ATE516519T1 - Lichtempfindliche harzzusammensetzung - Google Patents
Lichtempfindliche harzzusammensetzungInfo
- Publication number
- ATE516519T1 ATE516519T1 AT08738789T AT08738789T ATE516519T1 AT E516519 T1 ATE516519 T1 AT E516519T1 AT 08738789 T AT08738789 T AT 08738789T AT 08738789 T AT08738789 T AT 08738789T AT E516519 T1 ATE516519 T1 AT E516519T1
- Authority
- AT
- Austria
- Prior art keywords
- resin composition
- photosensitive resin
- photosensitive
- cured
- relief pattern
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/075—Silicon-containing compounds
- G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F299/00—Macromolecular compounds obtained by interreacting polymers involving only carbon-to-carbon unsaturated bond reactions, in the absence of non-macromolecular monomers
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F290/00—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups
- C08F290/08—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups on to polymers modified by introduction of unsaturated side groups
- C08F290/14—Polymers provided for in subclass C08G
- C08F290/148—Polysiloxanes
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F299/00—Macromolecular compounds obtained by interreacting polymers involving only carbon-to-carbon unsaturated bond reactions, in the absence of non-macromolecular monomers
- C08F299/02—Macromolecular compounds obtained by interreacting polymers involving only carbon-to-carbon unsaturated bond reactions, in the absence of non-macromolecular monomers from unsaturated polycondensates
- C08F299/08—Macromolecular compounds obtained by interreacting polymers involving only carbon-to-carbon unsaturated bond reactions, in the absence of non-macromolecular monomers from unsaturated polycondensates from polysiloxanes
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/04—Polysiloxanes
- C08G77/20—Polysiloxanes containing silicon bound to unsaturated aliphatic groups
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/48—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule in which at least two but not all the silicon atoms are connected by linkages other than oxygen atoms
- C08G77/58—Metal-containing linkages
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D183/00—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers
- C09D183/14—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers in which at least two but not all the silicon atoms are connected by linkages other than oxygen atoms
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/029—Inorganic compounds; Onium compounds; Organic compounds having hetero atoms other than oxygen, nitrogen or sulfur
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/70—Siloxanes defined by use of the MDTQ nomenclature
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Inorganic Chemistry (AREA)
- Materials Engineering (AREA)
- Wood Science & Technology (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Materials For Photolithography (AREA)
- Macromonomer-Based Addition Polymer (AREA)
- Silicon Polymers (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007098088 | 2007-04-04 | ||
PCT/JP2008/055480 WO2008123210A1 (ja) | 2007-04-04 | 2008-03-25 | 感光性樹脂組成物 |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE516519T1 true ATE516519T1 (de) | 2011-07-15 |
Family
ID=39830705
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT08738789T ATE516519T1 (de) | 2007-04-04 | 2008-03-25 | Lichtempfindliche harzzusammensetzung |
Country Status (8)
Country | Link |
---|---|
US (1) | US8557498B2 (de) |
EP (1) | EP2133744B1 (de) |
JP (1) | JP5144646B2 (de) |
KR (1) | KR101121936B1 (de) |
CN (1) | CN101646978B (de) |
AT (1) | ATE516519T1 (de) |
TW (1) | TW200905400A (de) |
WO (1) | WO2008123210A1 (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102902162A (zh) | 2007-12-14 | 2013-01-30 | 旭化成电子材料株式会社 | 感光性树脂组合物 |
JP5607898B2 (ja) * | 2008-07-01 | 2014-10-15 | 旭化成イーマテリアルズ株式会社 | 感光性樹脂組成物 |
JP5576622B2 (ja) * | 2008-07-01 | 2014-08-20 | 旭化成イーマテリアルズ株式会社 | 感光性樹脂組成物 |
US8372504B2 (en) * | 2009-01-13 | 2013-02-12 | Korea Advanced Institute Of Science And Technology | Transparent composite compound |
