ATE527660T1 - Silizium-auf-isolator-lese-schreib-festspeicher mit einem seitlichen thyristor und einer fallenschicht - Google Patents
Silizium-auf-isolator-lese-schreib-festspeicher mit einem seitlichen thyristor und einer fallenschichtInfo
- Publication number
- ATE527660T1 ATE527660T1 AT05740193T AT05740193T ATE527660T1 AT E527660 T1 ATE527660 T1 AT E527660T1 AT 05740193 T AT05740193 T AT 05740193T AT 05740193 T AT05740193 T AT 05740193T AT E527660 T1 ATE527660 T1 AT E527660T1
- Authority
- AT
- Austria
- Prior art keywords
- cell
- trapping layer
- thyristor
- insulator
- silicon
- Prior art date
Links
- 239000012212 insulator Substances 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 abstract 3
- 230000015556 catabolic process Effects 0.000 abstract 1
- 238000006731 degradation reaction Methods 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
- H01L27/102—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration including bipolar components
- H01L27/1027—Thyristors
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
- G11C11/34—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
- G11C11/39—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using thyristors or the avalanche or negative resistance type, e.g. PNPN, SCR, SCS, UJT
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/34—Determination of programming status, e.g. threshold voltage, overprogramming or underprogramming, retention
- G11C16/349—Arrangements for evaluating degradation, retention or wearout, e.g. by counting erase cycles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1203—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body the substrate comprising an insulating body on a semiconductor body, e.g. SOI
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/401—Multistep manufacturing processes
- H01L29/4011—Multistep manufacturing processes for data storage electrodes
- H01L29/40114—Multistep manufacturing processes for data storage electrodes the electrodes comprising a conductor-insulator-conductor-insulator-semiconductor structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66825—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a floating gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/74—Thyristor-type devices, e.g. having four-zone regenerative action
- H01L29/7436—Lateral thyristors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/74—Thyristor-type devices, e.g. having four-zone regenerative action
- H01L29/749—Thyristor-type devices, e.g. having four-zone regenerative action with turn-on by field effect
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/87—Thyristor diodes, e.g. Shockley diodes, break-over diodes
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Memories (AREA)
- Non-Volatile Memory (AREA)
- Dram (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/840,792 US7224002B2 (en) | 2004-05-06 | 2004-05-06 | Silicon on insulator read-write non-volatile memory comprising lateral thyristor and trapping layer |
PCT/US2005/014433 WO2005114742A2 (en) | 2004-05-06 | 2005-04-28 | Silicon on insulator read-write non-volatile memory comprising lateral thyristor and trapping layer |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE527660T1 true ATE527660T1 (de) | 2011-10-15 |
Family
ID=35238669
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT05740193T ATE527660T1 (de) | 2004-05-06 | 2005-04-28 | Silizium-auf-isolator-lese-schreib-festspeicher mit einem seitlichen thyristor und einer fallenschicht |
Country Status (7)
Country | Link |
---|---|
US (1) | US7224002B2 (de) |
EP (1) | EP1743339B1 (de) |
JP (1) | JP4915592B2 (de) |
KR (1) | KR100887866B1 (de) |
CN (1) | CN1981344B (de) |
AT (1) | ATE527660T1 (de) |
WO (1) | WO2005114742A2 (de) |
Families Citing this family (37)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6888200B2 (en) * | 2002-08-30 | 2005-05-03 | Micron Technology Inc. | One transistor SOI non-volatile random access memory cell |
US6917078B2 (en) * | 2002-08-30 | 2005-07-12 | Micron Technology Inc. | One transistor SOI non-volatile random access memory cell |
