ATE428957T1 - Lichtempfindliche harzzusammensetzung und lichtempfindlicher trockener film durch verwendung davon - Google Patents

Lichtempfindliche harzzusammensetzung und lichtempfindlicher trockener film durch verwendung davon

Info

Publication number
ATE428957T1
ATE428957T1 AT05811384T AT05811384T ATE428957T1 AT E428957 T1 ATE428957 T1 AT E428957T1 AT 05811384 T AT05811384 T AT 05811384T AT 05811384 T AT05811384 T AT 05811384T AT E428957 T1 ATE428957 T1 AT E428957T1
Authority
AT
Austria
Prior art keywords
photosensitive
resin composition
photosensitive resin
dry film
photosensitive dry
Prior art date
Application number
AT05811384T
Other languages
English (en)
Inventor
Teruhiro Uematsu
Naoya Katsumata
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Application granted granted Critical
Publication of ATE428957T1 publication Critical patent/ATE428957T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/031—Organic compounds not covered by group G03F7/029
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2/00—Processes of polymerisation
    • C08F2/46—Polymerisation initiated by wave energy or particle radiation
    • C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
    • C08F2/50—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light with sensitising agents
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/106—Binder containing
    • Y10S430/111—Polymer of unsaturated acid or ester
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/146—Laser beam

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Materials For Photolithography (AREA)
  • Polymerisation Methods In General (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
AT05811384T 2004-11-25 2005-11-22 Lichtempfindliche harzzusammensetzung und lichtempfindlicher trockener film durch verwendung davon ATE428957T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004340886A JP4315892B2 (ja) 2004-11-25 2004-11-25 感光性樹脂組成物、およびこれを用いた感光性ドライフィルム
PCT/JP2005/021939 WO2006057423A2 (en) 2004-11-25 2005-11-22 Photosensitive resin composition and photosensitive dry film by the use thereof

Publications (1)

Publication Number Publication Date
ATE428957T1 true ATE428957T1 (de) 2009-05-15

Family

ID=36498365

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05811384T ATE428957T1 (de) 2004-11-25 2005-11-22 Lichtempfindliche harzzusammensetzung und lichtempfindlicher trockener film durch verwendung davon

Country Status (9)

Country Link
US (1) US7662541B2 (de)
EP (1) EP1825328B1 (de)
JP (1) JP4315892B2 (de)
KR (1) KR20070070238A (de)
CN (1) CN101124517B (de)
AT (1) ATE428957T1 (de)
DE (1) DE602005014007D1 (de)
TW (1) TWI307344B (de)
WO (1) WO2006057423A2 (de)

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JP4942969B2 (ja) * 2005-09-16 2012-05-30 富士フイルム株式会社 パターン形成材料及びパターン形成方法
JP5023878B2 (ja) * 2006-08-11 2012-09-12 住友化学株式会社 重合性樹脂組成物
JP5293934B2 (ja) * 2007-06-13 2013-09-18 Ｊｓｒ株式会社 着色層形成用感放射線性組成物、カラーフィルタおよびカラー液晶表示素子
JP5546801B2 (ja) * 2008-06-10 2014-07-09 富士フイルム株式会社 紫外光レーザー露光用感光性樹脂組成物、パターン形成方法、その方法を用いて製造したカラーフィルタ、カラーフィルタの製造方法および液晶表示装置
CN103064250A (zh) * 2008-06-18 2013-04-24 日立化成工业株式会社 感光性树脂组合物及使用其的感光性元件、抗蚀剂图形的形成方法及印刷电路板的制造方法
JP2010266768A (ja) * 2009-05-18 2010-11-25 Sanyo Chem Ind Ltd 感光性樹脂組成物
JP2011064749A (ja) * 2009-09-15 2011-03-31 Dnp Fine Chemicals Co Ltd 感光性着色組成物
TWI556958B (zh) * 2010-09-14 2016-11-11 東京應化工業股份有限公司 基質劑及含嵌段共聚物之層的圖型形成方法
KR101548412B1 (ko) 2012-12-28 2015-08-28 코오롱인더스트리 주식회사 드라이 필름 포토 레지스트용 감광성 수지 조성물
JP6079277B2 (ja) * 2013-02-04 2017-02-15 日本ゼオン株式会社 感放射線樹脂組成物及び電子部品
KR101729813B1 (ko) * 2013-07-08 2017-04-24 주식회사 엘지화학 수지 혼합물
JP2015152854A (ja) * 2014-02-18 2015-08-24 旭化成イーマテリアルズ株式会社 感光性樹脂組成物、感光性樹脂積層体及びレジストパターン形成方法
JP6361191B2 (ja) * 2014-03-14 2018-07-25 日立化成株式会社 感光性樹脂組成物、感光性エレメント、レジストパターンの形成方法及びタッチパネルの製造方法
CN103923449B (zh) * 2014-04-04 2016-08-24 广州市聚赛龙工程塑料股份有限公司 激光直接成型的pc/abs复合材料及制备方法和应用
TWI647532B (zh) * 2014-07-01 2019-01-11 南韓商東友精細化工有限公司 光敏樹脂組成物
CN108227379A (zh) * 2017-12-11 2018-06-29 珠海市能动科技光学产业有限公司 一种含有纤维素材料的干膜光阻剂
WO2019124307A1 (ja) * 2017-12-20 2019-06-27 住友電気工業株式会社 プリント配線板の製造方法及び積層体
US11827781B2 (en) * 2019-08-29 2023-11-28 Zhejiang First Advanced Material R&D Institute Co., Ltd. Photosensitive resin composition and use thereof
CN115280239A (zh) * 2020-03-19 2022-11-01 富士胶片株式会社 转印膜、感光性材料、图案形成方法、电路基板的制造方法、触摸面板的制造方法

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Also Published As

Publication number Publication date
TW200628496A (en) 2006-08-16
JP2006153984A (ja) 2006-06-15
KR20070070238A (ko) 2007-07-03
US20070292804A1 (en) 2007-12-20
TWI307344B (en) 2009-03-11
EP1825328B1 (de) 2009-04-15
EP1825328A2 (de) 2007-08-29
JP4315892B2 (ja) 2009-08-19
CN101124517A (zh) 2008-02-13
WO2006057423A3 (en) 2007-09-27
WO2006057423A2 (en) 2006-06-01
CN101124517B (zh) 2011-04-13
US7662541B2 (en) 2010-02-16
DE602005014007D1 (de) 2009-05-28

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