KR960703266A - 피막 경화 방법(Method of curing a film) - Google Patents

피막 경화 방법(Method of curing a film) Download PDF

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Publication number
KR960703266A
KR960703266A KR1019950705871A KR19950705871A KR960703266A KR 960703266 A KR960703266 A KR 960703266A KR 1019950705871 A KR1019950705871 A KR 1019950705871A KR 19950705871 A KR19950705871 A KR 19950705871A KR 960703266 A KR960703266 A KR 960703266A
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KR
South Korea
Prior art keywords
substrate
film
laser beam
curing
coating
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KR1019950705871A
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English (en)
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KR100379843B1 (ko
Inventor
바드만 십케
요제프 반 보멜 마커스
Original Assignee
프레데릭 얀 스미트
필립스 일렉트로닉스 엔. 브이.
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Publication of KR960703266A publication Critical patent/KR960703266A/ko
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Publication of KR100379843B1 publication Critical patent/KR100379843B1/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/20—Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/86—Vessels; Containers; Vacuum locks
    • H01J29/867—Means associated with the outside of the vessel for shielding, e.g. magnetic shields
    • H01J29/868—Screens covering the input or output face of the vessel, e.g. transparent anti-static coatings, X-ray absorbing layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/06—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/25—Oxides by deposition from the liquid phase
    • C03C17/253—Coating containing SnO2
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/23—Mixtures
    • C03C2217/231—In2O3/SnO2
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/73—Anti-reflective coatings with specific characteristics
    • C03C2217/734—Anti-reflective coatings with specific characteristics comprising an alternation of high and low refractive indexes
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/11—Deposition methods from solutions or suspensions
    • C03C2218/113—Deposition methods from solutions or suspensions by sol-gel processes
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/11—Deposition methods from solutions or suspensions
    • C03C2218/116—Deposition methods from solutions or suspensions by spin-coating, centrifugation
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/32—After-treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2209/00—Apparatus and processes for manufacture of discharge tubes
    • H01J2209/01—Generalised techniques
    • H01J2209/012—Coating
    • H01J2209/015—Machines therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Vessels, Lead-In Wires, Accessory Apparatuses For Cathode-Ray Tubes (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

기판, 예를 들어 음극선관의 디스플레이 윈도우에 인가되는 ITO와 같은 전도성 물질의 졸-겔 코팅은 레이저에 의해 경화된다. 이것은 바람직하게도 수분 함유 대기, 예를 들어 애퀴어스 에어로졸과 같은 수분 함유 대기 또는 포밍 기체와 같은 수소 함유 기체에서 실행된다. 이것은 몇백 시간으로 이루어지는 안정된 저항 감소를 가져온다.

Description

피막 경화 방법(Method of curing a film)
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제2도는 본 발명에 따른 방법의 실시예를 도시하는 도면,
제3도는 본 발명에 따른 방법의 다른 실시예를 도시하는 도면.

Claims (8)

  1. 기판 표면의 피막을 경화하는 방법에 있어서, 상기 피막은 피막의 제한된 영역에 입사되고 표면을 주사하는 레이저빔에 의해 경화되는 것을 특징으로하는 피막 경화 방법.
  2. 제1항에 있어서, 상기 피막은 약한 레이저광을 흡수하고 에너지 방출은 피막 아래 영역에서 10㎛이하의 깊이까지 집중되는 것을 특징으로 하는 피막 경화 방법.
  3. 제1항 또는 제2항에 있어서, 전도성의 피막이 수소 함유 대기에서 레이저 빔에 의해 경화되는 것을 특징으로 하는 피막 경화 방법.
  4. 제1항 내지 제3항중 어느 한 항에 있어서, 전도성 피막이 수분 함유 대기에서 레이저 빔에 의해 경화되거나 또는 수분 함유 대기는 경화 동작이 끝난 즉시 제공되는 것을 특징으로하는 피막 경화 방법.
  5. 제2항 내지 제4항중 어느 한 항에 있어서, 상기 피막은 ITO 졸-겔 코팅인 것을 특징으로 하는 피막 경화 방법.
  6. 제1항 내지 제5항중 어느 한 항에 있어서, 상기 기판이 음극선관의 디스플레이 윈도우인 것을 특징으로 하는 피막 경화 방법.
  7. 기판의 피막을 경화하는 장치에 있어서, 기판 홀더, 기판에 레이저빔을 조사하는 수단, 레이저 빔으로 기판을 주사하는 수단과 상기 레이저빔이 기판에 입사되는 점에로 수소 함유 기체를 제공하는 수단을 구비하는 것을 특징으로 하는 피막 경화 장치.
  8. 기판의 피막을 경화하는 장치에 있어서, 기판 홀더, 상기 기판에 레이저빔을 조사하는 수단, 상기 레이저빔으로 기판을 주사하는 수단과 상기 레이저빔이 상기 기판에 입사되는 점에 수소 기체를 공급하는 수단을 구비하는 것을 특징으로 하는 피막 경화 장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019950705871A 1994-04-25 1995-04-13 피막경화방법및장치 KR100379843B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP94201138 1994-04-25
EP94201138.8 1994-04-25

Publications (2)

Publication Number Publication Date
KR960703266A true KR960703266A (ko) 1996-06-19
KR100379843B1 KR100379843B1 (ko) 2003-06-19

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Country Status (7)

Country Link
US (1) US6025037A (ko)
EP (1) EP0705483B1 (ko)
JP (1) JPH08512096A (ko)
KR (1) KR100379843B1 (ko)
DE (1) DE69513482T2 (ko)
TW (1) TW310443B (ko)
WO (1) WO1995029501A1 (ko)

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Also Published As

Publication number Publication date
JPH08512096A (ja) 1996-12-17
TW310443B (ko) 1997-07-11
KR100379843B1 (ko) 2003-06-19
US6025037A (en) 2000-02-15
EP0705483B1 (en) 1999-11-24
EP0705483A1 (en) 1996-04-10
DE69513482D1 (de) 1999-12-30
WO1995029501A1 (en) 1995-11-02
DE69513482T2 (de) 2000-05-18

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