ATE515390T1 - Verfahren zur herstellung eines erwärmungselements durch ablagerung dünner schichten auf einem isolationssubstrat, daraus resultierendes element und benutzung des letzten - Google Patents

Verfahren zur herstellung eines erwärmungselements durch ablagerung dünner schichten auf einem isolationssubstrat, daraus resultierendes element und benutzung des letzten

Info

Publication number
ATE515390T1
ATE515390T1 AT09708987T AT09708987T ATE515390T1 AT E515390 T1 ATE515390 T1 AT E515390T1 AT 09708987 T AT09708987 T AT 09708987T AT 09708987 T AT09708987 T AT 09708987T AT E515390 T1 ATE515390 T1 AT E515390T1
Authority
AT
Austria
Prior art keywords
last
producing
insulating substrate
thin layers
depositing thin
Prior art date
Application number
AT09708987T
Other languages
English (en)
Inventor
Philippe Maurin-Perrier
Christophe Heau
Benoit Terme
Original Assignee
Hydromecanique & Frottement
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hydromecanique & Frottement filed Critical Hydromecanique & Frottement
Application granted granted Critical
Publication of ATE515390T1 publication Critical patent/ATE515390T1/de

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00Ohmic-resistance heating
    • H05B3/84Heating arrangements specially adapted for transparent or reflecting areas, e.g. for demisting or de-icing windows, mirrors or vehicle windshields
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/16Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor
    • H05K1/167Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor incorporating printed resistors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/10Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C17/00Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/065Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thick film techniques, e.g. serigraphy
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C7/00Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/006Thin film resistors
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0201Thermal arrangements, e.g. for cooling, heating or preventing overheating
    • H05K1/0212Printed circuits or mounted components having integral heating means
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/017Manufacturing methods or apparatus for heaters
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03Conductive materials
    • H05K2201/0302Properties and characteristics in general
    • H05K2201/0317Thin film conductor layer; Thin film passive component
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/02Details related to mechanical or acoustic processing, e.g. drilling, punching, cutting, using ultrasound
    • H05K2203/025Abrading, e.g. grinding or sand blasting
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/11Treatments characterised by their effect, e.g. heating, cooling, roughening
    • H05K2203/1115Resistance heating, e.g. by current through the PCB conductors or through a metallic mask
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/381Improvement of the adhesion between the insulating substrate and the metal by special treatment of the substrate
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49082Resistor making
    • Y10T29/49083Heater type
AT09708987T 2008-02-06 2009-01-26 Verfahren zur herstellung eines erwärmungselements durch ablagerung dünner schichten auf einem isolationssubstrat, daraus resultierendes element und benutzung des letzten ATE515390T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0850747A FR2927218B1 (fr) 2008-02-06 2008-02-06 Procede de fabrication d'un element chauffant par depot de couches minces sur un substrat isolant et l'element obtenu
PCT/FR2009/050111 WO2009098421A1 (fr) 2008-02-06 2009-01-26 Procede de fabrication d'un element chauffant par depot de couches minces sur un substrat isolant et l'element obtenu

Publications (1)

Publication Number Publication Date
ATE515390T1 true ATE515390T1 (de) 2011-07-15

Family

ID=39745133

Family Applications (1)

Application Number Title Priority Date Filing Date
AT09708987T ATE515390T1 (de) 2008-02-06 2009-01-26 Verfahren zur herstellung eines erwärmungselements durch ablagerung dünner schichten auf einem isolationssubstrat, daraus resultierendes element und benutzung des letzten

Country Status (14)

Country Link
US (1) US8395091B2 (de)
EP (1) EP2240318B1 (de)
JP (1) JP5449197B2 (de)
KR (1) KR101496496B1 (de)
CN (1) CN101939164B (de)
AT (1) ATE515390T1 (de)
BR (1) BRPI0907493B8 (de)
CA (1) CA2712381C (de)
ES (1) ES2367840T3 (de)
FR (1) FR2927218B1 (de)
MX (1) MX2010008519A (de)
MY (1) MY161997A (de)
TW (1) TWI500800B (de)
WO (1) WO2009098421A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2914488B1 (fr) * 2007-03-30 2010-08-27 Soitec Silicon On Insulator Substrat chauffage dope
WO2009085320A2 (en) * 2007-12-29 2009-07-09 Saint-Gobain Ceramics & Plastics, Inc. Ceramic heating elements having open-face structure and methods of fabrication thereof
FR2927218B1 (fr) * 2008-02-06 2010-03-05 Hydromecanique & Frottement Procede de fabrication d'un element chauffant par depot de couches minces sur un substrat isolant et l'element obtenu
EP2955976A1 (de) * 2014-06-12 2015-12-16 AGC Glass Europe Beheizbare Verglasung
EP2977202A1 (de) * 2014-07-25 2016-01-27 AGC Glass Europe Beheizbare Verglasung
DE102015119763A1 (de) * 2015-11-16 2017-05-18 Heraeus Quarzglas Gmbh & Co. Kg Infrarotstrahler
WO2021160388A1 (de) * 2020-02-12 2021-08-19 Saint-Gobain Glass France Fahrzeugscheibe mit integriertem temperatursensor

Family Cites Families (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2111742A (en) * 1933-09-09 1938-03-22 Rca Corp Resistance compound
GB499816A (en) * 1937-07-26 1939-01-26 Allen West & Co Ltd Improvements in or relating to electric circuit interrupters
US2419537A (en) * 1944-09-09 1947-04-29 Bell Telephone Labor Inc Resistor
US2624823A (en) * 1949-06-23 1953-01-06 Pittsburgh Plate Glass Co Electroconductive article
US3095340A (en) * 1961-08-21 1963-06-25 David P Triller Precision resistor making by resistance value control for etching
US3458847A (en) * 1967-09-21 1969-07-29 Fairchild Camera Instr Co Thin-film resistors
US3594225A (en) * 1967-09-21 1971-07-20 Fairchild Camera Instr Co Thin-film resistors
US3772075A (en) * 1969-07-01 1973-11-13 Ppg Industries Inc Applying electroconductive heating circuits to glass
JPS5543751A (en) * 1978-09-21 1980-03-27 Tokyo Shibaura Electric Co Plane heating element
US4498071A (en) * 1982-09-30 1985-02-05 Dale Electronics, Inc. High resistance film resistor
US4725710A (en) * 1985-11-07 1988-02-16 Ford Motor Company Electrically heatable vision unit
US4911353A (en) * 1986-03-31 1990-03-27 David Deakin Solar collector having absorber plate formed by spraying molten metal
US5332888A (en) * 1986-08-20 1994-07-26 Libbey-Owens-Ford Co. Sputtered multi-layer color compatible solar control coating
DE3937346A1 (de) * 1989-11-09 1991-05-16 Ver Glaswerke Gmbh Elektrisch beheizbare autoglasscheibe aus verbundglas
JPH03292791A (ja) * 1990-04-11 1991-12-24 Toshiba Corp 配線基板
JPH07226301A (ja) 1994-02-10 1995-08-22 Tama Electric Co Ltd 抵抗器
JPH07280462A (ja) * 1994-04-11 1995-10-27 Shin Etsu Chem Co Ltd 均熱セラミックスヒーター
JPH08124707A (ja) 1994-10-24 1996-05-17 Tama Electric Co Ltd 薄膜チップ抵抗器
JPH10261478A (ja) * 1997-03-18 1998-09-29 Sun Tec Corp Kk 導電性加熱板
WO1998051127A1 (en) * 1997-05-06 1998-11-12 Thermoceramix, L.L.C. Deposited resistive coatings
US6262401B1 (en) * 1998-12-30 2001-07-17 Aos Holding Company Gold-plated water heater element and method of making same
US6967313B1 (en) * 1999-05-07 2005-11-22 Ibiden Company, Ltd. Hot plate and method of producing the same
US6835916B2 (en) * 1999-08-09 2004-12-28 Ibiden, Co., Ltd Ceramic heater
US6222166B1 (en) * 1999-08-09 2001-04-24 Watlow Electric Manufacturing Co. Aluminum substrate thick film heater
JP2001118664A (ja) * 1999-08-09 2001-04-27 Ibiden Co Ltd セラミックヒータ
WO2001041508A1 (fr) * 1999-11-30 2001-06-07 Ibiden Co., Ltd. Appareil chauffant en ceramique
US6674053B2 (en) * 2001-06-14 2004-01-06 Trebor International Electrical, thin film termination
US6580061B2 (en) * 2000-02-01 2003-06-17 Trebor International Inc Durable, non-reactive, resistive-film heater
US6204480B1 (en) 2000-02-01 2001-03-20 Southwall Technologies, Inc. Vacuum deposition of bus bars onto conductive transparent films
US7081602B1 (en) * 2000-02-01 2006-07-25 Trebor International, Inc. Fail-safe, resistive-film, immersion heater
US6433319B1 (en) * 2000-12-15 2002-08-13 Brian A. Bullock Electrical, thin film termination
US6663914B2 (en) * 2000-02-01 2003-12-16 Trebor International Method for adhering a resistive coating to a substrate
EP1274280A1 (de) * 2000-04-14 2003-01-08 Ibiden Co., Ltd. Keramisches heizelement
WO2002019400A1 (fr) * 2000-08-30 2002-03-07 Ibiden Co., Ltd. Dispositif ceramique chauffant permettant la production de semi-conducteurs et equipement d'inspection
JPWO2002043441A1 (ja) * 2000-11-24 2004-04-02 イビデン株式会社 セラミックヒータ、および、セラミックヒータの製造方法
JP2002299013A (ja) * 2001-01-29 2002-10-11 Murata Mfg Co Ltd 電極膜付き摺動物品、電極膜付き窓ガラスおよび導電性ペースト
JP2003057984A (ja) * 2001-08-09 2003-02-28 Minolta Co Ltd 加熱定着ローラ
US6870134B2 (en) 2002-02-01 2005-03-22 Centre Luxembourgeois De Recherches Pour Le Verre Et La Ceramique S.A. (C.R.V.C.) Heatable vehicle windshield with bus bars including braided and printed portions
JP2003272545A (ja) * 2002-03-18 2003-09-26 Canon Inc スペーサおよびこれを用いた画像形成装置
US6825681B2 (en) * 2002-07-19 2004-11-30 Delta Design, Inc. Thermal control of a DUT using a thermal control substrate
US6855647B2 (en) * 2003-04-02 2005-02-15 Hewlett-Packard Development Company, L.P. Custom electrodes for molecular memory and logic devices
US20070220745A1 (en) 2004-04-29 2007-09-27 Siemens Aktiengesellschaft Method for Producing Traverse Connections in Printed Circuit Board Sets
WO2006006391A1 (ja) * 2004-06-28 2006-01-19 Kyocera Corporation ウェハ加熱装置と半導体製造装置
US20060163563A1 (en) * 2005-01-24 2006-07-27 Kurt Ulmer Method to form a thin film resistor
US20060250078A1 (en) * 2005-05-09 2006-11-09 City University Of Hong Kong Organic electroluminescent devices incorporating UV-illuminated fluorocarbon layers
US20070220754A1 (en) * 2006-03-01 2007-09-27 Jennifer Barbaro Counter apparatus and method for consumables
JP2007273182A (ja) * 2006-03-30 2007-10-18 Sony Corp 集電体、負極及び電池
FR2907470B1 (fr) * 2006-10-20 2009-04-17 Hef Soc Par Actions Simplifiee Piece en contact glissant, en regime lubrifie, revetue d'une couche mince.
FR2913429B1 (fr) * 2007-03-05 2009-04-17 H E F Soc Par Actions Simplifi Procede d'assemblage d'au moins deux plaques et utilisation du procede pour la realisation d'un ensemble de pulverisation ionique.
FR2927218B1 (fr) * 2008-02-06 2010-03-05 Hydromecanique & Frottement Procede de fabrication d'un element chauffant par depot de couches minces sur un substrat isolant et l'element obtenu

Also Published As

Publication number Publication date
KR101496496B1 (ko) 2015-02-26
MX2010008519A (es) 2011-05-25
JP5449197B2 (ja) 2014-03-19
TW200936796A (en) 2009-09-01
FR2927218B1 (fr) 2010-03-05
BRPI0907493A8 (pt) 2018-09-18
BRPI0907493A2 (pt) 2015-07-14
CN101939164B (zh) 2013-09-11
KR20100111279A (ko) 2010-10-14
MY161997A (en) 2017-05-31
CA2712381C (fr) 2015-12-15
EP2240318A1 (de) 2010-10-20
JP2011512008A (ja) 2011-04-14
US20100308030A1 (en) 2010-12-09
CA2712381A1 (fr) 2009-08-13
ES2367840T3 (es) 2011-11-10
FR2927218A1 (fr) 2009-08-07
TWI500800B (zh) 2015-09-21
CN101939164A (zh) 2011-01-05
BRPI0907493B1 (pt) 2018-10-16
US8395091B2 (en) 2013-03-12
BRPI0907493B8 (pt) 2023-01-10
AU2009211229A1 (en) 2009-08-13
EP2240318B1 (de) 2011-07-06
WO2009098421A1 (fr) 2009-08-13

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