AU2002229050A1 - Improved linear variable differential transformers for high precision position measurements - Google Patents

Improved linear variable differential transformers for high precision position measurements

Info

Publication number
AU2002229050A1
AU2002229050A1 AU2002229050A AU2905002A AU2002229050A1 AU 2002229050 A1 AU2002229050 A1 AU 2002229050A1 AU 2002229050 A AU2002229050 A AU 2002229050A AU 2905002 A AU2905002 A AU 2905002A AU 2002229050 A1 AU2002229050 A1 AU 2002229050A1
Authority
AU
Australia
Prior art keywords
high precision
linear variable
position measurements
variable differential
precision position
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002229050A
Other languages
English (en)
Inventor
Dan Bocek
Jason Cleveland
Roger Proksch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asylum Research Corp
Original Assignee
Asylum Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asylum Research Corp filed Critical Asylum Research Corp
Publication of AU2002229050A1 publication Critical patent/AU2002229050A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/14—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
    • G01D5/2066—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by movement of a single coil with respect to a single other coil
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/22—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils
    • G01D5/2291—Linear or rotary variable differential transformers (LVDTs/RVDTs) having a single primary coil and two secondary coils
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F21/00—Variable inductances or transformers of the signal type
    • H01F21/02—Variable inductances or transformers of the signal type continuously variable, e.g. variometers
    • H01F21/04—Variable inductances or transformers of the signal type continuously variable, e.g. variometers by relative movement of turns or parts of windings

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Radiology & Medical Imaging (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Health & Medical Sciences (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
AU2002229050A 2000-11-30 2001-11-30 Improved linear variable differential transformers for high precision position measurements Abandoned AU2002229050A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US25031300P 2000-11-30 2000-11-30
US60/250,313 2000-11-30
US33224301P 2001-11-16 2001-11-16
US60/332,243 2001-11-16
PCT/US2001/048283 WO2002044647A2 (fr) 2000-11-30 2001-11-30 Transformateurs differentiels a variation lineaire ameliores pour mesures de position de grande precision

Publications (1)

Publication Number Publication Date
AU2002229050A1 true AU2002229050A1 (en) 2002-06-11

Family

ID=26940790

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002229050A Abandoned AU2002229050A1 (en) 2000-11-30 2001-11-30 Improved linear variable differential transformers for high precision position measurements

Country Status (7)

Country Link
US (8) US20020175677A1 (fr)
EP (1) EP1340040A4 (fr)
JP (2) JP2004523737A (fr)
KR (1) KR100794976B1 (fr)
CN (1) CN1483136A (fr)
AU (1) AU2002229050A1 (fr)
WO (1) WO2002044647A2 (fr)

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Also Published As

Publication number Publication date
US20060192551A1 (en) 2006-08-31
EP1340040A2 (fr) 2003-09-03
KR20030084903A (ko) 2003-11-01
EP1340040A4 (fr) 2007-02-28
US7038443B2 (en) 2006-05-02
US7372254B2 (en) 2008-05-13
US7459904B2 (en) 2008-12-02
US20040075428A1 (en) 2004-04-22
US20060186876A1 (en) 2006-08-24
US20060202683A1 (en) 2006-09-14
US7233140B2 (en) 2007-06-19
WO2002044647A2 (fr) 2002-06-06
JP2004523737A (ja) 2004-08-05
KR100794976B1 (ko) 2008-01-16
US20060186877A1 (en) 2006-08-24
CN1483136A (zh) 2004-03-17
WO2002044647A3 (fr) 2003-01-16
US7271582B2 (en) 2007-09-18
US7262592B2 (en) 2007-08-28
US20060186878A1 (en) 2006-08-24
JP2008102144A (ja) 2008-05-01
US20020175677A1 (en) 2002-11-28
US20070200559A1 (en) 2007-08-30

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