ATE430924T1 - Verfahren zur herstellung einer einrichtung zur thermischen detektion von strahlung mit einem aktiven mikrobolometer und einem passiven mikrobolometer - Google Patents

Verfahren zur herstellung einer einrichtung zur thermischen detektion von strahlung mit einem aktiven mikrobolometer und einem passiven mikrobolometer

Info

Publication number
ATE430924T1
ATE430924T1 AT05734192T AT05734192T ATE430924T1 AT E430924 T1 ATE430924 T1 AT E430924T1 AT 05734192 T AT05734192 T AT 05734192T AT 05734192 T AT05734192 T AT 05734192T AT E430924 T1 ATE430924 T1 AT E430924T1
Authority
AT
Austria
Prior art keywords
microbolometer
passive
radiation
producing
active
Prior art date
Application number
AT05734192T
Other languages
English (en)
Inventor
Jean-Louis Ouvrier-Buffet
Laurent Carle
Claire Vialle
Michel Vilain
Original Assignee
Commissariat Energie Atomique
Ulis
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique, Ulis filed Critical Commissariat Energie Atomique
Application granted granted Critical
Publication of ATE430924T1 publication Critical patent/ATE430924T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
    • G01J5/024—Special manufacturing steps or sacrificial layers or layer structures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • G01J5/064—Ambient temperature sensor; Housing temperature sensor; Constructional details thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • G01J2005/066—Differential arrangement, i.e. sensitive/not sensitive

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
AT05734192T 2004-03-04 2005-03-04 Verfahren zur herstellung einer einrichtung zur thermischen detektion von strahlung mit einem aktiven mikrobolometer und einem passiven mikrobolometer ATE430924T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0402263A FR2867273B1 (fr) 2004-03-04 2004-03-04 Procede de realisation d'un dispositif pour la detection thermique d'un rayonnement comportant un microbolometre actif et un microbolometre passif
PCT/FR2005/000518 WO2005085782A1 (fr) 2004-03-04 2005-03-04 Procede de realisation d’un dispositif pour la detection thermique d’un rayonnement comportant un microbolometre actif et un microbolometre passif

Publications (1)

Publication Number Publication Date
ATE430924T1 true ATE430924T1 (de) 2009-05-15

Family

ID=34855051

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05734192T ATE430924T1 (de) 2004-03-04 2005-03-04 Verfahren zur herstellung einer einrichtung zur thermischen detektion von strahlung mit einem aktiven mikrobolometer und einem passiven mikrobolometer

Country Status (10)

Country Link
US (1) US7541582B2 (de)
EP (1) EP1721136B1 (de)
JP (1) JP5335233B2 (de)
CN (1) CN100533078C (de)
AT (1) ATE430924T1 (de)
CA (1) CA2557903C (de)
DE (1) DE602005014342D1 (de)
FR (1) FR2867273B1 (de)
RU (1) RU2386934C2 (de)
WO (1) WO2005085782A1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8426818B2 (en) 2007-02-05 2013-04-23 Bae Systems Information And Electronic Systems Integration Inc. Post-supported microbolometer pixel
DE102007024902B8 (de) * 2007-05-29 2010-12-30 Pyreos Ltd. Vorrichtung mit Membranstruktur zur Detektion von Wärmestrahlung, Verfahren zum Herstellen und Verwendung der Vorrichtung
US7786440B2 (en) * 2007-09-13 2010-08-31 Honeywell International Inc. Nanowire multispectral imaging array
TWI423676B (zh) * 2008-01-14 2014-01-11 Chi Sheng Hsieh Application of coated substrate imaging
FR2943783B1 (fr) * 2009-03-31 2011-06-10 Commissariat Energie Atomique Pixel de bolometre dote d'un condensateur d'integration mim
FR2959013B1 (fr) * 2010-04-16 2012-05-11 Commissariat Energie Atomique Dispositif de detection de rayonnement electromagnetique a sensibilite reduite au bruit spacial
FR2966925B1 (fr) * 2010-11-03 2012-11-02 Commissariat Energie Atomique Detecteur infrarouge a base de micro-planches bolometriques suspendues
US10079982B2 (en) * 2011-06-10 2018-09-18 Flir Systems, Inc. Determination of an absolute radiometric value using blocked infrared sensors
RU2490751C1 (ru) * 2012-02-09 2013-08-20 Открытое акционерное общество "АНГСТРЕМ" Микроболометр с упрочненными поддерживающими балками и способы его изготовления
AT517956B1 (de) 2015-12-22 2017-06-15 Klaus Stadlmann Dr Verfahren zur Erzeugung eines dreidimensionalen Körpers
FR3056292B1 (fr) * 2016-09-22 2020-11-20 Commissariat Energie Atomique Structure de detection de rayonnements electromagnetiques de type bolometre et procede de fabrication d'une telle structure
CN110044494B (zh) * 2019-03-22 2021-04-13 清华大学 一种热辐射探测器阵列及其制造方法
FR3098904B1 (fr) * 2019-07-16 2021-06-18 Lynred Micro-bolometre a faible capacite thermique et procede de fabrication associe

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3453432A (en) * 1966-06-23 1969-07-01 Barnes Eng Co Pyroelectric radiation detector providing compensation for environmental temperature changes
US5054936A (en) * 1989-11-16 1991-10-08 Jacob Fraden Sensor for active thermal detection
EP0566156B1 (de) * 1992-04-17 1997-08-27 Terumo Kabushiki Kaisha Infrarotsensor und Verfahren für dessen Herstellung
JPH09218086A (ja) * 1996-02-14 1997-08-19 Matsushita Electric Ind Co Ltd 赤外線センサ
JPH1114449A (ja) * 1997-06-20 1999-01-22 Terumo Corp 赤外線センサ
JPH1144583A (ja) * 1997-07-28 1999-02-16 Matsushita Electric Works Ltd 赤外線検出器及びこれを用いたガス検出器
JPH1164111A (ja) * 1997-08-26 1999-03-05 Matsushita Electric Works Ltd 赤外線検出素子
SE0000148D0 (sv) * 2000-01-17 2000-01-17 Forskarpatent I Syd Ab Tillverkningsförfarande för IR-detektormatriser
FR2822541B1 (fr) 2001-03-21 2003-10-03 Commissariat Energie Atomique Procedes et dispositifs de fabrication de detecteurs de rayonnement
US7262412B2 (en) * 2004-12-10 2007-08-28 L-3 Communications Corporation Optically blocked reference pixels for focal plane arrays

Also Published As

Publication number Publication date
EP1721136A1 (de) 2006-11-15
FR2867273A1 (fr) 2005-09-09
CA2557903A1 (en) 2005-09-15
FR2867273B1 (fr) 2006-09-08
EP1721136B1 (de) 2009-05-06
DE602005014342D1 (de) 2009-06-18
JP5335233B2 (ja) 2013-11-06
CN100533078C (zh) 2009-08-26
RU2006134977A (ru) 2008-04-10
US7541582B2 (en) 2009-06-02
WO2005085782A1 (fr) 2005-09-15
US20070194238A1 (en) 2007-08-23
CN1926416A (zh) 2007-03-07
JP2007526472A (ja) 2007-09-13
RU2386934C2 (ru) 2010-04-20
CA2557903C (en) 2012-10-23

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