BR112016028225A2 - processo para produção de laminados flexíveis orgânico-inorgânicos - Google Patents

processo para produção de laminados flexíveis orgânico-inorgânicos

Info

Publication number
BR112016028225A2
BR112016028225A2 BR112016028225A BR112016028225A BR112016028225A2 BR 112016028225 A2 BR112016028225 A2 BR 112016028225A2 BR 112016028225 A BR112016028225 A BR 112016028225A BR 112016028225 A BR112016028225 A BR 112016028225A BR 112016028225 A2 BR112016028225 A2 BR 112016028225A2
Authority
BR
Brazil
Prior art keywords
flexible laminates
inorganic flexible
inorganic
producing organic
organic
Prior art date
Application number
BR112016028225A
Other languages
English (en)
Other versions
BR112016028225B1 (pt
BR112016028225A8 (pt
Inventor
LÖFFLER Daniel
Eickemeyer Felix
Frank Jürgen
Hyuck YOON Kwan
Ahlf Maraike
Mo SUNG Myung
KLOTZ Stephan
Original Assignee
Basf Coatings Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Basf Coatings Gmbh filed Critical Basf Coatings Gmbh
Publication of BR112016028225A2 publication Critical patent/BR112016028225A2/pt
Publication of BR112016028225A8 publication Critical patent/BR112016028225A8/pt
Publication of BR112016028225B1 publication Critical patent/BR112016028225B1/pt

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45523Pulsed gas flow or change of composition over time
    • C23C16/45525Atomic layer deposition [ALD]
    • C23C16/45527Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations
    • C23C16/45529Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations specially adapted for making a layer stack of alternating different compositions or gradient compositions
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00Processes for applying liquids or other fluent materials
    • B05D1/60Deposition of organic layers from vapour phase
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02Pretreatment of the material to be coated
    • C23C16/0227Pretreatment of the material to be coated by cleaning or etching
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40Oxides
    • C23C16/403Oxides of aluminium, magnesium or beryllium
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/549Organic PV cells

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Laminated Bodies (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
  • Electroluminescent Light Sources (AREA)
  • Wrappers (AREA)

Abstract

a presente invenção está no campo de processos para produção de laminados flexíveis orgânico-inorgânico, bem como de películas protetoras compreendendo laminados flexíveis orgânico-inorgânicos por deposição de camada atômica. em particular, a presente invenção diz respeito a um processo para produção de um laminado, o processo compreendendo mais do que uma vez a sequência compreendendo (a) deposição de uma camada inorgânica ao se executar 4 a 150 ciclos de um processo de deposição de camada atômica e, (b) deposição de uma camada orgânica compreendendo enxofre por meio de um processo de deposição de camada molecular.
BR112016028225-6A 2014-06-12 2015-05-07 Processo para produção de um laminado, laminado, película protetora, uso de uma película protetora e dispositivo eletrônico BR112016028225B1 (pt)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
EP14172146.4 2014-06-12
EP14172146 2014-06-12
EP15150318 2015-01-07
EP15150318.2 2015-01-07
PCT/EP2015/060105 WO2015188992A1 (en) 2014-06-12 2015-05-07 Process for producing flexible organic-inorganic laminates

Publications (3)

Publication Number Publication Date
BR112016028225A2 true BR112016028225A2 (pt) 2017-08-22
BR112016028225A8 BR112016028225A8 (pt) 2021-05-25
BR112016028225B1 BR112016028225B1 (pt) 2022-08-16

Family

ID=53055053

Family Applications (1)

Application Number Title Priority Date Filing Date
BR112016028225-6A BR112016028225B1 (pt) 2014-06-12 2015-05-07 Processo para produção de um laminado, laminado, película protetora, uso de uma película protetora e dispositivo eletrônico

Country Status (12)