JP5636869B2 (ja) * | 2010-10-20 | 2014-12-10 | Jsr株式会社 | 感放射線性組成物、硬化膜、及びそれらの形成方法 |
EP2665762B1 (de) * | 2011-01-21 | 2020-12-02 | Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung e.V. | Polymerisierbare zusammensetzungen, damit hergestellte gehärtete produkte sowie verwendung dieser materialien |
KR102232349B1 (ko) | 2013-05-31 | 2021-03-26 | 롬엔드하스전자재료코리아유한회사 | 고내열성 네거티브형 감광성 수지 조성물 및 이로부터 제조된 경화막 |
JPWO2015060190A1 (ja) * | 2013-10-21 | 2017-03-09 | 学校法人東海大学 | 光導波路の製造方法 |
JP6603115B2 (ja) * | 2015-11-27 | 2019-11-06 | 信越化学工業株式会社 | ケイ素含有縮合物、ケイ素含有レジスト下層膜形成用組成物、及びパターン形成方法 |
EP3243845A1 (de) * | 2016-05-13 | 2017-11-15 | Ricoh Company, Ltd. | Mit aktiver strahlung härtbare zusammensetzung, gehärtetes produkt, zusammensetzungs-lagerbehälter, vorrichtung zur erzeugung zwei- oder dreidimensionaler bilder, vorrichtung und verfahren zur erzeugung zwei- oder dreidimensionaler bilder |
CN110221731B (zh) * | 2018-03-02 | 2023-03-28 | 宸鸿光电科技股份有限公司 | 触控面板的直接图案化方法及其触控面板 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6167263A (ja) | 1984-09-10 | 1986-04-07 | Semiconductor Energy Lab Co Ltd | 半導体装置作製方法 |
EP0487453B1 (de) * | 1990-11-21 | 1996-05-22 | Ciba-Geigy Ag | Silylierte Acylphosphinoxide |
JPH04198270A (ja) * | 1990-11-27 | 1992-07-17 | Toshiba Silicone Co Ltd | 光硬化型シリコーン組成物及びその接着剤組成物 |
JPH05202146A (ja) * | 1991-12-27 | 1993-08-10 | I C I Japan Kk | 光硬化性樹脂組成物 |
US5861235A (en) * | 1996-06-26 | 1999-01-19 | Dow Corning Asia, Ltd. | Ultraviolet-curable composition and method for patterning the cured product therefrom |
JPH1083080A (ja) | 1996-06-26 | 1998-03-31 | Dow Corning Asia Kk | 紫外線硬化性組成物およびこれを用いた硬化物パターンの形成方法 |
JPH1010741A (ja) * | 1996-06-27 | 1998-01-16 | Dow Corning Asia Kk | 紫外線硬化性ポリシロキサン組成物およびこれを用いた硬化物パターンの製造方法 |
KR100437929B1 (ko) * | 1998-12-16 | 2004-06-30 | 아사히 가세이 가부시키가이샤 | 용융 유동성이 우수한 폴리카보네이트계 난연 수지 조성물 |
DE19932629A1 (de) * | 1999-07-13 | 2001-01-18 | Fraunhofer Ges Forschung | Organisch modifizierte, lagerstabile, UV-härtbare, NIR-durchlässige und in Schichtdicken von 1 bis 150 mum fotostrukturierbare Kieselsäurepolykondensate, deren Herstellung und deren Verwendung |
KR100881301B1 (ko) * | 2001-04-09 | 2009-02-03 | 세키스이가가쿠 고교가부시키가이샤 | 광반응성 조성물 |
US6627672B1 (en) | 2001-05-16 | 2003-09-30 | Henkel Loctite Corporation | UV/moisture dual cure silicone potting compound with improved depth of cure |
DE10148894A1 (de) * | 2001-10-04 | 2003-04-30 | Fraunhofer Ges Forschung | Photochemisch und/oder thermisch strukturierbare Harze auf Silanbasis, einstufiges Verfahren zu deren Herstellung, dabei einzetzbare Ausgangsverbindungen und Herstellungsverfahren für diese |
KR100614976B1 (ko) * | 2004-04-12 | 2006-08-25 | 한국과학기술원 | 광소자 또는 디스플레이에 이용되는 무기/유기혼성올리고머, 나노혼성고분자 및 그 제조방법 |
JP4517229B2 (ja) * | 2004-08-03 | 2010-08-04 | ナガセケムテックス株式会社 | シルセスキオキサン含有化合物及びその製造方法 |
US20090029287A1 (en) * | 2006-01-24 | 2009-01-29 | Asahi Kasei Emd Corporation | Photosensitive resin composition |
JP4912058B2 (ja) * | 2006-06-29 | 2012-04-04 | 旭化成イーマテリアルズ株式会社 | ハイブリッド感光性樹脂組成物 |
-
2008
- 2008-03-25 US US12/531,813 patent/US8557498B2/en not_active Expired - Fee Related
- 2008-03-25 JP JP2009509102A patent/JP5144646B2/ja not_active Expired - Fee Related
- 2008-03-25 CN CN2008800101518A patent/CN101646978B/zh not_active Expired - Fee Related
- 2008-03-25 WO PCT/JP2008/055480 patent/WO2008123210A1/ja active Application Filing
- 2008-03-25 AT AT08738789T patent/ATE516519T1/de not_active IP Right Cessation
- 2008-03-25 EP EP08738789A patent/EP2133744B1/de not_active Not-in-force
- 2008-03-25 KR KR1020097018975A patent/KR101121936B1/ko active IP Right Grant
- 2008-03-27 TW TW097111085A patent/TW200905400A/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP2133744A4 (de) | 2010-06-16 |
KR101121936B1 (ko) | 2012-03-09 |
WO2008123210A1 (ja) | 2008-10-16 |
TWI375125B (de) | 2012-10-21 |
EP2133744A1 (de) | 2009-12-16 |
US20100104827A1 (en) | 2010-04-29 |
TW200905400A (en) | 2009-02-01 |
US8557498B2 (en) | 2013-10-15 |
EP2133744B1 (de) | 2011-07-13 |
JPWO2008123210A1 (ja) | 2010-07-15 |
JP5144646B2 (ja) | 2013-02-13 |
KR20100009536A (ko) | 2010-01-27 |
CN101646978A (zh) | 2010-02-10 |
CN101646978B (zh) | 2011-11-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |