ATE49678T1 - Photoresistbelichtungsverfahren und geraet unter verwendung eines elektronenstrahls, dessen energie und ladung gesteuert werden. - Google Patents

Photoresistbelichtungsverfahren und geraet unter verwendung eines elektronenstrahls, dessen energie und ladung gesteuert werden.

Info

Publication number
ATE49678T1
ATE49678T1 AT85304167T AT85304167T ATE49678T1 AT E49678 T1 ATE49678 T1 AT E49678T1 AT 85304167 T AT85304167 T AT 85304167T AT 85304167 T AT85304167 T AT 85304167T AT E49678 T1 ATE49678 T1 AT E49678T1
Authority
AT
Austria
Prior art keywords
electron beam
photoresist
charge
controlled
energy
Prior art date
Application number
AT85304167T
Other languages
English (en)
Inventor
Arnold Reisman
Original Assignee
North Carolina Microelectron
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by North Carolina Microelectron filed Critical North Carolina Microelectron
Application granted granted Critical
Publication of ATE49678T1 publication Critical patent/ATE49678T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3175—Lithography
    • H01J2237/31793—Problems associated with lithography
    • H01J2237/31796—Problems associated with lithography affecting resists
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/143—Electron beam

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
AT85304167T 1984-06-14 1985-06-12 Photoresistbelichtungsverfahren und geraet unter verwendung eines elektronenstrahls, dessen energie und ladung gesteuert werden. ATE49678T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/620,510 US4576884A (en) 1984-06-14 1984-06-14 Method and apparatus for exposing photoresist by using an electron beam and controlling its voltage and charge
EP85304167A EP0165055B1 (de) 1984-06-14 1985-06-12 Photoresistbelichtungsverfahren und Gerät unter Verwendung eines Elektronenstrahls, dessen Energie und Ladung gesteuert werden

Publications (1)

Publication Number Publication Date
ATE49678T1 true ATE49678T1 (de) 1990-02-15

Family

ID=24486252

Family Applications (1)

Application Number Title Priority Date Filing Date
AT85304167T ATE49678T1 (de) 1984-06-14 1985-06-12 Photoresistbelichtungsverfahren und geraet unter verwendung eines elektronenstrahls, dessen energie und ladung gesteuert werden.

Country Status (6)

Country Link
US (1) US4576884A (de)
EP (1) EP0165055B1 (de)
JP (1) JPS6169123A (de)
AT (1) ATE49678T1 (de)
CA (1) CA1226075A (de)
DE (1) DE3575496D1 (de)

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US4981771A (en) * 1984-11-02 1991-01-01 Hitachi, Ltd. Pattern fabricating method
US5141830A (en) * 1989-09-20 1992-08-25 Jeol Ltd. Charged-particle beam lithography method
US5128849A (en) * 1989-12-12 1992-07-07 Optex Corpoataion Optical disk structures for electron trapping optical memory media
US5195082A (en) * 1989-12-12 1993-03-16 Optex Corporation Optical disk structures for electron trapping optical memory media
US5304441A (en) * 1992-12-31 1994-04-19 International Business Machines Corporation Method of optimizing exposure of photoresist by patterning as a function of thermal modeling
JP2565121B2 (ja) * 1993-12-14 1996-12-18 日本電気株式会社 電子線直接描画方法
JP3431387B2 (ja) * 1996-03-14 2003-07-28 株式会社東芝 露光強度分布表示方法とマスクパターン編集装置
US6153531A (en) * 1997-12-22 2000-11-28 Philips Electronics North America Corporation Method for preventing electrochemical erosion of interconnect structures
US5928968A (en) 1997-12-22 1999-07-27 Vlsi Technology, Inc. Semiconductor pressure transducer structures and methods for making the same
US6077762A (en) * 1997-12-22 2000-06-20 Vlsi Technology, Inc. Method and apparatus for rapidly discharging plasma etched interconnect structures
US6093658A (en) * 1997-12-22 2000-07-25 Philips Electronics North America Corporation Method for making reliable interconnect structures
US5968710A (en) * 1998-02-19 1999-10-19 Micron Technology, Inc. Controlled removal of electron beam curable coatings and articles formed thereby
US6472123B1 (en) * 2000-05-15 2002-10-29 Micron Technology, Inc. Multiple pass write method and reticle
JP4181561B2 (ja) * 2005-05-12 2008-11-19 松下電器産業株式会社 半導体加工方法および加工装置

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GB1047390A (de) * 1963-05-20 1900-01-01
US3259898A (en) * 1964-02-17 1966-07-05 Lab For Electronics Inc Doppler radar system
US3539401A (en) * 1966-05-25 1970-11-10 Matsushita Electric Ind Co Ltd Method of manufacturing mechano-electrical transducer
US3507709A (en) * 1967-09-15 1970-04-21 Hughes Aircraft Co Method of irradiating dielectriccoated semiconductor bodies with low energy electrons
DE1614635A1 (de) * 1967-10-23 1970-03-26 Siemens Ag Verfahren zum Herstellen von Fotolackmasken fuer Halbleiterzwecke
US3536547A (en) * 1968-03-25 1970-10-27 Bell Telephone Labor Inc Plasma deposition of oxide coatings on silicon and electron bombardment of portions thereof to be etched selectively
US3737347A (en) * 1970-02-26 1973-06-05 Fairchild Camera Instr Co Graded impurity profile in epitaxial films to improve integrated circuit performance
US3875416A (en) * 1970-06-30 1975-04-01 Texas Instruments Inc Methods and apparatus for the production of semiconductor devices by electron-beam patterning and devices produced thereby
IE39611B1 (en) * 1973-08-14 1978-11-22 Siemens Ag Improvements in or relating to two-phase charge coupled devices
US3950187A (en) * 1974-11-15 1976-04-13 Simulation Physics, Inc. Method and apparatus involving pulsed electron beam processing of semiconductor devices
GB1534896A (en) * 1975-05-19 1978-12-06 Itt Direct metal contact to buried layer
US4082958A (en) * 1975-11-28 1978-04-04 Simulation Physics, Inc. Apparatus involving pulsed electron beam processing of semiconductor devices
US4232439A (en) * 1976-11-30 1980-11-11 Vlsi Technology Research Association Masking technique usable in manufacturing semiconductor devices
JPS53121574A (en) * 1977-03-31 1978-10-24 Cho Lsi Gijutsu Kenkyu Kumiai Electron beam exposing device
US4350866A (en) * 1977-10-11 1982-09-21 Fujitsu Limited Discharge device and method for use in processing semiconductor devices
US4302530A (en) * 1977-12-08 1981-11-24 University Of Pennsylvania Method for making substance-sensitive electrical structures by processing substance-sensitive photoresist material
US4348804A (en) * 1978-07-12 1982-09-14 Vlsi Technology Research Association Method of fabricating an integrated circuit device utilizing electron beam irradiation and selective oxidation
JPS5580318A (en) * 1978-12-12 1980-06-17 Fujitsu Ltd Electron-beam exposure
US4383026A (en) * 1979-05-31 1983-05-10 Bell Telephone Laboratories, Incorporated Accelerated particle lithographic processing and articles so produced
JPS56111220A (en) * 1980-01-23 1981-09-02 Chiyou Lsi Gijutsu Kenkyu Kumiai Electron beam exposuring device
US4308586A (en) * 1980-05-02 1981-12-29 Nanometrics, Incorporated Method for the precise determination of photoresist exposure time
JPS5851514A (ja) * 1981-09-22 1983-03-26 Toshiba Corp ウエハ露光方法及びその装置
JPS58159328A (ja) * 1982-03-17 1983-09-21 Toshiba Corp レジストパタ−ン形成方法
JPS58192327A (ja) * 1982-05-06 1983-11-09 Toshiba Corp レジストパタ−ン形成方法

Also Published As

Publication number Publication date
US4576884A (en) 1986-03-18
JPS6169123A (ja) 1986-04-09
DE3575496D1 (de) 1990-02-22
EP0165055B1 (de) 1990-01-17
EP0165055A3 (en) 1987-09-23
EP0165055A2 (de) 1985-12-18
CA1226075A (en) 1987-08-25

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