ATE531674T1 - Verfahren zur durchführung einer plasmachemischen dampfabscheidung und verfahren zur herstellung einer optischen vorform - Google Patents
Verfahren zur durchführung einer plasmachemischen dampfabscheidung und verfahren zur herstellung einer optischen vorformInfo
- Publication number
- ATE531674T1 ATE531674T1 AT08007993T AT08007993T ATE531674T1 AT E531674 T1 ATE531674 T1 AT E531674T1 AT 08007993 T AT08007993 T AT 08007993T AT 08007993 T AT08007993 T AT 08007993T AT E531674 T1 ATE531674 T1 AT E531674T1
- Authority
- AT
- Austria
- Prior art keywords
- carrying
- optical preform
- out plasma
- producing
- interior
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 230000003287 optical effect Effects 0.000 title abstract 2
- 238000005229 chemical vapour deposition Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000011521 glass Substances 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 abstract 2
- 238000000151 deposition Methods 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 abstract 1
- 238000007496 glass forming Methods 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
- C03B37/01815—Reactant deposition burners or deposition heating means
- C03B37/01823—Plasma deposition burners or heating means
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
- C03B37/01815—Reactant deposition burners or deposition heating means
- C03B37/01823—Plasma deposition burners or heating means
- C03B37/0183—Plasma deposition burners or heating means for plasma within a tube substrate
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/08—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant
- C03B2201/12—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant doped with fluorine
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
- C03B2201/31—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with germanium
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Plasma & Fusion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
- Chemical Vapour Deposition (AREA)
- Glass Melting And Manufacturing (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL1033783A NL1033783C2 (nl) | 2007-05-01 | 2007-05-01 | Inrichting voor het uitvoeren van een plasma chemische dampdepositie alsmede werkwijze ter vervaardiging van een optische voorvorm. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE531674T1 true ATE531674T1 (de) | 2011-11-15 |
Family
ID=38996701
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT08007993T ATE531674T1 (de) | 2007-05-01 | 2008-04-25 | Verfahren zur durchführung einer plasmachemischen dampfabscheidung und verfahren zur herstellung einer optischen vorform |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US8662011B2 (de) |
| EP (1) | EP1988065B1 (de) |
| JP (1) | JP5459977B2 (de) |
| CN (1) | CN101298664B (de) |
| AT (1) | ATE531674T1 (de) |
| BR (1) | BRPI0801878B1 (de) |
| ES (1) | ES2376133T3 (de) |
| NL (1) | NL1033783C2 (de) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102263000B (zh) * | 2011-06-24 | 2013-05-15 | 长飞光纤光缆有限公司 | 一种等离子体微波谐振腔 |
| NL2007809C2 (en) * | 2011-11-17 | 2013-05-21 | Draka Comteq Bv | An apparatus for performing a plasma chemical vapour deposition process. |
| NL2007917C2 (en) * | 2011-12-01 | 2013-06-06 | Draka Comteq Bv | A device for applying electromagnetic microwave radiation in a plasma inside a hollow glass substrate tube, and method for manufacturing an optical preform. |
| NL2007968C2 (en) * | 2011-12-14 | 2013-06-17 | Draka Comteq Bv | An apparatus for performing a plasma chemical vapour deposition process. |
| CN105244251B (zh) * | 2015-11-03 | 2017-11-17 | 长飞光纤光缆股份有限公司 | 一种大功率等离子体微波谐振腔 |
| NL2017575B1 (en) | 2016-10-04 | 2018-04-13 | Draka Comteq Bv | A method and an apparatus for performing a plasma chemical vapour deposition process and a method |
| NL2028245B1 (en) | 2021-05-19 | 2022-12-05 | Draka Comteq Bv | A plasma chemical vapor deposition apparatus |
| CN117528893A (zh) * | 2023-10-23 | 2024-02-06 | 武汉长盈通光电技术股份有限公司 | 同轴型等离子体谐振腔 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2444100C3 (de) * | 1974-09-14 | 1979-04-12 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Verfahren zur Herstellung von innenbeschichteten Glasrohren zum Ziehen von Lichtleitfasern |
| US4292063A (en) * | 1980-05-05 | 1981-09-29 | Northern Telecom Limited | Manufacture of an optical fiber preform with micro-wave plasma activated deposition in a tube |
| JPS5869732A (ja) * | 1981-10-21 | 1983-04-26 | Furukawa Electric Co Ltd:The | プラズマｃｖｄ法におけるガラスパイプの加熱方法 |
| DE3528275A1 (de) * | 1985-08-07 | 1987-02-19 | Philips Patentverwaltung | Verfahren und vorrichtung zum innenbeschichten von rohren |
| DE3632684A1 (de) * | 1986-09-26 | 1988-03-31 | Philips Patentverwaltung | Verfahren und vorrichtung zum innenbeschichten von rohren |
| NL8602910A (nl) * | 1986-11-17 | 1988-06-16 | Philips Nv | Inrichting voor het aanbrengen van glaslagen op de binnenzijde van een buis. |
| JPH03193880A (ja) * | 1989-08-03 | 1991-08-23 | Mikakutou Seimitsu Kogaku Kenkyusho:Kk | 高圧力下でのマイクロ波プラズマｃｖｄによる高速成膜方法及びその装置 |
| DE4203369C2 (de) * | 1992-02-06 | 1994-08-11 | Ceramoptec Gmbh | Verfahren und Vorrichtung zur Herstellung von Vorformen für Lichtwellenleiter |
| US6138478A (en) * | 1992-09-21 | 2000-10-31 | Ceramoptec Industries, Inc. | Method of forming an optical fiber preform using an E020 plasma field configuration |
| US5698036A (en) * | 1995-05-26 | 1997-12-16 | Tokyo Electron Limited | Plasma processing apparatus |
| US5895548A (en) * | 1996-03-29 | 1999-04-20 | Applied Komatsu Technology, Inc. | High power microwave plasma applicator |
| US5902404A (en) * | 1997-03-04 | 1999-05-11 | Applied Materials, Inc. | Resonant chamber applicator for remote plasma source |
| BR9814578A (pt) * | 1997-12-31 | 2000-10-10 | Plasma Optical Fibre Bv | Aparelho para realizar deposição quìmica de vapor do plasma, e, processos para fabricar uma fibra ótica, para fabricar uma haste de preforma de fibra ótica e para fabricar um tubo de revestimento para uma preforma de fibra ótica |
| JP4008728B2 (ja) * | 2002-03-20 | 2007-11-14 | 株式会社 液晶先端技術開発センター | プラズマ処理装置 |
| NL1020358C2 (nl) * | 2002-04-10 | 2003-10-13 | Draka Fibre Technology Bv | Werkwijze en inrichting ter vervaardiging van optische voorvormen, alsmede de daarmee verkregen optische vezels. |
-
2007
- 2007-05-01 NL NL1033783A patent/NL1033783C2/nl not_active IP Right Cessation
-
2008
- 2008-04-25 AT AT08007993T patent/ATE531674T1/de active
- 2008-04-25 ES ES08007993T patent/ES2376133T3/es active Active
- 2008-04-25 EP EP08007993A patent/EP1988065B1/de active Active
- 2008-04-30 CN CN2008101258138A patent/CN101298664B/zh active Active
- 2008-04-30 JP JP2008118127A patent/JP5459977B2/ja active Active
- 2008-05-01 US US12/113,512 patent/US8662011B2/en active Active
- 2008-05-02 BR BRPI0801878A patent/BRPI0801878B1/pt active IP Right Grant
Also Published As
| Publication number | Publication date |
|---|---|
| CN101298664B (zh) | 2011-11-09 |
| US8662011B2 (en) | 2014-03-04 |
| JP2008280238A (ja) | 2008-11-20 |
| JP5459977B2 (ja) | 2014-04-02 |
| NL1033783C2 (nl) | 2008-11-06 |
| CN101298664A (zh) | 2008-11-05 |
| US20080274300A1 (en) | 2008-11-06 |
| BRPI0801878A2 (pt) | 2009-01-06 |
| EP1988065B1 (de) | 2011-11-02 |
| EP1988065A1 (de) | 2008-11-05 |
| BRPI0801878B1 (pt) | 2018-10-16 |
| ES2376133T3 (es) | 2012-03-09 |
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