Country Link
US (1) US11685995B2 (pt)
EP (1) EP3155141B1 (pt)
JP (1) JP6604974B2 (pt)
KR (1) KR102439664B1 (pt)
CN (1) CN106414799A (pt)
BR (1) BR112016028225B1 (pt)
CA (1) CA2950012C (pt)
MX (1) MX2016016346A (pt)
RU (1) RU2695997C2 (pt)
SG (1) SG11201609703QA (pt)
TW (1) TWI722987B (pt)
WO (1) WO2015188992A1 (pt)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015188990A2 (en) * 2014-06-13 2015-12-17 Basf Coatings Gmbh Process for producing organic-inorganic laminates
SG11201705023SA (en) 2015-01-20 2017-07-28 Basf Coatings Gmbh Process for producing flexible organic-inorganic laminates
CN107429390A (zh) 2015-03-25 2017-12-01 巴斯夫涂料有限公司 制备挠性有机‑无机层压材料的方法
WO2017129440A1 (en) 2016-01-27 2017-08-03 Basf Se Process for the generation of thin inorganic films
CN107201504B (zh) * 2017-05-19 2019-04-05 京东方科技集团股份有限公司 真空干燥膜层的方法和显示器件
US11427684B2 (en) 2017-07-10 2022-08-30 ARES Materials, Inc. Photopatterned planarization layers for flexible electronics
KR20200074263A (ko) * 2017-11-19 2020-06-24 어플라이드 머티어리얼스, 인코포레이티드 금속 표면들 상의 금속 산화물들의 ald를 위한 방법들
CN112334602B (zh) * 2018-07-05 2023-06-30 巴斯夫涂料有限公司 透明导电膜
KR102250011B1 (ko) * 2018-10-18 2021-05-10 한양대학교 산학협력단 막 구조체, 소자 및 멀티레벨 소자
TW202311054A (zh) 2021-05-06 2023-03-16 德商巴斯夫塗料有限責任公司 多層障壁膜、其製造及其於光伏打應用之用途
CN114695896B (zh) * 2022-03-14 2023-07-18 电子科技大学 一种电子器件的自组装高阻隔薄膜封装方法
WO2024126566A1 (en) 2022-12-14 2024-06-20 Basf Coatings Gmbh Multilayer barrier film coated polymeric substrate, its manufacture and use in electronic devices
WO2024167360A1 (ko) * 2023-02-10 2024-08-15 한양대학교 산학협력단 배위결합에 의해 가교가능한 분자선 구조를 갖는 다층 분자막 포토레지스트
WO2024167351A1 (ko) * 2023-02-10 2024-08-15 한양대학교 산학협력단 분자선 구조를 갖는 포지티브형의 다층 분자막 포토레지스트

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS524535B2 (pt) 1974-03-07 1977-02-04
EP1419286A1 (en) * 2001-08-20 2004-05-19 Nova-Plasma Inc. Coatings with low permeation of gases and vapors
JP2006321127A (ja) * 2005-05-19 2006-11-30 Konica Minolta Holdings Inc バリアフィルム、及び有機エレクトロルミネッセンスデバイス
JP2007090803A (ja) * 2005-09-30 2007-04-12 Fujifilm Corp ガスバリアフィルム、並びに、これを用いた画像表示素子および有機エレクトロルミネッセンス素子
JP4866658B2 (ja) * 2006-05-23 2012-02-01 東京エレクトロン株式会社 半導体製造装置
KR100856508B1 (ko) * 2007-06-15 2008-09-04 주식회사 잉크테크 투명도전막 및 이의 제조방법
JP5220106B2 (ja) * 2007-06-22 2013-06-26 ザ・リージエンツ・オブ・ザ・ユニバーシティ・オブ・コロラド 原子層堆積法及び分子層堆積法を用いて製造された有機電子デバイス用の保護被膜
US7858144B2 (en) * 2007-09-26 2010-12-28 Eastman Kodak Company Process for depositing organic materials
JP2009164049A (ja) * 2008-01-09 2009-07-23 Fuji Electric Holdings Co Ltd 有機elデバイス
US20090324826A1 (en) * 2008-06-27 2009-12-31 Hitoshi Kato Film Deposition Apparatus, Film Deposition Method, and Computer Readable Storage Medium
JP2010228412A (ja) * 2009-03-30 2010-10-14 Fujifilm Corp ガスバリアフィルムおよびバリア性積層体の製造方法
WO2011027619A1 (ja) * 2009-09-02 2011-03-10 コニカミノルタホールディングス株式会社 バリアフィルム及びその製造方法
FI20095947A0 (fi) * 2009-09-14 2009-09-14 Beneq Oy Monikerrospinnoite, menetelmä monikerrospinnoitteen valmistamiseksi, ja sen käyttötapoja
US20120207944A1 (en) * 2010-08-17 2012-08-16 Dudley Sean Finch Fabrication and selective patterning of thin films using ion beam-enhanced atomic and molecular layer deposition
US9163310B2 (en) * 2011-02-18 2015-10-20 Veeco Ald Inc. Enhanced deposition of layer on substrate using radicals
CN102593371A (zh) 2012-03-16 2012-07-18 四川长虹电器股份有限公司 有机电致发光器件的封装结构
KR20140045716A (ko) * 2012-10-09 2014-04-17 건국대학교 산학협력단 유무기 합금 필름의 제조방법 및 그로부터 제조된 유무기 합금 필름
MX2016002432A (es) 2013-08-30 2016-12-07 Basf Coatings Gmbh Pelicula delgada hibrida organica-inorganica y metodo para su preparacion.
SG11201705023SA (en) * 2015-01-20 2017-07-28 Basf Coatings Gmbh Process for producing flexible organic-inorganic laminates