US7042027B2 (en) * | 2002-08-30 | 2006-05-09 | Micron Technology, Inc. | Gated lateral thyristor-based random access memory cell (GLTRAM) |
US8125003B2 (en) * | 2003-07-02 | 2012-02-28 | Micron Technology, Inc. | High-performance one-transistor memory cell |
US7145186B2 (en) * | 2004-08-24 | 2006-12-05 | Micron Technology, Inc. | Memory cell with trenched gated thyristor |
US7528447B2 (en) * | 2005-04-06 | 2009-05-05 | Kabushiki Kaisha Toshiba | Non-volatile semiconductor memory and method for controlling a non-volatile semiconductor memory |
US7655973B2 (en) | 2005-10-31 | 2010-02-02 | Micron Technology, Inc. | Recessed channel negative differential resistance-based memory cell |
US7209384B1 (en) | 2005-12-08 | 2007-04-24 | Juhan Kim | Planar capacitor memory cell and its applications |
KR100699890B1 (ko) * | 2006-01-10 | 2007-03-28 | 삼성전자주식회사 | 반도체 메모리 소자 및 그 제조 방법 |
US8174046B1 (en) * | 2006-02-23 | 2012-05-08 | T-Ram Semiconductor, Inc | Reducing effects of parasitic transistors in thyristor-based memory using local thinning or implanting |
US20070257326A1 (en) * | 2006-05-08 | 2007-11-08 | Chien-Li Kuo | Integrated circuit structure and method of manufacturing a memory cell |
US7619917B2 (en) * | 2006-11-28 | 2009-11-17 | Qimonda North America Corp. | Memory cell with trigger element |
US7919800B2 (en) | 2007-02-26 | 2011-04-05 | Micron Technology, Inc. | Capacitor-less memory cells and cell arrays |
US7504286B2 (en) | 2007-03-28 | 2009-03-17 | Advanced Micro Devices, Inc. | Semiconductor memory devices and methods for fabricating the same |
US7883941B2 (en) * | 2008-05-29 | 2011-02-08 | Globalfoundries Inc. | Methods for fabricating memory cells and memory devices incorporating the same |
US7940560B2 (en) | 2008-05-29 | 2011-05-10 | Advanced Micro Devices, Inc. | Memory cells, memory devices and integrated circuits incorporating the same |
US8324656B1 (en) * | 2010-07-02 | 2012-12-04 | T-Ram Semiconductor, Inc. | Reduction of electrostatic coupling for a thyristor-based memory cell |
US8455919B2 (en) * | 2010-07-19 | 2013-06-04 | Micron Technology, Inc. | High density thyristor random access memory device and method |
US8609492B2 (en) | 2011-07-27 | 2013-12-17 | Micron Technology, Inc. | Vertical memory cell |
EP2766933B1 (de) * | 2011-10-14 | 2016-12-14 | Pakal Technologies LLC | Systeme, vorrichtungen und verfahren mit integrierbaren fet-gesteuerten seitlichen thyristoren |
US8951896B2 (en) | 2013-06-28 | 2015-02-10 | International Business Machines Corporation | High linearity SOI wafer for low-distortion circuit applications |
US9252246B2 (en) | 2013-08-21 | 2016-02-02 | Freescale Semiconductor, Inc. | Integrated split gate non-volatile memory cell and logic device |
US9275864B2 (en) * | 2013-08-22 | 2016-03-01 | Freescale Semiconductor,Inc. | Method to form a polysilicon nanocrystal thin film storage bitcell within a high k metal gate platform technology using a gate last process to form transistor gates |
US9343314B2 (en) | 2014-05-30 | 2016-05-17 | Freescale Semiconductor, Inc. | Split gate nanocrystal memory integration |
US9484068B2 (en) | 2015-02-17 | 2016-11-01 | Kilopass Technology, Inc. | MTP-thyristor memory cell circuits and methods of operation |
KR101804666B1 (ko) * | 2016-04-06 | 2017-12-05 | 고려대학교 산학협력단 | 수직 반도체 컬럼을 구비한 메모리 소자 |
KR101835231B1 (ko) * | 2016-09-26 | 2018-03-08 | 고려대학교 산학협력단 | 반도체 소자 |
US10411026B2 (en) | 2017-07-05 | 2019-09-10 | Micron Technology, Inc. | Integrated computing structures formed on silicon |
US10153348B1 (en) | 2017-07-05 | 2018-12-11 | Micron Technology, Inc. | Memory configurations |
US10153381B1 (en) | 2017-07-05 | 2018-12-11 | Micron Technology, Inc. | Memory cells having an access gate and a control gate and dielectric stacks above and below the access gate |
US10176870B1 (en) | 2017-07-05 | 2019-01-08 | Micron Technology, Inc. | Multifunctional memory cells |
US20190013387A1 (en) | 2017-07-05 | 2019-01-10 | Micron Technology, Inc. | Memory cell structures |
US10262736B2 (en) | 2017-07-05 | 2019-04-16 | Micron Technology, Inc. | Multifunctional memory cells |
