AU2001282361A1 - Electromagnetic radiation generation using a laser produced plasma - Google Patents

Electromagnetic radiation generation using a laser produced plasma

Info

Publication number
AU2001282361A1
AU2001282361A1 AU2001282361A AU8236101A AU2001282361A1 AU 2001282361 A1 AU2001282361 A1 AU 2001282361A1 AU 2001282361 A AU2001282361 A AU 2001282361A AU 8236101 A AU8236101 A AU 8236101A AU 2001282361 A1 AU2001282361 A1 AU 2001282361A1
Authority
AU
Australia
Prior art keywords
electromagnetic radiation
radiation generation
produced plasma
laser produced
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001282361A
Other languages
English (en)
Inventor
Daniel A. Allwood
David R. Klug
Ian P. Mercer
Alan G. Taylor
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Powerlase Ltd
Original Assignee
Powerlase Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB0021458A external-priority patent/GB0021458D0/en
Priority claimed from GB0021459A external-priority patent/GB0021459D0/en
Priority claimed from GB0021455A external-priority patent/GB0021455D0/en
Application filed by Powerlase Ltd filed Critical Powerlase Ltd
Publication of AU2001282361A1 publication Critical patent/AU2001282361A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—Production of X-ray radiation generated from plasma
    • H05G2/002—Supply of the plasma generating material
    • H05G2/0025—Systems for collecting the plasma generating material after the plasma generation
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—Production of X-ray radiation generated from plasma
    • H05G2/002—Supply of the plasma generating material
    • H05G2/0023—Constructional details of the ejection system
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—Production of X-ray radiation generated from plasma
    • H05G2/008—Production of X-ray radiation generated from plasma involving an energy-carrying beam in the process of plasma generation
    • H05G2/0082—Production of X-ray radiation generated from plasma involving an energy-carrying beam in the process of plasma generation the energy-carrying beam being a laser beam
    • H05G2/0086—Optical arrangements for conveying the laser beam to the plasma generation location

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • X-Ray Techniques (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
AU2001282361A 2000-08-31 2001-08-30 Electromagnetic radiation generation using a laser produced plasma Abandoned AU2001282361A1 (en)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
GB0021458 2000-08-31
GB0021458A GB0021458D0 (en) 2000-08-31 2000-08-31 Electromagnetic radiation generation using a laser produced plasma
GB0021455 2000-08-31
GB0021459A GB0021459D0 (en) 2000-08-31 2000-08-31 Electromagnetic radiation generation using a laser produced plasma
GB0021459 2000-08-31
GB0021455A GB0021455D0 (en) 2000-08-31 2000-08-31 Electromagnetic radiation generation using a laser produced plasma
PCT/GB2001/003871 WO2002019781A1 (en) 2000-08-31 2001-08-30 Electromagnetic radiation generation using a laser produced plasma

Publications (1)

Publication Number Publication Date
AU2001282361A1 true AU2001282361A1 (en) 2002-03-13

Family

ID=27255866

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001282361A Abandoned AU2001282361A1 (en) 2000-08-31 2001-08-30 Electromagnetic radiation generation using a laser produced plasma

Country Status (5)

Country Link
US (1) US6956885B2 (enExample)
EP (1) EP1316245A1 (enExample)
JP (1) JP2004507873A (enExample)
AU (1) AU2001282361A1 (enExample)
WO (1) WO2002019781A1 (enExample)

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US7137274B2 (en) * 2003-09-24 2006-11-21 The Boc Group Plc System for liquefying or freezing xenon
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GB0403865D0 (en) * 2004-02-20 2004-03-24 Powerlase Ltd Laser multiplexing
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US20080020083A1 (en) * 2006-06-06 2008-01-24 Kabushiki Kaisha Topcon Method for joining optical members, structure for integrating optical members and laser oscillation device
US7759663B1 (en) * 2006-12-06 2010-07-20 Asml Netherlands B.V. Self-shading electrodes for debris suppression in an EUV source
JP2013519211A (ja) 2010-02-09 2013-05-23 エナジェティック・テクノロジー・インコーポレーテッド レーザー駆動の光源
WO2013174525A1 (en) * 2012-05-25 2013-11-28 Eth Zurich Method and apparatus for generating electromagnetic radiation
WO2014139713A1 (en) * 2013-03-15 2014-09-18 Asml Holding N.V. Radiation source that jets up liquid fuel to form plasma for generating radiation and recycle liquid fuel
CN114830026B (zh) * 2019-10-17 2025-07-11 Asml荷兰有限公司 照射源和相关的量测设备
US11587781B2 (en) 2021-05-24 2023-02-21 Hamamatsu Photonics K.K. Laser-driven light source with electrodeless ignition
US12165856B2 (en) 2022-02-21 2024-12-10 Hamamatsu Photonics K.K. Inductively coupled plasma light source
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US12156322B2 (en) 2022-12-08 2024-11-26 Hamamatsu Photonics K.K. Inductively coupled plasma light source with switched power supply
CN119315365B (zh) * 2024-12-18 2025-04-11 中国人民解放军国防科技大学 基于超强激光诱导的超连续极紫外相干光源产生装置

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Also Published As

Publication number Publication date
US20050100071A1 (en) 2005-05-12
US6956885B2 (en) 2005-10-18
EP1316245A1 (en) 2003-06-04
JP2004507873A (ja) 2004-03-11
WO2002019781A1 (en) 2002-03-07

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