Also Published As

Publication number Publication date
US11685995B2 (en) 2023-06-27
JP6604974B2 (ja) 2019-11-13
US20180187306A1 (en) 2018-07-05
TWI722987B (zh) 2021-04-01
KR20170020765A (ko) 2017-02-24
MX2016016346A (es) 2017-04-27
CA2950012C (en) 2022-07-26
RU2017100539A (ru) 2018-07-16
RU2695997C2 (ru) 2019-07-30
WO2015188992A1 (en) 2015-12-17
BR112016028225B1 (pt) 2022-08-16
RU2017100539A3 (pt) 2018-11-28
TW201610232A (zh) 2016-03-16
JP2017524811A (ja) 2017-08-31
EP3155141A1 (en) 2017-04-19
SG11201609703QA (en) 2016-12-29
BR112016028225A8 (pt) 2021-05-25
CA2950012A1 (en) 2015-12-17
EP3155141B1 (en) 2021-04-21
KR102439664B1 (ko) 2022-09-02
CN106414799A (zh) 2017-02-15

Similar Documents

Publication Publication Date Title
BR112016028225A2 (pt) processo para produção de laminados flexíveis orgânico-inorgânicos
CO2017008437A2 (es) Métodos de purificación de cannabinoides, composiciones y kits de los mismos
MY187115A (en) Hybrid fluoropolymer composites
BR102016010064A8 (pt) Montagem de mola e processo de produzir uma montagem de mola
CL2019000844A1 (es) Compuesto de piridina.
MX2016002432A (es) Pelicula delgada hibrida organica-inorganica y metodo para su preparacion.
BR112016017690A2 (pt) Tratamentos para acne resistente
TW201612214A (en) Polymer, organic layer composition, organic layer, and method of forming patterns
AR089296A1 (es) Procedimiento para la produccion de recubrimientos mates homogeneos mediante endurecimiento por radiacion
BR112013020384A8 (pt) métodos e sistemas para o revestimento de substratos granulares
BR102015019361A8 (pt) método e capa de longarina para uma pá de turbina eólica
BR112018008441A2 (pt) composição de polipropileno, uso de uma composição de polipropileno, elemento de camada, artigo, e, módulo fotovoltaico.
MX2015012261A (es) Revestimientos que exhiben una apariencia de tri-capa, metodos de revestimiento y substratos relacionados.
BR112017015636A2 (pt) processo para produção de laminados orgânico-inorgânicos flexíveis.
MX2017002633A (es) Composicion polimerica para capa de elemento de capa.
BR112017012746A2 (pt) produção camada por camada de artigos moldados
WO2014004615A3 (en) System and method for hosting and sharing a live event
MX2017003344A (es) Composicion de polimero para capa de un elemento de capa.
TW201613762A (en) Inorganic multilayer lamination transfer films
BR112015029399A2 (pt) produção em etapa única de uma composição de polipropileno
BR112016028242A2 (pt) processo para produzir um laminado
FR3032363B1 (fr) Procede d'encapsulation de vitrages en polycarbonate pourvus d'un revetement anti-rayures
BR112016009429A2 (pt) Filme de xiloglucano
CU24420B1 (es) Derivados de diheterociclo enlazado a cicloalquilo
BR112016012248A2 (pt) método de tratamento de nefropatia

Legal Events

Date Code Title Description
B06U Preliminary requirement: requests with searches performed by other patent offices: procedure suspended [chapter 6.21 patent gazette]
B06A Patent application procedure suspended [chapter 6.1 patent gazette]
B09A Decision: intention to grant [chapter 9.1 patent gazette]
B16A Patent or certificate of addition of invention granted [chapter 16.1 patent gazette]

Free format text: PRAZO DE VALIDADE: 20 (VINTE) ANOS CONTADOS A PARTIR DE 07/05/2015, OBSERVADAS AS CONDICOES LEGAIS