ATE442223T1 - Laserbearbeitungsgerät und verfahren mit einem saugglockensystem und mindestens einem eingrenzungsbereich zur eingrenzung der ablagerung von emittierten gefahrstoffen - Google Patents

Laserbearbeitungsgerät und verfahren mit einem saugglockensystem und mindestens einem eingrenzungsbereich zur eingrenzung der ablagerung von emittierten gefahrstoffen

Info

Publication number
ATE442223T1
ATE442223T1 AT07703203T AT07703203T ATE442223T1 AT E442223 T1 ATE442223 T1 AT E442223T1 AT 07703203 T AT07703203 T AT 07703203T AT 07703203 T AT07703203 T AT 07703203T AT E442223 T1 ATE442223 T1 AT E442223T1
Authority
AT
Austria
Prior art keywords
deposition
emitted
limiting
processing device
laser processing
Prior art date
Application number
AT07703203T
Other languages
English (en)
Inventor
John O'halloran
John Tully
Pat Grimes
Original Assignee
Electro Scient Ind Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Electro Scient Ind Inc filed Critical Electro Scient Ind Inc
Application granted granted Critical
Publication of ATE442223T1 publication Critical patent/ATE442223T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/127—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an enclosure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/16—Removal of by-products, e.g. particles or vapours produced during treatment of a workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/123—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an atmosphere of particular gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/142—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor for the removal of by-products
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/36—Electric or electronic devices
    • B23K2101/40—Semiconductor devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Drying Of Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Laser Surgery Devices (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Dicing (AREA)
AT07703203T 2006-02-02 2007-02-01 Laserbearbeitungsgerät und verfahren mit einem saugglockensystem und mindestens einem eingrenzungsbereich zur eingrenzung der ablagerung von emittierten gefahrstoffen ATE442223T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0602115A GB2434767A (en) 2006-02-02 2006-02-02 Laser machining
PCT/EP2007/000874 WO2007088059A1 (en) 2006-02-02 2007-02-01 Laser machining apparatus and method with a vacuum extracting system and at least a first containement zone for containing deposition of emitted hazardous material

Publications (1)

Publication Number Publication Date
ATE442223T1 true ATE442223T1 (de) 2009-09-15

Family

ID=36100923

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07703203T ATE442223T1 (de) 2006-02-02 2007-02-01 Laserbearbeitungsgerät und verfahren mit einem saugglockensystem und mindestens einem eingrenzungsbereich zur eingrenzung der ablagerung von emittierten gefahrstoffen

Country Status (11)

Country Link
US (1) US20090020513A1 (de)
EP (1) EP1981679B1 (de)
JP (1) JP5305924B2 (de)
KR (1) KR101353367B1 (de)
CN (1) CN101370612B (de)
AT (1) ATE442223T1 (de)
DE (1) DE602007002381D1 (de)
GB (1) GB2434767A (de)
MY (1) MY143675A (de)
TW (1) TWI319726B (de)
WO (1) WO2007088059A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202010004852U1 (de) * 2010-04-09 2011-08-26 TRUMPF Maschinen Grüsch AG Laserbearbeitungsmaschine
JP5706235B2 (ja) * 2011-05-26 2015-04-22 株式会社ディスコ レーザー加工装置
CN105290613B (zh) * 2015-10-30 2017-05-17 武汉钢铁(集团)公司 防止激光焊缝产生气孔的真空焊接装置和方法
USD802632S1 (en) * 2016-06-08 2017-11-14 Shenzhen Triumph Industrial Co., LTD Laser engraving machine
JP6829053B2 (ja) * 2016-11-09 2021-02-10 コマツ産機株式会社 マシンルーム
US10549387B2 (en) * 2017-02-09 2020-02-04 Covidien Lp Enclosure cover
IT201800007468A1 (it) * 2018-07-24 2020-01-24 Apparato per rimuovere residui di lavorazione e relativo metodo
CN109530930B (zh) * 2018-12-27 2021-09-03 北京中科镭特电子有限公司 一种激光加工芯片的方法
KR102374612B1 (ko) 2019-08-22 2022-03-15 삼성디스플레이 주식회사 레이저 장치 및 레이저 가공 방법

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JPS5164866A (ja) * 1974-12-03 1976-06-04 Nippon Electric Co Handotaisochinoseizohoho
AU550708B2 (en) * 1981-02-06 1986-04-10 Amada Company Limited Dust collecting apparatus for cutting machine
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US5186750A (en) * 1988-08-15 1993-02-16 Nippon Telegraph And Telephone Corporation Method and apparatus for forming semiconductor thin films
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US5362941A (en) * 1992-06-11 1994-11-08 Iomega Corporation Exhaust and particle wastes collecting device for laser etching
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WO1995007152A1 (en) * 1993-09-08 1995-03-16 Uvtech Systems, Inc. Surface processing
JPH08318390A (ja) * 1995-05-26 1996-12-03 Hitachi Ltd アブレーションデブリス除去装置
JPH09192876A (ja) * 1996-01-18 1997-07-29 Amada Co Ltd レーザ加工機における集塵方法およびその装置
US5874011A (en) * 1996-08-01 1999-02-23 Revise, Inc. Laser-induced etching of multilayer materials
JPH10193161A (ja) * 1997-01-10 1998-07-28 Sony Corp レーザーマーキング装置
US6335208B1 (en) * 1999-05-10 2002-01-01 Intersil Americas Inc. Laser decapsulation method
JP4588167B2 (ja) * 2000-05-12 2010-11-24 株式会社半導体エネルギー研究所 半導体装置の作製方法
ATE323569T1 (de) * 2001-03-22 2006-05-15 Xsil Technology Ltd Ein laserbearbeitungssystem und -verfahren
JP2003191082A (ja) * 2001-12-21 2003-07-08 Mitsubishi Electric Corp レーザマーキング装置及びレーザマーキング方法
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Also Published As

Publication number Publication date
EP1981679B1 (de) 2009-09-09
WO2007088059A1 (en) 2007-08-09
TWI319726B (en) 2010-01-21
CN101370612B (zh) 2013-06-12
GB2434767A (en) 2007-08-08
CN101370612A (zh) 2009-02-18
TW200738389A (en) 2007-10-16
EP1981679A1 (de) 2008-10-22
MY143675A (en) 2011-06-30
KR101353367B1 (ko) 2014-01-21
DE602007002381D1 (de) 2009-10-22
JP2009525183A (ja) 2009-07-09
GB0602115D0 (en) 2006-03-15
US20090020513A1 (en) 2009-01-22
JP5305924B2 (ja) 2013-10-02
KR20080091146A (ko) 2008-10-09

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