JP2008102144A - 高精度位置測定のための改良された直線型可変差動トランス - Google Patents
高精度位置測定のための改良された直線型可変差動トランス Download PDFInfo
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- G—PHYSICS
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/14—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures
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- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/04—Fine scanning or positioning
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
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- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
- G01D5/2066—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by movement of a single coil with respect to a single other coil
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/22—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils
- G01D5/2291—Linear or rotary variable differential transformers (LVDTs/RVDTs) having a single primary coil and two secondary coils
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F21/00—Variable inductances or transformers of the signal type
- H01F21/02—Variable inductances or transformers of the signal type continuously variable, e.g. variometers
- H01F21/04—Variable inductances or transformers of the signal type continuously variable, e.g. variometers by relative movement of turns or parts of windings
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Abstract
【解決手段】本装置は、従来型LVDTの一次コイルおよび高透磁率強磁性コアを、非強磁性可動コア14の周囲に巻いた一次巻線15で置き換える。バルクハウゼン雑音を軽減または除去することに加えて、このアプローチは、コアの過度の渦電流加熱、高透磁率材料と関連する非線形性、および磁束回路の長さスケールを含む、従来型LVDTの他の好ましくない効果を軽減または除去した。これらの改良は、改良型LVDTの信号調整回路に連結される。本装置はアクチュエータでもあり、それを用いて差動電圧を力に変換することができる。これらの改良点を伴う装置は、分子力測定、原子間力顕微鏡、および操作技術、リソグラフィ製造、ナノメータースケールの表面形状測定、およびナノテクノロジーの他の局面を含め、多くの用途を有する。
【選択図】図2
Description
E.,LVDTプライマ,センサー,p27〜30 1997年6月 雑音 にさらされる。その結果、ジョンソン雑音は、従来型LVDTおよび本明細書記載のLVDTの両方に存在する。ジョンソン雑音は、信号調整電子回路の出力部で、センサーの実際の動きと区別できない電気信号へ変換されることになる。第2に、従来型LVDTにとって多分最も重要である理由は、強磁性材料の使用が、バルクハウゼン雑音として周知の現象を招くことである。もし、強磁性コアが完全であれば、透磁率が一定で、磁化は完全に線形で滑らかに変化することを意味するので、この現象は無視できるであろう。しかしながら、強磁性材料は決して完全ではない。バルクハウゼン雑音は、強磁性材料の磁気状態の急激なジャンプに与えられた名称である。強磁性材料の欠陥は、領域の壁を優先的に固定する特殊部位になり得る。次いで、この領域の壁は、熱エネルギーまたは外部磁界により解放される。この解放が起こると、領域の壁は別の準安定固定部位へジャンプし、材料の磁気状態全体にわたる急激な変化を引き起こすのである。
図13は、局部的な力を測定するために使用する、そして、かかる測定をするために上記LVDTを取り入れた分子力プローブ測定装置を表す。この測定装置は、鋭いチップ37を有する可撓性カンチレバーが試料上で押したり引いたりするときのたわみを測定することにより力を計測する。高感度たわみ測定装置と、可撓性カンチレバー端の非常に鋭いチップとが、単体分子の域にまで下がった測定を可能にする。押込力測定も、表面にカンチレバーチップを押し付けることにより行われる。図13で、カンチレバー37は、コヒーレンス性が低い光源35により照射される。この光源からの光は、調整可能な焦点レンズ36によりカンチレバー37上に焦点を当てられる。カンチレバーから反射する光は、調整可能なミラー38により集められ、位置センサー39上に導かれる。位置センサーは、測定装置(不図示)用コントローラへ、カンチレバーのたわみに比例する電圧を与える。光学検知システム全体は、剛性のある安定したカプセル40に収納される。カプセルは、可撓性カプリング、すなわち可撓体41および42を介して測定装置44のフレームに取り付けられる。これらのカプリングは、カプセル40を測定装置44のフレームに対して垂直方向に移動することを許容する。ピエゾスタック43を用いてその移動を与え、そして移動カプセルに取り付けられた可動一次コイル15と、測定装置の固定フレームに取り付けられた固定二次コイル3および4とにより、本発明の改良型LVDTセンサーは位置情報を提供する。
従来型LVDTセンサーは、多数の市販測定装置を含め、各種の表面形状測定装置で用いられており(例えば、ニューヨーク州プレインビュー所在のVeeco Instrument Dektak8)、図15は、かかる測定装置の一つを示す。この図は、米国特許第4,669,300号の図1を基にしている。この測定装置で、可動スタイラス49に取り付けられた鋭いチップ48はジュエル機構50周りに枢着されている。チップは、測定装置53のフレームに対して走査されるステージ52上に載置された試料51に接触している。スタイラスアセンブリの動きが、コイルアセンブリ54と、スタイラスアセンブリとともに動く高透磁率の強磁性コア55とで構成されたLVDTセンサーで測定される。チップ48と試料51間の力は、測定装置53のフレームに取り付けられた磁気アクチュエータコイル57を用いるスタイラスアセンブリに取り付けた磁気スラグ56へ磁界を印加することにより、変えることができる。この設計における一つの主要な配慮は、一次コイル55を、磁気アクチュエータコイル57およびスラグ56から放射される磁界からシールドすることである。アクチュエータからのいずれの漏洩磁界も高透磁率強磁性コア55の磁気状態を変え、それにより、感度、および/または、スタイラスアセンブリ48のチップの見かけ位置を変える原因となろう。
図18は、米国再発行特許第34,489号の図3を基にした原子間力顕微鏡(AFM)を示す。このAFMは、試料面上を、可撓性カンチレバー端にある鋭いプローブで走査することにより得られた情報に基づいて、表面トポグラフィ(および他の試料特性)の画像を生成するために用いる装置である。カンチレバーのたわみは試料のトポロジー的フィーチャに一致する。典型的には、チップ−試料位置は、ピエゾ管スキャナの編成によりラスターされ、可撓体により拘束されることもある。図18で、試料69は、ピエゾ管スキャナ70を用いて三次元で位置決めされる。カンチレバーのたわみは、図13に類似する光学式レバーにより測定される。画像は、カンチレバーのたわみまたは他の機械特性を、試料のx−y位置の関数としてプロットすることにより作成される。測定装置は、振動モードを含む多数の異なる画像化モードで動作させることができ、その場合、チップだけが試料面と間欠的に接触している。図18の更なる詳細な説明は、先の引用特許で見ることができる。
Claims (3)
- 変位変換器であって、
共通軸を有する第1および第2の非強磁性コイル巻枠を備え、各巻枠には少なくとも一つの巻線が巻かれており、
前記第1巻枠が第2巻枠の内側にあって、各巻枠が他方の巻枠と相対的に変位できるように、ひとつ以上の巻線を有する前記第1巻枠の外径は前記第2巻枠の内径より小さく、
前記コイル巻枠の一方は移動可能であり、他方のコイル巻枠は固定であり、前記可動巻枠上のひとつ以上の巻線は、前記固定巻枠上のひとつ以上の巻線へ、前記巻線を誘導結合する強磁性要素がない限り、磁気結合され、そして、
ミクロン以下の範囲の、前記コイル巻枠間の相対変位に応じた信号を発生する電子回路を備える変位変換器。 - 請求項1の前記変換器であって、前記センサーは、2つ以上の巻線が巻かれた前記小さい方の外径を有する前記コイル巻枠、および単一巻線が巻かれた前記他方のコイル巻枠を備える。
- 請求項1の前記変換器であって、前記センサーが、2つ以上の巻線が巻かれた前記大きい方の内径を有する前記コイル巻枠、および単一巻線が巻かれた前記他方のコイル巻枠を備える。
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US33224301P | 2001-11-16 | 2001-11-16 |
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EP (1) | EP1340040A4 (ja) |
JP (2) | JP2004523737A (ja) |
KR (1) | KR100794976B1 (ja) |
CN (1) | CN1483136A (ja) |
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JP2012185033A (ja) * | 2011-03-04 | 2012-09-27 | Makome Kenkyusho:Kk | 近接センサ |
JP2014188122A (ja) * | 2013-03-27 | 2014-10-06 | Akita Prefectural Hospital Organization | 磁性体検出センサ、磁性体検出方法および磁性体検出装置 |
JP2020101521A (ja) * | 2018-11-01 | 2020-07-02 | 株式会社ミツトヨ | 測定デバイスのスタイラスの位置を示すための誘導性位置検出構成体 |
JP7261144B2 (ja) | 2018-11-01 | 2023-04-19 | 株式会社ミツトヨ | 測定デバイスのスタイラスの位置を示すための誘導性位置検出構成体 |
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Also Published As
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EP1340040A2 (en) | 2003-09-03 |
US20040075428A1 (en) | 2004-04-22 |
US7459904B2 (en) | 2008-12-02 |
WO2002044647A3 (en) | 2003-01-16 |
AU2002229050A1 (en) | 2002-06-11 |
US20060186877A1 (en) | 2006-08-24 |
EP1340040A4 (en) | 2007-02-28 |
CN1483136A (zh) | 2004-03-17 |
KR20030084903A (ko) | 2003-11-01 |
US7271582B2 (en) | 2007-09-18 |
US7262592B2 (en) | 2007-08-28 |
US20060202683A1 (en) | 2006-09-14 |
JP2004523737A (ja) | 2004-08-05 |
US7038443B2 (en) | 2006-05-02 |
US7372254B2 (en) | 2008-05-13 |
KR100794976B1 (ko) | 2008-01-16 |
US20060192551A1 (en) | 2006-08-31 |
US20060186878A1 (en) | 2006-08-24 |
US20020175677A1 (en) | 2002-11-28 |
WO2002044647A2 (en) | 2002-06-06 |
US20070200559A1 (en) | 2007-08-30 |
US7233140B2 (en) | 2007-06-19 |
US20060186876A1 (en) | 2006-08-24 |
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