BR112016028225A2 - processo para produção de laminados flexíveis orgânico-inorgânicos - Google Patents
processo para produção de laminados flexíveis orgânico-inorgânicosInfo
- Publication number
- BR112016028225A2 BR112016028225A2 BR112016028225A BR112016028225A BR112016028225A2 BR 112016028225 A2 BR112016028225 A2 BR 112016028225A2 BR 112016028225 A BR112016028225 A BR 112016028225A BR 112016028225 A BR112016028225 A BR 112016028225A BR 112016028225 A2 BR112016028225 A2 BR 112016028225A2
- Authority
- BR
- Brazil
- Prior art keywords
- flexible laminates
- inorganic flexible
- inorganic
- producing organic
- organic
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45527—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations
- C23C16/45529—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations specially adapted for making a layer stack of alternating different compositions or gradient compositions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/60—Deposition of organic layers from vapour phase
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/403—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Laminated Bodies (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
- Electroluminescent Light Sources (AREA)
- Wrappers (AREA)
Abstract
a presente invenção está no campo de processos para produção de laminados flexíveis orgânico-inorgânico, bem como de películas protetoras compreendendo laminados flexíveis orgânico-inorgânicos por deposição de camada atômica. em particular, a presente invenção diz respeito a um processo para produção de um laminado, o processo compreendendo mais do que uma vez a sequência compreendendo (a) deposição de uma camada inorgânica ao se executar 4 a 150 ciclos de um processo de deposição de camada atômica e, (b) deposição de uma camada orgânica compreendendo enxofre por meio de um processo de deposição de camada molecular.
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP14172146.4 | 2014-06-12 | ||
EP14172146 | 2014-06-12 | ||
EP15150318 | 2015-01-07 | ||
EP15150318.2 | 2015-01-07 | ||
PCT/EP2015/060105 WO2015188992A1 (en) | 2014-06-12 | 2015-05-07 | Process for producing flexible organic-inorganic laminates |
Publications (3)
Publication Number | Publication Date |
---|---|
BR112016028225A2 true BR112016028225A2 (pt) | 2017-08-22 |
BR112016028225A8 BR112016028225A8 (pt) | 2021-05-25 |
BR112016028225B1 BR112016028225B1 (pt) | 2022-08-16 |
Family
ID=53055053
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BR112016028225-6A BR112016028225B1 (pt) | 2014-06-12 | 2015-05-07 | Processo para produção de um laminado, laminado, película protetora, uso de uma película protetora e dispositivo eletrônico |
Country Status (12)
Country | Link |
---|---|
US (1) | US11685995B2 (pt) |
EP (1) | EP3155141B1 (pt) |
JP (1) | JP6604974B2 (pt) |
KR (1) | KR102439664B1 (pt) |
CN (1) | CN106414799A (pt) |
BR (1) | BR112016028225B1 (pt) |
CA (1) | CA2950012C (pt) |
MX (1) | MX2016016346A (pt) |
RU (1) | RU2695997C2 (pt) |
SG (1) | SG11201609703QA (pt) |
TW (1) | TWI722987B (pt) |
WO (1) | WO2015188992A1 (pt) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015188990A2 (en) * | 2014-06-13 | 2015-12-17 | Basf Coatings Gmbh | Process for producing organic-inorganic laminates |
SG11201705023SA (en) | 2015-01-20 | 2017-07-28 | Basf Coatings Gmbh | Process for producing flexible organic-inorganic laminates |
CN107429390A (zh) | 2015-03-25 | 2017-12-01 | 巴斯夫涂料有限公司 | 制备挠性有机‑无机层压材料的方法 |
WO2017129440A1 (en) | 2016-01-27 | 2017-08-03 | Basf Se | Process for the generation of thin inorganic films |
CN107201504B (zh) * | 2017-05-19 | 2019-04-05 | 京东方科技集团股份有限公司 | 真空干燥膜层的方法和显示器件 |
US11427684B2 (en) | 2017-07-10 | 2022-08-30 | ARES Materials, Inc. | Photopatterned planarization layers for flexible electronics |
KR20200074263A (ko) * | 2017-11-19 | 2020-06-24 | 어플라이드 머티어리얼스, 인코포레이티드 | 금속 표면들 상의 금속 산화물들의 ald를 위한 방법들 |
CN112334602B (zh) * | 2018-07-05 | 2023-06-30 | 巴斯夫涂料有限公司 | 透明导电膜 |
KR102250011B1 (ko) * | 2018-10-18 | 2021-05-10 | 한양대학교 산학협력단 | 막 구조체, 소자 및 멀티레벨 소자 |
TW202311054A (zh) | 2021-05-06 | 2023-03-16 | 德商巴斯夫塗料有限責任公司 | 多層障壁膜、其製造及其於光伏打應用之用途 |
CN114695896B (zh) * | 2022-03-14 | 2023-07-18 | 电子科技大学 | 一种电子器件的自组装高阻隔薄膜封装方法 |
WO2024126566A1 (en) | 2022-12-14 | 2024-06-20 | Basf Coatings Gmbh | Multilayer barrier film coated polymeric substrate, its manufacture and use in electronic devices |
WO2024167360A1 (ko) * | 2023-02-10 | 2024-08-15 | 한양대학교 산학협력단 | 배위결합에 의해 가교가능한 분자선 구조를 갖는 다층 분자막 포토레지스트 |
WO2024167351A1 (ko) * | 2023-02-10 | 2024-08-15 | 한양대학교 산학협력단 | 분자선 구조를 갖는 포지티브형의 다층 분자막 포토레지스트 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS524535B2 (pt) | 1974-03-07 | 1977-02-04 | ||
EP1419286A1 (en) * | 2001-08-20 | 2004-05-19 | Nova-Plasma Inc. | Coatings with low permeation of gases and vapors |
JP2006321127A (ja) * | 2005-05-19 | 2006-11-30 | Konica Minolta Holdings Inc | バリアフィルム、及び有機エレクトロルミネッセンスデバイス |
JP2007090803A (ja) * | 2005-09-30 | 2007-04-12 | Fujifilm Corp | ガスバリアフィルム、並びに、これを用いた画像表示素子および有機エレクトロルミネッセンス素子 |
JP4866658B2 (ja) * | 2006-05-23 | 2012-02-01 | 東京エレクトロン株式会社 | 半導体製造装置 |
KR100856508B1 (ko) * | 2007-06-15 | 2008-09-04 | 주식회사 잉크테크 | 투명도전막 및 이의 제조방법 |
JP5220106B2 (ja) * | 2007-06-22 | 2013-06-26 | ザ・リージエンツ・オブ・ザ・ユニバーシティ・オブ・コロラド | 原子層堆積法及び分子層堆積法を用いて製造された有機電子デバイス用の保護被膜 |
US7858144B2 (en) * | 2007-09-26 | 2010-12-28 | Eastman Kodak Company | Process for depositing organic materials |
JP2009164049A (ja) * | 2008-01-09 | 2009-07-23 | Fuji Electric Holdings Co Ltd | 有機elデバイス |
US20090324826A1 (en) * | 2008-06-27 | 2009-12-31 | Hitoshi Kato | Film Deposition Apparatus, Film Deposition Method, and Computer Readable Storage Medium |
JP2010228412A (ja) * | 2009-03-30 | 2010-10-14 | Fujifilm Corp | ガスバリアフィルムおよびバリア性積層体の製造方法 |
WO2011027619A1 (ja) * | 2009-09-02 | 2011-03-10 | コニカミノルタホールディングス株式会社 | バリアフィルム及びその製造方法 |
FI20095947A0 (fi) * | 2009-09-14 | 2009-09-14 | Beneq Oy | Monikerrospinnoite, menetelmä monikerrospinnoitteen valmistamiseksi, ja sen käyttötapoja |
US20120207944A1 (en) * | 2010-08-17 | 2012-08-16 | Dudley Sean Finch | Fabrication and selective patterning of thin films using ion beam-enhanced atomic and molecular layer deposition |
US9163310B2 (en) * | 2011-02-18 | 2015-10-20 | Veeco Ald Inc. | Enhanced deposition of layer on substrate using radicals |
CN102593371A (zh) | 2012-03-16 | 2012-07-18 | 四川长虹电器股份有限公司 | 有机电致发光器件的封装结构 |
KR20140045716A (ko) * | 2012-10-09 | 2014-04-17 | 건국대학교 산학협력단 | 유무기 합금 필름의 제조방법 및 그로부터 제조된 유무기 합금 필름 |
MX2016002432A (es) | 2013-08-30 | 2016-12-07 | Basf Coatings Gmbh | Pelicula delgada hibrida organica-inorganica y metodo para su preparacion. |
SG11201705023SA (en) * | 2015-01-20 | 2017-07-28 | Basf Coatings Gmbh | Process for producing flexible organic-inorganic laminates |
-
2015
- 2015-05-07 EP EP15721001.4A patent/EP3155141B1/en active Active
- 2015-05-07 MX MX2016016346A patent/MX2016016346A/es unknown
- 2015-05-07 RU RU2017100539A patent/RU2695997C2/ru active
- 2015-05-07 US US15/316,661 patent/US11685995B2/en active Active
- 2015-05-07 KR KR1020167034256A patent/KR102439664B1/ko active IP Right Grant
- 2015-05-07 SG SG11201609703QA patent/SG11201609703QA/en unknown
- 2015-05-07 BR BR112016028225-6A patent/BR112016028225B1/pt active IP Right Grant
- 2015-05-07 WO PCT/EP2015/060105 patent/WO2015188992A1/en active Application Filing
- 2015-05-07 CN CN201580031240.0A patent/CN106414799A/zh active Pending
- 2015-05-07 JP JP2016572699A patent/JP6604974B2/ja active Active
- 2015-05-07 CA CA2950012A patent/CA2950012C/en active Active
- 2015-05-27 TW TW104117043A patent/TWI722987B/zh active
Also Published As
Publication number | Publication date |
---|---|
US11685995B2 (en) | 2023-06-27 |
JP6604974B2 (ja) | 2019-11-13 |
US20180187306A1 (en) | 2018-07-05 |
TWI722987B (zh) | 2021-04-01 |
KR20170020765A (ko) | 2017-02-24 |
MX2016016346A (es) | 2017-04-27 |
CA2950012C (en) | 2022-07-26 |
RU2017100539A (ru) | 2018-07-16 |
RU2695997C2 (ru) | 2019-07-30 |
WO2015188992A1 (en) | 2015-12-17 |
BR112016028225B1 (pt) | 2022-08-16 |
RU2017100539A3 (pt) | 2018-11-28 |
TW201610232A (zh) | 2016-03-16 |
JP2017524811A (ja) | 2017-08-31 |
EP3155141A1 (en) | 2017-04-19 |
SG11201609703QA (en) | 2016-12-29 |
BR112016028225A8 (pt) | 2021-05-25 |
CA2950012A1 (en) | 2015-12-17 |
EP3155141B1 (en) | 2021-04-21 |
KR102439664B1 (ko) | 2022-09-02 |
CN106414799A (zh) | 2017-02-15 |
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Legal Events
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B06U | Preliminary requirement: requests with searches performed by other patent offices: procedure suspended [chapter 6.21 patent gazette] | ||
B06A | Patent application procedure suspended [chapter 6.1 patent gazette] | ||
B09A | Decision: intention to grant [chapter 9.1 patent gazette] | ||
B16A | Patent or certificate of addition of invention granted [chapter 16.1 patent gazette] |
Free format text: PRAZO DE VALIDADE: 20 (VINTE) ANOS CONTADOS A PARTIR DE 07/05/2015, OBSERVADAS AS CONDICOES LEGAIS |