BR9901322A - Solução de revelação aquosa alcalina para revestimento fotossensìvel, e, processo de preparação de um padrão de revestimento fotossensìvel padronizado sobre um substrato. - Google Patents

Solução de revelação aquosa alcalina para revestimento fotossensìvel, e, processo de preparação de um padrão de revestimento fotossensìvel padronizado sobre um substrato.

Info

Publication number
BR9901322A
BR9901322A BR9901322-3A BR9901322A BR9901322A BR 9901322 A BR9901322 A BR 9901322A BR 9901322 A BR9901322 A BR 9901322A BR 9901322 A BR9901322 A BR 9901322A
Authority
BR
Brazil
Prior art keywords
photosensitive coating
substrate
oxide units
preparing
standardized
Prior art date
Application number
BR9901322-3A
Other languages
English (en)
Inventor
Robert Barr
Daniel E Lundy
Original Assignee
Nichigo Morton Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nichigo Morton Co Ltd filed Critical Nichigo Morton Co Ltd
Publication of BR9901322A publication Critical patent/BR9901322A/pt

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/32—Liquid compositions therefor, e.g. developers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/32—Liquid compositions therefor, e.g. developers
    • G03F7/322—Aqueous alkaline compositions

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Detergent Compositions (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Removal Of Specific Substances (AREA)
  • Separation Of Suspended Particles By Flocculating Agents (AREA)

Abstract

"SOLUçãO DE REVELAçãO AQUOSA ALCALINA PARA REVESTIMENTO FOTOSSENSìVEL, E, PROCESSO DE PREPARAçãO DE UM PADRãO DE REVESTIMENTO FOTOSSENSìVEL PADRONIZADO SOBRE UM SUBSTRATO" Uma solução de revelação aquosa alcalina para revelar revestimentos fotossensíveis, ou similares, contém, como um agente antiescuma, um tensoativo etoxilado tendo a fórmula geral: [R-O-(AO)~ n~]~ m~-X (I) onde AO são unidades de óxido de alquileno selecionadas dentre unidades de óxido de etileno (CH~ 2~-CH~ 2~-O) e unidades de óxido de propileno (CH(CH~ 3~)-CH~ 2~-O) ou (CH~ 2~-CH(CH~ 3~)-O), onde R é um grupo hidrofóbico, X é H ou um grupo aniónico, m é de 1 a 3, e n é pelo menos aproximadamente 8, e a proporção molar do toal de unidades de óxido de etileno para o total de unidades de óxido de propileno está entre aproximadamente 1:4 e aproximadamente 4:1, preferencialmente, entre aproximadamente 2:3 e aproximadamente 3:2.
BR9901322-3A 1998-04-29 1999-04-29 Solução de revelação aquosa alcalina para revestimento fotossensìvel, e, processo de preparação de um padrão de revestimento fotossensìvel padronizado sobre um substrato. BR9901322A (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/069,518 US5922522A (en) 1998-04-29 1998-04-29 Aqueous developing solutions for reduced developer residue

Publications (1)

Publication Number Publication Date
BR9901322A true BR9901322A (pt) 2000-03-14

Family

ID=22089531

Family Applications (1)

Application Number Title Priority Date Filing Date
BR9901322-3A BR9901322A (pt) 1998-04-29 1999-04-29 Solução de revelação aquosa alcalina para revestimento fotossensìvel, e, processo de preparação de um padrão de revestimento fotossensìvel padronizado sobre um substrato.

Country Status (10)

Country Link
US (1) US5922522A (pt)
EP (1) EP0953880B1 (pt)
KR (1) KR100326617B1 (pt)
CN (1) CN1141622C (pt)
AT (1) ATE232994T1 (pt)
BR (1) BR9901322A (pt)
CA (1) CA2270013A1 (pt)
DE (1) DE69905417T2 (pt)
IL (1) IL129658A0 (pt)
SG (1) SG80021A1 (pt)