US10276576B2 (en) | 2017-07-05 | 2019-04-30 | Micron Technology, Inc. | Gated diode memory cells |
US10297493B2 (en) | 2017-07-05 | 2019-05-21 | Micron Technology, Inc. | Trench isolation interfaces |
US10374101B2 (en) | 2017-07-05 | 2019-08-06 | Micron Technology, Inc. | Memory arrays |
US10153039B1 (en) | 2017-07-05 | 2018-12-11 | Micron Technology, Inc. | Memory cells programmed via multi-mechanism charge transports |
Family Cites Families (22)
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US41212A (en) * | 1864-01-12 | Improvement in freight-cars | ||
US612793A (en) * | 1898-10-18 | The mor | ||
US41208A (en) * | 1864-01-12 | Improvement in the construction of ordnance | ||
US41206A (en) * | 1864-01-12 | Improvement in operating heavy ordnance | ||
JPS509156B1 (de) * | 1970-10-09 | 1975-04-10 | ||
GB1480201A (en) * | 1975-01-06 | 1977-07-20 | Ncr Co | Four zone semiconductor device |
JPS56162860A (en) * | 1980-05-19 | 1981-12-15 | Toshiba Corp | Semiconductor device |
US5448083A (en) * | 1991-08-08 | 1995-09-05 | Kabushiki Kaisha Toshiba | Insulated-gate semiconductor device |
JP3959125B2 (ja) * | 1994-09-14 | 2007-08-15 | 株式会社東芝 | 半導体装置 |
US6229161B1 (en) | 1998-06-05 | 2001-05-08 | Stanford University | Semiconductor capacitively-coupled NDR device and its applications in high-density high-speed memories and in power switches |
US6625057B2 (en) | 2000-11-17 | 2003-09-23 | Kabushiki Kaisha Toshiba | Magnetoresistive memory device |
JP4044293B2 (ja) * | 2001-02-13 | 2008-02-06 | 株式会社東芝 | 半導体装置及びその製造方法 |
JP4216483B2 (ja) * | 2001-02-15 | 2009-01-28 | 株式会社東芝 | 半導体メモリ装置 |
US6462359B1 (en) | 2001-03-22 | 2002-10-08 | T-Ram, Inc. | Stability in thyristor-based memory device |
EP1384232A4 (de) | 2001-04-05 | 2008-11-19 | T Ram Inc | Wiederherstellung dynamischer daten in einem speicherbaustein auf thyristorbasis |
US6906354B2 (en) * | 2001-06-13 | 2005-06-14 | International Business Machines Corporation | T-RAM cell having a buried vertical thyristor and a pseudo-TFT transfer gate and method for fabricating the same |
JP2003030980A (ja) * | 2001-07-13 | 2003-01-31 | Toshiba Corp | 半導体記憶装置 |
US7042027B2 (en) | 2002-08-30 | 2006-05-09 | Micron Technology, Inc. | Gated lateral thyristor-based random access memory cell (GLTRAM) |
US6917078B2 (en) | 2002-08-30 | 2005-07-12 | Micron Technology Inc. | One transistor SOI non-volatile random access memory cell |
US6888200B2 (en) | 2002-08-30 | 2005-05-03 | Micron Technology Inc. | One transistor SOI non-volatile random access memory cell |
US6690039B1 (en) * | 2002-10-01 | 2004-02-10 | T-Ram, Inc. | Thyristor-based device that inhibits undesirable conductive channel formation |
US6756612B1 (en) * | 2002-10-28 | 2004-06-29 | T-Ram, Inc. | Carrier coupler for thyristor-based semiconductor device |
-
2004
- 2004-05-06 US US10/840,792 patent/US7224002B2/en not_active Expired - Fee Related
-
2005
- 2005-04-28 JP JP2007511418A patent/JP4915592B2/ja active Active
- 2005-04-28 EP EP05740193A patent/EP1743339B1/de not_active Not-in-force
- 2005-04-28 KR KR1020067022983A patent/KR100887866B1/ko active IP Right Grant
- 2005-04-28 CN CN2005800225574A patent/CN1981344B/zh not_active Expired - Fee Related
- 2005-04-28 AT AT05740193T patent/ATE527660T1/de not_active IP Right Cessation
- 2005-04-28 WO PCT/US2005/014433 patent/WO2005114742A2/en active Search and Examination
Also Published As
Publication number | Publication date |
---|---|
US20050247962A1 (en) | 2005-11-10 |
JP2007536737A (ja) | 2007-12-13 |
EP1743339B1 (de) | 2011-10-05 |
WO2005114742A2 (en) | 2005-12-01 |
US7224002B2 (en) | 2007-05-29 |
EP1743339A4 (de) | 2007-08-01 |
KR100887866B1 (ko) | 2009-03-06 |
EP1743339A2 (de) | 2007-01-17 |
WO2005114742B1 (en) | 2006-08-17 |
JP4915592B2 (ja) | 2012-04-11 |
CN1981344A (zh) | 2007-06-13 |
WO2005114742A3 (en) | 2006-06-15 |
CN1981344B (zh) | 2012-05-30 |
KR20070005716A (ko) | 2007-01-10 |
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Legal Events
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RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |