ATE534191T1 - Oszillatorvorrichtung, die einen wärmegesteuerten piezoeletrischen quarz umfasst - Google Patents

Oszillatorvorrichtung, die einen wärmegesteuerten piezoeletrischen quarz umfasst

Info

Publication number
ATE534191T1
ATE534191T1 AT09154670T AT09154670T ATE534191T1 AT E534191 T1 ATE534191 T1 AT E534191T1 AT 09154670 T AT09154670 T AT 09154670T AT 09154670 T AT09154670 T AT 09154670T AT E534191 T1 ATE534191 T1 AT E534191T1
Authority
AT
Austria
Prior art keywords
piezoelectric resonator
resonator element
oscillator device
heat controlled
temperature sensor
Prior art date
Application number
AT09154670T
Other languages
English (en)
Inventor
Jean-Marc Navet
Original Assignee
Micro Crystal Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micro Crystal Ag filed Critical Micro Crystal Ag
Application granted granted Critical
Publication of ATE534191T1 publication Critical patent/ATE534191T1/de

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02007Details of bulk acoustic wave devices
    • H03H9/02086Means for compensation or elimination of undesirable effects
    • H03H9/02102Means for compensation or elimination of undesirable effects of temperature influence
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/05Holders; Supports
    • H03H9/0538Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0547Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/05Holders; Supports
    • H03H9/08Holders with means for regulating temperature
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03LAUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
    • H03L1/00Stabilisation of generator output against variations of physical values, e.g. power supply
    • H03L1/02Stabilisation of generator output against variations of physical values, e.g. power supply against variations of temperature only
    • H03L1/04Constructional details for maintaining temperature constant

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
AT09154670T 2009-03-09 2009-03-09 Oszillatorvorrichtung, die einen wärmegesteuerten piezoeletrischen quarz umfasst ATE534191T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP09154670A EP2228903B1 (de) 2009-03-09 2009-03-09 Oszillatorvorrichtung, die einen wärmegesteuerten piezoeletrischen Quarz umfasst

Publications (1)

Publication Number Publication Date
ATE534191T1 true ATE534191T1 (de) 2011-12-15

Family

ID=40912022

Family Applications (1)

Application Number Title Priority Date Filing Date
AT09154670T ATE534191T1 (de) 2009-03-09 2009-03-09 Oszillatorvorrichtung, die einen wärmegesteuerten piezoeletrischen quarz umfasst

Country Status (6)

Country Link
EP (1) EP2228903B1 (de)
JP (1) JP5351082B2 (de)
CN (1) CN101895270B (de)
AT (1) ATE534191T1 (de)
NZ (1) NZ583690A (de)
TW (1) TWI477072B (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5633866B2 (ja) * 2011-01-21 2014-12-03 日本電気株式会社 基準信号発生装置および基準信号発生方法
US9240767B2 (en) * 2012-05-31 2016-01-19 Texas Instruments Incorporated Temperature-controlled integrated piezoelectric resonator apparatus
JP5998872B2 (ja) * 2012-11-26 2016-09-28 セイコーエプソン株式会社 圧電発振器
JP6175242B2 (ja) * 2013-02-01 2017-08-02 旭化成エレクトロニクス株式会社 圧電デバイス
JP6179155B2 (ja) 2013-03-27 2017-08-16 セイコーエプソン株式会社 振動デバイス、電子機器、および移動体
JP2014195235A (ja) * 2013-03-28 2014-10-09 Rakon Ltd 一体型温度センサをもつ共振器
JP6341362B2 (ja) * 2013-12-24 2018-06-13 セイコーエプソン株式会社 発熱体、振動デバイス、電子機器及び移動体
JP6323652B2 (ja) * 2013-12-24 2018-05-16 セイコーエプソン株式会社 発熱体、振動デバイス、電子機器及び移動体
JP2015122607A (ja) 2013-12-24 2015-07-02 セイコーエプソン株式会社 発振器、電子機器および移動体
JP6349722B2 (ja) * 2013-12-25 2018-07-04 セイコーエプソン株式会社 振動デバイス、電子機器、および移動体
JP6436280B2 (ja) 2014-03-27 2018-12-12 セイコーエプソン株式会社 恒温槽型発振器の製造方法
JP6442899B2 (ja) 2014-07-30 2018-12-26 セイコーエプソン株式会社 振動デバイス、電子機器、および移動体
CN105634429B (zh) * 2014-11-28 2018-01-30 加高电子股份有限公司 具有温度感测组件的振荡器及其制作方法
JP2017208798A (ja) * 2016-05-13 2017-11-24 日本電波工業株式会社 水晶発振器及び水晶発振器の製造方法
US10069500B2 (en) * 2016-07-14 2018-09-04 Murata Manufacturing Co., Ltd. Oven controlled MEMS oscillator
US20200373906A1 (en) * 2018-03-28 2020-11-26 Daishinku Corporation Piezoelectric vibration device
JP6729643B2 (ja) * 2018-07-31 2020-07-22 セイコーエプソン株式会社 発振器、電子機器および移動体
JP7424941B2 (ja) 2020-08-19 2024-01-30 日本電波工業株式会社 恒温槽付水晶発振器
RU2767302C1 (ru) * 2020-11-25 2022-03-17 Общество с ограниченной ответственностью "ОТК" Установка и термостат для контроля долговременной стабильности частоты кварцевых резонаторов и генераторов
JP2023132495A (ja) 2022-03-11 2023-09-22 セイコーエプソン株式会社 回路基板及び振動デバイス
DE102022212500A1 (de) 2022-11-23 2024-05-23 Robert Bosch Gesellschaft mit beschränkter Haftung Temperatursensor zur SMD-Montage

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5283458A (en) * 1992-03-30 1994-02-01 Trw Inc. Temperature stable semiconductor bulk acoustic resonator
US5912592A (en) * 1994-07-04 1999-06-15 Seiko Epson Corporation Piezoelectric oscillator
GB2302446B (en) * 1995-06-17 1999-04-21 Motorola Israel Ltd Ovenized crystal assembly.
JP3125732B2 (ja) * 1997-11-04 2001-01-22 日本電気株式会社 圧電振動子発振器
US5917272A (en) * 1998-06-11 1999-06-29 Vectron, Inc. Oven-heated crystal resonator and oscillator assembly
JP2002198739A (ja) * 2000-12-26 2002-07-12 Toyo Commun Equip Co Ltd 表面実装型圧電発振器
JP4426375B2 (ja) * 2004-05-19 2010-03-03 日本電波工業株式会社 恒温槽を用いた高安定用の水晶発振器
JP4804813B2 (ja) * 2005-06-24 2011-11-02 日本電波工業株式会社 圧電発振器
US7675157B2 (en) * 2006-01-30 2010-03-09 Marvell World Trade Ltd. Thermal enhanced package
US7471162B2 (en) * 2006-04-24 2008-12-30 Nihon Dempa Kogyo Co., Ltd. Surface mount type temperature-compensated crystal oscillator
TW200744314A (en) * 2006-05-18 2007-12-01 Taitien Electronics Co Ltd Oscillator device capable of keeping constant temperature
JP5070954B2 (ja) * 2007-06-22 2012-11-14 株式会社大真空 表面実装型圧電振動デバイス

Also Published As

Publication number Publication date
JP5351082B2 (ja) 2013-11-27
EP2228903B1 (de) 2011-11-16
CN101895270A (zh) 2010-11-24
TWI477072B (zh) 2015-03-11
TW201108606A (en) 2011-03-01
JP2010213280A (ja) 2010-09-24
CN101895270B (zh) 2014-07-02
EP2228903A1 (de) 2010-09-15
NZ583690A (en) 2011-09-30

Similar Documents

Publication Publication Date Title
ATE534191T1 (de) Oszillatorvorrichtung, die einen wärmegesteuerten piezoeletrischen quarz umfasst
TW201614955A (en) Piezoelectric device and electronic apparatus
TWI558096B (zh) 溫度補償微機電振盪器
TW201130225A (en) Thermal sensor using a vibrating MEMS resonator of a chip interconnect layer
JP5020340B2 (ja) 表面実装用とした恒温型の水晶発振器
JP2010154227A (ja) 多段型とした恒温型の水晶発振器
JP2007006270A (ja) 圧電発振器
TW200644417A (en) Low-voltage MEMS oscillator
US20100225405A1 (en) Oscillator device comprising a thermally-controlled piezoelectric resonator
CN103427765B (zh) 振荡装置、振荡元件以及电子设备
JP2015023434A5 (de)
CN109195904A (zh) 烘箱控制mems振荡器
JP2015033065A (ja) 水晶振動子及び水晶発振器
JP5926578B2 (ja) 圧電デバイス
JP2013090176A5 (de)
JP2018142899A (ja) 水晶発振器
RU2006146996A (ru) Устройство для определения и/или контроля параметра процесса среды
JP2006080672A5 (de)
JP2014033368A (ja) 電子部品及び発振器
RU2491712C1 (ru) Резонатор на поверхностных акустических волнах с использованием отражателей в качестве нагревательных элементов
JP2010124348A (ja) 発振装置
JP5205822B2 (ja) 圧電発振器
US20070241827A1 (en) Surface mount crystal oscillator
RU123218U1 (ru) Кварцевый резонатор-термостат
US20140210566A1 (en) Crystal resonator, crystal resonator package, and crystal oscillator