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US6248506B1 (en) * 1998-12-04 2001-06-19 Nichigo-Morton Aqueous developing solutions for reduced developer residue
US6455234B1 (en) 1999-05-04 2002-09-24 Air Products And Chemicals, Inc. Acetylenic diol ethylene oxide/propylene oxide adducts and their use in photoresist developers
US6281170B1 (en) 1999-10-18 2001-08-28 Air Products And Chemicals, Inc. Surface tension reduction with N,N,N'-trialkkyl ureas
JP2001215690A (ja) 2000-01-04 2001-08-10 Air Prod And Chem Inc アセチレン列ジオールエチレンオキシド／プロピレンオキシド付加物および現像剤におけるその使用
EP1172699B1 (en) 2000-07-14 2013-09-11 FUJIFILM Corporation Method for making lithographic printing plates
US6649324B1 (en) 2000-08-14 2003-11-18 Kodak Polychrome Graphics Llc Aqueous developer for lithographic printing plates
US6503694B1 (en) * 2001-06-12 2003-01-07 Chi Mei Corporation Developer solution and edge bead remover composition
JP2003021901A (ja) * 2001-07-05 2003-01-24 Fuji Photo Film Co Ltd 感光性平版印刷版の光重合方法
US6756183B2 (en) 2001-08-24 2004-06-29 Fuji Photo Film Co., Ltd. Method for preparing lithographic printing plate
US20030196685A1 (en) * 2001-12-18 2003-10-23 Shipley Company, L.L.C. Cleaning composition and method
EP1335016A1 (en) * 2002-02-06 2003-08-13 Shipley Company LLC Cleaning composition
JP2003302770A (ja) * 2002-02-08 2003-10-24 Fuji Photo Film Co Ltd 画像形成方法
US6900003B2 (en) * 2002-04-12 2005-05-31 Shipley Company, L.L.C. Photoresist processing aid and method
JP2004252395A (ja) * 2002-05-07 2004-09-09 Shipley Co Llc 残渣削減安定濃縮物
US6887654B2 (en) * 2002-05-07 2005-05-03 Shipley Company, L.L.C. Residue and scum reducing composition and method
JP2004163904A (ja) * 2002-09-30 2004-06-10 Rohm & Haas Electronic Materials Llc 改善された光開始剤
KR20050101458A (ko) * 2004-04-19 2005-10-24 주식회사 하이닉스반도체 포토레지스트 세정액 조성물 및 이를 이용한 패턴 형성방법
US20050282093A1 (en) * 2004-06-16 2005-12-22 Dammel Ralph R Aqueous edge bead remover
US7094523B1 (en) 2005-11-30 2006-08-22 Kesheng Feng Developer solution and process for use
CN102540771A (zh) * 2010-12-24 2012-07-04 无锡华润上华半导体有限公司 正性光刻胶用显影液及光刻工艺中的显影方法
CN104597727A (zh) * 2015-01-14 2015-05-06 深圳市国华光电科技有限公司 一种kmpr光刻胶用koh显影液
KR102378341B1 (ko) * 2015-06-11 2022-03-24 주식회사 이엔에프테크놀로지 포토레지스트 현상액
WO2022114208A1 (ja) * 2020-11-30 2022-06-02 富士フイルム株式会社 フレキソ印刷版用水性現像液およびフレキソ印刷版の製造方法

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EP0279630B1 (en) * 1987-02-16 1993-10-13 Konica Corporation Developer for light-sensitive lithographic printing plate capable of processing commonly the negative-type and the positive type and developer composition for light-sensitive material
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JP2543742B2 (ja) * 1988-04-07 1996-10-16 富士写真フイルム株式会社 ポジ型フオトレジスト用現像液
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JPH04163556A (ja) * 1990-10-29 1992-06-09 Konica Corp 感光性平版印刷版の処理方法及び処理装置
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Also Published As

Publication number Publication date
KR100326617B1 (ko) 2002-03-02
EP0953880B1 (en) 2003-02-19
CN1233783A (zh) 1999-11-03
DE69905417D1 (de) 2003-03-27
KR19990083501A (ko) 1999-11-25
IL129658A0 (en) 2000-02-29
EP0953880A3 (en) 1999-11-17
CA2270013A1 (en) 1999-10-29
US5922522A (en) 1999-07-13
SG80021A1 (en) 2001-04-17
DE69905417T2 (de) 2003-08-28
EP0953880A2 (en) 1999-11-03
ATE232994T1 (de) 2003-03-15
CN1141622C (zh) 2004-03-10

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Legal Events

Date Code Title Description
FA10 Dismissal: dismissal - article 33 of industrial property law
B11Y Definitive dismissal - extension of time limit for request of examination expired [chapter 11.1.1 patent gazette]