳体和与其相联的波导装置，在谐振腔壳体的两端沿谐振腔轴向开设有同轴线的通孔，通过两端通孔安设有贯穿谐振腔腔体和两端通孔的玻璃内衬套，所述的玻璃内衬套包括玻璃直筒体和设置在玻璃直筒体两端的玻璃止挡环，其特征在于在玻璃直筒体的一端或两端设置外螺纹，玻璃止挡环通过其设置的螺孔与玻璃直筒体的端头相联。
2.按权利要求1所述的等离子体微波谐振腔，其特征在于所述的玻璃直筒体的一端设置与其相联成一体的固定玻璃止挡环，玻璃直筒体的另一端端头设置外螺纹，与设置螺孔的玻璃止挡环相联，构成一端为螺纹联接的玻璃止挡环。
3.按权利要求1或2所述的等离子体微波谐振腔，其特征在于所述的玻璃直筒体和玻璃止挡环均由石英玻璃制成。
4.按权利要求1或2所述的等离子体微波谐振腔，其特征在于所述的玻璃直筒体直径为30~80毫米，端头设置的外螺纹为细牙螺纹，螺距为3~0.85毫米，整个外螺纹的轴向长度为10~20毫米。
5.按权利要求1或2所述的等离子体微波谐振腔，其特征在于所述的玻璃止挡环呈圆环形，螺孔与玻璃直筒体外螺纹相配置，玻璃止挡环的轴向厚度为3~15毫米，环体径向单边宽度为10~35毫米。
6.按权利要求1或2所述的等离子体微波谐振腔，其特征在于在玻璃直筒体一端或两端玻璃止挡环的内侧套装有活动玻璃挡圈。
7.按权利要求1或2所述的等离子体微波谐振腔，其特征在于所述的谐振腔壳体为圆柱型谐振腔壳体或同轴型谐振腔壳体。
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CN105502918B (zh) * 2015-12-25 2019-01-25 长飞光纤光缆股份有限公司 一种双腔型等离子体微波谐振腔
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