FR3098904B1 - Micro-bolometre a faible capacite thermique et procede de fabrication associe - Google Patents

Micro-bolometre a faible capacite thermique et procede de fabrication associe Download PDF

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Publication number
FR3098904B1
FR3098904B1 FR1907993A FR1907993A FR3098904B1 FR 3098904 B1 FR3098904 B1 FR 3098904B1 FR 1907993 A FR1907993 A FR 1907993A FR 1907993 A FR1907993 A FR 1907993A FR 3098904 B1 FR3098904 B1 FR 3098904B1
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FR
France
Prior art keywords
bolometer
membrane
manufacturing process
low thermal
thermometric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1907993A
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English (en)
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FR3098904A1 (fr
Inventor
Nicolas Boudou
Sébastien Cortial
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lynred SAS
Original Assignee
Lynred SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR1907993A priority Critical patent/FR3098904B1/fr
Application filed by Lynred SAS filed Critical Lynred SAS
Priority to CN202080039554.6A priority patent/CN113892018A/zh
Priority to CA3139765A priority patent/CA3139765A1/fr
Priority to EP20740687.7A priority patent/EP3999826A1/fr
Priority to US17/611,830 priority patent/US11988560B2/en
Priority to KR1020217039011A priority patent/KR20220031999A/ko
Priority to PCT/FR2020/050763 priority patent/WO2021009421A1/fr
Publication of FR3098904A1 publication Critical patent/FR3098904A1/fr
Application granted granted Critical
Publication of FR3098904B1 publication Critical patent/FR3098904B1/fr
Priority to IL288441A priority patent/IL288441A/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0853—Optical arrangements having infrared absorbers other than the usual absorber layers deposited on infrared detectors like bolometers, wherein the heat propagation between the absorber and the detecting element occurs within a solid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
    • G01J5/024—Special manufacturing steps or sacrificial layers or layer structures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G01J5/22—Electrical features thereof
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/30—Transforming light or analogous information into electric information
    • H04N5/33—Transforming infrared radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G01J2005/202—Arrays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G01J2005/202—Arrays
    • G01J2005/204—Arrays prepared by semiconductor processing, e.g. VLSI

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)

Abstract

L’invention concerne un micro-bolomètre d’imagerie infrarouge (10a) intégrant une membrane (11a) montée en suspension sur un substrat par des bras de soutien (14a-14h). La membrane (11a) comporte :. un matériau absorbeur (13a) configuré pour capter les rayonnements infrarouges ;. un matériau thermométrique (12) connecté au matériau absorbeur (13a) configuré pour réaliser une transduction des rayonnements infrarouges captés par le matériau absorbeur (13a) ; le matériau thermométrique (12) étant disposé sur une surface inférieure à 0.4 fois une surface de la membrane (11a), et. au moins une couche diélectrique centrale disposée entre le matériau absorbeur (13a) et le matériau thermométrique (12). Des évidements (20) sont ménagés dans le matériau absorbeur (13a) et dans l’au moins une couche diélectrique dans des parties de la membrane (11a) exempte du matériau thermométrique (12).
FR1907993A 2019-07-16 2019-07-16 Micro-bolometre a faible capacite thermique et procede de fabrication associe Active FR3098904B1 (fr)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FR1907993A FR3098904B1 (fr) 2019-07-16 2019-07-16 Micro-bolometre a faible capacite thermique et procede de fabrication associe
CA3139765A CA3139765A1 (fr) 2019-07-16 2020-05-11 Micro-bolometre a faible capacite thermique et procede de fabrication associe
EP20740687.7A EP3999826A1 (fr) 2019-07-16 2020-05-11 Micro-bolomètre a faible capacité thermique et procédé de fabrication associé
US17/611,830 US11988560B2 (en) 2019-07-16 2020-05-11 Low thermal capacity micro-bolometer and associated manufacturing method
CN202080039554.6A CN113892018A (zh) 2019-07-16 2020-05-11 低热容量微辐射热计及相关制造方法
KR1020217039011A KR20220031999A (ko) 2019-07-16 2020-05-11 저 열용량 마이크로볼로미터 및 관련 제조 방법
PCT/FR2020/050763 WO2021009421A1 (fr) 2019-07-16 2020-05-11 Micro-bolomètre a faible capacité thermique et procédé de fabrication associé
IL288441A IL288441A (en) 2019-07-16 2021-11-25 A low thermal capacity microbolometer and associated fabrication method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1907993A FR3098904B1 (fr) 2019-07-16 2019-07-16 Micro-bolometre a faible capacite thermique et procede de fabrication associe
FR1907993 2019-07-16

Publications (2)

Publication Number Publication Date
FR3098904A1 FR3098904A1 (fr) 2021-01-22
FR3098904B1 true FR3098904B1 (fr) 2021-06-18

Family

ID=69024299

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1907993A Active FR3098904B1 (fr) 2019-07-16 2019-07-16 Micro-bolometre a faible capacite thermique et procede de fabrication associe

Country Status (8)

Country Link
US (1) US11988560B2 (fr)
EP (1) EP3999826A1 (fr)
KR (1) KR20220031999A (fr)
CN (1) CN113892018A (fr)
CA (1) CA3139765A1 (fr)
FR (1) FR3098904B1 (fr)
IL (1) IL288441A (fr)
WO (1) WO2021009421A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11788893B1 (en) * 2021-04-22 2023-10-17 National Technology & Engineering Solutions Of Sandia, Llc Nanoscale bolometer operating near the thermodynamic limit
FR3125585B1 (fr) 2021-07-22 2023-08-04 Lynred Micro-bolometre d’imagerie infrarouge
FR3133447B1 (fr) 2022-03-11 2024-04-12 Lynred Micro-bolometre d’imagerie infrarouge

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3597069B2 (ja) * 1999-01-12 2004-12-02 日本電気株式会社 複数の赤外波長帯を検出する熱型赤外アレイセンサ
FR2861172B1 (fr) * 2003-10-15 2006-06-02 Ulis Detecteur bolometrique, dispositif de detection infrarouge mettant en oeuvre un tel detecteur bolometrique et procede de fabrication de ce detecteur
FR2867273B1 (fr) * 2004-03-04 2006-09-08 Commissariat Energie Atomique Procede de realisation d'un dispositif pour la detection thermique d'un rayonnement comportant un microbolometre actif et un microbolometre passif
EP2384425B1 (fr) * 2008-12-31 2020-03-11 Technion Research & Development Foundation Ltd. Sonde thermique à fréquence térahertzienne pour téramos, et réseau en plan focal
US8314769B2 (en) * 2010-04-28 2012-11-20 Honeywell International Inc. High performance detection pixel
FR2977937B1 (fr) * 2011-07-15 2013-08-16 Centre Nat Rech Scient Detecteur bolometrique a performances ameliorees

Also Published As

Publication number Publication date
EP3999826A1 (fr) 2022-05-25
IL288441A (en) 2022-01-01
CN113892018A (zh) 2022-01-04
WO2021009421A1 (fr) 2021-01-21
US20220228917A1 (en) 2022-07-21
US11988560B2 (en) 2024-05-21
FR3098904A1 (fr) 2021-01-22
CA3139765A1 (fr) 2021-01-21
KR20220031999A (ko) 2022-03-15

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